Efficient tile mapping for row-by-row convolutional neural network mapping for analog artificial intelligence network inference

    公开(公告)号:US11562240B2

    公开(公告)日:2023-01-24

    申请号:US16884128

    申请日:2020-05-27

    IPC分类号: G06N3/08 G06N3/04

    摘要: Implementing a convolutional neural network (CNN) includes configuring a crosspoint array to implement a convolution layer in the CNN. Convolution kernels of the layer are stored in crosspoint devices of the array. Computations for the CNN are performed by iterating a set of operations for a predetermined number of times. The operations include transmitting voltage pulses corresponding to a subpart of a vector of input data to the crosspoint array. The voltage pulses generate electric currents that are representative of performing multiplication operations at the crosspoint device based on weight values stored at the crosspoint devices. A set of integrators accumulates an electric charge based on the output electric currents from the respective crosspoint devices. The crosspoint array outputs the accumulated charge after iterating for the predetermined number of times. The accumulated charge represents a multiply-add result of the vector of input data and the one or more convolution kernels.

    Method and recording medium of reducing chemoepitaxy directed self-assembled defects

    公开(公告)号:US10114921B2

    公开(公告)日:2018-10-30

    申请号:US15697594

    申请日:2017-09-07

    IPC分类号: G06F17/50 H01L29/66

    摘要: A method, system, and non-transitory computer readable medium for reducing chemo-epitaxy directed-self assembly (DSA) defects of a layout of a guiding pattern include inserting an internal dummy between a first portion of the guiding pattern and a second portion of the guiding pattern if a vertical spacing is equal to or greater than a first predetermined distance, inserting a first external dummy along an external edge of the guiding pattern in a vertical direction if the vertical spacing is greater than a second predetermined distance, and inserting an anti-taper structure on the first external dummy if a second distance from the external edge of the guiding pattern to an edge of the first external dummy is greater than a first distance.

    DIRECTED SELF-ASSEMBLY
    39.
    发明申请
    DIRECTED SELF-ASSEMBLY 有权
    指导自组织

    公开(公告)号:US20160379837A1

    公开(公告)日:2016-12-29

    申请号:US14754664

    申请日:2015-06-29

    摘要: The disclosure provides methods for directed self-assembly (DSA) of a block co-polymer (BCP). In one embodiment, a method includes: forming an oxide spacer along each of a first sidewall and a second sidewall of a cavity in a semiconductor substrate; forming a neutral layer between the oxide spacers and along a bottom of the cavity; and removing the oxide spacers to expose the first and second sidewalls and a portion of the bottom of the cavity adjacent the first and second sidewalls.

    摘要翻译: 本公开提供了嵌段共聚物(BCP)的定向自组装(DSA)的方法。 在一个实施例中,一种方法包括:沿着半导体衬底中的空腔的第一侧壁和第二侧壁中的每一个形成氧化物间隔物; 在所述氧化物间隔物和所述空腔的底部之间形成中性层; 以及去除所述氧化物间隔物以暴露所述第一和第二侧壁以及邻近所述第一和第二侧壁的所述腔的底部的一部分。

    2-DIMENSIONAL PATTERNING EMPLOYING TONE INVERTED GRAPHOEPITAXY
    40.
    发明申请
    2-DIMENSIONAL PATTERNING EMPLOYING TONE INVERTED GRAPHOEPITAXY 有权
    使用TONE INVERTED GRAPHOPHITAXY的二维图案

    公开(公告)号:US20160358776A1

    公开(公告)日:2016-12-08

    申请号:US13686058

    申请日:2012-11-27

    摘要: After formation of a template layer over a neutral polymer layer, a self-assembling block copolymer material is applied and self-assembled. The template layer includes a first linear portion, a second linear portion that is shorter than the first linear portion, and blocking template structures having a greater width than the second linear portion. The self-assembling block copolymer material is phase-separated into alternating lamellae in regions away from the widthwise-extending portion. The blocking template structures perturb, and cause termination of, the lamellae. A cavity parallel to the first and second linear portions and terminating in self-alignment to the blocking template structures is formed upon selective removal of a polymeric block component. The pattern of the cavity can be inverted and transferred into the material layer to form fins having different lengths.

    摘要翻译: 在中性聚合物层上形成模板层之后,自组装嵌段共聚物材料被应用并自组装。 模板层包括第一直线部分,比第一直线部分短的第二直线部分,以及阻挡具有比第二直线部分更大的宽度的模板结构。 自组装嵌段共聚物材料在远离宽度方向延伸部分的区域中相分离成交替的薄片。 阻挡模板结构扰乱并导致薄片的终止。 在选择性去除聚合物嵌段组分时,形成平行于第一和第二直线部分并终止于与阻挡模板结构自对准的空腔。 空腔的图案可以反转并转移到材料层中以形成具有不同长度的翅片。