Method for implementing an efficient and economical cathode process
    33.
    发明授权
    Method for implementing an efficient and economical cathode process 失效
    实现高效和经济的阴极工艺的方法

    公开(公告)号:US06923918B2

    公开(公告)日:2005-08-02

    申请号:US09968186

    申请日:2001-09-28

    CPC分类号: H01J9/148 H01J1/30

    摘要: The present invention provides a method of fabricating a cathode requiring relatively few and somewhat simple steps. In one embodiment, a novel etchant gas chemistry dispenses with needing a second passivation layer. In one embodiment, a direct via is formed without a separate mask. In one embodiment, access and isolation features of a metallic gate are patterned in the same patterning operation as an associated passivation layer, dispensing with a need for separate patterning of each. In one embodiment, etching is effectuated with high selectivity for nitrides of silicon. In one embodiment, the requirement for at least one passivation layer deposition, a direct via masking step, and separate patterning steps for the passivation layer and metallic gate are eliminated. This effectively eliminates or substantially reduces associated costs, concomitantly reducing process completion time. Advantageously, this increases efficiency and productivity, correspondingly reducing fabrication costs and unit costs of finished devices.

    摘要翻译: 本发明提供一种制造阴极的方法,其需要相对较少和有些简单的步骤。 在一个实施方案中,新颖的蚀刻剂气体化学物质需要第二钝化层。 在一个实施例中,形成直通通孔而没有单独的掩模。 在一个实施例中,金属栅极的访问和隔离特征在与相关联的钝化层相同的图案化操作中被图案化,分配了对每个钝化层的分离图案化的需要。 在一个实施方案中,以高选择性对硅的氮化物进行蚀刻。 在一个实施例中,消除了对钝化层和金属栅极的至少一个钝化层沉积,直接通孔掩模步骤和单独的图案化步骤的要求。 这有效地消除或显着降低了相关成本,同时缩短了工艺完成时间。 有利地,这提高了效率和生产率,相应地降低了成品设备的制造成本和单位成本。

    Cold cathode field emission device and display
    35.
    发明授权
    Cold cathode field emission device and display 失效
    冷阴极场发射装置及显示屏

    公开(公告)号:US06465941B1

    公开(公告)日:2002-10-15

    申请号:US09453403

    申请日:1999-12-03

    IPC分类号: H01J102

    CPC分类号: H01J9/025 H01J2329/00

    摘要: A cold cathode field emission device comprising; (A) a cathode electrode formed on a support, (B) an insulating layer formed on the support and the cathode electrode, (C) a gate electrode formed on the insulating layer, (D) an opening portion which penetrates through the gate electrode and the insulating layer, and (E) an electron emitting portion which is positioned at a bottom portion of the opening portion and has a tip portion having a conical form and being composed of a crystalline conductive material, the tip portion of the electron emitting portion having a crystal boundary nearly perpendicular to the cathode electrode.

    摘要翻译: 一种冷阴极场致发射器件,包括: (A)形成在支撑体上的阴极,(B)形成在支撑体和阴极上的绝缘层,(C)形成在绝缘层上的栅电极,(D)穿过栅电极 和(E)电子发射部分,其位于开口部分的底部并且具有圆锥形的尖端部分并且由结晶导电材料构成,电子发射部分的尖端部分 具有几乎垂直于阴极的晶体边界。

    Method for forming a thin film of a metal compound by vacuum deposition
    37.
    发明授权
    Method for forming a thin film of a metal compound by vacuum deposition 失效
    通过真空沉积形成金属化合物的薄膜的方法

    公开(公告)号:US6103320A

    公开(公告)日:2000-08-15

    申请号:US92644

    申请日:1998-06-09

    CPC分类号: C23C14/0047 C23C14/0078

    摘要: A method for forming a thin film of a metal compound is disclosed. Within a vacuum chamber, a metallic ultra-thin film of a metal or an incompletely-reacted metal is deposited on a substrate. The metallic ultra-thin film is brought in contact with the electrically neutral activated species of a reactive gas so as to convert the metallic ultra-thin film to an ultra-thin film of a metal compound through the reaction of the metallic ultra-thin film with the activated species of the reactive gas. The above-described steps are sequentially repeated so as to deposit on the substrate the ultra-thin film of the metal compound in layers until a thin film of the metal compound having a desired thickness is formed on the substrate.

    摘要翻译: 公开了一种形成金属化合物的薄膜的方法。 在真空室内,将金属的金属超薄膜或不完全反应的金属沉积在基板上。 金属超薄膜与电中性活性物质的反应性气体接触,以通过金属超薄膜的反应将金属超薄膜转变成金属化合物的超薄膜 与活性气体的活化物质。 依次重复上述步骤,以便在衬底上沉积金属化合物的超薄膜,直到在基片上形成具有所需厚度的金属化合物的薄膜。

    Crystallization method
    38.
    发明授权
    Crystallization method 失效
    结晶方法

    公开(公告)号:US5935534A

    公开(公告)日:1999-08-10

    申请号:US758502

    申请日:1996-12-02

    CPC分类号: C07C51/43 C07B63/04

    摘要: In a crystallization method, a liquid mixture containing a crystallizable component is cooled so as to form and separate crystals of the crystallizable component. Then, a purified melt having purity substantially equal to that of the separated crystals, to which a polymerization inhibitor is added and which is heated to a temperature higher than a freezing point of the separated crystals, is circulated to flow contacting the crystals so as to accelerate melting. Then, the melted crystals are recovered along with the purified melt containing the polymerization inhibitor.

    摘要翻译: 在结晶方法中,将含有可结晶组分的液体混合物冷却以形成和分离可结晶组分的晶体。 然后,将纯度基本上等于分离的结晶的纯化熔体循环到与晶体接触的流动中,向其中加入聚合抑制剂并将其加热到高于分离晶体的凝固点的温度,从而 加速融化 然后,将熔融的晶体与含有聚合抑制剂的纯化熔体一起回收。

    Optical scanning apparatus and recording apparatus using the same
    40.
    发明授权
    Optical scanning apparatus and recording apparatus using the same 失效
    光学扫描装置及使用其的记录装置

    公开(公告)号:US5255115A

    公开(公告)日:1993-10-19

    申请号:US853425

    申请日:1992-03-18

    申请人: Kazuo Kikuchi

    发明人: Kazuo Kikuchi

    摘要: There is disclosed an optical scanning system in which axis alignment in a subscanning direction and adjustment of a spot is easily performed, the spot diameter is variable and a change in efficiency of an optical path due to these changes is small. The optical scanning system comprises two flat plate glasses which are provided between a cylindrical lens for converging an optical beam in a subscanning direction and a polygon mirror and are rotatable around an axis perpendicular to the subscanning direction and may be fixed after an adjustment. Axis alignment in a subscanning direction is obtainable by adjustment of the angle of one flat plate glass, and change in the spot diameter is obtainable by rotating two flat plate glasses in opposite directions while change of the axis in the subscanning direction and change in efficiency of the optical path are kept small.

    摘要翻译: 公开了一种光扫描系统,其中副扫描方向上的轴对准和斑点的调节容易进行,光斑直径是可变的,并且由于这些变化而导致的光路效率的变化很小。 光学扫描系统包括两个平板玻璃,它们设置在用于会聚在副扫描方向上的光束的圆柱形透镜和多面镜之间,并且可以围绕垂直于副扫描方向的轴线旋转,并且可以在调整之后被固定。 可以通过调整一个平板玻璃的角度来获得副扫描方向上的轴对准,并且可以通过沿相反方向旋转两个平板玻璃来获得光斑直径的变化,同时沿副扫描方向的轴线的变化和效率的变化 光路保持较小。