Semiconductor device manufacturing method
    31.
    发明授权
    Semiconductor device manufacturing method 有权
    半导体器件制造方法

    公开(公告)号:US08440524B2

    公开(公告)日:2013-05-14

    申请号:US13030790

    申请日:2011-02-18

    IPC分类号: H01L21/00

    摘要: A method for manufacturing a semiconductor device including a semiconductor substrate composed of silicon carbide, an upper surface electrode which contacts an upper surface of the substrate, and a lower surface electrode which contacts a lower surface of the substrate, the method including steps of: (a) forming an upper surface structure on the upper surface side of the substrate, and (b) forming a lower surface structure on the lower surface side of the substrate. The step (a) comprises steps of: (a1) depositing an upper surface electrode material layer on the upper surface of the substrate, the upper surface electrode material layer being a raw material layer of the upper surface electrode, and (a2) annealing the upper surface electrode material layer. The step (b) comprises steps of: (b1) depositing a lower surface electrode material layer on the lower surface of the substrate, the lower surface electrode material layer being a raw material layer of the lower surface electrode, and (b2) annealing the lower surface electrode material layer with a laser to make an ohmic contact between the lower surface electrode and the substrate.

    摘要翻译: 一种半导体器件的制造方法,该半导体器件包括由碳化硅构成的半导体衬底,与衬底的上表面接触的上表面电极和与衬底的下表面接触的下表面电极,该方法包括以下步骤:( a)在基板的上表面侧上形成上表面结构,(b)在基板的下表面侧形成下表面结构。 步骤(a)包括以下步骤:(a1)在基板的上表面上沉积上表面电极材料层,上表面电极材料层是上表面电极的原料层,(a2)使 上表面电极材料层。 步骤(b)包括以下步骤:(b1)在基板的下表面上沉积下表面电极材料层,下表面电极材料层是下表面电极的原料层,(b2)使 下表面电极材料层用激光器在下表面电极和衬底之间形成欧姆接触。

    EXPOSURE DEVICE, IMAGE FORMING APPARATUS AND MIRROR ADJUSTING METHOD
    33.
    发明申请
    EXPOSURE DEVICE, IMAGE FORMING APPARATUS AND MIRROR ADJUSTING METHOD 有权
    曝光装置,图像形成装置和镜像调整方法

    公开(公告)号:US20110262185A1

    公开(公告)日:2011-10-27

    申请号:US13090977

    申请日:2011-04-20

    申请人: Takeshi Endo

    发明人: Takeshi Endo

    IPC分类号: G03G15/04

    摘要: An exposure device includes a mirror to reflect light used for exposure of an object, a holder to hold the mirror, an adhesive that bonds the mirror to the holder and elastically deforms, and an adjusting tool that pushes the mirror to change a direction of the mirror.

    摘要翻译: 曝光装置包括用于反射用于物体曝光的光的反射镜,用于保持反射镜的保持器,将反射镜粘合到保持器并弹性变形的粘合剂,以及调节工具,其推动反射镜以改变方向 镜子。

    SiC semiconductor device and method for manufacturing the same
    35.
    发明授权
    SiC semiconductor device and method for manufacturing the same 有权
    SiC半导体器件及其制造方法

    公开(公告)号:US07824995B2

    公开(公告)日:2010-11-02

    申请号:US12071717

    申请日:2008-02-26

    IPC分类号: H01L29/72

    摘要: A SiC semiconductor device includes: a SiC substrate having a main surface; a channel region on the substrate; first and second impurity regions on upstream and downstream sides of the channel region, respectively; a gate on the channel region through a gate insulating film. The channel region for flowing current between the first and second impurity regions is controlled by a voltage applied to the gate. An interface between the channel region and the gate insulating film has a hydrogen concentration equal to or greater than 2.6×1020 cm−3. The interface provides a channel surface perpendicular to a (0001)-orientation plane.

    摘要翻译: SiC半导体器件包括:具有主表面的SiC衬底; 衬底上的沟道区; 分别在通道区域的上游侧和下游侧的第一和第二杂质区域; 通过栅极绝缘膜在沟道区上形成栅极。 用于在第一和第二杂质区域之间流动电流的沟道区域由施加到栅极的电压来控制。 沟道区域和栅极绝缘膜之间的界面的氢浓度等于或大于2.6×1020cm-3。 界面提供垂直于(0001)取向平面的通道表面。

    Optical Information Recording Reproducing Apparatus
    37.
    发明申请
    Optical Information Recording Reproducing Apparatus 审中-公开
    光信息记录再生装置

    公开(公告)号:US20100103490A1

    公开(公告)日:2010-04-29

    申请号:US12579571

    申请日:2009-10-15

    IPC分类号: G03H1/04 G03H1/22

    摘要: In the optical information recording reproducing apparatus that makes a reference light beam to interfere with an information light beam so as to record the information of the information light beam in a recording medium based on a two light beam interference method, or irradiates the reference light beam to a recording medium so as to emit a light beam and reproduces information stored in the recording medium by leading the light beam emitted from the recording medium an the image light receiving element, the optical information recording reproducing apparatus comprises a detector to detect positional deviation of at least one of the reference light beam and the information light beam from a predetermined optical path; and a correcting mechanism to correct the positional deviation based on an output from the detector.

    摘要翻译: 在使基准光束干涉信息光束以便根据两种光束干涉法将信息光束的信息记录在记录介质中的光信息记录重放装置中,或照射参考光束 通过将从记录介质发射的光束引导到图像光接收元件而发射光束并再现存储在记录介质中的信息,光信息记录再现装置包括检测器,以检测位置偏差 来自预定光路的参考光束和信息光中的至少一个; 以及基于来自检测器的输出来校正位置偏差的校正机构。

    LASER EXPOSURE DEVICE AND OPTICAL AXIS ADJUSTMENT METHOD IN LASER EXPOSURE DEVICE
    39.
    发明申请
    LASER EXPOSURE DEVICE AND OPTICAL AXIS ADJUSTMENT METHOD IN LASER EXPOSURE DEVICE 有权
    激光曝光装置和激光曝光装置中的光轴调整方法

    公开(公告)号:US20090238605A1

    公开(公告)日:2009-09-24

    申请号:US12477961

    申请日:2009-06-04

    IPC分类号: G03G15/00

    CPC分类号: G03G15/04072 G03G15/0435

    摘要: In a laser exposure device according to the present invention, a positioning pin, which is formed in a lens holder supporting a lens system, is inserted through an elongated hole for restriction of a board holder supporting a laser diode. An eccentric cam is inserted into an elongated hole for rotation movement formed in a board holder and a circular hole for rotation movement which is formed in the lens holder and which faces the elongated hole for rotation movement. An eccentric cam is inserted into an elongated hole for slide movement formed in the board holder and a circular hole for slide movement which is formed in the lens holder and which faces the elongated hole for slide movement. The eccentric cams are rotated to relatively move the board holder and lens holder with respect to each other to thereby establish alignment between the optical axes of the laser diode and lens system. In a state where the eccentric cams are fitted into the elongated holes, the board holder and lens holder are fixed to each other by screws.

    摘要翻译: 在根据本发明的激光曝光装置中,形成在支撑透镜系统的透镜支架中的定位销被插入通过长孔,用于限制支撑激光二极管的板支架。 偏心凸轮被插入到用于旋转运动的长孔中,形成在板保持器中的旋转运动和用于旋转运动的圆形孔,其形成在透镜保持器中并面向用于旋转运动的细长孔。 偏心凸轮被插入到用于滑动运动的细长孔中,形成在板保持器中,并且用于滑动运动的圆形孔形成在透镜保持器中并面对用于滑动运动的长孔。 偏心凸轮旋转以相对于彼此相对地移动板保持器和透镜保持器,从而在激光二极管和透镜系统的光轴之间建立对准。 在将偏心凸轮装配到细长孔中的状态下,通过螺钉将板保持器和透镜保持器彼此固定。

    Diode
    40.
    发明申请
    Diode 审中-公开
    二极管

    公开(公告)号:US20090224353A1

    公开(公告)日:2009-09-10

    申请号:US12382012

    申请日:2009-03-05

    IPC分类号: H01L29/872

    摘要: A diode includes the following: an n type semiconductor region; a p type semiconductor region provided in a part of a front face of the n type semiconductor region; an anode electrode (front face electrode) which adjoins a front face of the n type semiconductor region and a front face of the p type semiconductor region while at least forming a Schottky junction on a front face of the n type semiconductor region; and an insulating region which has a right-hand side (first side) and a left-hand side (second side) adjacent to the n type semiconductor region, the right-hand side facing a second n type semiconductor region which is located below the Schottky junction, the left-hand side facing a first n type semiconductor region which is located below a pn junction between the n type semiconductor region and the p type semiconductor region.

    摘要翻译: 二极管包括:n型半导体区域; 设置在n型半导体区域的正面的一部分中的p型半导体区域; 邻接n型半导体区域的前表面和p型半导体区域的正面的阳极电极(正面电极),同时至少在n型半导体区域的正面上形成肖特基结; 以及具有与n型半导体区域相邻的右侧(第一侧)和左侧(第二侧)的绝缘区域,所述右侧面向位于所述n型半导体区域下方的第二n型半导体区域 肖特基结,左手侧面对位于n型半导体区域和p型半导体区域之间的pn结的下方的第一n型半导体区域。