公开(公告)号：US20100080258A1

公开(公告)日：2010-04-01

申请号：US12562605

申请日：2009-09-18

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00 ,  H01L33/00

CPC classification number: H01S5/18391 ,  H01S5/18311 ,  H01S5/2086 ,  H01S5/209 ,  H01S2301/166

Abstract: Provided is a surface emitting laser or the like capable of suppressing horizontal misalignment between the surface relief structure and the current confining structure to make higher the precision of the alignment, to thereby obtain single transverse mode characteristics with stability. The surface emitting laser having a semiconductor layer laminated therein includes: a first etching region formed by etching a part of the upper mirror; and a second etching region formed by performing etching from a bottom portion of the first etching region to a semiconductor layer for forming a current confining structure, in which a depth of the second etching region is smaller than a depth of the first etching region.

Abstract translation: 提供了能够抑制表面浮雕结构和电流限制结构之间的水平偏移的表面发射激光器等，以提高对准的精度，从而稳定地获得单横模特性。 层叠有半导体层的表面发射激光器包括：通过蚀刻上反射镜的一部分而形成的第一蚀刻区域; 以及通过从第一蚀刻区域的底部进行蚀刻而形成的第二蚀刻区域到形成电流限制结构的半导体层，其中第二蚀刻区域的深度小于第一蚀刻区域的深度。

公开(公告)号：US20100029027A1

公开(公告)日：2010-02-04

申请号：US12509635

申请日：2009-07-27

Applicant: Mitsuhiro Ikuta ,  Yasuhisa Inao ,  Takako Yamaguchi

Inventor： Mitsuhiro Ikuta ,  Yasuhisa Inao ,  Takako Yamaguchi

IPC: H01L21/00 ,  H01S5/00

CPC classification number: H01S5/18391 ,  H01S5/18311 ,  H01S5/18347 ,  H01S2301/166 ,  H01S2301/176

Abstract: Provided is a surface emitting laser manufacturing method, etc., which reduces process damage occurring to a surface relief structure, enabling stable provision of a single transverse mode characteristic. Provided is a method including a surface relief structure for controlling a reflectance in a light emitting portion of an upper mirror, the surface relief structure including a stepped structure, includes: forming a resist pattern including a pattern for forming a mesa structure and a pattern for forming a stepped structure, on or above the upper mirror, and performing first-phase etching for etching the surface layer of the upper mirror to determine the horizontal position of the stepped structure; forming a current confining structure after the performing first-phase etching; and performing second-phase etching for further etching the area that the first-phase etching has been performed, to determine the depth position of the stepped structure, after the forming a current confining structure.

Abstract translation: 本发明提供了一种表面发射激光制造方法等，其减少了对表面起伏结构发生的工艺损伤，能够稳定地提供单一横模特性。 提供了一种包括用于控制上反射镜的发光部分中的反射率的表面浮雕结构的方法，所述表面浮雕结构包括阶梯结构，包括：形成包括用于形成台面结构的图案的抗蚀剂图案和用于形成台阶结构的图案 在上反射镜上或上方形成台阶结构，并执行用于蚀刻上镜的表面层的第一相蚀刻以确定阶梯结构的水平位置; 在执行第一相蚀刻之后形成电流限制结构; 并且在形成电流限制结构之后，执行第二相蚀刻以进一步蚀刻已经执行第一相蚀刻的区域，以确定阶梯结构的深度位置。

公开(公告)号：US20100014548A1

公开(公告)日：2010-01-21

申请号：US11916230

申请日：2007-04-05

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/183 ,  H01S5/10

CPC classification number: H01S5/105 ,  B82Y20/00 ,  H01S5/183 ,  H01S5/2027 ,  H01S5/34326

Abstract: The present invention provides a surface emitting laser having a novel structure which eliminates necessity to provide a low refractive index medium at an interface of a photonic crystal layer on the side of a substrate. A multilayer mirror (1300), an active layer (1200), and a refractive index periodic structure layer (1020) whose refractive index changes periodically are laminated in a direction perpendicular to a substrate (1500). The refractive index periodic structure layer is structured so as to separate a light having a wavelength λ perpendicularly incident on the refractive index periodic structure into at least a transmitted light and a diffracted light. The multilayer mirror is structured so as to have a reflectance with regard to the diffracted light higher than a reflectance with regard to the transmitted light. A resonant mode is realized within a waveguide including the refractive index periodic structure layer and the multilayer mirror.

Abstract translation: 本发明提供了具有新颖结构的表面发射激光器，其消除了在基板侧的光子晶体层的界面处提供低折射率介质的必要性。 折射率周期性变化的多层反射镜（1300），有源层（1200）和折射率周期性结构层（1020）在与基板（1500）垂直的方向上层叠。 折射率周期结构层被构造成将具有垂直入射在折射率周期结构上的波长λ的光分离成至少透射光和衍射光。 多层反射镜被构造为具有相对于相对于透射光的反射率高的衍射光的反射率。 在包括折射率周期结构层和多层反射镜的波导内实现谐振模式。

公开(公告)号：US07535946B2

公开(公告)日：2009-05-19

申请号：US11940124

申请日：2007-11-14

Applicant: Yasuhiro Nagatomo ,  Yuichiro Hori ,  Mitsuhiro Ikuta

Inventor： Yasuhiro Nagatomo ,  Yuichiro Hori ,  Mitsuhiro Ikuta

IPC: H01S5/00 ,  H01S3/08

CPC classification number: G02B6/1225 ,  B82Y20/00 ,  H01S5/105 ,  H01S5/12 ,  H01S5/18 ,  H01S5/183 ,  H01S5/34326

Abstract: A structure includes a photonic crystal layer including a first member having a high refractive index in which a plurality of holes are periodically arranged, and a second member having a low refractive index. A third member is disposed on the first member. The third member has a refractive index higher than 1.0 and lower than the refractive index of the first member. The holes of the photonic crystal layer have a depth in the range of 20% to 80% of the thickness of the first member.

Abstract translation: 一种结构包括光子晶体层，其包括具有高折射率的第一部件，其中多个孔周期性地布置，以及具有低折射率的第二部件。 第三构件设置在第一构件上。 第三构件的折射率高于1.0且低于第一构件的折射率。 光子晶体层的孔的深度在第一构件的厚度的20％至80％的范围内。

公开(公告)号：US20080107145A1

公开(公告)日：2008-05-08

申请号：US11933642

申请日：2007-11-01

Applicant: Yuichiro Hori ,  Mitsuhiro Ikuta

Inventor： Yuichiro Hori ,  Mitsuhiro Ikuta

IPC: G02B6/10 ,  H01S3/08

CPC classification number: H01S5/18386 ,  B82Y20/00 ,  G02B6/1225 ,  H01S5/105 ,  H01S5/18311 ,  H01S5/34326 ,  H01S5/3436

Abstract: To provide a structure having a photonic crystal that can display a reflection function using GR even when a refractive index difference between a photonic crystal layer and a cladding layer adjacent thereto is not sufficient and a surface-emitting laser using the structure. The structure includes a photonic crystal layer including a first member of a flat shape and plural pillars arrayed two-dimensionally periodically on the first member. The photonic crystal layer is formed of a first material having a first refractive index. A low refractive index layer formed of a second material having a second refractive index lower than the first refractive index is adjacent to the photonic crystal layer. A relative refractive index difference between the first refractive index and the second refractive index is not less than 0.04 and does not exceed 0.13. The height of the pillars with respect to the thickness of the photonic crystal layer is not less than 0.10t and does not exceed 0.07t.

Abstract translation: 即使在光子晶体层与与其相邻的包层之间的折射率差不足的情况下，也可以提供具有能够使用GR显示反射功能的光子晶体的结构，以及使用该结构的表面发射激光。 该结构包括光子晶体层，其包括平坦形状的第一构件和在第一构件上二维排列的多个柱。 光子晶体层由具有第一折射率的第一材料形成。 由具有低于第一折射率的第二折射率的第二材料形成的低折射率层与光子晶体层相邻。 第一折射率和第二折射率之间的相对折射率差不小于0.04并且不超过0.13。 相对于光子晶体层的厚度，柱的高度不小于0.10t，不超过0.07t。

公开(公告)号：US08897330B2

公开(公告)日：2014-11-25

申请号：US13824710

申请日：2011-10-05

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00 ,  B41J2/455 ,  B41J2/47 ,  H01S5/183 ,  H01S5/42

CPC classification number: H01S5/18 ,  B41J2/455 ,  B41J2/473 ,  H01S3/02 ,  H01S5/183 ,  H01S5/18313 ,  H01S5/1833 ,  H01S5/18361 ,  H01S5/18391 ,  H01S5/3202 ,  H01S5/423 ,  H01S2301/16 ,  H01S2301/166 ,  H01S2301/18

Abstract: The present invention provides a surface emitting laser that provides a sufficient optical output and is suitable as a light source intended for electrophotographic apparatuses, and a surface-emitting-laser array and an image forming apparatus each including the surface emitting laser.The surface emitting laser includes a first stepped structure on a front surface of a front mirror. In the first stepped structure, a difference L between an optical path length in a first area and an optical path length in a second area satisfies the following expression: (¼+N)λ

Abstract translation: 本发明提供一种表面发射激光器，其提供足够的光输出并且适合作为用于电子照相设备的光源，以及包括表面发射激光器的表面发射激光器阵列和图像形成装置。 表面发射激光器包括在前反射镜的前表面上的第一阶梯结构。 在第一阶梯结构中，第一区域的光路长度与第二区域的光程长度之间的差值L满足以下表达式：（¼+ N）λ<| L | <（¾+ N）λ其中 N是整数。

公开(公告)号：US08331414B2

公开(公告)日：2012-12-11

申请号：US13121677

申请日：2010-09-07

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00

CPC classification number: H01S5/18327 ,  H01S5/0655 ,  H01S5/18311 ,  H01S5/18394 ,  H01S5/2086 ,  H01S5/423 ,  H01S2301/166

Abstract: A surface-emitting laser includes a surface relief structure provided on an upper multilayer reflector, the surface relief structure including a region of a first laminate, a region of a second laminate that has a larger optical thickness than the first laminate, and a region of a third laminate that has a larger optical thickness than the first laminate and the second laminate.

Abstract translation: 表面发射激光器包括设置在上多层反射器上的表面浮雕结构，表面浮雕结构包括第一层压体的区域，具有比第一层压板更大的光学厚度的第二层压体的区域，以及 具有比第一层压体和第二层压体更大的光学厚度的第三层压体。

公开(公告)号：US08329524B2

公开(公告)日：2012-12-11

申请号：US13413973

申请日：2012-03-07

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01L33/06

CPC classification number: H01S5/18311 ,  H01S5/0286 ,  H01S5/18313 ,  H01S5/18316 ,  H01S5/18333 ,  H01S5/18347 ,  Y10S257/918

Abstract: A surface emitting laser includes a lower multilayer mirror, an active layer, and an upper multilayer mirror stacked onto a substrate. A first current confinement layer having a first electrically conductive region and a first insulating region is formed above or below the active layer using a first trench structure. A second current confinement layer having a second electrically conductive region and a second insulating region is formed above or below the first current confinement layer using a second trench structure. The first and second trench structures extend from a top surface of the upper multilayer mirror towards the substrate such that the second trench structure surrounds the first trench structure. When the surface emitting laser is viewed in an in-plane direction of the substrate, a boundary between the first electrically conductive region and the first insulating region is disposed inside the second electrically conductive region.

Abstract translation: 表面发射激光器包括层叠在基板上的下多层反射镜，有源层和上多层反射镜。 使用第一沟槽结构在有源层的上方或下方形成具有第一导电区域和第一绝缘区域的第一电流限制层。 使用第二沟槽结构在第一电流限制层的上方或下方形成具有第二导电区域和第二绝缘区域的第二电流限制层。 第一和第二沟槽结构从上多层反射镜的顶表面延伸到衬底，使得第二沟槽结构围绕第一沟槽结构。 当在基板的面内方向上观察表面发射激光时，第一导电区域和第一绝缘区域之间的边界设置在第二导电区域的内部。

公开(公告)号：US08249123B2

公开(公告)日：2012-08-21

申请号：US12853393

申请日：2010-08-10

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00

CPC classification number: H01S5/105 ,  B82Y20/00 ,  H01S5/183 ,  H01S5/2027 ,  H01S5/34326

Abstract: The present invention provides a surface emitting laser having a novel structure which eliminates necessity to provide a low refractive index medium at an interface of a photonic crystal layer on the side of a substrate. A multilayer mirror (1300), an active layer (1200), and a refractive index periodic structure layer (1020) whose refractive index changes periodically are laminated in a direction perpendicular to a substrate (1500). The refractive index periodic structure layer is structured so as to separate a light having a wavelength λ perpendicularly incident on the refractive index periodic structure into at least a transmitted light and a diffracted light. The multilayer mirror is structured so as to have a reflectance with regard to the diffracted light higher than a reflectance with regard to the transmitted light. A resonant mode is realized within a waveguide including the refractive index periodic structure layer and the multilayer mirror.

Abstract translation: 本发明提供了具有新颖结构的表面发射激光器，其消除了在基板侧的光子晶体层的界面处提供低折射率介质的必要性。 折射率周期性变化的多层反射镜（1300），有源层（1200）和折射率周期性结构层（1020）在与基板（1500）垂直的方向上层叠。 折射率周期结构层被构造成将具有垂直入射在折射率周期结构上的波长λ的光分离成至少透射光和衍射光。 多层反射镜被构造为具有相对于相对于透射光的反射率高的衍射光的反射率。 在包括折射率周期性结构层和多层反射镜的波导内实现谐振模式。

公开(公告)号：US08188487B2

公开(公告)日：2012-05-29

申请号：US12837039

申请日：2010-07-15

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01L29/26

CPC classification number: H01S5/18311 ,  H01S5/0286 ,  H01S5/18313 ,  H01S5/18316 ,  H01S5/18333 ,  H01S5/18347 ,  Y10S257/918

Abstract: A surface emitting laser includes a lower multilayer mirror, an active layer, and an upper multilayer mirror stacked onto a substrate. A first current confinement layer having a first electrically conductive region and a first insulating region is formed above or below the active layer using a first trench structure. A second current confinement layer having a second electrically conductive region and a second insulating region is formed above or below the first current confinement layer using a second trench structure. The first and second trench structures extend from a top surface of the upper multilayer mirror towards the substrate such that the second trench structure surrounds the first trench structure. When the surface emitting laser is viewed in an in-plane direction of the substrate, a boundary between the first electrically conductive region and the first insulating region is disposed inside the second electrically conductive region.

Abstract translation: 表面发射激光器包括层叠在基板上的下多层反射镜，有源层和上多层反射镜。 使用第一沟槽结构在有源层的上方或下方形成具有第一导电区域和第一绝缘区域的第一电流限制层。 使用第二沟槽结构在第一电流限制层的上方或下方形成具有第二导电区域和第二绝缘区域的第二电流限制层。 第一和第二沟槽结构从上多层反射镜的顶表面延伸到衬底，使得第二沟槽结构围绕第一沟槽结构。 当在基板的面内方向上观察表面发射激光时，第一导电区域和第一绝缘区域之间的边界设置在第二导电区域的内部。