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公开(公告)号:US10121809B2
公开(公告)日:2018-11-06
申请号:US15264411
申请日:2016-09-13
Applicant: OmniVision Technologies, Inc.
Inventor: Chin-Poh Pang , Boyang Zhang , Chia-Ying Liu , Wu-Zang Yang , Chih-Wei Hsiung , Chun-Yung Ai
IPC: H01L27/146 , H04N5/374 , H04N9/04
Abstract: A backside-illuminated color image sensor with crosstalk-suppressing color filter array includes (a) a silicon layer including an array of photodiodes and (b) a color filter layer on the light-receiving surface of the silicon layer, wherein the color filter layer includes (i) an array of color filters cooperating with the array of photodiodes to form a respective array of color pixels and (ii) a light barrier grid disposed between the color filters to suppress transmission of light between adjacent ones of the color filters. The light barrier is spatially non-uniform across the color filter layer to account for variation of chief ray angle across the array of color filters.
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公开(公告)号:US20180286895A1
公开(公告)日:2018-10-04
申请号:US15478085
申请日:2017-04-03
Applicant: OmniVision Technologies, Inc.
Inventor: Kazufumi Watanabe , Chih-Wei Hsiung , Dyson Tai , Lindsay Grant
IPC: H01L27/146
CPC classification number: H01L27/1463 , H01L27/14612 , H01L27/14621 , H01L27/14627 , H01L27/14645 , H01L27/14683 , H04N5/378 , H04N9/045
Abstract: A multi-color HDR image sensor includes at least a first combination color pixel with a first color filter and an adjacent second combination color pixel with a second color filter which is different from the first color filter, wherein each combination color pixel includes at least two sub-pixels having at least two adjacent photodiodes. Within each combination color pixel, there is a dielectric deep trench isolation (d-DTI) structure to isolate the two adjacent photodiodes of the two adjacent sub-pixels with same color filters in order to prevent the electrical cross talk. Between two adjacent combination color pixels with different color filters, there is a hybrid deep trench isolation (h-DTI) structure to isolate two adjacent photodiodes of two adjacent sub-pixels with different color filters in order to prevent both optical and electrical cross talk. Each combination color pixel is enclosed on all sides by the hybrid deep trench isolation (h-DTI) structure.
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公开(公告)号:US09455291B2
公开(公告)日:2016-09-27
申请号:US14601010
申请日:2015-01-20
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Gang Chen , Duli Mao , Yuanwei Zheng , Chih-Wei Hsiung , Arvind Kumar , Dyson H. Tai
IPC: H01L31/00 , H01L27/146
CPC classification number: H01L27/14621 , H01L27/14612 , H01L27/1464 , H01L27/14641 , H01L27/14643 , H01L27/14645 , H01L27/14647
Abstract: A back side illuminated image sensor includes a semiconductor material having a front side and a back side. The semiconductor material is disposed between image sensor circuitry and a light filter array. The image sensor circuitry is disposed on the front side, and the light filter array is disposed proximate to the back side. The image sensor includes a first pixel with a first doped region that extends from the image sensor circuitry into the semiconductor material a first depth. The first pixel also includes a second doped region that is disposed between the back side of the semiconductor material and the first doped region. The second doped region is electrically isolated from the first doped region. A second pixel with a third doped region is also included in the image sensor. The third doped region extends from the image sensor circuitry into the semiconductor material a second depth.
Abstract translation: 背面照明图像传感器包括具有前侧和后侧的半导体材料。 半导体材料设置在图像传感器电路和滤光器阵列之间。 图像传感器电路设置在前侧,并且滤光器阵列靠近背面设置。 图像传感器包括具有第一掺杂区域的第一像素,其从图像传感器电路延伸到半导体材料第一深度。 第一像素还包括设置在半导体材料的背面和第一掺杂区之间的第二掺杂区域。 第二掺杂区域与第一掺杂区域电隔离。 具有第三掺杂区域的第二像素也包括在图像传感器中。 第三掺杂区域从图像传感器电路延伸到半导体材料第二深度。
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公开(公告)号:US20140299956A1
公开(公告)日:2014-10-09
申请号:US13856993
申请日:2013-04-04
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Chih-Wei Hsiung , Oray Orkun Cellek , Gang Chen , Duli Mao , Vincent Venezia , Hsin-Chih Tai
IPC: H01L31/0216 , H01L27/146
CPC classification number: H01L31/02161 , H01L27/1462 , H01L27/1464
Abstract: An imaging device includes a semiconductor substrate having a photosensitive element for accumulating charge in response to incident image light. The semiconductor substrate includes a light-receiving surface positioned to receive the image light. The imaging device also includes a negative charge layer and a charge sinking layer. The negative charge layer is disposed proximate to the light-receiving surface of the semiconductor substrate to induce holes in an accumulation zone in the semiconductor substrate along the light-receiving surface. The charge sinking layer is disposed proximate to the negative charge layer and is configured to conserve or increase an amount of negative charge in the negative charge layer. The negative charge layer is disposed between the semiconductor substrate and the charge sinking layer.
Abstract translation: 成像装置包括具有用于响应于入射图像光累积电荷的光敏元件的半导体衬底。 半导体衬底包括被定位成接收图像光的光接收表面。 成像装置还包括负电荷层和电荷沉没层。 负电荷层设置在半导体衬底的光接收表面附近以沿着光接收表面在半导体衬底中的累积区域中引起空穴。 电荷沉降层设置成靠近负电荷层,并且被配置为在负电荷层中保存或增加负电荷的量。 负电荷层设置在半导体衬底和电荷沉降层之间。
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公开(公告)号:US20240387567A1
公开(公告)日:2024-11-21
申请号:US18318482
申请日:2023-05-16
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Chun-Yung Ai , Kazufumi Watanabe , Chih-Wei Hsiung
IPC: H01L27/146
Abstract: A pixel array substrate includes a semiconductor substrate including a pixel array, a first side, and a second side opposite the first side, a guard ring region in the semiconductor substrate, formed of a doped semiconductor, enclosing the pixel array, and extending into the semiconductor substrate from the first side, and a peripheral region in the semiconductor substrate and enclosing the guard ring region. The peripheral region includes at least one device and a deep trench isolation (DTI) structure region disposed between the guard ring region and the at least one device and proximate to the second side of the semiconductor substrate. The DTI structure region is configured to block an electric current path between a P-N junction in the guard ring region and the at least one device.
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公开(公告)号:US10204951B2
公开(公告)日:2019-02-12
申请号:US15882925
申请日:2018-01-29
Applicant: OmniVision Technologies, Inc.
Inventor: Kazufumi Watanabe , Chih-Wei Hsiung , Dyson Hsin-Chih Tai , Lindsay Alexander Grant
IPC: H01L27/146 , H04N9/04 , H04N5/378
Abstract: A multi-color HDR image sensor includes at least a first combination color pixel with a first color filter and an adjacent second combination color pixel with a second color filter which is different from the first color filter, wherein each combination color pixel includes at least two sub-pixels having at least two adjacent photodiodes. Within each combination color pixel, there is a dielectric deep trench isolation (d-DTI) structure to isolate the two adjacent photodiodes of the two adjacent sub-pixels with same color filters in order to prevent the electrical cross talk. Between two adjacent combination color pixels with different color filters, there is a hybrid deep trench isolation (h-DTI) structure to isolate two adjacent photodiodes of two adjacent sub-pixels with different color filters in order to prevent both optical and electrical cross talk. Each combination color pixel is enclosed on all sides by the hybrid deep trench isolation (h-DTI) structure.
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公开(公告)号:US10181490B2
公开(公告)日:2019-01-15
申请号:US15478085
申请日:2017-04-03
Applicant: OmniVision Technologies, Inc.
Inventor: Kazufumi Watanabe , Chih-Wei Hsiung , Dyson Tai , Lindsay Grant
IPC: H01L27/146 , H04N9/04 , H04N5/378
Abstract: A multi-color HDR image sensor includes at least a first combination color pixel with a first color filter and an adjacent second combination color pixel with a second color filter which is different from the first color filter, wherein each combination color pixel includes at least two sub-pixels having at least two adjacent photodiodes. Within each combination color pixel, there is a dielectric deep trench isolation (d-DTI) structure to isolate the two adjacent photodiodes of the two adjacent sub-pixels with same color filters in order to prevent the electrical cross talk. Between two adjacent combination color pixels with different color filters, there is a hybrid deep trench isolation (h-DTI) structure to isolate two adjacent photodiodes of two adjacent sub-pixels with different color filters in order to prevent both optical and electrical cross talk. Each combination color pixel is enclosed on all sides by the hybrid deep trench isolation (h-DTI) structure.
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公开(公告)号:US20180286897A1
公开(公告)日:2018-10-04
申请号:US15882925
申请日:2018-01-29
Applicant: OmniVision Technologies, Inc.
Inventor: Kazufumi Watanabe , Chih-Wei Hsiung , Dyson Hsin-Chih Tai , Lindsay Alexander Grant
IPC: H01L27/146 , H04N5/378 , H04N9/04
CPC classification number: H01L27/1463 , H01L27/14612 , H01L27/14621 , H01L27/14627 , H01L27/14645 , H01L27/14683 , H04N5/378 , H04N9/045
Abstract: A multi-color HDR image sensor includes at least a first combination color pixel with a first color filter and an adjacent second combination color pixel with a second color filter which is different from the first color filter, wherein each combination color pixel includes at least two sub-pixels having at least two adjacent photodiodes. Within each combination color pixel, there is a dielectric deep trench isolation (d-DTI) structure to isolate the two adjacent photodiodes of the two adjacent sub-pixels with same color filters in order to prevent the electrical cross talk. Between two adjacent combination color pixels with different color filters, there is a hybrid deep trench isolation (h-DTI) structure to isolate two adjacent photodiodes of two adjacent sub-pixels with different color filters in order to prevent both optical and electrical cross talk. Each combination color pixel is enclosed on all sides by the hybrid deep trench isolation (h-DTI) structure.
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公开(公告)号:US09923009B1
公开(公告)日:2018-03-20
申请号:US15342817
申请日:2016-11-03
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Chih-Wei Hsiung , Duli Mao , Vincent Venezia , Gang Chen , Dyson H. Tai
IPC: H01L27/146 , H01L21/762 , H01L21/306
CPC classification number: H01L27/1463 , H01L21/30604 , H01L21/76224 , H01L27/14621 , H01L27/14627 , H01L27/14629 , H01L27/14643 , H01L27/14685
Abstract: An image sensor includes a plurality of photodiodes disposed in a semiconductor material between a first side and a second side of the semiconductor material. The image sensor also includes a plurality of hybrid deep trench isolation (DTI) structures disposed in the semiconductor material, where individual photodiodes in the plurality of photodiodes are separated by individual hybrid DTI structures. The individual hybrid DTI structures include a shallow portion that extends from the first side towards the second side of the semiconductor material, and the shallow portion includes a dielectric region and a metal region such that at least part of the dielectric region is disposed between the semiconductor material and the metal region. The hybrid DTI structures also include a deep portion that extends from the shallow portion and is disposed between the shallow portion and the second side of the semiconductor material.
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公开(公告)号:US09735196B2
公开(公告)日:2017-08-15
申请号:US15286392
申请日:2016-10-05
Applicant: OMNIVISION TECHNOLOGIES, INC.
Inventor: Wu-Zang Yang , Chia-Ying Liu , Chih-Wei Hsiung , Chun-Yung Ai , Dyson H. Tai , Dominic Massetti
IPC: H01L27/146 , H01L49/02
CPC classification number: H01L27/14692 , H01L27/14607 , H01L27/14609 , H01L27/1461 , H01L27/14612 , H01L27/14629 , H01L27/14636 , H01L27/14638 , H01L27/1464 , H01L27/14685 , H01L27/14687 , H01L27/14689 , H01L28/55 , H01L28/56 , H01L28/90
Abstract: A method of fabricating a pixel array includes forming a transistor network along a frontside of a semiconductor substrate. A contact element is formed for every pixel in the pixel array that is electrically coupled to a transistor within the transistor network. An interconnect layer is formed upon the frontside to control the transistor network with a dielectric that covers the contact element. A cavity is formed in the interconnect layer. A conductive layer is formed along cavity walls of the cavity and a dielectric layer is formed over the conductive layer within the cavity. A photosensitive semiconductor material is deposited over the dielectric layer within the cavity. An electrode cavity is formed that extends into the contact element. The electrode cavity is at least partially filled with a conductive material to form an electrode. The electrode, the conductive layer, and the photosensitive semiconductor material form a photosensitive capacitor.
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