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    Pulse power system for extreme ultraviolet and x-ray sources
    31.
    发明授权
    Pulse power system for extreme ultraviolet and x-ray sources 有权
    用于极紫外和X射线源的脉冲电力系统

    公开(公告)号：US06744060B2

    公开(公告)日：2004-06-01

    申请号：US10120655

    申请日：2002-04-10

    申请人： Richard M. Ness ,  Igor V. Fomenkov ,  William N. Partlo

    发明人： Richard M. Ness ,  Igor V. Fomenkov ,  William N. Partlo

    IPC分类号： H05H104

    CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70916 ,  H05G2/005 ,  H05H1/06

    摘要： The present invention provides a pulse power system for extreme ultraviolet and x-ray light sources. The pulse power system produces electrical pulses of at least 12 J at pulse repetition rates of at least 2000 Hz. The system is extremely reliable and has design lifetime substantially in excess of 10 billion pulses. The system includes a charging capacitor bank, a fast charger for charging the charging capacitor bank in time periods of less than 0.5 seconds. A voltage control circuit is provided for controlling the charging voltage capacitor to within less than 0.5 percent of desired values. The system includes a magnetic compression circuit for creating, compressing in duration and amplifying voltage pulses. A trigger circuit discharges the charging capacitor bank into the pulse compression circuit so as to produce EUV or x-ray light pulses with a timing accuracy of less than 10 ns. In a preferred embodiment a pulse transformer with at least two one-turn primary windings and a single one turn secondary winding is included in the pulse compression circuit and increases the pulse voltage by at least a factor of 3. The pulse power system described herein is useful for providing high energy electrical pulses at repetition rates in excess of 2000 Hz for several high temperature discharge EUV or x-ray light sources. These include dense plasma focus devices, Z pinch devices, hollow cathode Z-pinch devices and capillary discharge devices. Inclusion of the pulse transformer is recommended when the system is used for dense plasma focus, and the two types of Z-pinch devices.

    摘要翻译： 本发明提供一种用于极紫外和X射线光源的脉冲电力系统。 脉冲功率系统产生至少为12 J的脉冲重复频率至少为2000 Hz的电脉冲。 该系统非常可靠，设计寿命基本上超过100亿个脉冲。 该系统包括充电电容器组，用于在小于0.5秒的时间段内对充电电容器组充电的快速充电器。 提供了一种电压控制电路，用于将充电电压电容器控制在所需值的0.5％以内。 该系统包括用于产生，压缩持续时间并放大电压脉冲的磁压缩电路。 触发电路将充电电容器组放电到脉冲压缩电路中，以便产生具有小于10ns的定时精度的EUV或X射线光脉冲。 在优选实施例中，具有至少两个单匝初级绕组和单个匝次级绕组的脉冲变压器包括在脉冲压缩电路中，并且将脉冲电压增加至少3倍。本文描述的脉冲功率系统是 对于几个高温放电EUV或X射线光源，以超过2000Hz的重复率提供高能电脉冲是有用的。 这些包括致密等离子体聚焦装置，Z夹紧装置，空心阴极Z夹点装置和毛细管放电装置。 当系统用于等离子体浓度较高时，推荐使用脉冲变压器，以及两种类型的Z夹式器件。

    Plasma focus light source with improved pulse power system
    32.
    发明授权
    Plasma focus light source with improved pulse power system 失效
    等离子聚焦光源具有改进的脉冲电源系统

    公开(公告)号：US06815700B2

    公开(公告)日：2004-11-09

    申请号：US10189824

    申请日：2002-07-03

    申请人： Stephan T. Melnychuk ,  William N. Partlo ,  Igor V. Fomenkov ,  I. Roger Oliver ,  Richard M. Ness ,  Norbert Bowering ,  Oleh Khodykin

    发明人： Stephan T. Melnychuk ,  William N. Partlo ,  Igor V. Fomenkov ,  I. Roger Oliver ,  Richard M. Ness ,  Norbert Bowering ,  Oleh Khodykin

    IPC分类号： H05H104

    CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70916 ,  H05G2/005 ,  H05H1/06

    摘要： The present invention provides a high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. Preferably the electrodes are configured co-axially. The central electrode is preferably hollow and the active gas is introduced out of the hollow electrode. This permits an optimization of the spectral line source and a separate optimization of the buffer gas. In preferred embodiments the central electrode is pulsed with a high negative electrical pulse so that the central electrode functions as a hollow cathode. Preferred embodiments present optimization of capacitance values, anode length and shape and preferred active gas delivery systems are disclosed. Preferred embodiments also include a pulse power system comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer. Special techniques are described for cooling the central electrode. In one example, water is circulated through the walls of the hollow electrode. In another example, a heat pipe cooling system is described for cooling the central electrode.

    摘要翻译： 本发明提供了一种高能量光子源。 一对等离子体夹紧电极位于真空室中。 该室包含工作气体，其包括贵重缓冲气体和被选择用于提供所需光谱线的活性气体。 脉冲电源在电压足够高的电压下提供电脉冲，以在电极之间产生放电，以在工作气体中产生非常高温度，高密度的等离子体夹持，从而在源或活性气体的光谱线处提供辐射。 优选地，电极被同轴配置。 中心电极优选是中空电极，并且活性气体从中空电极引出。 这允许对光谱线源进行优化和缓冲气体的单独优化。 在优选的实施例中，中心电极用高的负电脉冲脉冲，使得中心电极用作空心阴极。 本发明优选的实施例公开了电容值的优化，阳极长度和形状以及优选的活性气体输送系统。 优选实施例还包括脉冲功率系统，其包括充电电容器和包括脉冲变压器的磁压缩电路。 描述了用于冷却中心电极的特殊技术。 在一个实例中，水通过中空电极的壁循环。 在另一个实例中，描述了用于冷却中心电极的热管冷却系统。

    High pulse rate pulse power system with liquid cooling
    33.
    发明授权
    High pulse rate pulse power system with liquid cooling 有权
    高脉冲脉冲电源系统具有液体冷却功能

    公开(公告)号：US06240112B1

    公开(公告)日：2001-05-29

    申请号：US09470288

    申请日：1999-12-22

    申请人： William N. Partlo ,  Daniel L. Birx ,  Richard M. Ness ,  Daniel A. Rothweil ,  Paul C. Melcher ,  Brett D. Smith

    发明人： William N. Partlo ,  Daniel L. Birx ,  Richard M. Ness ,  Daniel A. Rothweil ,  Paul C. Melcher ,  Brett D. Smith

    IPC分类号： H01S304

    CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70483 ,  G03F7/70575 ,  H01S3/097 ,  H01S3/225 ,  H03K3/57 ,  H03K17/80

    摘要： A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 4000 charges per second. In a preferred embodiment capable of operating at pulse rates of 2000 to 4000 Hz or greater, water cooling of the saturable inductors is provided.

    摘要翻译： 用于以2000Hz或更高的速率提供受控高能电脉冲的高脉冲脉冲电源。 源包括一个包括充电电容器，固态开关和限流电感器的脉冲发生电路。 在脉冲发生电路中产生的脉冲在至少两个脉冲压缩电路中被压缩，并且升压脉冲变压器将峰值电压增加到至少12000伏特。 提供了一种非常快速的调节电源，用于在小于400微秒内为充电电容器充电，并且包括编程的处理器的脉冲控制系统以至少4000的速率控制充电电容器的充电，精度小于约百分之一 每秒收费 在能够以2000至4000Hz或更大的脉冲速率操作的优选实施例中，提供可饱和电感器的水冷却。

    High pulse rate pulse power system
    34.
    发明授权
    High pulse rate pulse power system 失效
    高脉冲脉冲电源系统

    公开(公告)号：US5936988A

    公开(公告)日：1999-08-10

    申请号：US118773

    申请日：1998-07-18

    申请人： William N. Partlo ,  Daniel L. Birx ,  Richard M. Ness ,  Daniel A. Rothweil ,  Paul C. Melcher ,  Brett D. Smith

    发明人： William N. Partlo ,  Daniel L. Birx ,  Richard M. Ness ,  Daniel A. Rothweil ,  Paul C. Melcher ,  Brett D. Smith

    IPC分类号： H01F30/00 ,  G03F7/20 ,  H01S3/097 ,  H01S3/225 ,  H03K3/57 ,  H03K17/80 ,  H01S3/00

    CPC分类号： G03F7/70483 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/097 ,  H03K17/80 ,  H03K3/57 ,  H01S3/225

    摘要： A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.

    摘要翻译： 用于以2000Hz或更高的速率提供受控高能电脉冲的高脉冲脉冲电源。 源包括一个包括充电电容器，固态开关和限流电感器的脉冲发生电路。 在脉冲发生电路中产生的脉冲在至少两个脉冲压缩电路中被压缩，并且升压脉冲变压器将峰值电压增加到至少12000伏特。 提供了一种非常快速的调节电源，用于在小于400微秒内对充电电容器充电，并且包括编程的处理器的脉冲控制系统以至少2000的速率控制充电电容器的充电至小于约百分之一的精度 每秒收费

    High voltage cable interlock circuit
    40.
    发明授权
    High voltage cable interlock circuit 失效
    高压电缆互锁电路

    公开(公告)号：US5949806A

    公开(公告)日：1999-09-07

    申请号：US100311

    申请日：1998-06-19

    申请人： Richard M. Ness ,  William N. Partlo ,  Richard L. Sandstrom

    发明人： Richard M. Ness ,  William N. Partlo ,  Richard L. Sandstrom

    IPC分类号： H03K3/53 ,  H01S3/00

    CPC分类号： H03K3/53

    摘要： A low level current travels from a source through the high voltage cable from the remote end to the local end of the cable in a pulse power circuit. The current is detected, and a signal is generated by a bias sensing circuit. If the low level current is not positively detected, no pulse is allowed to occur, preventing accidental damage and high voltage hazard. In some embodiments, the current is coupled to ground at the local end through an isolation inductor, commonly a secondary winding of a high voltage pulse transformer. The low level current then passes through a shunt resistor from ground to an input terminal of the source, thus completing the circuit and generating a voltage between the source input terminal and ground that confirms continuity of the circuit through the high voltage cable.

    摘要翻译： 低电平电流在脉冲电源电路中从源极通过高压电缆从远端到电缆的本端行进。 检测电流，并且由偏置感测电路产生信号。 如果没有检测到低电平电流，则不允许发生脉冲，防止意外损坏和高电压危险。 在一些实施例中，电流通过隔离电感器（通常是高压脉冲变压器的次级绕组）在本地端接地。 然后，低电平电流通过分流电阻器从地源到源极的输入端子，从而完成电路并且在源极输入端子和地之间产生电压，其通过高压电缆确认电路的连续性。