MEMS ELEMENT
    32.
    发明申请
    MEMS ELEMENT 有权
    MEMS元件

    公开(公告)号:US20120122314A1

    公开(公告)日:2012-05-17

    申请号:US13321116

    申请日:2010-05-26

    IPC分类号: H01L21/304

    摘要: A method of manufacturing an electronic device that comprises a microelectromechanical (MEMS) element, the method comprising the steps of: providing a material layer (34) on a first side of a substrate (32); providing a trench (40) in the material later (34); etching material from the trench (40) such as to also etch the substrate (32) from the first side of the substrate (32); grinding the substrate (32) from a second side of the substrate to expose the trench (40); and using the exposed trench (40) as an etch hole. The exposed trench (40) is used as an etch hole for releasing a portion of the material layer (34), for example a beam resonator (12), from the substrate (32). An input electrode (6), an output electrode (8), and a top electrode (10) are provided.

    摘要翻译: 一种制造包括微机电元件的电子器件的方法,所述方法包括以下步骤:在衬底(32)的第一侧上提供材料层(34); 在后面的材料(34)中提供沟槽(40); 从沟槽(40)蚀刻材料,以便也从衬底(32)的第一侧蚀刻衬底(32); 从衬底的第二侧研磨衬底(32)以露出沟槽(40); 并使用暴露的沟槽(40)作为蚀刻孔。 暴露的沟槽(40)用作用于从衬底(32)释放材料层(34)的一部分(例如光束谐振器(12))的蚀刻孔。 设置有输入电极(6),输出电极(8)和顶部电极(10)。

    Scanning Laser Projector
    33.
    发明申请
    Scanning Laser Projector 有权
    扫描激光投影机

    公开(公告)号:US20120105812A1

    公开(公告)日:2012-05-03

    申请号:US13289422

    申请日:2011-11-04

    IPC分类号: G03B21/14

    摘要: A scanning projector for projecting an image comprising multiple wavelength signals is disclosed. Embodiments of the present invention include a beam combiner comprising a planar lightwave circuit having a plurality of surface waveguides arranged to define a plurality of input ports, a mixing region, and an output port. Each input port receives a different wavelength signal and provides it to the mixing region. The mixing region combines the plurality of wavelength signals into a single composite output beam that is scanned over a region to create an image in a region.In some embodiments, the projector (1) interrogates image points in the region using a first wavelength signal to determine a measurand and (2) projects an image over the image points of the region using a second wavelength signal, wherein each image point is illuminated with the second wavelength signal based on a measurand at that image point.

    摘要翻译: 公开了一种用于投影包括多个波长信号的图像的扫描投影仪。 本发明的实施例包括一种光束组合器,其包括具有布置成限定多个输入端口的多个表面波导的平面光波电路,混合区域和输出端口。 每个输入端口接收不同的波长信号并将其提供给混合区域。 混合区域将多个波长信号组合成单个复合输出光束,该单个复合输出光束在区域上扫描以在区域中产生图像。 在一些实施例中,投影仪(1)使用第一波长信号询问该区域中的图像点以确定被测量,并且(2)使用第二波长信号在图像点上投影图像,其中每个图像点被照亮 基于在该图像点处的被测量的第二波长信号。

    SYSTEM-IN-PACKAGE PLATFORM FOR ELECTRONIC-MICROFLUIDIC DEVICES
    39.
    发明申请
    SYSTEM-IN-PACKAGE PLATFORM FOR ELECTRONIC-MICROFLUIDIC DEVICES 有权
    用于电子微流体装置的系统级封装平台

    公开(公告)号:US20090072332A1

    公开(公告)日:2009-03-19

    申请号:US12293284

    申请日:2007-03-07

    IPC分类号: H01L29/00 H01L21/00

    摘要: The present invention relates to an integrated electronic-micro fluidic device an integrated electronic-micro fluidic device, comprising a semiconductor substrate (106) on a first (122) support, an electronic circuit (102, 104) on a first semiconductor-substrate side of the semiconductor substrate, and a signal interface structure to an external device. The signal interface structure is arranged on the first semiconductor-substrate side and configured to receive electrical signals from the electronic circuit. A micro fluidic structure (126) is formed in the semiconductor substrate, and is configured to confine a fluid and to allow a flow of the fluid to and from the microfluidic structure only on a second semiconductor-substrate side that is opposite to the first semiconductor-substrate side and faces away form the first support. The electronic-micro fluidic device forms a flexible platform for the formation of various System-in-Package applications. It achieves a clear separation between electrical and wet-chemical interfaces. The claimed method for fabricating the device of the invention also allows a simple formation of thermally isolated microfluidic structures.

    摘要翻译: 本发明涉及集成电子微流体装置,其集成电子微流体装置包括在第一(122)支撑件上的半导体衬底(106),在第一半导体衬底侧上的电子电路(102,104) 的半导体衬底,以及到外部设备的信号接口结构。 信号接口结构布置在第一半导体衬底侧并被配置为从电子电路接收电信号。 微流体结构(126)形成在半导体衬底中,并且被配置为限制流体并且允许仅在与第一半导体相反的第二半导体衬底侧上流体流过微流体结构 底部侧面和背面形成第一支撑。 电子 - 微流体装置形成用于形成各种系统级封装应用的灵活平台。 它实现了电气和湿化学界面之间的清晰分离。 所要求的制造本发明装置的方法还允许简单地形成热分离的微流体结构。