公开(公告)号：US12139396B2

公开(公告)日：2024-11-12

申请号：US17384566

申请日：2021-07-23

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Francesco Rizzini ,  Carlo Valzasina ,  Gabriele Gattere

IPC: B81B3/00 ,  G01P1/00 ,  G01P15/125

Abstract: A microelectromechanical sensor device has a detection structure including: a substrate having a first surface; a mobile structure having an inertial mass suspended above the substrate at a first area of the first surface so as to perform at least one inertial movement with respect to the substrate; and a fixed structure having fixed electrodes suspended above the substrate at the first area and defining with the mobile structure a capacitive coupling to form at least one sensing capacitor. The device further includes a single monolithic mechanical-anchorage structure positioned at a second area of the first surface separate from the first area and coupled to the mobile structure, the fixed structure, and the substrate and connection elements that couple the mobile structure and the fixed structure mechanically to the single mechanical-anchorage structure.

公开(公告)号：US11965906B2

公开(公告)日：2024-04-23

申请号：US17866378

申请日：2022-07-15

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Jean Marie Darmanin ,  Francesco Rizzini ,  Carlo Valzasina

IPC: G01P15/125 ,  G01P1/00 ,  G01P15/08 ,  G01P15/13

CPC classification number: G01P15/125 ,  G01P1/00 ,  G01P15/0802 ,  G01P15/131 ,  G01P2015/0831

Abstract: A closed-loop microelectromechanical accelerometer includes a substrate of semiconductor material, an out-of-plane sensing mass and feedback electrodes. The out-of-plane sensing mass, of semiconductor material, has a first side facing the supporting body and a second side opposite to the first side. The out-of-plane sensing mass is also connected to the supporting body to oscillate around a non-barycentric fulcrum axis parallel to the first side and to the second side and perpendicular to an out-of-plane sensing axis. The feedback electrodes are capacitively coupled to the sensing mass and are configured to apply opposite electrostatic forces to the sensing mass.

公开(公告)号：US11933810B2

公开(公告)日：2024-03-19

申请号：US17930689

申请日：2022-09-08

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Valentina Zega ,  Gabriele Gattere ,  Attilio Alberto Frangi ,  Andrea Opreni ,  Manuel Riani

IPC: G01P15/097 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18

CPC classification number: G01P15/097 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18

Abstract: The present disclosure is directed to a detection structure for a vertical-axis resonant accelerometer. The detection structure includes an inertial mass suspended above a substrate and having a window provided therewithin and traversing it throughout a thickness thereof. The inertial mass is coupled to a main anchorage, arranged in the window and integral with the substrate, through a first and a second anchoring elastic element of a torsional type. The detection structure also includes at least a first resonant element having longitudinal extension, coupled between the first elastic element and a first constraint element arranged in the window. The first constraint element is suspended above the substrate, to which it is fixedly coupled through a first auxiliary anchoring element which extends below the first resonant element with longitudinal extension and is integrally coupled between the first constraint element and the main anchorage.

公开(公告)号：US11865581B2

公开(公告)日：2024-01-09

申请号：US16684289

申请日：2019-11-14

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Federico Vercesi ,  Giorgio Allegato

IPC: B06B1/06 ,  B81B7/00 ,  B81C1/00

CPC classification number: B06B1/0681 ,  B06B1/0666 ,  B81B7/0016 ,  B81C1/00825 ,  B81B2201/0264 ,  B81B2201/0271 ,  B81B2203/0127 ,  B81B2203/0163

Abstract: An ultrasonic MEMS acoustic transducer formed in a body of semiconductor material having first and second surfaces opposite to one another. A first cavity extends in the body and delimits at the bottom a sensitive portion, which extends between the first cavity and the first surface of the body. The sensitive portion houses a second cavity and forms a membrane that extends between the second cavity and the first surface of the body. An elastic supporting structure extends between the sensitive portion and the body and is suspended over the first cavity.

公开(公告)号：US11808574B2

公开(公告)日：2023-11-07

申请号：US17700275

申请日：2022-03-21

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5747 ,  G01C19/5712 ,  H01G5/011 ,  G01C25/00 ,  B81C1/00 ,  G01C19/58

CPC classification number: G01C19/5747 ,  B81C1/00158 ,  G01C19/5712 ,  G01C25/00 ,  H01G5/011 ,  G01C19/58 ,  Y10T29/49169

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

公开(公告)号：US11698388B2

公开(公告)日：2023-07-11

申请号：US17122793

申请日：2020-12-15

Applicant: STMicroelectronics S.r.l.

Inventor： Jean Marie Darmanin ,  Carlo Valzasina ,  Alessandro Tocchio ,  Gabriele Gattere

IPC: G01P15/125 ,  G01P15/00

CPC classification number: G01P15/125

Abstract: A micromechanical device includes a semiconductor body, a first mobile structure, an elastic assembly, coupled to the first mobile structure and to the semiconductor body and adapted to undergo deformation in a direction, and at least one abutment element. The elastic assembly is configured to enable an oscillation of the first mobile structure as a function of a force applied thereto. The first mobile structure, the abutment element and the elastic assembly are arranged with respect to one another in such a way that: when the force is lower than a force threshold, the elastic assembly operates with a first elastic constant; and when the force is greater than the threshold force, then the first mobile structure is in contact with the abutment element, and a deformation of the elastic assembly is generated, which operates with a second elastic constant different from the first elastic constant.

公开(公告)号：US11519932B2

公开(公告)日：2022-12-06

申请号：US17192465

申请日：2021-03-04

Applicant: STMicroelectronics S.r.l.

Inventor： Francesco Rizzini ,  Gabriele Gattere ,  Sarah Zerbini

IPC: G01P15/03 ,  B81B3/00 ,  G01P15/18 ,  G01P15/08 ,  G01P15/125

Abstract: A MEMS inertial sensor includes a supporting structure and an inertial structure. The inertial structure includes at least one inertial mass, an elastic structure, and a stopper structure. The elastic structure is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass along a first direction, when the supporting structure is subjected to an acceleration parallel to the first direction. The stopper structure is fixed with respect to the supporting structure and includes at least one primary and one secondary stopper elements. If the acceleration exceeds a first threshold value, the inertial mass abuts against the primary stopper element and subsequently rotates about an axis of rotation defined by the primary stopper element. If the acceleration exceeds a second threshold value, rotation of the inertial mass terminates when the inertial mass abuts against the secondary stopper element.

公开(公告)号：US20210285981A1

公开(公告)日：2021-09-16

申请号：US17192465

申请日：2021-03-04

Applicant: STMicroelectronics S.r.l.

Inventor： Francesco Rizzini ,  Gabriele Gattere ,  Sarah Zerbini

IPC: G01P15/03 ,  B81B3/00

Abstract: A MEMS inertial sensor includes a supporting structure and an inertial structure. The inertial structure includes at least one inertial mass, an elastic structure, and a stopper structure. The elastic structure is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass in a direction parallel to a first direction, when the supporting structure is subjected to an acceleration parallel to the first direction. The stopper structure is fixed with respect to the supporting structure and includes at least one primary stopper element and one secondary stopper element. If the acceleration exceeds a first threshold value, the inertial mass abuts against the primary stopper element and subsequently rotates about an axis of rotation defined by the primary stopper element. If the acceleration exceeds a second threshold value, rotation of the inertial mass terminates when the inertial mass abuts against the secondary stopper element.

公开(公告)号：US10812090B2

公开(公告)日：2020-10-20

申请号：US16681469

申请日：2019-11-12

Applicant: STMicroelectronics S.r.l.

Inventor： Giorgio Mussi ,  Giacomo Langfelder ,  Carlo Valzasina ,  Gabriele Gattere

IPC: H03L7/099 ,  H03K3/353 ,  H03K5/00 ,  H03L7/18

Abstract: In an embodiment, a clock generator has a variable-modulus frequency divider that receives a high-frequency clock signal and outputs a divided clock signal having a frequency controlled by a modulus-control signal generated by a temperature-compensation circuit. A jitter filter is coupled to the output of the variable-modulus frequency divider and to the temperature-compensation circuit and generates a compensated clock signal having switching edges that are delayed, with respect to the divided clock signal, by a time correlated to a quantization-error signal.

公开(公告)号：US10771042B2

公开(公告)日：2020-09-08

申请号：US15976611

申请日：2018-05-10

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Lorenzo Corso ,  Alessandro Tocchio ,  Carlo Valzasina

IPC: H03H9/02 ,  H03H9/24 ,  H03H3/007 ,  H03H9/46 ,  H03H9/05

Abstract: A microelectromechanical device having a mobile structure including mobile arms formed from a composite material and having a fixed structure including fixed arms capacitively coupled to the mobile arms. The composite material includes core regions of insulating material and a silicon coating.