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公开(公告)号:US12243618B2
公开(公告)日:2025-03-04
申请号:US18164274
申请日:2023-02-03
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Meng-Sheng Chang , Yao-Jen Yang , Yih Wang , Fu-An Wu
IPC: G11C7/10 , G11C5/06 , G11C8/08 , G11C17/16 , G11C17/18 , H01L23/522 , H01L23/525 , H10B20/25
Abstract: A method includes: coupling a first gate to a first word line through a first gate via, wherein the first gate extends along a first direction; coupling the first gate to a second word line through a second gate via, wherein each of the first gate, a second gate, the first gate via and the second gate via is disposed on a first active area which extends along the second direction, wherein the second gate extends along the first direction and is separated from the first gate along a second direction; coupling the first active area to a first bit line through a first conductive via; and aligning the first gate via, the second gate via and the a first conductive via with each other along the second direction.
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公开(公告)号:US20240274160A1
公开(公告)日:2024-08-15
申请号:US18644516
申请日:2024-04-24
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Meng-Han Lin , Chenchen Jacob Wang , Yi-Ching Liu , Han-Jong Chia , Sai-Hooi Yeong , Yu-Ming Lin , Yih Wang
CPC classification number: G11C5/063 , H01L29/24 , H01L29/78391 , H01L29/7869 , H10B41/27 , H10B51/00 , H10B51/10 , H10B51/20
Abstract: Routing arrangements for 3D memory arrays and methods of forming the same are disclosed. In an embodiment, a memory array includes a ferroelectric (FE) material contacting a first word line; an oxide semiconductor (OS) layer contacting a source line and a bit line, the FE material being disposed between the OS layer and the first word line; a dielectric material contacting the FE material, the FE material being between the dielectric material and the first word line; an inter-metal dielectric (IMD) over the first word line; a first contact extending through the IMD to the first word line, the first contact being electrically coupled to the first word line; a second contact extending through the dielectric material and the FE material; and a first conductive line electrically coupling the first contact to the second contact.
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公开(公告)号:US20220310132A1
公开(公告)日:2022-09-29
申请号:US17842256
申请日:2022-06-16
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Meng-Han Lin , Chenchen Jacob Wang , Yi-Ching Liu , Han-Jong Chia , Sai-Hooi Yeong , Yu-Ming Lin , Yih Wang
IPC: G11C5/06 , H01L27/11587 , H01L29/78 , H01L27/11597 , H01L29/24 , H01L27/11585 , H01L27/11556 , H01L29/786
Abstract: Routing arrangements for 3D memory arrays and methods of forming the same are disclosed. In an embodiment, a memory array includes a ferroelectric (FE) material contacting a first word line; an oxide semiconductor (OS) layer contacting a source line and a bit line, the FE material being disposed between the OS layer and the first word line; a dielectric material contacting the FE material, the FE material being between the dielectric material and the first word line; an inter-metal dielectric (IMD) over the first word line; a first contact extending through the IMD to the first word line, the first contact being electrically coupled to the first word line; a second contact extending through the dielectric material and the FE material; and a first conductive line electrically coupling the first contact to the second contact.
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公开(公告)号:US11423960B2
公开(公告)日:2022-08-23
申请号:US17085398
申请日:2020-10-30
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Meng-Sheng Chang , Chia-En Huang , Yi-Ching Liu , Yih Wang
Abstract: A memory device is disclosed, including a first switch and multiple first memory cells that are arranged in a first column, a second switch and multiple second memory cells that are arranged in a second column, a first data line and a second data line. The first data line is coupled to the first memory cells and the second memory cells. The second data line is coupled connected to the first memory cells and the second memory cells. The first switch transmits a data signal in the first data line in response to a control signal. The second switch outputs the data signal received from the second data line in response to the control signal.
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公开(公告)号:US20210408234A1
公开(公告)日:2021-12-30
申请号:US16916951
申请日:2020-06-30
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Yu-Xuan Huang , Chia-En Huang , Ching-Wei Tsai , Kuan-Lun Cheng , Yih Wang
IPC: H01L29/06 , H01L27/088 , H01L27/112 , H01L21/8234 , H01L29/423 , H01L29/78 , H01L29/66
Abstract: The present disclosure is directed to methods for the formation of high-voltage nano-sheet transistors and low-voltage gate-all-around transistors on a common substrate. The method includes forming a fin structure with first and second nano-sheet layers on the substrate. The method also includes forming a gate structure having a first dielectric and a first gate electrode on the fin structure and removing portions of the fin structure not covered by the gate structure. The method further includes partially etching exposed surfaces of the first nano-sheet layers to form recessed portions of the first nano-sheet layers in the fin structure and forming a spacer structure on the recessed portions. In addition, the method includes replacing the first gate electrode with a second dielectric and a second gate electrode, and forming an epitaxial structure abutting the fin structure.
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公开(公告)号:US11183261B2
公开(公告)日:2021-11-23
申请号:US16836928
申请日:2020-04-01
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hiroki Noguchi , Ku-Feng Lin , Yih Wang
Abstract: A testing device for memory includes a memory array and a test apparatus. The test apparatus includes a controller and a pattern generator. The pattern generator generates a background data, a first pattern data, and a second pattern data. The controller sets up the background data to a to-be-tested memory sub-array of the memory sub-arrays, performs a first memory test operation with the to-be-tested memory sub-array according to the first pattern data for detecting an occurrence of a hardware failure of the to-be-tested memory sub-array is occurred during the first memory test operation. The controller performs a second memory test operation with the to-be-tested memory sub-array according to the second pattern data for detecting the occurrence of the hardware failure of the to-be-tested memory sub-array during the second memory test operation in response to the hardware failure of the to-be-tested memory sub-array is not occurred during the first memory test operation.
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公开(公告)号:US20210271479A1
公开(公告)日:2021-09-02
申请号:US16923107
申请日:2020-07-08
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hiroki Noguchi , Yih Wang
Abstract: A memory device includes a memory array with at least one memory macro, a flag, and a controller. The controller is coupled to the memory array. Each bit of data stored in the at least one memory macro is presented as a first bit type or a second bit type. The controller is configured to select one of a first situation mode and a second situation mode as a selected situation mode according to a first retention time of the first bit type and a second retention time of the second bit type. The first situation mode is that a number of bits with the first bit type in data is larger than a number of bit with the second bit type in data, and the second situation mode is that the number of bit with the first bit type in data is not larger than the number of bits with the second bit type in data. In a write operation of the at least one memory macro, the controller determines that an input data is meet the selected situation mode or not. In response to the input data is meet the selected situation mode, the controller disables the flag and writes the input data into the at least one memory macro. In response to the input data is not meet the selected situation mode, the controller enables the flag, inverts the input data, and writes an inverted input data into the at least one memory macro.
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公开(公告)号:US20210271417A1
公开(公告)日:2021-09-02
申请号:US16985240
申请日:2020-08-05
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hiroki Noguchi , Shih-Lien Linus Lu , Yu-Der Chih , Yih Wang
Abstract: A memory device including a memory array with a plurality of memory macros, a power supplying circuit, and a controller is provided. The power supplying circuit is coupled to the memory array. The controller is coupled to the memory array. The power supplying circuit is configured to provide power to perform write operations to a number of the memory macros at the same time. The number of the memory macros for the write operations performed at the same time is not higher than a maximum number of the memory macros. The controller obtains the maximum number of the memory macros for the write operations performed at the same time by the power supplying circuit. The controller re-arranges a schedule for a sequence of the write operations of the memory macros to generate a re-arranged schedule. The maximum number is taken as a threshold value. In the re-arranged schedule, a number of part of the memory macros for the write operations performed at the same time is equal to or less then the threshold value.
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公开(公告)号:US20210098035A1
公开(公告)日:2021-04-01
申请号:US16876138
申请日:2020-05-18
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jui-Che Tsai , Chia-En Huang , Yu-Hao Hsu , Yih Wang
Abstract: In an exemplary embodiment, the disclosure provides a memory circuit which includes a dual port memory cell for storing a binary value accessed through a first port and a second port, a first WL switch connected to the dual port memory cell and controlled by a first WL voltage, a second WL switch connected to the dual port memory cell and controlled by a second WL voltage, a BL connected to the first WL switch for accessing the memory cell through the first port and having a first BL voltage, a second BL connected to the second WL switch for accessing the memory cell through the second port and having a second BL voltage, a BL selection circuit connected to the second WL switch for selecting the second BL, and a BL voltage pull down circuit connected to the BL selection circuit and the second WL switch.
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