Abstract:
There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.
Abstract:
The tiltable-body apparatus including a frame member, a tiltable body, and a pair of torsion springs having a twisting longitudinal axis. The torsion springs are disposed along the twisting longitudinal-axis opposingly with the tiltable body being interposed, support the tiltable body flexibly and rotatably about the twisting longitudinal axis relative to the frame member, and include a plurality of planar portions, compliant directions of which intersect each other when viewed along a direction of the twisting longitudinal axis. A center of gravity of the tiltable body is positioned on the twisting longitudinal axis of the torsion springs.
Abstract:
A liquid discharge head includes a pair of substrates mutually fixed in lamination, a plurality of liquid flow paths arranged on the bonded faces of the substrates, the leading end of the plural liquid flow paths being communicated with a plurality of discharge ports, a plurality of heat generating members arranged on at least one of the substrates corresponding to each of the liquid flow paths and a movable member having in the liquid flow path the free end thereof on the discharge port side, and a region between the heat generating member and the movable member, where liquid exists. In the liquid discharge head, a bubble is created by enabling thermal energy generated by the heat generating members to act upon the liquid, and the bubble is controlled by the movable member to discharge liquid in the liquid flow paths from the discharge ports to the outside. Further, all of the movable members, members becoming side walls of liquid flow paths, members supporting the movable members, and members supporting the walls of liquid flow paths are formed by materials containing silicon and the side walls of liquid flow paths are formed by patterning the material containing silicon formed on the surface of one of the pair of substrates in the liquid discharge head.
Abstract:
A method for manufacturing a liquid discharge head, which is provided with a movable film supporting member for supporting a movable film separating a first liquid flow path and a bubble creation region completely, and that is displaceable by the bubble created on the heat generating element. The method comprises the steps of forming the movable film supporting member, forming on the surface of the substrate becoming the movable film supporting member the recessed portion corresponding to the movable region of the movable film, providing a material becoming the movable film on the entire surface of the substrate having the recessed portion provided therefor, removing the portion including the movable region on the substrate from the reverse side of the substrate having the movable film provided therefor and forming a slacked configuration on the portion of the movable region of the movable film.
Abstract:
An optical prove for detecting or irradiating evanescent light is manufactured by forming a film having a regulated film thickness on a substrate, then forming a recess from the rear surface of the substrate, and forming a through hole in the film from the side of the recess by etching. The obtained optical probe has a micro-aperture at the tip of the through hole and usually, a plurality of optical probes each having a micro-aperture of uniform profile are formed on a single substrate. In the recess, light-receiving or light-irradiating means may be provided.
Abstract:
In a display device of the type wherein a display state is selected by rotation of polarized colored balls, the colored balls are formed from a paraelectric material, and the charged state of each colored ball is provided by an electret-forming treatment due to charge-injection to a minute colored ball per se of a paraelectric material or a film of a paraelectric material coating a minute ball. As a result, a colored ball having an increased charge can be produced stably from an inexpensive material.
Abstract:
A probe for detecting minute physical behavior comprises a lever member, particularly in the form of a cantilever, formed of a monocrystalline silicon layer and a tip in the form of one-end-supported beam which is bowed and formed upon the lever member. The probe is manufactured by forming a film of a material with low density and high elasticity on the silicon layer of an SOI substrate, then oxidizing part of the silicon layer and removing the oxidized portion to form a tip with the material as a so-called bird's beak, and finally the SOI substrate is worked to form the cantilever shape of the lever member. The probe can be used for an information recording/reproducing device with good traceability even in high speed scanning over a recording medium.
Abstract:
According to this invention, when a program requiring an inseparable operation is to be executed, prior to its program processing, an instruction fetch counter setting instruction is executed by an instruction fetch counter setting unit, and a value indicated by the instruction fetch counter setting instruction, i.e., an instruction count required for the program processing, is set in an instruction fetch counter. The instruction fetch counter is counted down by a count down unit every time an instruction is fetched. When an interrupt is generated, an interrupt control unit refers to the instruction fetch counter. When the reference value is "1" or more, the interrupt is inhibited until the value is set to be "0."
Abstract:
A micro channel element includes a semiconductor substrate and a channel. The micro channel element is produced as follows. A mask having an opening with a desired pattern is formed on a surface of the semiconductor substrate. The semiconductor substrate on which the mask is formed is dipped in a solution of hydrofluoric acid or a solution mixture of hydrofluoric acid and ethyl alcohol. A cathode is arranged near the surface of the substrate dipped in the solution. An anode is connected to the other surface of the semiconductor substrate. A porosity is imparted to a portion of the surface of the semiconductor substrate which corresponds to the opening of the mask by applying a voltage across the cathode and anode. A high-temperature treatment is performed for the semiconductor substrate removed from the solution to increase the pore size and extend the branches of pores of the porous portion on the surface of the semiconductor substrate, thereby forming the micro channel.
Abstract:
According to this invention, when a program requiring an inseparable operation is to be executed, prior to its program processing, an instruction fetch counter setting instruction is executed by an instruction fetch counter setting unit, and a value indicated by the instruction fetch counter setting instruction, i.e., an instruction count required for the program processing, is set in an instruction fetch counter. The instruction fetch counter is counted down by a count down unit every time an instruction is fetched. When an interrupt is generated, an interrupt control unit refers to the instruction fetch counter. When the reference value is "1" or more, the interrupt is inhibited until the value is set to be "0."