公开(公告)号：US20070256703A1

公开(公告)日：2007-11-08

申请号：US11416124

申请日：2006-05-03

申请人： Yoshiaki Ikuta

发明人： Yoshiaki Ikuta

IPC分类号： B08B3/12 ,  G21G5/00 ,  G02B3/00 ,  B08B6/00

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B7/0042 ,  C03C15/00 ,  C03C23/0005 ,  C03C23/003 ,  C03C23/0075

摘要： A method for removing a contaminant from a surface of a glass substrate, which comprises a step of irradiating a portion of the glass substrate surface where the contaminant is present, with at least one type of high energy beams selected from the group consisting of laser beams having a wavelength of at most 350 nm, X-rays, electron beams, neutron beams and γ-rays, to induce a stress due to a structural change of constituting material of the glass substrate at the portion irradiated with the high energy beams, and a step of wet-etching the glass substrate surface after the irradiation with the high energy beams.

摘要翻译： 一种用于从玻璃基板的表面除去污染物的方法，其包括以下步骤：从存在污染物的玻璃基板表面的一部分照射至少一种类型的选自激光束的高能束 具有至多350nm的波长，X射线，电子束，中子束和γ射线，以在由高能束照射的部分处的玻璃基板的构成材料的结构变化引起应力，以及 在用高能量束照射之后对玻璃基板表面进行湿蚀刻的步骤。

公开(公告)号：US20070077499A1

公开(公告)日：2007-04-05

申请号：US11240437

申请日：2005-10-03

申请人： Yoshiaki Ikuta ,  David Krick ,  Hsing Ma

发明人： Yoshiaki Ikuta ,  David Krick ,  Hsing Ma

IPC分类号： C23C14/32 ,  C23C14/00 ,  B05D5/06 ,  G03F1/00

CPC分类号： C23C14/225 ,  B82Y10/00 ,  B82Y40/00 ,  C23C14/046 ,  C23C14/46 ,  G03F1/24 ,  G03F1/68

摘要： A method for depositing, by ion beam sputtering, a multilayer reflective coating of a reflective mask blank for EUV lithography on a substrate having a concave defect formed thereon, characterized in that the method comprises carrying out ion beam sputtering so that an absolute value of an angle α formed between a normal line of a substrate and sputtered particles landing on the substrate is maintained so as to satisfy the formula of 35°≦α≦80° while rotating the substrate about a central axis thereof.

摘要翻译： 一种用于在其上形成有凹陷缺陷的衬底上沉积用于EUV光刻的反射掩模板的多层反射涂层的方法，其特征在于，所述方法包括进行离子束溅射，使得绝对值为 保持基板的法线和落在基板上的溅射颗粒之间形成的角度α，以便在围绕其中心轴旋转基板时满足35°<=α<= 80°的公式。

公开(公告)号：US06576578B1

公开(公告)日：2003-06-10

申请号：US09762679

申请日：2001-03-01

申请人： Yoshiaki Ikuta ,  Shinya Kikugawa ,  Akio Masui ,  Noriaki Shimodaira ,  Shuhei Yoshizawa

发明人： Yoshiaki Ikuta ,  Shinya Kikugawa ,  Akio Masui ,  Noriaki Shimodaira ,  Shuhei Yoshizawa

IPC分类号： C03C306

CPC分类号： C03B19/1415 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2207/30 ,  C03B2207/32 ,  C03B2207/36 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/54 ,  Y02P40/57

摘要： A synthetic quartz glass to be used for light with a wavelength of from 150 to 200 nm, wherein the OH group concentration is at most 100 ppm, the hydrogen molecule concentration is at most 1×1017 molecules/cm3, reduction type defects are at most 1×1015 defects/cm3, and the relation between &Dgr;k163 and &Dgr;k190, as between before and after irradiation of ultraviolet rays, satisfies 0

摘要翻译： 用于波长为150〜200nm的光的合成石英玻璃，OH基浓度为100ppm以下，氢分子浓度为1×10 17分子/ cm 3以下，还原型缺陷为1×1015以下的缺陷 / cm3，紫外线照射前后的DELTAk163与DELTAk190之间的关系满足0

公开(公告)号：US4919207A

公开(公告)日：1990-04-24

申请号：US354457

申请日：1989-05-22

申请人： Yoshiaki Ikuta ,  Masayuki Moriwaki ,  Masato Kaneko

发明人： Yoshiaki Ikuta ,  Masayuki Moriwaki ,  Masato Kaneko

IPC分类号： E21B43/00 ,  E21B43/12 ,  E21B43/40

CPC分类号： E21B43/40 ,  E21B43/121

摘要： The present invention is directed to a method for drawing up a special crude oil which is characterized by comprising the steps of extracting and separating a gas oil from a crude oil containing a great deal of wax or a high-viscosity crude oil which has been drawn up through an oil well, and drawing up the crude oil containing a great deal of wax or the high-viscosity crude oil, while injecting a part of the thus separated gas oil into the oil well. For the extraction and separation of the gas oil, a recycle oil is employed.

摘要翻译： 本发明涉及一种制备特殊原油的方法，其特征在于包括以下步骤：从含有大量蜡或高粘度原油的原油中提取和分离瓦斯油 通过油井，并且将含有大量蜡或高粘度原油的原油装入，同时将一部分如此分离的瓦斯油注入油井中。 为了提取和分离瓦斯油，使用循环油。

公开(公告)号：US08993201B2

公开(公告)日：2015-03-31

申请号：US13478532

申请日：2012-05-23

申请人： Masaki Mikami ,  Mitsuhiko Komakine ,  Yoshiaki Ikuta

发明人： Masaki Mikami ,  Mitsuhiko Komakine ,  Yoshiaki Ikuta

IPC分类号： G03F1/24 ,  B82Y10/00 ,  B82Y40/00 ,  G02B5/08 ,  G03F7/20

CPC分类号： G03F1/24 ,  B82Y10/00 ,  B82Y40/00 ,  G02B5/0891 ,  G03F7/70316 ,  G03F7/70958 ,  G03F7/70983

摘要： Provided are an EUV mask blank in which deterioration in reflectivity due to oxidation of a Ru protective layer is prevented, a reflective layer-equipped substrate to be used for producing the EUV mask blank, and a process for producing the reflective layer-equipped substrate. A reflective layer-equipped substrate for EUV lithography comprising a substrate, and a reflective layer for reflecting EUV light and a protective layer for protecting the reflective layer, formed in this order on the substrate, wherein the reflective layer is a Mo/Si multilayer reflective film, the protective layer is a Ru layer or a Ru compound layer, and an intermediate layer containing from 0.5 to 25 at % of nitrogen and from 75 to 99.5 at % of Si is formed between the reflective layer and the protective layer.

摘要翻译： 提供了防止由于Ru保护层的氧化引起的反射率的劣化的EUV掩模坯料，用于制造EUV掩模坯料的反射层的衬底以及用于制造具有反射层的衬底的工艺。 一种用于EUV光刻的反射层衬底，包括衬底，以及用于反射EUV光的反射层和用于保护反射层的保护层，其依次形成在衬底上，其中反射层是Mo / Si多层反射 膜，保护层是Ru层或Ru化合物层，并且在反射层和保护层之间形成含有0.5至25原子％的氮和75至99.5原子％的Si的中间层。

公开(公告)号：US08518613B2

公开(公告)日：2013-08-27

申请号：US13618503

申请日：2012-09-14

申请人： Hiroshi Nakanishi ,  Yoshiaki Ikuta

发明人： Hiroshi Nakanishi ,  Yoshiaki Ikuta

IPC分类号： G03F1/60 ,  B24B1/00 ,  C03C17/00 ,  C03C19/00

CPC分类号： G03F1/24 ,  G03F1/60 ,  G03F7/70958

摘要： The present invention relates to a method for producing an optical member base material for EUVL, comprising performing the following in this order to obtain an optical member base material for EUVL: a preliminary-polishing step of preliminarily polishing a film forming surface and a back surface of the film forming surface of a glass substrate; a measuring step of measuring a total thickness distribution and a flatness of the glass substrate; and a corrective-polishing step of locally polishing only the back surface of the glass substrate depending on the measurement result of the measuring step.

摘要翻译： 本发明涉及一种EUVL用光学元件基材的制造方法，其特征在于，依次进行以下操作以获得EUVL用的光学元件基材：预成型表面和背面的预研磨步骤 的玻璃基板的成膜表面; 测量玻璃基板的总厚度分布和平坦度的测量步骤; 以及根据测量步骤的测量结果仅对玻璃基板的背面进行局部抛光的校正抛光步骤。

公开(公告)号：US08251197B2

公开(公告)日：2012-08-28

申请号：US12727355

申请日：2010-03-19

申请人： Hisashi Takeuchi ,  Yoshiaki Ikuta ,  Masao Sakamoto ,  Hirokazu Goto ,  Masaru Hayasako

发明人： Hisashi Takeuchi ,  Yoshiaki Ikuta ,  Masao Sakamoto ,  Hirokazu Goto ,  Masaru Hayasako

IPC分类号： G07F7/04

CPC分类号： G07D11/0066 ,  G06Q20/382 ,  G06Q20/40 ,  G07D11/009

摘要： A printed note deposit machine, comprises: a user recognition unit identifying a user with an authenticated person; an inlet unit serving as a receiving teller in which printed notes are deposited; a dispensing unit receiving printed notes deposited in the inlet unit to dispense them in sequence; an identifying unit classifying the dispensed printed notes into four categories of authenticated notes, counterfeit notes, unidentifiable notes, and rejected notes, and identified them with the four categories; a temporary money holder temporarily storing the authenticated, counterfeit, and unidentified notes but the rejected ones therein; a plurality of storage cells storing the printed notes after they are temporarily stored in the previous stage; and a rejection unit accumulating the printed notes identified with the rejected notes by the identifying unit to return them to the user. A printed note deposit system, comprises: a plurality of the printed note deposit machines; a database apparatus installed in a central office and receiving transaction data from the memory of each of the printed note deposit machines to accumulate the transaction data; and a trace unit matching the transaction data accumulated in the database apparatus with transaction data on the detected counterfeit or unidentified notes to track down a user of the unauthenticated notes.

摘要翻译： 一种印刷笔记存款机，包括：用户识别单元，用于识别具有认证人的用户; 入口单元，用作存放打印纸的接收柜员; 分配单元，其接收沉积在入口单元中以便依次分配它们的印记; 识别单元将分发的印刷纸分类为四类认证纸币，假币，不可识别纸币和拒收纸币，并用四类进行鉴定; 临时存款人暂时存放经认证的，伪造的和不明的票据，但其中的被拒绝的票据; 多个存储单元在其被暂时存储在前一级之后存储打印的笔记; 以及拒绝单元，累积由所述识别单元识别的被拒绝的笔记的打印笔记，以将其返回给用户。 一种印刷纸币存款系统，包括：多个印刷纸币存款机; 数据库装置，安装在中心局，并从每个打印的笔记存放机的存储器接收交易数据，以累积交易数据; 以及跟踪单元，其与在数据库装置中累积的交易数据相匹配的检测到的假冒或未识别的笔记上的交易数据跟踪未认证笔记的用户。

公开(公告)号：US08053557B2

公开(公告)日：2011-11-08

申请号：US12304350

申请日：2007-06-15

申请人： Yasuharu Nishimura ,  Yoshiaki Ikuta ,  Shuichi Nakatsuru

发明人： Yasuharu Nishimura ,  Yoshiaki Ikuta ,  Shuichi Nakatsuru

IPC分类号： A61K38/08

CPC分类号： C07K7/06 ,  A61K38/00 ,  A61K39/0011 ,  A61K2039/5154 ,  C07K14/47 ,  C07K16/18

摘要： It is an objective of the present invention to identify SPARC protein-derived peptides that are able to induce human killer T cells and helper T cells having cytotoxic activity to tumors, and to provide a means for carrying out a tumor immunotherapy of patients with various types of cancers overexpressing SPARC. The present invention provides a peptide of any of the following: (A) a peptide which consists of the amino acid sequence as shown in any one of SEQ ID NOS: 1 to 3; or (B) a peptide which consists of an amino acid sequence comprising a substitution or addition of one or several amino acids with respect to the peptide consisting of the amino acid sequence as shown in any one of SEQ ID NOS: 1 to 3, and which has capacity to induce cytotoxic (killer) T cells.

摘要翻译： 本发明的目的是鉴定能够诱导人类杀伤T细胞和对肿瘤具有细胞毒性活性的辅助性T细胞的SPARC蛋白衍生肽，并提供用于对各种类型的患者进行肿瘤免疫治疗的手段 的过表达SPARC的癌症。 本发明提供以下任一项的肽：（A）由SEQ ID NO：1〜3中任一项所示的氨基酸序列构成的肽; 或（B）由包含相对于由SEQ ID NO：1至3中任一项所示的氨基酸序列组成的肽取代或添加一个或数个氨基酸的氨基酸序列组成的肽，以及 其具有诱导细胞毒性（杀伤）T细胞的能力。

公开(公告)号：US20110132394A1

公开(公告)日：2011-06-09

申请号：US13027923

申请日：2011-02-15

申请人： Abbas Rastegar ,  Yoshiaki Ikuta

发明人： Abbas Rastegar ,  Yoshiaki Ikuta

IPC分类号： B08B3/10

CPC分类号： B08B3/10 ,  B05D3/062 ,  B08B7/0057 ,  H01L21/67051 ,  H01L21/67115

摘要： The present invention provides an apparatus and a method for an ultraviolet cleaning tool. The cleaning tool includes ultraviolet source spaced apart from a surface having contaminant particles. The ultraviolet source can create ozone between the surface and the ultraviolet source which breaks the chemical bonds between particles and the surface. The apparatus includes a gas feed which introduces a gas to aid the chemical bond. Additionally, the gas feed can introduce a gas to remove the particles from the surface.

摘要翻译： 本发明提供一种紫外线清洁工具的装置和方法。 清洁工具包括与具有污染物颗粒的表面间隔开的紫外线源。 紫外线源可以在表面和紫外线源之间产生臭氧，从而破坏了颗粒与表面之间的化学键。 该装置包括引入气体以辅助化学键的气体进料。 此外，气体进料可以引入气体以从表面除去颗粒。

公开(公告)号：US07592063B2

公开(公告)日：2009-09-22

申请号：US11514997

申请日：2006-09-05

申请人： Yoshiaki Ikuta ,  Shinya Kikugawa

发明人： Yoshiaki Ikuta ,  Shinya Kikugawa

IPC分类号： B32B3/00 ,  B32B17/06 ,  B32B18/00 ,  B32B3/16 ,  C03C3/112 ,  C03C3/06 ,  C03C10/16 ,  G01N23/00

CPC分类号： C03B19/1453 ,  C03B2201/03 ,  C03B2201/12 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  Y10T428/166 ,  Y10T428/249969 ,  Y10T428/252

摘要： For a substrate having fine convexoconcave patterns on its surface, the dimensions of the convexoconcave patterns in a vertical direction of a quartz glass substrate are controlled to be uniform with extreme accuracy and over the entire substrate surface. The quartz glass substrate is made to have a fictive temperature distribution of at most 40° C. and a halogen concentration of less than 400 ppm, and the etching rate of the surface of the quartz glass substrate is made uniform, whereby the dimensions of the convexoconcave patterns in a vertical direction of the quartz glass substrate are controlled to be uniform with good accuracy and over the entire substrate surface.

摘要翻译： 对于在其表面上具有细凹凸图案的基板，石英玻璃基板的垂直方向上的凸凹图案的尺寸被控制为以极高的精度和整个基板表面均匀。 使石英玻璃基板具有至多40℃的假想温度分布和小于400ppm的卤素浓度，并且使石英玻璃基板的表面的蚀刻速率均匀，由此， 在石英玻璃基板的垂直方向上的凸凹图案被控制为具有良好的精度和整个基板表面的均匀。