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    Organic vapor jet print head with orthogonal delivery and exhaust channels
    31.
    发明申请
    Organic vapor jet print head with orthogonal delivery and exhaust channels 审中-公开

    公开(公告)号：US20190232325A1

    公开(公告)日：2019-08-01

    申请号：US16254998

    申请日：2019-01-23

    Applicant: Universal Display Corporation

    Inventor： Gregory MCGRAW ,  William E. QUINN ,  Matthew KING

    IPC: B05C5/02 ,  G03F7/00

    CPC classification number: B05C5/027 ,  B05C5/0212 ,  G03F7/0015 ,  H01L51/0002 ,  H01L51/5004 ,  H01L2251/552

    Abstract: Embodiments of the disclosed subject matter provide a device that may have a first depositor that includes one or more delivery apertures surrounded by one or more exhaust apertures, where the one or more delivery apertures and the one or more exhaust apertures are enclosed within a perimeter of a boss that protrudes from a substrate-facing side of the one or more delivery apertures. The delivery channels for the one or more delivery apertures and exhaust channels for the one or more exhaust apertures may be routed orthogonally to each other. The one or more delivery apertures may be configured to permit jets of delivery gas pass through a lower surface of the first depositor. The lower surface of the first depositor may include the one or more exhaust apertures to remove surplus vapor from a delivery zone. Embodiments may also provide a method of forming a print head.

    HYBRID BARRIER LAYER FOR SUBSTRATES AND ELECTRONIC DEVICES
    33.
    发明申请
    HYBRID BARRIER LAYER FOR SUBSTRATES AND ELECTRONIC DEVICES 审中-公开
    用于衬底和电子器件的混合障碍层

    公开(公告)号：US20160118621A1

    公开(公告)日：2016-04-28

    申请号：US14893436

    申请日：2014-06-21

    Applicant: UNIVERSAL DISPLAY CORPORATION

    Inventor： Siddharth HARIKRISHNA MOHAN ,  William E. QUINN ,  Ruiqing MA

    IPC: H01L51/52

    CPC classification number: H01L51/5253 ,  H01L23/296 ,  H01L2251/5338 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: Systems and techniques for depositing multiple different organic precursors, with reactive gases, such as by plasma polymerization, are provided. Using multiple precursor materials may provide for a much larger process regime, thus enabling for precise tuning of barrier properties and stress of the films. A barrier film as disclosed herein may be used on variety of substrates and electronic devices to reduce the permeation of moisture and other atmospheric contaminants.

    Abstract translation: 提供了通过等离子体聚合沉积多种不同有机前体与反应性气体的系统和技术。 使用多种前体材料可以提供更大的工艺制度，从而能够精确调节膜的阻挡性能和应力。 本文公开的阻挡膜可以用于各种基底和电子装置上，以减少水分和其它大气污染物的渗透。

    HERMETICALLY SEALED ISOLATED OLED PIXELS
    35.
    发明申请
    HERMETICALLY SEALED ISOLATED OLED PIXELS 审中-公开
    密封隔离OLED像素

    公开(公告)号：US20150280170A1

    公开(公告)日：2015-10-01

    申请号：US14661335

    申请日：2015-03-18

    Applicant: UNIVERSAL DISPLAY CORPORATION

    Inventor： Siddharth HARIKRISHNA MOHAN ,  William E. QUINN ,  Ruiqing MA ,  Emory KRALL ,  Luke WALSKI

    IPC: H01L51/52 ,  H01L51/56 ,  H01L51/00 ,  H01L27/32 ,  H01L51/50

    CPC classification number: H01L51/5246 ,  H01L27/3246 ,  H01L27/3258 ,  H01L27/326 ,  H01L51/0097 ,  H01L51/5012 ,  H01L51/5206 ,  H01L51/5209 ,  H01L51/5221 ,  H01L51/5225 ,  H01L51/5253 ,  H01L51/56 ,  H01L2251/5338

    Abstract: A novel thin film encapsulated OLED panel architecture and a method for making the panels with improved shelf life is disclosed. The OLED panel consists of a plurality of OLED pixels; each OLED pixel is individually hermetically sealed and isolated from its neighboring pixels. The organic stack of the OLED pixel is contained within its own hermetically sealed structure, achieved by making the structure on a barrier coated substrate and using a first barrier material as the grid and a second barrier for encapsulating the entire OLED pixel. The first barrier material provides the edge seal while the second barrier disposed over the pixel provides protection from top down moisture diffusion. By isolating and hermetically sealing individual pixels; any damage such as moisture and oxygen ingress due to defects or particles, delamination, cracking etc. can be effectively contained within the pixel thereby protecting other pixels in the panel.

    Abstract translation: 公开了一种新颖的薄膜封装的OLED面板结构和用于制造具有改善的保质期的面板的方法。 OLED面板由多个OLED像素组成; 每个OLED像素被独立地密封并与其相邻像素隔离。 OLED像素的有机堆叠被包含在其自身的密封结构内，通过将阻挡涂层的基底上的结构和使用第一阻挡材料作为栅格并且用于封装整个OLED像素的第二屏障来实现。 第一阻挡材料提供边缘密封，而设置在像素上的第二阻挡件提供防止顶部水分扩散的保护。 通过隔离和气密密封各个像素; 任何由于缺陷或颗粒，分层，破裂等引起的水分和氧气进入的损害都可以被有效地包含在像素内，从而保护面板中的其它像素。

    MODULAR CONFINED ORGANIC PRINT HEAD AND SYSTEM
    39.
    发明申请
    MODULAR CONFINED ORGANIC PRINT HEAD AND SYSTEM 有权

    公开(公告)号：US20210355575A1

    公开(公告)日：2021-11-18

    申请号：US17389694

    申请日：2021-07-30

    Applicant: Universal Display Corporation

    Inventor： William E. QUINN ,  Gregory MCGRAW ,  Matthew KING ,  Gregg KOTTAS

    IPC: C23C14/22 ,  C23C14/12 ,  C23C14/24

    Abstract: Embodiments of the disclosed subject matter provide a vapor distribution manifold that ejects organic vapor laden gas into a chamber and withdraws chamber gas, where vapor ejected from the manifold is incident on, and condenses onto, a deposition surface within the chamber that moves relative to one or more print heads in a direction orthogonal to a platen normal and a linear extent of the manifold. The volumetric flow of gas withdrawn by the manifold from the chamber may be greater than the volumetric flow of gas injected into the chamber by the manifold. The net outflow of gas from the chamber through the manifold may prevent organic vapor from diffusing beyond the extent of the gap between the manifold and deposition surface. The manifold may be configured so that long axes of delivery and exhaust apertures are perpendicular to a print direction.

    ORGANIC VAPOR JET MICRO-PRINT HEAD WITH MULTIPLE GAS DISTRIBUTION ORIFICE PLATES
    40.
    发明申请
    ORGANIC VAPOR JET MICRO-PRINT HEAD WITH MULTIPLE GAS DISTRIBUTION ORIFICE PLATES 有权

    公开(公告)号：US20210343942A1

    公开(公告)日：2021-11-04

    申请号：US17370050

    申请日：2021-07-08

    Applicant: Universal Display Corporation

    Inventor： Gregory MCGRAW ,  William E. QUINN ,  Roman KOROTKOV

    IPC: H01L51/00 ,  B05C5/02 ,  H01L51/56 ,  B41J2/14

    Abstract: Embodiments of the disclosed subject matter provide a micronozzle array including a linear array having a plurality of depositors connected in series, where a first depositor of the plurality of depositors may border a second depositor on a least one side boundary. The micronozzle array may include plurality of orifice arrays, where a width of each orifice in the plurality of orifice arrays is 20 μm or less in a minor axis of its cross section to flow, to regulate flow through a delivery gas distribution channel. The micronozzle array may include a plurality of exhaust distribution channels, where the delivery gas distribution channel and at least one of the plurality of exhaust distribution channels have separate fluid communication with each of the plurality of depositors.

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