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    BLOCK COPOLYMER-BASED MASK STRUCTURES FOR THE GROWTH OF NANOPATTERNED POLYMER BRUSHES
    31.
    发明申请
    BLOCK COPOLYMER-BASED MASK STRUCTURES FOR THE GROWTH OF NANOPATTERNED POLYMER BRUSHES 有权
    用于纳米聚合物刷的生长的基于嵌段共聚物的掩模结构

    公开(公告)号：US20140272673A1

    公开(公告)日：2014-09-18

    申请号：US13800178

    申请日：2013-03-13

    Applicant: Wisconsin Alumni Research Foundation

    Inventor： Padma Gopalan ,  Daniel Patrick Sweat ,  Myungwoong Kim ,  Eungnak Han

    IPC: G03F7/20 ,  G03F1/50

    CPC classification number: G03F1/50 ,  B05D5/00 ,  B05D2506/00 ,  G03F7/0002 ,  G03F7/20

    Abstract: Block copolymer-based mask structures for the growth of patterned polymer brushes via surface-initiated atom transfer radical polymerization (SI-ATRP) are provided. Also provided are methods of making the mask structures and methods of using the mask structures to grow patterned polymer brushes. The mask structures comprise a substrate having a surface, a neutral layer comprising a crosslinked copolymer film disposed on the surface of the substrate and a domain-forming block copolymer film disposed on the crosslinked copolymer film. The crosslinked copolymer film comprises crosslinked random copolymer chains having pendant alkyl halide functional groups that are capable of acting as ATRP initiating sites.

    Abstract translation: 提供了通过表面起始原子转移自由基聚合（SI-ATRP）生长图案化聚合物刷的基于嵌段共聚物的掩模结构。 还提供了制造掩模结构的方法和使用掩模结构来生长图案化聚合物刷的方法。 掩模结构包括具有表面的基材，包含设置在基材表​​面上的交联共聚物膜的中性层和设置在交联共聚物膜上的区域形成嵌段共聚物膜。 交联共聚物膜包括具有能够作为ATRP起始位点的烷基卤官能团侧基的交联无规共聚物链。

    Two-dimensional carbon nanotube liquid crystal films for wafer-scale electronics
    33.
    发明授权
    Two-dimensional carbon nanotube liquid crystal films for wafer-scale electronics 有权

    公开(公告)号：US11631814B2

    公开(公告)日：2023-04-18

    申请号：US17376295

    申请日：2021-07-15

    Applicant: Wisconsin Alumni Research Foundation

    Inventor： Michael Scott Arnold ,  Katherine Rose Jinkins ,  Padma Gopalan

    IPC: H01L51/00 ,  H01L51/05

    Abstract: Methods of forming films of aligned carbon nanotubes on a substrate surface are provided. The films are deposited from carbon nanotubes that have been concentrated and confined at a two-dimensional liquid/liquid interface. The liquid/liquid interface is formed by a dispersion of organic material-coated carbon nanotubes that flows over the surface of an immiscible liquid within a flow channel. Within the interface, the carbon nanotubes self-organize via liquid crystal phenomena and globally align along the liquid flow direction. By translating the interface across the substrate, large-area, wafer-scale films of aligned carbon nanotubes can be deposited on the surface of the substrate in a continuous and scalable process.

    Crosslinked random copolymer films for block copolymer domain orientation
    40.
    发明授权
    Crosslinked random copolymer films for block copolymer domain orientation 有权
    用于嵌段共聚物结构取向的交联无规共聚物膜

    公开(公告)号：US09115255B2

    公开(公告)日：2015-08-25

    申请号：US13828803

    申请日：2013-03-14

    Applicant: Wisconsin Alumni Research Foundation

    Inventor： Padma Gopalan ,  Eungnak Han ,  Myungwoong Kim

    IPC: C03C15/00 ,  C03C25/68 ,  C23F1/00 ,  C08J7/04 ,  G03F7/00 ,  B41N1/14

    CPC classification number: C08J7/04 ,  B41N1/14 ,  C08J2325/08 ,  C08J2453/00 ,  G03F7/0002

    Abstract: Surface-modifying layers, including neutral layers for vertical domain-forming block copolymers of styrene and methyl methacrylate are provided. Also provided are self-assembled block copolymer structures incorporating the surface modifying layers, methods of fabricating such structures and methods of using the structures in BCP lithography applications. The surface-modifying layers comprise a crosslinked copolymer film, wherein the crosslinked copolymers are random copolymers polymerized from styrene monomers and/or (meth)acrylate monomers and crosslinkable epoxy group-functionalized monomers. The crosslinked copolymer films are characterized by a high content of the crosslinkable epoxy group-functionalized monomer.

    Abstract translation: 提供表面改性层，包括苯乙烯和甲基丙烯酸甲酯的垂直结构形成嵌段共聚物的中性层。 还提供了包含表面改性层的自组装嵌段共聚物结构，制造这种结构的方法以及在BCP光刻应用中使用该结构的方法。 表面改性层包括交联共聚物膜，其中交联共聚物是由苯乙烯单体和/或（甲基）丙烯酸酯单体和可交联的环氧基官能化单体聚合的无规共聚物。 交联共聚物膜的特征在于交联性环氧基官能化单体的含量高。

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