摘要:
A method and apparatus for forming a semiconductor device. A semiconductor substrate is implanted with dopants. The substrate is subjected to a cleaning process employing electrically neutral nitrogen and fluorine radicals to produce an oxygen-free surface having dangling bonds. Before any further exposure to oxidizing gases, the substrate is annealed by thermal treatment to activate and distribute the dopants. A gate oxide layer is formed over the annealed surface. The apparatus performs all such treatments without breaking vacuum.
摘要:
Systems and methods are disclosed for non-invasively measuring blood glucose levels in a biological sample based on spectral data. A variety of techniques are disclosed for improving signal-to-noise ratio in the acquisition of spectral data and calculating attenuance of light attributable to blood in a sample. Disclosed techniques include (1) using a standard deviation operation in conjunction with the logarithm function, (2) using a normalization factor, (3) using a ratio factor, (4) accounting for the effect of temperature on various system components such as resistors, and (5) accounting for dark current in a light detector by performing a calibration.
摘要:
Embodiments of the invention relate to a light illumination funnel. The funnel includes a first opening positioned to receive an incoming light source, a second opening positioned opposite the first opening and with a diameter smaller than the first opening and inner reflective walls, in contact with the first opening and second opening. The funnel has a half angle of less than 25 degrees. Embodiments also relate to a light collection funnel and an apparatus utilizing both a light illumination funnel and light collection funnel.
摘要:
The invention concerns high sensitivity light scattering detection and its application to evaporative light scattering detection in liquid chromatography. The exemplary embodiment includes a detection cell to accept particles suspended in a gas stream and permit a polarized light beam to pass through a trajectory of the particles and gas stream. A sample light detector is disposed to detect light scattered in the detection cell. A light trap accepts the polarized beam after it passes through the detection cell. The light trap includes an elongated housing through which the polarized beam passes, and light absorptive material within the elongated housing. An absorptive filter is aligned such that the angle of incidence of the light beam upon the filter approximates Brewster's angle and the electric field vector of the beam is aligned with the plane of incidence between the beam and the filter. Other embodiments of the invention provide increased light collection. Embodiments of the invention include temperature-controlled entrance and exit ports that control particle trajectory. Embodiments of the invention include a reference cell disposed between a detection cell and a light trap, and the reference cell includes lensing and a spherical mirror to direct light toward a reference light detector. The reference light detector provides a reference signal that may be used with noise cancellation circuitry, operating in either voltage or current mode, to reduce light source noise in the sample signal.
摘要:
An appparatus for confining plasma within a process zone of a substrate processing chamber. In one aspect, an apparatus comprises an annular member having an upper mounting surface, an inner confinement wall, and an outer confinement wall. The apparatus is disposed on or otherwise connected to a gas distribution assembly of the processing chamber to prevent plasma edge effects on the surface of a substrate. The apparatus provides a plasma choke aperture that reduces the volume of the process zone around the periphery of the substrate thereby eliminating uneven deposition of material around the edge of the substrate.
摘要:
A composite structure comprising a layer of zeolite having a high silica to alumina ratio supported on a support layer acts as a separator in a redox flow battery. The zeolite can be either supported on a rigid substrate, such as alumina, or a flexible substrate, such as a polymeric film. The polymeric film, in particular, can be an ion exchange membrane such as Nafion. The zeolite layer with a high silica to aluminum ratio provides a long-lasting separator for redox flow batteries.
摘要:
A Fourier Transfer Infrared (FTIR) spectrophotometer having reduced baseline noise. The system and method include internal or external optical adapters having a moveable beamsplitter for splitting the source light beam into a reference beam and a sample beam, and may include a variable bandpass filter, variable preamplifier and reversed biased photodiodes.
摘要:
A Fourier Transfer Infrared (FTIR) spectrophotometer having reduced baseline noise. The system and method include internal or external optical adapters having a moveable beamsplitter for splitting the source light beam into a reference beam and a sample beam, and may include a variable bandpass filter, variable preamplifier and reversed biased photodiodes.
摘要:
An apparatus for concentrating light and associated method of use is disclosed. This apparatus includes a first outer wall having an anterior end, a posterior end, an inner surface and an outer surface, the inner surface defining an interior portion, the interior portion having an anterior end and a posterior end, and a light source disposed within the interior portion. The first outer wall has an opening in the posterior end, the opening having an opening diameter. The interior portion has a substantially frusto-conical shape and has a cross-sectional diameter at the opening equal to the opening diameter and a second cross-sectional diameter near the anterior end that is less than the opening diameter and the inner surface is photo-reflective. The light passes through a sample through an aperture and a collector lens or a second outer wall. A transmission diffraction grating may be utilized.
摘要:
A focused droplet nebulizer of the invention produces substantially uniform droplets of a predetermined size. Droplets are pushed out through a small outlet orifice by the contraction of a chamber. The droplets can be carried on a substantially non-divergent path in a drift tube. A piezo membrane micro pump acts in response to an electrical control signal to force a droplet out of the outlet orifice. The nebulizer can operate at frequencies permitting a stream of individual droplets of the predetermined size to be sent along the substantially non-divergent path in the drift tube in a preferred embodiment ELSD device.