DOPANT ACTIVATION ANNEAL TO ACHIEVE LESS DOPANT DIFFUSION (BETTER USJ PROFILE) AND HIGHER ACTIVATION PERCENTAGE
    31.
    发明申请
    DOPANT ACTIVATION ANNEAL TO ACHIEVE LESS DOPANT DIFFUSION (BETTER USJ PROFILE) AND HIGHER ACTIVATION PERCENTAGE 失效
    狄更斯激活肛门以达到更少的瞳孔扩张(更好的USJ型材)和更高的激活百分比

    公开(公告)号:US20100087052A1

    公开(公告)日:2010-04-08

    申请号:US12247448

    申请日:2008-10-08

    申请人: Zhi Xu

    发明人: Zhi Xu

    IPC分类号: H01L21/425 H01L21/00

    摘要: A method and apparatus for forming a semiconductor device. A semiconductor substrate is implanted with dopants. The substrate is subjected to a cleaning process employing electrically neutral nitrogen and fluorine radicals to produce an oxygen-free surface having dangling bonds. Before any further exposure to oxidizing gases, the substrate is annealed by thermal treatment to activate and distribute the dopants. A gate oxide layer is formed over the annealed surface. The apparatus performs all such treatments without breaking vacuum.

    摘要翻译: 一种形成半导体器件的方法和装置。 用掺杂剂注入半导体衬底。 对衬底进行采用电中性氮和氟自由基的清洗工艺,以产生具有悬挂键的无氧表面。 在任何进一步暴露于氧化气体之前,通过热处理对衬底进行退火以激活和分布掺杂剂。 在退火表面上形成栅氧化层。 该设备执行所有这样的处理而不破坏真空。

    Method and System for Non-Invasive Optical Blood Glucose Detection Utilizing Spectral Data Analysis
    32.
    发明申请
    Method and System for Non-Invasive Optical Blood Glucose Detection Utilizing Spectral Data Analysis 有权
    利用光谱数据分析的非侵入性光学血糖检测方法与系统

    公开(公告)号:US20090292186A1

    公开(公告)日:2009-11-26

    申请号:US12425535

    申请日:2009-04-17

    申请人: Zhi Xu

    发明人: Zhi Xu

    IPC分类号: A61B5/1455

    摘要: Systems and methods are disclosed for non-invasively measuring blood glucose levels in a biological sample based on spectral data. A variety of techniques are disclosed for improving signal-to-noise ratio in the acquisition of spectral data and calculating attenuance of light attributable to blood in a sample. Disclosed techniques include (1) using a standard deviation operation in conjunction with the logarithm function, (2) using a normalization factor, (3) using a ratio factor, (4) accounting for the effect of temperature on various system components such as resistors, and (5) accounting for dark current in a light detector by performing a calibration.

    摘要翻译: 公开了基于光谱数据非生物地测量生物样品中的血糖水平的系统和方法。 公开了用于在获取光谱数据和计算归因于样品中的血液的光的衰减的改善信噪比的各种技术。 所公开的技术包括(1)结合对数函数使用标准偏差运算,(2)使用归一化因子,(3)使用比率因子,(4)考虑温度对各种系统组件如电阻器 ,(5)通过进行校准来计算光检测器中的暗电流。

    OPTICAL DEVICE COMPONENTS
    33.
    发明申请
    OPTICAL DEVICE COMPONENTS 有权
    光学器件组件

    公开(公告)号:US20090079964A1

    公开(公告)日:2009-03-26

    申请号:US12209807

    申请日:2008-09-12

    申请人: Zhi Xu

    发明人: Zhi Xu

    IPC分类号: G01N33/48 F21V1/00 F21V7/00

    摘要: Embodiments of the invention relate to a light illumination funnel. The funnel includes a first opening positioned to receive an incoming light source, a second opening positioned opposite the first opening and with a diameter smaller than the first opening and inner reflective walls, in contact with the first opening and second opening. The funnel has a half angle of less than 25 degrees. Embodiments also relate to a light collection funnel and an apparatus utilizing both a light illumination funnel and light collection funnel.

    摘要翻译: 本发明的实施例涉及一种光照射漏斗。 漏斗包括定位成接收入射光源的第一开口,与第一开口相对定位并且具有小于第一开口和内反射壁的直径的第二开口,与第一开口和第二开口接触。 漏斗的半角小于25度。 实施例还涉及光收集漏斗和利用光照漏斗和光收集漏斗两者的装置。

    Light scattering detector
    34.
    发明授权
    Light scattering detector 失效
    光散射检测器

    公开(公告)号:US07460234B2

    公开(公告)日:2008-12-02

    申请号:US11853682

    申请日:2007-09-11

    IPC分类号: G01N21/00

    摘要: The invention concerns high sensitivity light scattering detection and its application to evaporative light scattering detection in liquid chromatography. The exemplary embodiment includes a detection cell to accept particles suspended in a gas stream and permit a polarized light beam to pass through a trajectory of the particles and gas stream. A sample light detector is disposed to detect light scattered in the detection cell. A light trap accepts the polarized beam after it passes through the detection cell. The light trap includes an elongated housing through which the polarized beam passes, and light absorptive material within the elongated housing. An absorptive filter is aligned such that the angle of incidence of the light beam upon the filter approximates Brewster's angle and the electric field vector of the beam is aligned with the plane of incidence between the beam and the filter. Other embodiments of the invention provide increased light collection. Embodiments of the invention include temperature-controlled entrance and exit ports that control particle trajectory. Embodiments of the invention include a reference cell disposed between a detection cell and a light trap, and the reference cell includes lensing and a spherical mirror to direct light toward a reference light detector. The reference light detector provides a reference signal that may be used with noise cancellation circuitry, operating in either voltage or current mode, to reduce light source noise in the sample signal.

    摘要翻译: 本发明涉及高灵敏度光散射检测及其在液相色谱中的蒸发光散射检测中的应用。 该示例性实施例包括接收悬浮在气流中的颗粒并允许偏振光束通过颗粒和气流的轨迹的检测单元。 设置采样光检测器以检测在检测单元中散射的光。 光阱在其通过检测单元之后接受偏振光束。 光阱包括通过偏振光束通过的细长壳体和细长壳体内的光吸收材料。 对准吸收滤光器,使得光束在滤光片上的入射角近似于布鲁斯特角,并且光束的电场矢量与光束与滤光片之间的入射平面对准。 本发明的其它实施例提供增加的光收集。 本发明的实施例包括控制粒子轨迹的温度控制的入口和出口。 本发明的实施例包括设置在检测单元和光阱之间的参考单元,并且参考单元包括透镜和球面镜,以将光引向参考光检测器。 参考光检测器提供可用于噪声消除电路的参考信号,其以电压或电流模式工作,以减少采样信号中的光源噪声。

    Reduction of plasma edge effect on plasma enhanced CVD processes
    35.
    发明授权
    Reduction of plasma edge effect on plasma enhanced CVD processes 有权
    降低等离子体增强CVD工艺的等离子体边缘效应

    公开(公告)号:US06553932B2

    公开(公告)日:2003-04-29

    申请号:US09853397

    申请日:2001-05-11

    IPC分类号: C23C1600

    摘要: An appparatus for confining plasma within a process zone of a substrate processing chamber. In one aspect, an apparatus comprises an annular member having an upper mounting surface, an inner confinement wall, and an outer confinement wall. The apparatus is disposed on or otherwise connected to a gas distribution assembly of the processing chamber to prevent plasma edge effects on the surface of a substrate. The apparatus provides a plasma choke aperture that reduces the volume of the process zone around the periphery of the substrate thereby eliminating uneven deposition of material around the edge of the substrate.

    摘要翻译: 一种用于将等离子体限制在衬底处理室的处理区内的设备。 一方面,一种装置包括具有上安装表面,内限制壁和外约束壁的环形构件。 该设备设置在处理室的气体分配组件上或以其他方式连接到处理室的气体分配组件,以防止等离子体对基板表面的影响。 该装置提供等离子体扼流圈,其减小了基板周边周围处理区的体积,从而消除了材料在基板边缘周围的不均匀沉积。

    External/internal optical adapter for FTIR spectrophotometer
    37.
    发明授权
    External/internal optical adapter for FTIR spectrophotometer 有权
    用于FTIR分光光度计的外部/内部光学适配器

    公开(公告)号:US08766191B2

    公开(公告)日:2014-07-01

    申请号:US12898879

    申请日:2010-10-06

    申请人: Zhi Xu

    发明人: Zhi Xu

    IPC分类号: G01J5/02

    CPC分类号: G01J3/4535

    摘要: A Fourier Transfer Infrared (FTIR) spectrophotometer having reduced baseline noise. The system and method include internal or external optical adapters having a moveable beamsplitter for splitting the source light beam into a reference beam and a sample beam, and may include a variable bandpass filter, variable preamplifier and reversed biased photodiodes.

    摘要翻译: 具有降低的基线噪声的傅立叶转移红外(FTIR)分光光度计。 该系统和方法包括具有可移动分束器的内部或外部光学适配器,用于将源光束分成参考光束和采样光束,并且可以包括可变带通滤波器,可变前置放大器和反向偏置光电二极管。

    EXTERNAL/INTERNAL OPTICAL ADAPTER WITH BIASED PHOTODIODES FOR FTIR SPECTROPHOTOMETER
    38.
    发明申请
    EXTERNAL/INTERNAL OPTICAL ADAPTER WITH BIASED PHOTODIODES FOR FTIR SPECTROPHOTOMETER 有权
    外置/内置光学适配器,具有用于FTIR分光光度计的偏光照相

    公开(公告)号:US20110079719A1

    公开(公告)日:2011-04-07

    申请号:US12899024

    申请日:2010-10-06

    申请人: Zhi Xu

    发明人: Zhi Xu

    IPC分类号: G01J5/02 G01J3/427

    CPC分类号: G01J3/4535

    摘要: A Fourier Transfer Infrared (FTIR) spectrophotometer having reduced baseline noise. The system and method include internal or external optical adapters having a moveable beamsplitter for splitting the source light beam into a reference beam and a sample beam, and may include a variable bandpass filter, variable preamplifier and reversed biased photodiodes.

    摘要翻译: 具有降低的基线噪声的傅立叶转移红外(FTIR)分光光度计。 该系统和方法包括具有可移动分束器的内部或外部光学适配器,用于将源光束分成参考光束和采样光束,并且可以包括可变带通滤波器,可变前置放大器和反向偏置光电二极管。

    OPTICAL SPECTROSCOPY DEVICE FOR NON-INVASIVE BLOOD GLUCOSE DETECTION AND ASSOCIATED METHOD OF USE
    39.
    发明申请
    OPTICAL SPECTROSCOPY DEVICE FOR NON-INVASIVE BLOOD GLUCOSE DETECTION AND ASSOCIATED METHOD OF USE 有权
    用于非侵入性血液葡萄糖检测的光学光谱仪和相关的使用方法

    公开(公告)号:US20100252721A1

    公开(公告)日:2010-10-07

    申请号:US12729886

    申请日:2010-03-23

    申请人: Zhi Xu

    发明人: Zhi Xu

    IPC分类号: G01J3/51 F21V7/04 F21V13/04

    摘要: An apparatus for concentrating light and associated method of use is disclosed. This apparatus includes a first outer wall having an anterior end, a posterior end, an inner surface and an outer surface, the inner surface defining an interior portion, the interior portion having an anterior end and a posterior end, and a light source disposed within the interior portion. The first outer wall has an opening in the posterior end, the opening having an opening diameter. The interior portion has a substantially frusto-conical shape and has a cross-sectional diameter at the opening equal to the opening diameter and a second cross-sectional diameter near the anterior end that is less than the opening diameter and the inner surface is photo-reflective. The light passes through a sample through an aperture and a collector lens or a second outer wall. A transmission diffraction grating may be utilized.

    摘要翻译: 公开了一种用于集中光的装置和相关联的使用方法。 该装置包括具有前端,后端,内表面和外表面的第一外壁,内表面限定内部部分,内部具有前端和后端,以及光源, 内部部分。 第一外壁在后端具有开口,开口具有开口直径。 内部具有基本上截头圆锥形的形状,并且在开口处的截面直径等于开口直径,并且在前端附近的第二截面直径小于开口直径, 反光。 光通过孔和收集透镜或第二外壁穿过样品。 可以使用透射衍射光栅。

    Focused droplet nebulizer for evaporative light scattering detector
    40.
    发明授权
    Focused droplet nebulizer for evaporative light scattering detector 有权
    用于蒸发光散射检测器的聚焦液滴雾化器

    公开(公告)号:US07760355B2

    公开(公告)日:2010-07-20

    申请号:US11191272

    申请日:2005-07-27

    IPC分类号: G01N15/02

    摘要: A focused droplet nebulizer of the invention produces substantially uniform droplets of a predetermined size. Droplets are pushed out through a small outlet orifice by the contraction of a chamber. The droplets can be carried on a substantially non-divergent path in a drift tube. A piezo membrane micro pump acts in response to an electrical control signal to force a droplet out of the outlet orifice. The nebulizer can operate at frequencies permitting a stream of individual droplets of the predetermined size to be sent along the substantially non-divergent path in the drift tube in a preferred embodiment ELSD device.

    摘要翻译: 本发明的聚焦液滴雾化器产生预定尺寸的基本均匀的液滴。 通过室的收缩将液滴从小出口孔推出。 液滴可以在漂移管中的基本上不发散的路径上承载。 压电膜微泵响应于电控制信号而起作用以迫使液滴离开出口孔。 在优选实施例的ELSD装置中,雾化器可以以允许预定尺寸的各个液滴流沿漂移管中的基本非发散路径发送的频率工作。