METHOD OF FABRICATING A SEMICONDUCTOR DEVICE
    41.
    发明申请
    METHOD OF FABRICATING A SEMICONDUCTOR DEVICE 有权
    制造半导体器件的方法

    公开(公告)号:US20070148906A1

    公开(公告)日:2007-06-28

    申请号:US11616820

    申请日:2006-12-27

    申请人: Bong Jun Kim

    发明人: Bong Jun Kim

    IPC分类号: H01L21/76

    摘要: Embodiments relate to a semiconductor device and a method for fabricating a semiconductor device. In embodiments, the method may include forming a gate dielectric layer on an active region of a semiconductor substrate defined by an isolation region to form a gate conductive layer pattern, etching the isolation region of the semiconductor substrate where the gate conductive layer pattern is formed, to form an isolation trench, forming a polyoxide layer on the gate conductive layer pattern and a sidewall oxide layer in the trench by carrying out an oxidation process, forming a spacer nitride layer on the polyoxide layer and a liner nitride layer on the sidewall oxide layer by carrying out a nitride layer forming process, and forming a dielectric layer on an entire surface of the resultant structure to fill the trench.

    摘要翻译: 实施例涉及半导体器件和制造半导体器件的方法。 在实施例中,该方法可以包括在由隔离区域限定的半导体衬底的有源区上形成栅极电介质层以形成栅极导电层图案,蚀刻形成栅极导电层图案的半导体衬底的隔离区域, 以形成隔离沟槽,通过进行氧化工艺在栅极导电层图案和沟槽中的侧壁氧化物层形成多环氧化物层,在多孔层上形成间隔氮化物层,在侧壁氧化物层上形成衬里氮化物层 通过进行氮化物层形成工艺,并在所得结构的整个表面上形成电介质层以填充沟槽。

    Three-terminal metal-insulator transition switch, switching system including the same, and method of controlling metal-insulator transition of the same
    43.
    发明授权
    Three-terminal metal-insulator transition switch, switching system including the same, and method of controlling metal-insulator transition of the same 有权
    三端子金属绝缘体转换开关,包括相同的开关系统及其控制金属 - 绝缘体转换的方法

    公开(公告)号:US08536554B2

    公开(公告)日:2013-09-17

    申请号:US12599248

    申请日:2008-05-07

    IPC分类号: H01L21/02

    CPC分类号: H01L49/003

    摘要: Provided are a 3-terminal MIT switch which can easily control a discontinuous MIT jump and does not need a conventional gate insulating layer, a switching system including the 3-terminal MIT switch, and a method of controlling an MIT of the 3-terminal MIT switch. The 3-terminal MIT switch includes a 2-terminal MIT device, which generates discontinuous MIT in a transition voltage, an inlet electrode and an outlet electrode, which are respectively connected to each terminal of the 2-terminal MIT device, and a control electrode, which is connected to the inlet electrode and includes an external terminal separated from an external terminal of the inlet electrode, wherein an MIT of the 2-terminal MIT device is controlled according to a voltage or a current applied to the control electrode. The switching system includes the 3-terminal MIT switch, a voltage source connected to the inlet electrode, and a control source connected to the control electrode.

    摘要翻译: 提供了一种三端MIT开关,其可以容易地控制不连续的MIT跳转,并且不需要传统的栅极绝缘层,包括3端子MIT开关的开关系统以及控制三端MIT的MIT的方法 开关。 3端MIT开关包括2端MIT装置,其分别连接到2端MIT装置的每个端子,产生过渡电压的不连续MIT,入口电极和出口电极以及控制电极 ,其连接到入口电极并且包括与入口电极的外部端子分离的外部端子,其中根据施加到控制电极的电压或电流来控制2端子MIT装置的MIT。 开关系统包括三端MIT开关,连接到入口电极的电压源和连接到控制电极的控制源。

    CIRCUIT FOR PREVENTING SELF-HEATING OF METAL-INSULATOR-TRANSITION (MIT) DEVICE AND METHOD OF FABRICATING INTEGRATED-DEVICE FOR THE SAME CIRCUIT
    44.
    发明申请
    CIRCUIT FOR PREVENTING SELF-HEATING OF METAL-INSULATOR-TRANSITION (MIT) DEVICE AND METHOD OF FABRICATING INTEGRATED-DEVICE FOR THE SAME CIRCUIT 有权
    用于防止金属绝缘体转变(MIT)装置的自加热的电路和用于制造相同电路的集成装置的方法

    公开(公告)号:US20110043141A1

    公开(公告)日:2011-02-24

    申请号:US12919195

    申请日:2009-02-23

    CPC分类号: H01L27/067 H01L49/003

    摘要: Provided are a MIT device self-heating preventive-circuit that can solve a self-heating problem of a MIT device and a method of manufacturing a MIT device self-heating preventive-circuit integrated device. The MIT device self-heating preventive-circuit includes a MIT device that generates an abrupt MIT at a temperature equal to or greater than a critical temperature and is connected to a current driving device to control the flow of current in the current driving device, a transistor that is connected to the MIT device to control the self-heating of the MIT device after generating the MIT in the MIT device, and a resistor connected to the MIT device and the transistor.

    摘要翻译: 提供了能够解决MIT装置的自发热问题的MIT装置自发热防止电路以及制造MIT装置自发热防止电路集成装置的方法。 MIT装置自发热防止电路包括MIT装置,其在等于或大于临界温度的温度下产生突然的MIT,并连接到电流驱动装置以控制当前驱动装置中的电流流动, 晶体管,其连接到MIT装置,以在MIT装置中产生MIT之后控制MIT装置的自发热,以及连接到MIT装置和晶体管的电阻器。

    CIRCUIT FOR CONTINUOUSLY MEASURING DISCONTINUOUS METAL INSULATOR TRANSITION OF MIT ELEMENT AND MIT SENSOR USING THE SAME
    45.
    发明申请
    CIRCUIT FOR CONTINUOUSLY MEASURING DISCONTINUOUS METAL INSULATOR TRANSITION OF MIT ELEMENT AND MIT SENSOR USING THE SAME 有权
    用于连续测量不连续金属绝缘子过渡的电路元件和麻省传感器的电路

    公开(公告)号:US20100182034A1

    公开(公告)日:2010-07-22

    申请号:US12376668

    申请日:2007-07-05

    IPC分类号: G01R31/26

    CPC分类号: G01R31/2641

    摘要: Provided are a circuit for continuously measuring a discontinuous metal-insulator transition (MIT) of an MIT element and an MIT sensor using the circuit. The circuit comprises a to-be-measured object unit including the MIT element having a discontinuous MIT occurring at the transition voltage thereof, a power supply unit applying a predetermined pulse current or voltage signal to the to-be-measured object unit, a measurement unit measuring the discontinuous MIT of the MIT element, and a microprocessor controlling the power supply unit and the measurement unit. The discontinuous MIT measurement circuit continuously measures the discontinuous MIT of the MIT element, and thus it can be used as a sensor for sensing a variation in an external factor.

    摘要翻译: 提供了一种用于连续测量使用该电路的MIT元件和MIT传感器的不连续金属 - 绝缘体转变(MIT)的电路。 该电路包括被测量对象单元,其包括具有在其转变电压下出现的不连续MIT的MIT元件,向待测量对象单元施加预定脉冲电流或电压信号的电源单元, 测量MIT元件的不连续MIT的单元,以及控制电源单元和测量单元的微处理器。 不连续的MIT测量电路连续测量MIT元件的不连续MIT,因此它可以用作感测外部因素变化的传感器。

    Method of fabricating a semiconductor device
    46.
    发明授权
    Method of fabricating a semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号:US07691706B2

    公开(公告)日:2010-04-06

    申请号:US11616820

    申请日:2006-12-27

    申请人: Bong Jun Kim

    发明人: Bong Jun Kim

    IPC分类号: H01L21/336

    摘要: Embodiments relate to a method for fabricating a semiconductor device. In embodiments, the method may include forming a gate dielectric layer on an active region of a semiconductor substrate defined by an isolation region to form a gate conductive layer pattern, etching the isolation region of the semiconductor substrate where the gate conductive layer pattern is formed, to form an isolation trench, forming a polyoxide layer on the gate conductive layer pattern and a sidewall oxide layer in the trench by carrying out an oxidation process, forming a spacer nitride layer on the polyoxide layer and a liner nitride layer on the sidewall oxide layer by carrying out a nitride layer forming process, and then forming a dielectric layer on an entire surface of the resultant structure to fill the trench.

    摘要翻译: 实施例涉及一种用于制造半导体器件的方法。 在实施例中,该方法可以包括在由隔离区域限定的半导体衬底的有源区上形成栅极电介质层以形成栅极导电层图案,蚀刻形成栅极导电层图案的半导体衬底的隔离区域, 以形成隔离沟槽,通过进行氧化工艺在栅极导电层图案和沟槽中的侧壁氧化物层形成多环氧化物层,在多孔层上形成间隔氮化物层,在侧壁氧化物层上形成衬里氮化物层 通过进行氮化物层形成工艺,然后在所得结构的整个表面上形成电介质层以填充沟槽。

    Temperature Sensor Using Abrupt Metal-Insulator Transition (Mit) and Alarm Comprising the Temperature Sensor
    47.
    发明申请
    Temperature Sensor Using Abrupt Metal-Insulator Transition (Mit) and Alarm Comprising the Temperature Sensor 有权
    温度传感器使用突发金属绝缘体转换(Mit)和包含温度传感器的报警器

    公开(公告)号:US20080297358A1

    公开(公告)日:2008-12-04

    申请号:US12090084

    申请日:2006-06-27

    IPC分类号: G08B17/06 G01K7/16

    CPC分类号: G01K3/005 G01K7/22

    摘要: Provided are a temperature sensor using a metal-insulator transition (MIT) device subject to abrupt MIT at a specific temperature and an alarm including the temperature sensor. The abrupt MIT device includes an abrupt MIT thin film and at least two electrode thin films that contacts the abrupt MIT thin film. The abrupt MIT device generates abrupt metal-insulator transition at a specific transition temperature. The alarm includes a temperature sensor comprising an abrupt MIT device, and an alarm signaling device serially connected to the temperature sensor. Accordingly, the alarm can be manufactured to have a simple circuit and be of a small size by including the temperature sensor using an abrupt MIT device.

    摘要翻译: 提供了使用在特定温度下经受突然MIT的金属 - 绝缘体转变(MIT)装置的温度传感器和包括温度传感器的警报。 突变的MIT装置包括突变的MIT薄膜和至少两个接触突变的MIT薄膜的电极薄膜。 突变MIT器件在特定转变温度下产生突然的金属 - 绝缘体转变。 报警装置包括一个温度传感器,它包括一个突然的MIT装置,和一个串联连接到温度传感器的报警信号装置。 因此,通过使用突然的MIT装置包括温度传感器,可以将报警器制造成具有简单的电路并且尺寸小。

    ABRUPT METAL-INSULATOR TRANSITION DEVICE, CIRCUIT FOR REMOVING HIGH-VOLTAGE NOISE USING THE ABRUPT METAL-INSULATOR TRANSITION DEVICE, AND ELECTRICAL AND/OR ELECTRONIC SYSTEM COMPRISING THE CIRCUIT
    48.
    发明申请
    ABRUPT METAL-INSULATOR TRANSITION DEVICE, CIRCUIT FOR REMOVING HIGH-VOLTAGE NOISE USING THE ABRUPT METAL-INSULATOR TRANSITION DEVICE, AND ELECTRICAL AND/OR ELECTRONIC SYSTEM COMPRISING THE CIRCUIT 有权
    用于使用破坏金属绝缘体过渡装置以及包括电路的电气和/或电子系统来消除高压噪声的电路的绝缘金属绝缘体过渡装置

    公开(公告)号:US20080142900A1

    公开(公告)日:2008-06-19

    申请号:US12021764

    申请日:2008-01-29

    IPC分类号: H01L29/76

    CPC分类号: H01L49/003

    摘要: Provided are an abrupt metal-insulator transition (MIT) device for bypassing super-high voltage noise to protect an electric and/or electronic system, such as, a high-voltage switch, from a super-high voltage, a high-voltage noise removing circuit for bypassing the super-high voltage noise using the abrupt MIT device, and an electric and/or electronic system including the high-voltage noise removing circuit. The abrupt MIT device includes a substrate, a first abrupt MIT structure, and a second abrupt MIT structure. The first and second abrupt MIT structures are formed on an upper surface and a lower surface, respectively, of the substrate. The high-voltage noise removing circuit includes an abrupt MIT device chain connected in parallel to the electric and/or electronic system to be protected. The abrupt MIT device chain includes at least two abrupt MIT devices serially connected to each other.

    摘要翻译: 提供了用于绕过超高压噪声以保护诸如高压开关的电和/或电子系统的突发金属 - 绝缘体转变(MIT)装置,从超高电压,高压噪声 使用突发MIT装置绕过超高压噪声的除电路,以及包括高压噪声去除电路的电气和/或电子系统。 突变MIT装置包括基板,第一突发MIT结构和第二突发MIT结构。 第一和第二突变MIT结构分别形成在基板的上表面和下表面上。 高电压噪声去除电路包括与要保护的电和/或电子系统并联连接的突变MIT装置链。 突发MIT设备链包括彼此串行连接的至少两个突发MIT设备。

    MIM capacitor and method for manufacturing the same
    49.
    发明申请
    MIM capacitor and method for manufacturing the same 有权
    MIM电容器及其制造方法

    公开(公告)号:US20070145526A1

    公开(公告)日:2007-06-28

    申请号:US11640154

    申请日:2006-12-15

    申请人: Bong Jun Kim

    发明人: Bong Jun Kim

    IPC分类号: H01L29/00

    CPC分类号: H01L21/76852

    摘要: Disclosed are an MIM (Metal-Insulator-Metal) capacitor and a method of manufacturing the same. The MIM capacitor includes: a lower metal layer and a lower metal interconnection on a substrate; a barrier metal layer on the lower metal layer; an insulating layer on the barrier metal layer; an upper metal layer on the insulating layer; an interlayer dielectric layer having a via hole on the lower metal interconnection; and a plug in the via hole.

    摘要翻译: 金属绝缘子金属电容器及其制造方法公开了一种MIM(金属 - 绝缘体 - 金属)电容器及其制造方法。 MIM电容器包括:在基板上的下金属层和下金属互连; 下金属层上的阻挡金属层; 阻挡金属层上的绝缘层; 绝缘层上的上金属层; 在下金属互连上具有通孔的层间绝缘层; 并插入通孔。