公开(公告)号：US09366696B2

公开(公告)日：2016-06-14

申请号：US14352043

申请日：2011-10-19

Applicant: Matthias Brunner

Inventor： Matthias Brunner

IPC: G01R31/20 ,  G01R1/02 ,  G09G3/00 ,  G01R31/01

CPC classification number: G01R1/02 ,  G01R31/01 ,  G09G3/006

Abstract: An apparatus for testing of a plurality of electronic devices on a flexible substrate is described. The apparatus includes at least two rollers configured for guiding the flexible substrate into a testing area along transport direction, at least one prober configured for electrically contacting one or more of the electronic devices, at least one probing support configured for supporting a portion of the flexible substrate during electrical contact with the at least one prober, and a test device for functional testing of one or more of the electronic devices.

Abstract translation: 描述了一种用于在柔性基板上测试多个电子装置的装置。 所述设备包括至少两个辊，所述至少两个辊构造成用于将柔性基板沿传送方向引导到测试区域中，至少一个构造成用于电接触一个或多个电子设备的探测器，至少一个探测支撑件， 与所述至少一个探测器电接触的基板，以及用于一个或多个所述电子设备的功能测试的测试装置。

公开(公告)号：US20120113559A1

公开(公告)日：2012-05-10

申请号：US13288743

申请日：2011-11-03

Applicant: Hung T. Nguyen ,  George Tzeng ,  Daniel I. Handjojo ,  Paul Bocian ,  Matthias Brunner ,  Bernhard G. Mueller

Inventor： Hung T. Nguyen ,  George Tzeng ,  Daniel I. Handjojo ,  Paul Bocian ,  Matthias Brunner ,  Bernhard G. Mueller

IPC: H05F3/00

CPC classification number: H01L21/67748 ,  H01L21/6831 ,  H01L22/14 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Embodiments of the invention relate to methods and apparatus for minimizing electrostatic discharge in processing and testing systems utilizing large area substrates in the production of flat panel displays, solar panels, and the like. In one embodiment, an apparatus is described. The apparatus includes a testing chamber, a substrate support disposed in the testing chamber, the substrate support having a substrate support surface, a structure disposed in the testing chamber, the structure having a length that spans a width of the substrate support surface, the structure being linearly movable relative to the substrate support, and a brush device having a plurality of conductive bristles coupled to the structure and spaced a distance away from the substrate support surface of the substrate support, the brush device electrically coupling the support surface to ground through the structure.

Abstract translation: 本发明的实施例涉及在平板显示器，太阳能电池板等的生产中利用大面积基板的处理和测试系统中的静电放电最小化的方法和装置。 在一个实施例中，描述了一种装置。 该装置包括测试室，设置在测试室中的衬底支撑件，衬底支撑件具有衬底支撑表面，设置在测试室中的结构，该结构具有跨过衬底支撑表面的宽度的长度，该结构 相对于衬底支撑件可线性移动;以及刷子装置，其具有耦合到该结构并且离开衬底支撑件的衬底支撑表面间隔一定距离的多个导电刷毛，刷装置通过 结构体。

公开(公告)号：US07847566B2

公开(公告)日：2010-12-07

申请号：US11940432

申请日：2007-11-15

Applicant: Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

Inventor： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

IPC: G01R31/26

CPC classification number: G09G3/006 ,  G01R31/2893 ,  G01R31/305

Abstract: A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.

Abstract translation: 描述了一种在基板上测试电子器件的方法。 该方法包括将可配置的探测器放置在第一衬底上，测试第一衬底，重新配置可配置的探测器，将可配置的探测器放置在第二衬底上，以及测试第二衬底。

公开(公告)号：US20100188666A1

公开(公告)日：2010-07-29

申请号：US11813334

申请日：2006-01-05

Applicant: Matthias Brunner ,  Ralf Schmid ,  Bernhard Mueller ,  Axel Wenzel

Inventor： Matthias Brunner ,  Ralf Schmid ,  Bernhard Mueller ,  Axel Wenzel

IPC: G01B11/14

CPC classification number: G09G3/006 ,  G01R31/305 ,  G01R31/308 ,  G01R35/005 ,  H01J2237/2826

Abstract: The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period Ps in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period Ps, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections intentionally deviate either in the beam target period P1 from the structure period Ps and/or in the beam target position L1 from the position L.

Abstract translation: 本发明涉及一种校准红细胞束的束位置的方法。 使用具有结构的校准体，其中结构在平坦部分中具有结构周期Ps，并且在每个结构内具有用于测量的位置L. 对于校准，生成校准体的平坦部分中的结构处的至少一个检测信号，其中，粒子束在束目标位置L1上被偏转器偏转，其中光束目标周期P1大于 结构周期Ps，由此基准校准用于偏转器的控制，并且其中光束目标偏转有意地在光束目标周期P1中与结构周期Ps和/或光束目标位置L1从位置L 。

公开(公告)号：US07353929B2

公开(公告)日：2008-04-08

申请号：US11241335

申请日：2005-09-30

Applicant: Matthias Brunner ,  Joachim Lindner

Inventor： Matthias Brunner ,  Joachim Lindner

IPC: F16D23/14

CPC classification number: F16D23/12 ,  F16D2023/141

Abstract: A clutch lever arrangement for a clutch, especially for a commercial motor vehicle clutch, having a clutch lever pivotably supported on a bearing point on a stationary component. The lever has a force-application section for introducing an actuating force by way of an actuating element and a force-transmission section for transmitting the actuating force to a clutch-release bearing, which is mounted with freedom to slide axially back and forth in the pivot plane of the clutch lever. To reduce undesirable vibrations of the clutch lever, the lever is guided in its pivot plane by a guide member.

Abstract translation: 一种用于离合器的离合器杆装置，特别是用于商用汽车离合器，其具有可枢转地支撑在固定部件上的支承点上的离合器杆。 杠杆具有用于通过致动元件引导致动力的力施加部分和用于将致动力传递到离合器释放轴承的力传递部分，该离合器释放轴承安装成可自由地沿轴向前后滑动 离合器杆的枢转平面。 为了减少离合器杆的不期望的振动，杆通过引导构件在其枢转平面中被引导。

公开(公告)号：US07075323B2

公开(公告)日：2006-07-11

申请号：US10901936

申请日：2004-07-29

Applicant: Matthias Brunner ,  Shinichi Kurita ,  Wendell T. Blonigan ,  Edgar Kehrberg

Inventor： Matthias Brunner ,  Shinichi Kurita ,  Wendell T. Blonigan ,  Edgar Kehrberg

IPC: G01R31/26

CPC classification number: H01J37/185 ,  G01R31/2886 ,  H01J2237/204

Abstract: A method and system for testing one or more large substrates are provided. In one or more embodiments, the system includes a testing chamber having a substrate table disposed therein. The substrate table is adapted to move a substrate within the testing chamber in various directions. More particularly, the substrate table includes a first stage movable in a first direction, and a second stage movable in a second direction, wherein each of the stages moves in an X-direction, Y-direction or both X and Y directions. The system further includes a load lock chamber at least partially disposed below the testing chamber, and a transfer chamber coupled to the load lock chamber and the testing chamber. In one or more embodiments, the transfer chamber includes a robot disposed therein which is adapted to transfer substrates between the load lock chamber and the testing chamber.

公开(公告)号：US20050212545A1

公开(公告)日：2005-09-29

申请号：US10115685

申请日：2002-04-04

Applicant: Matthias Brunner ,  Ralf Schmid

Inventor： Matthias Brunner ,  Ralf Schmid

IPC: G01R31/302 ,  G01N23/225 ,  G01R1/06 ,  G01R31/26 ,  G01R31/307 ,  G01R31/311 ,  G02F1/13 ,  H01L21/66

CPC classification number: G01R31/311 ,  G01R31/307

Abstract: A method and an apparatus for testing the function of a plurality of microstructural elements by irradiation with particle radiation. All of the microstructural elements detected as malfunctioning are listed in a first error list in a first test sequence. The microstructural elements listed in the first error list are tested once more in at least one further test sequence and at least the result of the test sequence last carried out is evaluated to establish the overall test result. The first test sequence is designed so that, if possible, all of the microstructural elements which are actually malfunctioning are detected. The invention further relates to a method for producing microstructural elements which are constructed as a plurality on a substrate and are tested according to the above test method.

Abstract translation: 一种用于通过用粒子辐射照射来测试多个微结构元件的功能的方法和装置。 检测为故障的所有微结构元件都列在第一个测试序列的第一个错误列表中。 在第一个错误列表中列出的微结构元素在至少一个进一步的测试序列中再次被测试，并且至少对上次执行的测试序列的结果进行评估以建立整体测试结果。 第一测试序列被设计成使得如果可能的话，检测到所有实际故障的微结构元件。 本发明还涉及一种用于制造在基板上多个构造并根据上述测试方法测试的显微结构元件的方法。

公开(公告)号：US20050179451A1

公开(公告)日：2005-08-18

申请号：US10889695

申请日：2004-07-12

Applicant: Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

Inventor： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

IPC: G01R31/302 ,  G01R31/26 ,  G01R31/305 ,  G02F1/13 ,  G09G3/00 ,  H01L21/687

CPC classification number: G09G3/006 ,  G01R31/2893 ,  G01R31/305

Abstract: An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.

Abstract translation: 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。

公开(公告)号：US06465795B1

公开(公告)日：2002-10-15

申请号：US09536897

申请日：2000-03-28

Applicant: Juan R. Madonado ,  Lee H. Veneklasen ,  Matthias Brunner ,  Ralf Schmid

Inventor： Juan R. Madonado ,  Lee H. Veneklasen ,  Matthias Brunner ,  Ralf Schmid

IPC: H01J4000

CPC classification number: H01J37/026 ,  G01N23/225 ,  H01J2237/0047 ,  H01J2237/3175

Abstract: In a charged particle or electron beam system, gas, such as argon or helium, is introduced over the surface of a substrate and ionized to neutralize charge accumulating on the surface from interactions caused by the impinging charged particles. The gas can be distributed throughout the gas chamber or confined to an area above the substrate. The radiation beam to ionize the gas can be directed across or towards the surface of the substrate. In the latter case, the gas pressure may be reduced to zero.

Abstract translation: 在带电粒子或电子束系统中，诸如氩或氦的气体被引入到衬底的表面上并电离以中和由撞击的带电粒子引起的相互作用累积在表面上的电荷。 气体可以分布在整个气体室中或限制在基板上方的区域中。 用于离子化气体的辐射束可以被引导穿过或朝向衬底的表面。 在后一种情况下，气体压力可以减小到零。

公开(公告)号：US5045783A

公开(公告)日：1991-09-03

申请号：US524850

申请日：1990-05-18

Applicant: Matthias Brunner ,  Hermann Wessely

Inventor： Matthias Brunner ,  Hermann Wessely

IPC: G01R31/302 ,  G01R31/306

CPC classification number: G01R31/2805 ,  G01R31/306

Abstract: Modified scanning electron microscopes are usually employed for the implementation of methods for testing the electrical properties of printed circuit boards with the electron probe. As a consequence of the deflection, chromatic aberration and of the aberrations of the objective lens increasing greatly with the deflection angle, however, their scanning field is limited. In order to be able to test larger printed circuit boards without involved improvement of electron optics, it is proposed that the printed circuit board be subdivided into a plurality of adjoining regions, whereby the size of the regions respectively approximately corresponds to the size of the scanning field. Each of the networks lying only within one of the regions is then tested in a known manner. In order to detect shorts between networks of different regions as well as interruptions between contact points of networks extending beyond regions, the known testing method is followed by a further test cycle.

Abstract translation: 通常使用改进的扫描电子显微镜来实现用电子探针测试印刷电路板的电性能的方法。 然而，由于偏转，色差和物镜的像差随着偏转角而大幅度增加的结果是它们的扫描场受到限制。 为了能够在不涉及电子光学改进的情况下测试较大的印刷电路板，建议将印刷电路板细分成多个相邻区域，由此区域的大小分别大约对应于扫描的尺寸 领域。 然后以已知的方式测试仅位于一个区域内的每个网络。 为了检测不同区域的网络之间的短路以及延伸到区域之外的网络的接触点之间的中断，已知的测试方法之后是进一步的测试周期。