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公开(公告)号：US11078925B2
公开(公告)日：2021-08-03
申请号：US16327154
申请日：2017-08-09
摘要： A vacuum pump reduces a stress without reducing the rotation speed of a rotating cylindrical body. In an outlet port-side lower portion of a rotor cylindrical portion included in the vacuum pump, a smaller diameter portion having an outer diameter smaller than that of an inlet port-side portion of the rotor cylindrical portion is provided. A lowermost end portion (outlet port-side end portion) of the rotor cylindrical portion is designed longer than a thread groove exhaust element to provide an extending portion. In the extending portion, a smaller diameter portion having an outer diameter smaller than that of the inlet port-side portion of the rotor cylindrical portion which is opposed to the thread groove exhaust element is provided.
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公开(公告)号：US20200158117A1
公开(公告)日：2020-05-21
申请号：US16604820
申请日：2018-04-11
发明人： Yongwei Shi , Tooru Miwata , Yoshiyuki Sakaguchi
摘要： In a vacuum pump, the lower Ra sensor target, the fourth spacer, and the Ra electromagnetic target are configured in this order, from the inlet port side toward the outlet port side, at the lower side of the shaft of the 5-axis control magnetic bearing Likewise, at the lower side of the stator, the lower Ra sensor and the lower Ra electromagnet are configured in this order, from the inlet port toward the outlet port. In other words, the lower Ra sensor is disposed above the lower Ra electromagnet. According to this configuration, the third spacer fixed above the lower Ra sensor target is shortened. As a result, the height of the 5-axis control magnetic bearing and the length of the stator column enclosing electrical components constituting the 5-axis control magnetic bearing is reduced, thereby reducing the overall height of the vacuum pump.
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公开(公告)号：US10253777B2
公开(公告)日：2019-04-09
申请号：US15021499
申请日：2014-09-01
IPC分类号： F04D19/04
摘要： The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.
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公开(公告)号：US20180335052A1
公开(公告)日：2018-11-22
申请号：US15774861
申请日：2016-10-31
发明人： Yoshiyuki Sakaguchi
CPC分类号： F04D29/5853 , F04D19/04 , F04D19/042 , F04D27/006
摘要： Provided is a vacuum pump that prevents the solidification of gas while being operated properly. The vacuum pump includes a rotor that is supported rotatably on a base, a stator that has a thread groove portion, and a heating structure that heats the stator. The heating structure has a spacer that insulates the stator from stator components other than the stator, and a cartridge heater that heats the stator. The distance between a rotor cylindrical portion and the stator at the inlet port side is set to be equal to or greater than the distance between the rotor cylindrical portion and the stator at the outlet port side.
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公开(公告)号：US20160222974A1
公开(公告)日：2016-08-04
申请号：US14917772
申请日：2014-06-06
发明人： Yoshiyuki Sakaguchi
CPC分类号： F04D29/023 , F04D17/168 , F04D19/042 , F04D25/06 , F04D29/28 , F04D29/4206 , F04D29/444 , F04D29/522 , F04D29/644 , F05D2230/21 , F05D2300/518
摘要： The present invention provides a stator component of a vacuum pump, which is suitable for reducing the fracture energy (energy of fracture that occurs when a rotor of the pump is damaged during its rotation) and the size of the pump, and also provides a vacuum pump having this stator component. In the vacuum pump, a spacer or of a thread groove pump stator, which is a stator component forms a gap satisfying the following > between an outer circumferential surface of each of housed in a pump case of the vacuum pump, and an inner circumferential surface of the pump case, with the stator component being housed in the pump case. > 2d/D≦εmax, where D is the outer diameter of the stator component (spacer or thread groove pump stator), d is the width of the gap, and εmax is the breaking elongation of the stator component.
摘要翻译： 本发明提供一种真空泵的定子部件，其适用于降低断裂能（在旋转期间泵的转子损坏时发生的断裂能量）和泵的尺寸，并且还提供真空 泵具有该定子部件。 在真空泵中，作为定子部件的间隔件或螺纹槽泵定子在容纳在真空泵的泵壳体的每个的外周面之间形成满足以下“条件”的间隙，以及 泵壳体的内圆周表面，其中定子部件容纳在泵壳体中。 “条件”2d /D≤εmax，其中D是定子部件（间隔件或螺纹槽泵定子）的外径，d是间隙的宽度，εmax是定子部件的断裂伸长率。
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公开(公告)号：US20160138602A1
公开(公告)日：2016-05-19
申请号：US14899917
申请日：2014-06-06
CPC分类号： F04D19/04 , F04D17/168 , F04D19/044 , F04D29/28 , F04D29/32 , F04D29/324 , F04D29/444 , F04D29/542 , F04D29/544 , F05D2240/122 , F05D2240/304 , F05D2250/70 , F05D2260/607
摘要： A vacuum pump is provided, which suppresses occurrence of a gas product in an exhaust side outlet of a thread groove and maintains pump performance over a long period. The vacuum pump includes inflow suppressing walls formed by widening greater an exhaust side end portion of ridge portions, extended along a gas exhaust direction on an outer circumferential surface of an inner circumference side stator, forward in a rotor rotating direction than an intake side end portion, the inflow suppressing walls suppressing retention of gas in exhaust side outlets of thread grooves engraved among the ridge portions.
摘要翻译： 提供一种真空泵，其抑制螺纹槽的排气侧出口中的气体产物的发生，并且长期保持泵的性能。 真空泵包括流入抑制壁，通过使沿着内周侧定子的外周面的排气方向延伸的脊部的排气侧端部比在吸入侧端部部分的转子旋转方向 流入抑制壁，其抑制在脊部中雕刻的线槽的排气侧出口中的气体的滞留。
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公开(公告)号：US20150240829A1
公开(公告)日：2015-08-27
申请号：US14429645
申请日：2013-09-18
IPC分类号： F04D29/051 , F04D29/058 , F04D19/04 , F04D29/02 , F04D29/08 , F04D29/38
CPC分类号： F04D29/051 , F04D19/042 , F04D19/044 , F04D19/046 , F04D19/048 , F04D29/023 , F04D29/058 , F04D29/083 , F04D29/38 , F04D29/662 , F05D2260/95
摘要： A rotor of a vacuum pump has first and second cylindrical bodies and a connecting portion for connecting the end portions of the cylindrical bodies together. The first cylindrical body has a plurality of rotor blades on an outer circumferential surface thereof, and configures a blade exhaust portion when the rotor blades are arranged along an axial center of the vacuum pump alternately with a plurality of stator blades. The second cylindrical body configures a threaded groove exhaust portion when a threaded groove exhaust flow passage is formed at least on an inner circumference of the second cylindrical body. In this rotor, a balancing portion for the rotor is provided on an inner circumferential surface of the first cylindrical body or the connecting portion, and mass adding means is provided in the balancing portion.
摘要翻译： 真空泵的转子具有第一和第二圆柱体和用于将圆柱体的端部连接在一起的连接部分。 第一圆柱体在其外圆周表面上具有多个转子叶片，并且当转子叶片沿着真空泵的轴向中心与多个定子叶片交替排列时构成叶片排出部分。 当螺纹槽排气流道至少形成在第二圆柱体的内周上时，第二圆筒体构成螺纹槽排气部。 在该转子中，在第一圆筒体或连接部的内周面上设置有用于转子的平衡部，并且在平衡部中设置质量补充机构。
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公开(公告)号：US20240295221A1
公开(公告)日：2024-09-05
申请号：US18258886
申请日：2022-01-11
发明人： Tooru Miwata , Yoshiyuki Sakaguchi
IPC分类号： F04D19/04
CPC分类号： F04D19/042
摘要： There are provided a vacuum pump which can effectively prevent stress corrosion cracking of a rotating body and has excellent corrosion resistance, and a rotating body of the vacuum pump. In a vacuum pump (e.g., a turbo-molecular pump 100) exhausting gas by rotation of a rotating body 103, the rotating body 103 has, on a surface thereof, a first area 1 covered with a first surface treatment layer 1A and a second area 2 covered with a second surface treatment layer 2A, and a boundary portion 3 between the first area 1 and the second area 2 has an area in which the surface treatment layers 1A and 1B of the first and second areas 1 and 2 overlap each other.
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公开(公告)号：US11802568B2
公开(公告)日：2023-10-31
申请号：US17625974
申请日：2020-07-10
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D19/044 , F05D2210/12 , F05D2260/607
摘要： A vacuum pump includes a linked-type thread-groove spacer which is a structure for linking a Siegbahn pump portion and a thread-groove pump portion, and when an outlet position of a thread groove which is an exhaust channel portion of this linked-type thread-groove spacer is in a vicinity of the stator portion (stator bolt) of the stator column, conductance of the exhaust channel is lowered. Thus, phases in a circumferential direction of installation positions of a thread ridge of the linked-type thread-groove spacer and the stator portion of the stator column are aligned as much as possible. In other words, the thread groove of the linked-type thread-groove spacer which is the exhaust channel is provided between the installation positions of the stator portions in the circumferential direction of the stator column so that lowering of the conductance of the exhaust channel is suppressed.
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公开(公告)号：US11408429B2
公开(公告)日：2022-08-09
申请号：US16477745
申请日：2018-01-12
发明人： Yoshiyuki Sakaguchi , Yanbin Sun , Kengo Saegusa , Hideki Omori
IPC分类号： F04D25/06 , F04D19/04 , H05K5/02 , F04B37/14 , F04B39/00 , F04B37/16 , F04D29/64 , F04D29/52
摘要： Provided is a vacuum pump apparatus which allows reductions in thickness, weight, size, and cost of a vacuum pump control device. In the vacuum pump apparatus, a pump main body unit and a control unit which controls driving of the pump main body unit are integrated with each other. The vacuum pump apparatus has a configuration in which a spacer configured to support a load applied to a housing of the control unit is provided between a base of the pump main body unit and the housing of the control unit.
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