公开(公告)号：US08168950B2

公开(公告)日：2012-05-01

申请号：US12273805

申请日：2008-11-19

申请人： Kanji Furuhashi ,  Shuji Kikuchi ,  Akira Karakama ,  Yasuhiro Gunji

发明人： Kanji Furuhashi ,  Shuji Kikuchi ,  Akira Karakama ,  Yasuhiro Gunji

IPC分类号： H01J37/28

CPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/20221 ,  H01J2237/20278 ,  H01J2237/2817

摘要： The present invention has a subject to provide an apparatus that optimizes scanning in accordance with circumstances or purposes, reduces distortion of images, and improves throughput, image quality, and defect detection rate by controlling deflection of a charged particle beam in a stage tracking system. To solve this subject, an apparatus according to the present invention is an inspection apparatus for detecting abnormal conditions of an inspection target by irradiating the inspection target with the charged particle beam and detecting generated secondary electrons, including both a stage that moves continuously with the inspection target placed thereon and a deflection control circuit for providing a deflector with a scanning signal that causes the charged particle beam to scan repeatedly in a direction substantially perpendicular to a stage movement axis direction while the charged particle beam being deflected in the stage movement axis direction in accordance with a change in movement speed of the stage during movement of the stage.

摘要翻译： 本发明提供一种根据情况或目的优化扫描的装置，减少图像的失真，并且通过控制在舞台跟踪系统中的带电粒子束的偏转来提高吞吐量，图像质量和缺陷检测率。 为了解决这个问题，根据本发明的装置是一种检查装置，用于通过用带电粒子束照射检查对象并检测产生的二次电子来检测检查对象的异常状况，包括两个检查阶段连续移动的阶段 目标物放置在其上，以及偏转控制电路，用于向偏转器提供扫描信号，该扫描信号使得带电粒子束在基本上垂直于载物台移动轴线方向的方向上反复扫描，同时带电粒子束在载物台移动轴线方向上偏转 根据舞台运动中舞台的移动速度的变化。

公开(公告)号：US20120091339A1

公开(公告)日：2012-04-19

申请号：US13378561

申请日：2010-06-15

申请人： Yusuke Ominami ,  Hiroshi Miyai ,  Yasuhiro Gunji

发明人： Yusuke Ominami ,  Hiroshi Miyai ,  Yasuhiro Gunji

IPC分类号： H01J37/26

CPC分类号： H01J37/28 ,  H01J2237/004 ,  H01J2237/24564 ,  H01J2237/24592

摘要： A charged-particle microscope device and a method of controlling charged-particle beams are provided, which are capable of signal detection at the time when the charged state of an observation sample or a defect portion becomes optimum. Charge accumulation-waiting time T from an initial irradiation with an electron beam 21 for enhancing charge accumulation on an observation sample 100 until a next irradiation with the electron beam 21 for sample observation is set depending on the state of the observation sample 100 or a defect portion 112 generated on the observation sample 100. The irradiation with the electron beam 21 for enhancing charge accumulation and the irradiation with the electron beam 21 for sample observation are performed on the observation sample 100 on the basis of the charge accumulation-waiting time T.

摘要翻译： 提供带电粒子显微镜装置和控制带电粒子束的方法，其能够在观察样品或缺陷部分的充电状态变为最佳时进行信号检测。 根据观察样品100的状态或缺陷来设定用于增强观察样品100上的电荷累积的电子束21的电荷累积等待时间T，直到下一次照射用于样本观察的电子束21为止 在观察样本100上产生的电子束21的照射。基于电荷累积等待时间T，对观察样品100进行用于增强电荷积聚的电子束21的照射和用于样本观察的电子束21的照射。

公开(公告)号：US07518383B2

公开(公告)日：2009-04-14

申请号：US11379463

申请日：2006-04-20

申请人： Yasuhiro Gunji ,  Hiroshi Miyai ,  Shigeya Tanaka

发明人： Yasuhiro Gunji ,  Hiroshi Miyai ,  Shigeya Tanaka

IPC分类号： G01R31/305

CPC分类号： G01N23/203 ,  G01N23/2251 ,  G01N2223/3302 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2817

摘要： A visual inspection apparatus and method using the scanning electron microscope are disclosed. An electron beam is scanned repeatedly on a sample, and an inspection and a reference image are generated by the secondary electrons generated from the sample or reflected electrons. From the differential image between the inspection image and the reference image, a defect is determined. The number of pixels in the generated image along the direction of repetitive scanning by the electron beam can be changed.

摘要翻译： 公开了使用扫描电子显微镜的目视检查装置和方法。 在样品上重复扫描电子束，并且由从样品或反射电子产生的二次电子产生检查和参考图像。 根据检查图像与参考图像之间的差分图像，确定缺陷。 可以改变沿电子束的重复扫描方向产生的图像中的像素数。

公开(公告)号：US20090026369A1

公开(公告)日：2009-01-29

申请号：US12179272

申请日：2008-07-24

申请人： Hiroshi MIYAI ,  Yusuke Ominami ,  Yasuhiro Gunji

发明人： Hiroshi MIYAI ,  Yusuke Ominami ,  Yasuhiro Gunji

IPC分类号： G21K1/00 ,  G01N23/00

CPC分类号： G01N23/225 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/24495 ,  H01J2237/2487 ,  H01J2237/2817

摘要： An object of the present invention is to provide an inspection system using a scanning electron microscope that detects a high-precision electron beam image and at the same time, removes restrictions for a low sampling rate, which presents a problem at this point, of an AD converter element and an inspection method.To achieve the object, an embodiment of the present invention is constructed so that a sampled signal is obtained by sampling an analog brightness signal generated by a secondary electron detector at a predetermined sampling rate, contiguous digital values contained in the sampled signal are added on a N by N digital value basis to generate a digital brightness signal whose frequency is equal to 1/N of the sampling frequency, and each digital value contained in the digital brightness signal is divided by N to generate a digital signal made of digital values having a number of bits equal to that of the sampled signal and to generate an image signal in which each digital value of the digital signal forms one pixel data.

摘要翻译： 本发明的目的是提供一种使用扫描电子显微镜检测高精度电子束图像的检查系统，并且同时消除了在这一点上出现问题的低采样率的限制 AD转换器元件和检查方法。 为了实现该目的，本发明的一个实施例被构造成使得通过以预定采样率对由二次电子检测器产生的模拟亮度信号进行采样来获得采样信号，将包含在采样信号中的连续数字值加到 以N数字值为基础产生频率等于采样频率的1 / N的数字亮度信号，并且将包含在数字亮度信号中的每个数字值除以N，以产生由具有 位数等于采样信号的位数，并产生其中数字信号的每个数字值形成一个像素数据的图像信号。

公开(公告)号：US20060289751A1

公开(公告)日：2006-12-28

申请号：US11404610

申请日：2006-04-13

申请人： Masahiro Watanabe ,  Hiroyuki Shinada ,  Atsuko Takafuji ,  Masami lizuka ,  Yasuhiro Gunji ,  Kouichi Hayakawa ,  Masayoshi Takeda

发明人： Masahiro Watanabe ,  Hiroyuki Shinada ,  Atsuko Takafuji ,  Masami lizuka ,  Yasuhiro Gunji ,  Kouichi Hayakawa ,  Masayoshi Takeda

IPC分类号： G21K7/00

CPC分类号： G01R31/307 ,  H01J37/153 ,  H01J2237/1532 ,  H01J2237/216 ,  H01J2237/2817

摘要： According to the invention, techniques for automatically adjusting for astigmatism in a charged particle beam apparatus. Embodiments according to the present invention can provide a charged particle beam apparatus and an automatic astigmatism adjustment methods capable of automatically correcting astigmatism and a focal point in a relatively short period of time by finding a plurality of astigmatism correction quantities and a focal point correction quantity in a single operation from a relatively small number of 2 dimensional images. Specific embodiments can perform such automatic focusing while minimizing damages inflicted on subject samples. Embodiments include, among others, a charged particle optical system for carrying out an inspection, a measurement and a fabrication with a relatively high degree of accuracy by using a charged particle beam.

公开(公告)号：US06825480B1

公开(公告)日：2004-11-30

申请号：US09603459

申请日：2000-06-22

申请人： Masahiro Watanabe ,  Hiroyuki Shinada ,  Atsuko Takafuji ,  Masami Iizuka ,  Yasuhiro Gunji ,  Kouichi Hayakawa ,  Masayoshi Takeda

发明人： Masahiro Watanabe ,  Hiroyuki Shinada ,  Atsuko Takafuji ,  Masami Iizuka ,  Yasuhiro Gunji ,  Kouichi Hayakawa ,  Masayoshi Takeda

IPC分类号： G01B1100

CPC分类号： G01R31/307 ,  H01J37/153 ,  H01J2237/1532 ,  H01J2237/216 ,  H01J2237/2817

摘要： According to the invention, techniques for automatically adjusting for astigmatism in a charged particle beam apparatus. Embodiments according to the present invention can provide a charged particle beam apparatus and an automatic astigmatism adjustment methods capable of automatically correcting astigmatism and a focal point in a relatively short period of time by finding a plurality of astigmatism correction quantities and a focal point correction quantity in a single operation from a relatively small number of 2 dimensional images. Specific embodiments can perform such automatic focusing while minimizing damages inflicted on subject samples. Embodiments include, among others, a charged particle optical system for carrying out an inspection, a measurement and a fabrication with a relatively high degree of accuracy by using a charged particle beam.

摘要翻译： 根据本发明，用于自动调整带电粒子束装置中的像散的技术。 根据本发明的实施例可以提供一种带电粒子束装置和自动像散调节方法，其能够通过在多个像散校正量和焦点校正量中找到多个像散校正量和焦点校正量来在相对短的时间段内自动校正散光和焦点 来自相对较少数量的二维图像的单一操作。 具体实施例可以执行这种自动聚焦，同时最小化对受试样品造成的损害。 实施例包括用于通过使用带电粒子束来进行检查，测量和以相对高的精度制造的带电粒子光学系统。

公开(公告)号：US6124454A

公开(公告)日：2000-09-26

申请号：US292850

申请日：1999-04-16

申请人： Hisao Ikeda ,  Yasuhiro Gunji ,  Toshinari Koda ,  Motohiko Hidaka ,  Atsumi Aoki

发明人： Hisao Ikeda ,  Yasuhiro Gunji ,  Toshinari Koda ,  Motohiko Hidaka ,  Atsumi Aoki

IPC分类号： C07D405/14 ,  H05K3/28 ,  C07D251/30

CPC分类号： C07D405/14 ,  H05K3/285

摘要： .beta.-form tris-(2,3-epoxypropyl)-isocyanurate crystals containing from 2 to 15 wt % of .alpha.-form tris-(2,3-epoxypropyl)-isocyanurate in the interior of the crystals.

摘要翻译： 在晶体内部含有2至15重量％的α-型三 - （2,3-环氧丙基） - 异氰脲酸酯的β-型三 - （2,3-环氧丙基） - 异氰脲酸酯晶体。

公开(公告)号：US6081230A

公开(公告)日：2000-06-27

申请号：US349172

申请日：1994-12-02

申请人： Masatoshi Hoshino ,  Shigeru Oho ,  Yasuhiro Gunji ,  Hiroshi Kuroda ,  Kenji Takano ,  Yoshimasa Nagashima ,  Mikihiko Onari

发明人： Masatoshi Hoshino ,  Shigeru Oho ,  Yasuhiro Gunji ,  Hiroshi Kuroda ,  Kenji Takano ,  Yoshimasa Nagashima ,  Mikihiko Onari

IPC分类号： G01C21/16 ,  G01C21/28 ,  G01S19/49 ,  H01Q1/12 ,  H04B7/185 ,  G01S5/02

CPC分类号： H01Q1/1257 ,  G01C21/165 ,  G01C21/28

摘要： A navigation system which can enhance the position determining accuracy of a mobile object without employing any high precision measuring instrument. The navigation system comprises a GPS range measuring device, an angular velocity measuring device, a velocity measuring device and an azimuth measuring device, which measure the motion of the mobile object; a GPS range error estimating device, an angular velocity error estimating device, a velocity error estimating device and an azimuth error estimating device, which estimate errors involved in the respectively corresponding measuring devices; and a position calculating device which calculates the position of the mobile object from the outputs of the error estimating devices. The error estimating devices are implemented by Kalman filters and averaging processes. The factors of the errors of the individual measuring devices are assumed, and the outputs thereof are corrected, so that the position of the mobile object can always be determined at a high accuracy without employing any high precision sensor.

摘要翻译： 一种导航系统，可以在不使用任何高精度测量仪器的情况下提高移动物体的位置确定精度。 导航系统包括测量移动物体的运动的GPS测距装置，角速度测量装置，速度测量装置和方位测量装置; GPS范围误差估计装置，角速度误差估计装置，速度误差估计装置和方位误差估计装置，其估计分别对应的测量装置中涉及的误差; 以及位置计算装置，其从所述误差估计装置的输出计算所述移动体的位置。 误差估计装置由卡尔曼滤波器和平均过程实现。 假设各个测量装置的误差的因素，并且其输出被校正，使得可以总是高精度地确定移动对象的位置，而不使用任何高精度传感器。

公开(公告)号：US5926117A

公开(公告)日：1999-07-20

申请号：US94504

申请日：1998-06-10

申请人： Yasuhiro Gunji ,  Hiroshi Kuroda ,  Kozo Nakamura ,  Hiroshi Takenaga

发明人： Yasuhiro Gunji ,  Hiroshi Kuroda ,  Kozo Nakamura ,  Hiroshi Takenaga

IPC分类号： G09B29/10 ,  G01C21/00 ,  G01S19/14 ,  G01S19/41 ,  G01S19/43 ,  G01S19/49 ,  G05D1/02 ,  G08G1/0968 ,  G08G1/16 ,  H04W60/00 ,  G08G1/123

CPC分类号： G08G1/164 ,  G01S19/04 ,  G01S19/07 ,  G01S19/14 ,  G05D1/0246 ,  G05D1/0274 ,  G05D1/0278 ,  G05D1/0297 ,  G08G1/22 ,  G05D2201/0213

摘要： A vehicle control system and method which can realize automatic driving of a vehicle under control of a base station with a high accuracy of the order of cm, low costs and a high reliability. On the basis of information relating to positions or speeds of other vehicles or fixed vehicles obtained through communication units installed in the vehicles and base station, the system know presence of vehicles in proximity to each vehicle, proximity distances, proximity directions or relative speeds thereof, informs an associated driver of it, or controls movement states of the proximity vehicles to avoid any contact with the proximity vehicles on the basis of the proximity information.

摘要翻译： 一种车辆控制系统和方法，其可以在基站的控制下实现车辆的自动驾驶，其高精度为厘米，低成本和高可靠性。 基于通过车辆和基站中安装的通信单元获得的其他车辆或固定车辆的位置或速度的信息，系统知道每辆车辆附近的车辆的存在，接近距离，邻近方向或相对速度， 通知相关驾驶员，或控制邻近车辆的运动状态，以避免基于邻近信息与邻近车辆的任何接触。

公开(公告)号：US4836657A

公开(公告)日：1989-06-06

申请号：US940491

申请日：1986-12-10

申请人： Yasuhiro Gunji ,  Sadayuki Okada ,  Masato Isogai ,  Katsumi Kondo ,  Masahiko Ibamoto ,  Kazuhiro Kuwabara ,  Atsushi Kanke

发明人： Yasuhiro Gunji ,  Sadayuki Okada ,  Masato Isogai ,  Katsumi Kondo ,  Masahiko Ibamoto ,  Kazuhiro Kuwabara ,  Atsushi Kanke

IPC分类号： G02F1/1333 ,  G02F1/141

CPC分类号： G02F1/1326 ,  G02F1/141

摘要： The liquid crystal cell (30) for the optical change-over switch comprises a pair of transparent substrates (1), a pair of transparent flat electrodes (2) provided on the respective opposing surfaces of the substrates, orientation control films (3) provided on the flat electrodes (2), two pair of comb shaped electrodes (33) respectively provided on the orientation control films (3), and a ferroelectric liquid crystal layer (4) confined between the substrates (1). The optical incidence plane (31) to the cell (30) is so selected that the plane (31) is away from the helical axes (9) of the ferroelectric liquid crystal in the cell (30) in the order of somewhat greater than the tilt angle (.theta..sub.t) of the ferroelectric liquid crystal. The pair of flat electrodes (2) generate a first electric field (37a) perpendicular to the layer (32) and orient the long axes of the ferroelectric liquid crystal molecules into a first orientation (35a') parallel to the layer (32 ) to induce a first refractive index which causes simultaneous reflection of unpolarized light beam (7+8) with a predetermined incidence angle (.theta.). The two pair of comb shaped electrodes (33) generate a second electric field (37b') parallel to the layer and perpendicular to the helical axes (9) and orient the long axes of the molecules into a second orientation (35b') not in parallel to the layer (32) to induce a second refractive index which causes simultaneous transmission of the unpolarized light beam (7+8) with the predetermined incidence angle (.theta.).

摘要翻译： 用于光转换开关的液晶单元（30）包括一对透明基板（1），设置在基板的相应相对表面上的一对透明平板电极（2），提供定向控制膜 在平面电极（2）上，分别设置在取向控制膜（3）上的两对梳状电极（33）和限制在基板（1）之间的铁电液晶层（4）。 选择细胞（30）的光入射平面（31），以使得平面（31）以略大于细胞（30）的大小的顺序远离细胞（30）中的铁电液晶的螺旋轴（9） 铁电液晶的倾斜角（θt）。 一对扁平电极（2）产生垂直于层（32）的第一电场（37a），并将铁电液晶分子的长轴定向成与层（32）平行的第一取向（35a'）至 诱导第一折射率，其引起非偏振光束（7 + 8）以预定入射角（θ）的同时反射。 两对梳状电极（33）产生平行于该层并垂直于螺旋轴（9）的第二电场（37b'），并使分子的长轴定向成不在第二取向（35b'） 平行于层（32）以诱导第二折射率，其引起非偏振光束（7 + 8）以预定入射角（θ）的同时透射。