公开(公告)号：US20200312976A1

公开(公告)日：2020-10-01

申请号：US16363632

申请日：2019-03-25

Applicant: Intel Corporation

Inventor： Seung Hoon Sung ,  Jack Kavalieros ,  Ian Young ,  Matthew Metz ,  Uygar Avci ,  Devin Merrill ,  Ashish Verma Penumatcha ,  Chia-Ching Lin ,  Owen Loh

IPC: H01L29/49 ,  H01L29/51 ,  H01L29/78 ,  H01L21/28 ,  H01L29/66

Abstract: Techniques and mechanisms to provide electrical insulation between a gate and a channel region of a non-planar circuit device. In an embodiment, the gate structure, and insulation spacers at opposite respective sides of the gate structure, each extend over a semiconductor fin structure. In a region between the insulation spacers, a first dielectric layer extends conformally over the fin, and a second dielectric layer adjoins and extends conformally over the first dielectric layer. A third dielectric layer, adjoining the second dielectric layer and the insulation spacers, extends under the gate structure. Of the first, second and third dielectric layers, the third dielectric layer is conformal to respective sidewalls of the insulation spacers. In another embodiment, the second dielectric layer is of dielectric constant which is greater than that of the first dielectric layer, and equal to or less than that of the third dielectric layer.

公开(公告)号：US20200286686A1

公开(公告)日：2020-09-10

申请号：US16296082

申请日：2019-03-07

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sou-Chi Chang ,  Ashish Verma Penumatcha ,  Nazila Haratipour ,  Seung Hoon Sung ,  Owen Y. Loh ,  Jack Kavalieros ,  Uygar E. Avci ,  Ian A. Young

IPC: H01G7/06 ,  H01L49/02 ,  H01L27/108

Abstract: Described is a ferroelectric-based capacitor that improves reliability of a ferroelectric memory by using low-leakage insulating thin film. In one example, the low-leakage insulating thin film is positioned between a bottom electrode and a ferroelectric oxide. In another example, the low-leakage insulating thin film is positioned between a top electrode and ferroelectric oxide. In yet another example, the low-leakage insulating thin film is positioned in the middle of ferroelectric oxide to reduce the leakage current and improve reliability of the ferroelectric oxide.

公开(公告)号：US20200279805A1

公开(公告)日：2020-09-03

申请号：US16647691

申请日：2017-11-03

Applicant: INTEL CORPORATION

Inventor： Sasikanth Manipatruni ,  Jasmeet S. Chawla ,  Chia-Ching Lin ,  Dmitri E. Nikonov ,  Ian A. Young ,  Robert L. Bristol

IPC: H01L23/522 ,  H01L23/528 ,  H01L27/22 ,  H01L21/768 ,  H01L43/02 ,  H01F10/32

Abstract: Techniques are disclosed for forming vias for integrated circuit structures. During an additive via formation process, a dielectric material is deposited, an etch stop layer is deposited, a checkerboard pattern is deposited on the etch stop layer, regions in the checkerboard pattern are removed where it is desired to have vias, openings are etched in the dielectric material through the removed regions, and the openings are filled with a first via material. This is then repeated for a second via material. During the subtractive via formation process, a first via material is deposited, an etch stop layer is deposited, a checkerboard pattern is deposited on the etch stop layer, regions in the checkerboard pattern are removed where it is not desired to have vias, openings are etched in the first via material through the removed regions. This is then repeated for a second via material.

公开(公告)号：US20190386662A1

公开(公告)日：2019-12-19

申请号：US16009110

申请日：2018-06-14

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Dmitri Nikonov ,  Ian A. Young ,  Benjamin Buford ,  Tanay Gosavi ,  Kaan Oguz ,  John J. Plombon

IPC: H03K19/18 ,  H01L43/06 ,  H03K19/0944 ,  H01F10/32 ,  H01F41/30

Abstract: An apparatus is provided to improve spin injection efficiency from a magnet to a spin orbit coupling material. The apparatus comprises: a first magnet; a second magnet adjacent to the first magnet; a first structure comprising a tunneling barrier; a third magnet adjacent to the first structure; a stack of layers, a portion of which is adjacent to the third magnet, wherein the stack of layers comprises spin-orbit material; and a second structure comprising magnetoelectric material, wherein the second structure is adjacent to the first magnet.

公开(公告)号：US20190386208A1

公开(公告)日：2019-12-19

申请号：US16009035

申请日：2018-06-14

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Tanay Gosavi ,  Dmitri Nikonov ,  Benjamin Buford ,  Kaan Oguz ,  John J. Plombon ,  Ian A. Young

IPC: H01L43/10 ,  H01L27/22 ,  H01L43/02

Abstract: An apparatus is provided which comprises: a stack comprising a magnetoelectric (ME such as BiFeO3, (LaBi)FeO3, LuFeO3, PMN-PT, PZT, AlN, SmBiFeO3, Cr2O3, etc.) material and a transition metal dichalcogenide (TMD such as MoS2, MoSe2, WS2, WSe2, PtS2, PtSe2, WTe2, MoTe2, graphene, etc.); a magnet adjacent to a first portion of the TMD of the stack; a first interconnect adjacent to the magnet; a second interconnect adjacent to the ME material of the stack; and a third interconnect adjacent to a second portion of the TMD of the stack.

公开(公告)号：US12278289B2

公开(公告)日：2025-04-15

申请号：US18414290

申请日：2024-01-16

Applicant: Intel Corporation

Inventor： Kevin P. O'Brien ,  Carl Naylor ,  Chelsey Dorow ,  Kirby Maxey ,  Tanay Gosavi ,  Ashish Verma Penumatcha ,  Shriram Shivaraman ,  Chia-Ching Lin ,  Sudarat Lee ,  Uygar E. Avci

IPC: H01L29/78 ,  H01L29/06 ,  H01L29/24 ,  H01L29/423 ,  H01L29/66 ,  H01L21/02

Abstract: Embodiments disclosed herein comprise semiconductor devices with two dimensional (2D) semiconductor channels and methods of forming such devices. In an embodiment, the semiconductor device comprises a source contact and a drain contact. In an embodiment, a 2D semiconductor channel is between the source contact and the drain contact. In an embodiment, the 2D semiconductor channel is a shell.

公开(公告)号：US20250113572A1

公开(公告)日：2025-04-03

申请号：US18375060

申请日：2023-09-29

Applicant: Intel Corporation

Inventor： Mahmut Sami Kavrik ,  Uygar E. Avci ,  Kevi P. Obrien ,  Chia-Ching Lin ,  Carl H. Naylor ,  Kirby Maxey ,  Andrey Vyatskikh ,  Scott B. Clendenning ,  Matthew Metz ,  Marko Radosavljevic

IPC: H01L29/18 ,  H01L21/8238 ,  H01L27/092 ,  H01L29/06 ,  H01L29/417 ,  H01L29/423 ,  H01L29/66 ,  H01L29/775 ,  H01L29/786

Abstract: Techniques and mechanisms for forming a gate dielectric structure and source or drain (S/D) structures on a monolayer channel structure of a transistor. In an embodiment, the channel structure comprises a two-dimensional (2D) layer of a transition metal dichalcogenide (TMD) material. During fabrication of the transistor structure, a layer of a dielectric material is deposited on the channel structure, wherein the dielectric material is suitable to provide a reaction, with a plasma, to produce a conductive material. While a first portion of the dielectric material is covered by a patterned structure, a second portion of the dielectric material is exposed to a plasma treatment to form a source or dielectric (S/D) electrode structure that adjoins the first portion. In another embodiment, the dielectric material is an oxide of a Group V-VI transition metal.

公开(公告)号：US20250113540A1

公开(公告)日：2025-04-03

申请号：US18375055

申请日：2023-09-29

Applicant: Intel Corporation

Inventor： Carl H. Naylor ,  Rachel Steinhardt ,  Mahmut Sami Kavrik ,  Chia-Ching Lin ,  Andrey Vyatskikh ,  Kevin O’Brien ,  Kirby Maxey ,  Ashish Verma Penumatcha ,  Uygar Avci ,  Matthew Metz ,  Chelsey Dorow

IPC: H01L29/49 ,  H01L21/02 ,  H01L29/06 ,  H01L29/24 ,  H01L29/423 ,  H01L29/66 ,  H01L29/76 ,  H01L29/775 ,  H01L29/786

Abstract: Techniques and mechanisms for providing gate dielectric structures of a transistor. In an embodiment, the transistor comprises a thin channel structure which comprises one or more layers of a transition metal dichalcogenide (TMD) material. The channel structure forms two surfaces on opposite respective sides thereof, wherein the surfaces extend to each of two opposing edges of the channel structure. A composite gate dielectric structure comprises first bodies of a first dielectric material, wherein the first bodies each adjoin a different respective one of the two opposing edges, and variously extend to each of the surfaces two surfaces. The composite gate dielectric structure further comprises another body of a second dielectric material other than the first dielectric material. In another embodiment, the other body adjoins one or both of the two surfaces, and extends along one or both of the two surfaces to each of the first bodies.

公开(公告)号：US12266720B2

公开(公告)日：2025-04-01

申请号：US17129486

申请日：2020-12-21

Applicant: Intel Corporation

Inventor： Carl Naylor ,  Chelsey Dorow ,  Kevin O'Brien ,  Sudarat Lee ,  Kirby Maxey ,  Ashish Verma Penumatcha ,  Tanay Gosavi ,  Patrick Theofanis ,  Chia-Ching Lin ,  Uygar Avci ,  Matthew Metz ,  Shriram Shivaraman

IPC: H01L29/76 ,  H01L21/02 ,  H01L21/8256 ,  H01L27/092 ,  H01L29/24

Abstract: Transistor structures with monocrystalline metal chalcogenide channel materials are formed from a plurality of template regions patterned over a substrate. A crystal of metal chalcogenide may be preferentially grown from a template region and the metal chalcogenide crystals then patterned into the channel region of a transistor. The template regions may be formed by nanometer-dimensioned patterning of a metal precursor, a growth promoter, a growth inhibitor, or a defected region. A metal precursor may be a metal oxide suitable, which is chalcogenated when exposed to a chalcogen precursor at elevated temperature, for example in a chemical vapor deposition process.

公开(公告)号：US20250105136A1

公开(公告)日：2025-03-27

申请号：US18473887

申请日：2023-09-25

Applicant: Intel Corporation

Inventor： Kimin Jun ,  Adel A. Elsherbini ,  Chia-Ching Lin ,  Sou-Chi Chang ,  Thomas Lee Sounart ,  Tushar Kanti Talukdar ,  Johanna Marie Swan ,  Uygar Avci

IPC: H01L23/522 ,  H01L23/00 ,  H01L23/498 ,  H01L23/528 ,  H01L23/538 ,  H01L25/065 ,  H01L25/16

Abstract: Capacitors for use with integrated circuit packages are disclosed. An example apparatus includes a semiconductor substrate, a metal layer coupled to the semiconductor substrate, a dielectric layer coupled to the metal layer, the dielectric layer including a capacitor disposed therein, and an interface layer positioned between the metal layer and the dielectric layer, the interface layer in contact with the dielectric layer and in contact with the metal layer.