Apparatus for dilution of discharged fuel
    41.
    发明授权
    Apparatus for dilution of discharged fuel 有权
    用于稀释排出的燃料的装置

    公开(公告)号:US07285351B2

    公开(公告)日:2007-10-23

    申请号:US10676470

    申请日:2003-10-01

    IPC分类号: H01M8/04 H01M2/12

    摘要: An apparatus for dilution of discharged fuel of a fuel cell is provided, which has an inlet for guiding purged hydrogen gas coming from the fuel cell, a reservoir for storing the purged hydrogen gas guided through the inlet, and a cathode exhaust gas pipe penetrating the reservoir. The cathode exhaust gas pipe has a feature that it has holes inside the reservoir and is supplied with cathode exhaust gas of the fuel cell. Also the apparatus has a feature that the cathode exhaust gas pipe sucks the purged hydrogen gas stored in the reservoir through the holes and discharges the purged hydrogen gas diluted by mixing with the cathode exhaust gas.

    摘要翻译: 提供一种用于稀释燃料电池的排放燃料的装置,其具有用于引导来自燃料电池的净化氢气的入口,用于存储通过入口引导的净化氢气的储存器和穿透入口的阴极排气管 水库 阴极排气管具有在储存器内部具有孔的燃料电池的阴极排气的特征。 此外,该装置具有阴极排气管通过孔吸收储存在储存器中的净化氢气并排出通过与阴极废气混合而稀释的净化氢气的特征。

    Semiconductor manufacturing equipment
    47.
    发明授权
    Semiconductor manufacturing equipment 失效
    半导体制造设备

    公开(公告)号:US06352073B1

    公开(公告)日:2002-03-05

    申请号:US09404595

    申请日:1999-09-24

    IPC分类号: B28D704

    摘要: By preventing warping of chips when detaching individual chips from a dicing sheet, improvement in quality without cracks and in productivity is realized. A collet (115) used in a step of detaching chips (110) discretely divided as bonded to a dicing sheet (109) from the dicing sheet has a flat attraction surface made of a porous material of a size equal to or larger than the chip size. Alternatively, the collet may have a chip attraction groove containing poles, balls or hemispheres, for example, to prevent warping of chips. In the step of detaching each chip from the dicing sheet, a means for reducing the bonding force of the dicing sheet, such as heating device or cooling device, may be provided. Thus, warping or cracking can be prevented in a process of thinned semiconductor substrate. Additionally, since the means for reducing the bonding force of the dicing sheet is provided in a semiconductor manufacturing equipment, breakage or cracking of chips can be prevented more reliably.

    摘要翻译: 通过防止从切割片上分离各个芯片时芯片的翘曲,可以实现质量的提高,无裂纹和生产率。 在从切割片离散分离的切片(110)分离的步骤中使用的夹头(115)具有由等于或大于芯片的尺寸的多孔材料制成的平坦的吸引表面 尺寸。 或者,夹头可以具有例如包含杆,球或半球的芯片吸引槽,以防止芯片翘曲。 在从切割片分离每个芯片的步骤中,可以提供用于降低切割片(例如加热装置或冷却装置)的结合力的装置。 因此,在减薄的半导体衬底的工艺中可以防止翘曲或破裂。 此外,由于在半导体制造装置中设置了用于降低切割片的接合力的装置,因此可以更可靠地防止切屑的断裂或破裂。