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公开(公告)号：US08267636B2
公开(公告)日：2012-09-18
申请号：US12117355
申请日：2008-05-08
IPC分类号： B25J18/00
CPC分类号： B25J11/0095 , B25J9/106 , B25J9/126 , H01L21/67742 , H01L21/68707 , Y10S414/141 , Y10S901/15 , Y10S901/21 , Y10S901/23 , Y10S901/27 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.
摘要翻译： 一种基板输送装置，其特征在于，包括：第一无转轴旋转马达，其具有第一定子和第一转子，所述第一定子线性分布，所述第一转子与第一臂连结，第二无轴旋转马达，包括第二定子和第二转子， 第二定子是线性分布的，第二转子耦合到第二臂，第二臂连接到第一臂，第一衬底支撑件联接到第一和第二臂中的至少一个，其中第一定子和第二定子 被构造成使得第一和第二臂和第一基板支撑件在定子内部，并且在第一和第二无轴旋转马达之间的连接处的马达输出和第一和第二臂中的相应的一个是合力设置在 第一和第二臂。
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公开(公告)号：US08267634B2
公开(公告)日：2012-09-18
申请号：US11803077
申请日：2007-05-11
申请人： Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert C. May
发明人： Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert C. May
IPC分类号： B65G1/00
CPC分类号： H01L21/6732 , H01L21/67017 , H01L21/67276 , H01L21/67379 , H01L21/67386 , H01L21/67715 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67775 , H01L21/67778
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
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公开(公告)号：US20110316370A1
公开(公告)日：2011-12-29
申请号：US13219267
申请日：2011-08-26
IPC分类号： H02K7/00
CPC分类号： H02K41/03 , H01L21/67742 , H01L21/68707 , H02K2201/18
摘要： In accordance to an aspect of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a frame defining a chamber, at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation. The substrate transport apparatus further includes at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber. The substrate transport apparatus further includes at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.
摘要翻译： 根据所公开的实施例的一个方面，提供了一种基板输送装置。 衬底传送装置包括限定腔室的框架，至少一个至少部分地嵌入腔室的周壁的定子模块，所述至少一个定子模块限定旋转轴线。 衬底传送装置还包括至少一个转子，其基于围绕旋转轴线相对于至少一个定子模块基本上同心地设置，所述至少一个转子被配置为与所述至少一个定子模块相接合并被相应的一个 所述至少一个定子模块基本上在所述腔室内没有接触。 衬底传送装置还包括连接到至少一个转子的至少一个衬底传送臂，并具有构造成保持至少一个衬底的至少一个端部执行器。
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公开(公告)号：US07904182B2
公开(公告)日：2011-03-08
申请号：US11178615
申请日：2005-07-11
申请人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
发明人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
摘要翻译： 控制系统包括具有主控制器的集群架构，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分，以及包括由主控制器控制的集群控制器的分布式控制部分。 集群控制器控制一个或多个第二个遥控器的活动。 第一和第二遥控器中的每一个被用于驱动一个或多个轴。
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公开(公告)号：US20110014016A1
公开(公告)日：2011-01-20
申请号：US12843659
申请日：2010-07-26
申请人： Daniel A. Hall , Christopher Hofmeister , William Fosnight , Jeff G. Araujo , Steven Allen , Glenn Sindledecker
发明人： Daniel A. Hall , Christopher Hofmeister , William Fosnight , Jeff G. Araujo , Steven Allen , Glenn Sindledecker
IPC分类号： H01L21/673
CPC分类号： H01L21/67775
摘要： A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.
摘要翻译： 基板处理装置具有连接到框架并适于将基板输送容器与框架配合的框架和负载端口。 该装置具有适于可拆卸地连接到框架并且装配在装载口下方的可移动存储器。 存储器可以是容纳基板处理装置的电，机械或机电装置的外壳。
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公开(公告)号：US07712808B2
公开(公告)日：2010-05-11
申请号：US11239272
申请日：2005-09-29
CPC分类号： H01L21/68707 , Y10S414/141
摘要： A flat workpiece transport apparatus having a movable arm and an end effector. The end effector is connected to the arm. The end effector has a movable grip for holding a flat workpiece on the end effector. The end effector has a grip actuator operably connected to the movable grip. The grip actuator has more than one actuation members and a resiliently flexible member connecting the more than one actuation members. Each actuation member actuates at least one corresponding grip element of the movable grip to capture or release the workpiece. Flexure of the resiliently flexible member effects movement of at least one of the more than one actuation members for actuation of the at least one corresponding grip element. The resiliently flexible member is sandwiched by substantially rigid portions of the more than one actuation members.
摘要翻译： 具有可动臂和端部执行器的平坦工件输送装置。 末端执行器连接到手臂。 末端执行器具有用于将平坦的工件保持在末端执行器上的可动手柄。 端部执行器具有可操作地连接到可动夹具的夹紧致动器。 把手致动器具有不止一个致动构件和连接多于一个致动构件的弹性柔性构件。 每个致动构件致动可动夹具的至少一个对应的夹紧元件以捕获或释放工件。 弹性柔性构件的弯曲影响多于一个致动构件中的至少一个的运动，用于致动至少一个相应的夹紧元件。 弹性柔性构件被多于一个致动构件的基本上刚性的部分夹持。
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公开(公告)号：US20100054897A1
公开(公告)日：2010-03-04
申请号：US12544064
申请日：2009-08-19
申请人： Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert C. May
发明人： Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert C. May
IPC分类号： H01L21/67 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67386 , H01L21/67196 , H01L21/67201 , H01L21/67276 , H01L21/67379 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67766 , H01L21/67772 , H01L21/67775
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
摘要翻译： 一种半导体工件处理系统，具有至少一个用于处理工件的处理装置，主输送系统，辅助输送系统以及第一输送系统和第二输送系统之间的一个或多个接口。 主要和次要运输系统各自具有基本上恒定速度的一个或多个部分和与等速段相通的队列部分。
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公开(公告)号：US07575406B2
公开(公告)日：2009-08-18
申请号：US10624987
申请日：2003-07-22
CPC分类号： H01L21/67161 , H01L21/67167 , H01L21/67173 , H01L21/67184 , H01L21/67709 , H01L21/67724 , H01L21/67727 , H01L21/67742 , H01L21/67766 , Y10S414/135
摘要： A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening.
摘要翻译： 一种具有第一室，运输车辆和另一室的半导体工件处理设备。 第一个房间能够与外界气氛隔绝。 运输车辆位于第一室中，并且可从第一室移动地支撑，用于相对于第一室线性运动。 运输车辆包括基座和可移动地安装到基座并且能够相对于基座进行多通道移动的整体半导体工件传送臂。 另一个室通过第一室的可关闭的开口可通信地连接到第一室。 开口的尺寸设计成允许运输车辆通过开口在第一室和另一个室之间转运。
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公开(公告)号：US07522267B2
公开(公告)日：2009-04-21
申请号：US11485146
申请日：2006-07-11
CPC分类号： H01L21/681 , H01L21/67259 , H01L21/68 , H01L21/68707
摘要： A substrate processing apparatus is provided with a substrate transport apparatus. The transport apparatus is used for automating alignment of the processing apparatus. In one aspect, a through-beam sensor on the transport apparatus is used to level parts of the processing apparatus. In another aspect, a through-beam sensor on the transport apparatus is used to determine the locations and angular orientations of substrate stations within a plane. In another aspect, the transport apparatus teaches itself the accurate location of a substrate aligner by repeatedly placing the substrate on the aligner, recording positional data, constructing a cost function, and determining the location of the aligner by minimizing the cost function using a numerical technique.
摘要翻译： 基板处理装置具有基板输送装置。 运送装置用于使处理装置的对准自动化。 在一个方面，传送装置上的通过光束传感器用于对处理装置的部分进行平坦化。 在另一方面，传送装置上的通过束传感器用于确定在平面内的衬底台的位置和角取向。 另一方面，运输设备通过将衬底重新放置在对准器上来记录衬底对准器的准确位置，记录位置数据，构建成本函数，以及通过使用数字技术最小化成本函数来确定对准器的位置 。
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公开(公告)号：US20090033316A1
公开(公告)日：2009-02-05
申请号：US12163802
申请日：2008-06-27
IPC分类号： G01B7/00
CPC分类号： G01D5/2086
摘要： An apparatus including a controller, a transport in communication with the controller having a movable portion and a transport path and a multi-dimensional position measurement device in communication with the controller, the multi-dimensional position measurement device including a plurality of transformers and at least one element attached to the movable portion, wherein the multi-dimensional position measurement device is configured so that a circuit is completed in at least one plurality of transformers as the at least one element passes proximate to the at least one of the plurality of transformers and the controller is configured to calculate a multi-dimensional position of the movable object based on an output of the at least one of the plurality of transformers, wherein the multi-dimensional position includes at least a gap between the movable portion and the plurality of transformers.
摘要翻译： 一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的传输和与控制器通信的多维位置测量装置，所述多维位置测量装置包括多个变压器，并且至少 一个元件附接到可移动部分，其中所述多维位置测量装置被配置为使得当至少一个元件通过所述多个变压器中的至少一个变压器时至少一个多个变压器中完成电路，并且 控制器被配置为基于多个变压器中的至少一个的输出来计算可移动物体的多维位置，其中多维位置至少包括可移动部分和多个变压器之间的间隙 。
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