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公开(公告)号：US20070252476A1
公开(公告)日：2007-11-01
申请号：US11790806
申请日：2007-04-27
申请人： Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masanori Ueda , Go Endo
发明人： Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masanori Ueda , Go Endo
IPC分类号： H01L41/00 , H01L41/047
摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film so as to have a portion that overlaps the lower electrode across the piezoelectric film. At least a part of an outer end of the piezoelectric film is further in than an outer end of an opposing region in which the upper and lower electrodes overlap each other across the piezoelectric film.
摘要翻译： 压电薄膜谐振器包括基板，设置在基板上的下电极，设置在下电极上的压电薄膜和设置在压电薄膜上的上电极，以便具有与下电极重叠的部分跨越压电 电影。 压电薄膜的外端部的至少一部分进一步位于上下电极跨越压电薄膜的相对区域的外端。
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公开(公告)号：US20060255693A1
公开(公告)日：2006-11-16
申请号：US11430184
申请日：2006-05-09
申请人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
发明人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
IPC分类号： H01L41/00
摘要： A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the lower electrode; and an upper electrode that is formed on the piezoelectric film. In the piezoelectric thin-film resonator, the upper electrode has a greater film thickness than the lower electrode.
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公开(公告)号：US20060244553A1
公开(公告)日：2006-11-02
申请号：US11413104
申请日：2006-04-28
申请人： Tsuyoshi Yokoyama , Tokihiro Nishihara , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
发明人： Tsuyoshi Yokoyama , Tokihiro Nishihara , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
IPC分类号： H03H9/56
CPC分类号： H03H9/173 , H03H3/04 , H03H9/132 , H03H9/174 , H03H2003/0428 , H03H2003/0457
摘要： A piezoelectric thin-film resonator includes a lower electrode provided on a substrate, a piezoelectric thin film provided on the lower electrode, and an upper electrode provided on the piezoelectric thin film. A membrane region is defined by a region where the upper electrode and the lower electrode overlap each other to sandwich the piezoelectric thin film therebetween and has an elliptical shape, and the lower electrode is also provided at an outer side of the membrane region in a region in which neither an extraction electrode of the upper electrode nor an extraction electrode of the lower electrode is provided.
摘要翻译： 压电薄膜谐振器包括设置在基板上的下电极，设置在下电极上的压电薄膜和设置在压电薄膜上的上电极。 膜区域由上电极和下电极彼此重叠的区域限定，以夹在其间的压电薄膜并具有椭圆形状，并且下电极也设置在膜区域的外侧，区域 其中不设置上电极的引出电极和下电极的引出电极。
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公开(公告)号：US20060091764A1
公开(公告)日：2006-05-04
申请号：US11259347
申请日：2005-10-27
申请人： Jun Tsutsumi , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
发明人： Jun Tsutsumi , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
IPC分类号： H01L41/08
CPC分类号： H03H9/02149 , H03H9/02118 , H03H9/132 , H03H9/174 , H03H2003/0428
摘要： A piezoelectric thin-film resonator includes: a substrate; a lower electrode that is formed on the substrate; a piezoelectric film that is formed on the lower electrode and the substrate; and an upper electrode that is formed on the piezoelectric film, with the piezoelectric film being partially interposed between the lower electrode and the upper electrode facing each other. In this piezoelectric thin-film resonator, at least a part of the outer periphery of the piezoelectric film interposed between the lower electrode and the upper electrode overlaps the outer periphery of the region formed by the upper electrode and the lower electrode facing each other.
摘要翻译： 压电薄膜谐振器包括：基板; 形成在基板上的下电极; 形成在下电极和基板上的压电膜; 以及形成在所述压电膜上的上电极，所述压电膜被部分插入在所述下电极和所述上电极彼此面对之间。 在该压电薄膜谐振器中，夹在下电极和上电极之间的压电薄膜的外周的至少一部分与由上电极和下电极相对的区域的外周重叠。
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公开(公告)号：US20050264137A1
公开(公告)日：2005-12-01
申请号：US11138893
申请日：2005-05-27
申请人： Shinji Taniguchi , Tokihiro Nishihara , Takeshi Sakashita , Tsuyoshi Yokoyama , Masafumi Iwaki , Masanori Ueda , Tsutomu Miyashita
发明人： Shinji Taniguchi , Tokihiro Nishihara , Takeshi Sakashita , Tsuyoshi Yokoyama , Masafumi Iwaki , Masanori Ueda , Tsutomu Miyashita
摘要： A piezoelectric thin-film resonator includes a device substrate and a laminated body provided on the device substrate and composed of a lower electrode, an upper electrode and a piezoelectric film sandwiched between the lower and upper electrodes. The laminated body has a membrane portion in which the upper and lower electrodes overlap with each other through the piezoelectric film, and a gap has a dome shape being formed between the device substrate and the lower electrode and located below the membrane portion.
摘要翻译： 压电薄膜谐振器包括器件基板和设置在器件基板上并由夹在下电极和上电极之间的下电极，上电极和压电薄膜组成的层叠体。 层叠体具有通过压电膜彼此重叠的上部电极和下部电极的膜部，并且在该器件基板和下部电极之间形成有位于该膜部下方的间隙。
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公开(公告)号：US07345402B2
公开(公告)日：2008-03-18
申请号：US11326418
申请日：2006-01-06
申请人： Shinji Taniguchi , Tsuyoshi Yokoyama , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
发明人： Shinji Taniguchi , Tsuyoshi Yokoyama , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
CPC分类号： H03H9/132 , H03H3/02 , H03H9/02133 , H03H9/173 , H03H2003/021
摘要： A piezoelectric thin-film resonator includes a film laminate formed on a device substrate, the film laminate including a lower electrode, a piezoelectric film provided on the device substrate and the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the upper and lower electrodes has an electrode leading portion that extends from an membrane in which the upper electrode overlaps with the lower electrode through the piezoelectric film and has a width narrower than that of the membrane.
摘要翻译： 压电薄膜谐振器包括形成在器件基板上的薄膜层叠体，该薄膜层叠体包括下电极，设置在器件基板上的压电薄膜和下电极，以及设置在压电薄膜上的上电极。 上电极和下电极中的至少一个具有电极引导部分，其从上部电极通过压电膜与下部电极重叠的膜延伸并且具有比膜的宽度窄的宽度。
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公开(公告)号：US20060152110A1
公开(公告)日：2006-07-13
申请号：US11326418
申请日：2006-01-06
申请人： Shinji Taniguchi , Tsuyoshi Yokoyama , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
发明人： Shinji Taniguchi , Tsuyoshi Yokoyama , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
CPC分类号： H03H9/132 , H03H3/02 , H03H9/02133 , H03H9/173 , H03H2003/021
摘要： A piezoelectric thin-film resonator includes a film laminate formed on a device substrate, the film laminate including a lower electrode, a piezoelectric film provided on the device substrate and the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the upper and lower electrodes has an electrode leading portion that extends from an membrane in which the upper electrode overlaps with the lower electrode through the piezoelectric film and has a width narrower than that of the membrane.
摘要翻译： 压电薄膜谐振器包括形成在器件基板上的薄膜层叠体，该薄膜层叠体包括下电极，设置在器件基板上的压电薄膜和下电极，以及设置在压电薄膜上的上电极。 上电极和下电极中的至少一个具有电极引导部分，其从上部电极通过压电膜与下部电极重叠的膜延伸并且具有比膜的宽度窄的宽度。
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公开(公告)号：US20060066419A1
公开(公告)日：2006-03-30
申请号：US11236861
申请日：2005-09-28
申请人： Masafumi Iwaki , Tokihiro Nishihara , Jun Tsutsumi , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masanori Ueda , Tsutomu Miyashita
发明人： Masafumi Iwaki , Tokihiro Nishihara , Jun Tsutsumi , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masanori Ueda , Tsutomu Miyashita
IPC分类号： H03H9/70
CPC分类号： H03H9/564 , H03H7/18 , H03H7/46 , H03H9/0571 , H03H9/706
摘要： A duplexer includes: first and second filters including film bulk acoustic resonators (FBARs) arranged in a ladder form; first and second integrated-passive devices (IPDs) provided between a common terminal and the first and second filters; and a substrate on which the first and second filters and the first and second IPDs are mounted. The substrate includes conductive patterns that realize inductances connected between the first and second filters and ground. The first and second IPDs includes inductors connected to the first and second filters.
摘要翻译： 双工器包括：第一和第二滤波器，包括以梯形布置的薄膜体声共振器（FBAR）; 提供在公共端子与第一和第二滤波器之间的第一和第二集成无源器件（IPD）; 以及其上安装有第一和第二滤光器以及第一和第二IPD的基板。 衬底包括实现连接在第一和第二滤波器和地之间的电感的导电图案。 第一和第二IPD包括连接到第一和第二滤波器的电感器。
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公开(公告)号：US20100096358A1
公开(公告)日：2010-04-22
申请号：US12647794
申请日：2009-12-28
申请人： Shinji TANIGUCHI , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
发明人： Shinji TANIGUCHI , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
IPC分类号： C23F1/00
CPC分类号： H03H9/205 , H03H3/00 , H03H3/0073 , H03H3/04 , H03H9/0211 , H03H9/02118 , H03H9/02133 , H03H9/02149 , H03H9/131 , H03H9/132 , H03H9/15 , H03H9/173 , H03H9/174 , H03H9/178 , H03H9/54 , H03H9/568 , H03H9/587 , H03H9/588 , H03H9/605 , H03H9/6483 , H03H2003/021 , H03H2003/023 , H03H2003/0414 , H03H2003/0471 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49124 , Y10T29/49208 , Y10T29/49224
摘要： A ladder filter includes a series resonator having a first film laminate in which an upper electrode and a lower electrode face each other across a piezoelectric film, and a first film provided on the first film laminate, and a parallel resonator having a second film laminate having a structure similar to that of the first film laminate, a second film provided on the second film laminate, and another first film identical to the first film.
摘要翻译： 梯形滤波器包括串联谐振器，其具有第一膜层叠体，其中上电极和下电极在压电膜上彼此面对，第一膜设置在第一膜层叠体上，并且具有第二膜层叠体， 类似于第一膜层压体的结构，设置在第二膜层压体上的第二膜和与第一膜相同的另一第一膜。
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公开(公告)号：US20080129417A1
公开(公告)日：2008-06-05
申请号：US11907704
申请日：2007-10-16
申请人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
发明人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
IPC分类号： H03H9/56
CPC分类号： H03H9/205 , H03H3/00 , H03H3/0073 , H03H3/04 , H03H9/0211 , H03H9/02118 , H03H9/02133 , H03H9/02149 , H03H9/131 , H03H9/132 , H03H9/15 , H03H9/173 , H03H9/174 , H03H9/178 , H03H9/54 , H03H9/568 , H03H9/587 , H03H9/588 , H03H9/605 , H03H9/6483 , H03H2003/021 , H03H2003/023 , H03H2003/0414 , H03H2003/0471 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49124 , Y10T29/49208 , Y10T29/49224
摘要： A ladder filter includes a series resonator having a first film laminate in which an upper electrode and a lower electrode face each other across a piezoelectric film, and a first film provided on the first film laminate, and a parallel resonator having a second film laminate having a structure similar to that of the first film laminate, a second film provided on the second film laminate, and another first film identical to the first film.
摘要翻译： 梯形滤波器包括串联谐振器，其具有第一膜层叠体，其中上电极和下电极在压电膜上彼此面对，第一膜设置在第一膜层叠体上，并且具有第二膜层叠体， 类似于第一膜层压体的结构，设置在第二膜层压体上的第二膜和与第一膜相同的另一第一膜。
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