公开(公告)号：US08317245B2

公开(公告)日：2012-11-27

申请号：US12305468

申请日：2007-06-21

申请人： Yu Sun ,  Keekyoung Kim

发明人： Yu Sun ,  Keekyoung Kim

IPC分类号： B25J7/00

CPC分类号： B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

摘要： The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

摘要翻译： 本发明涉及一种微抓爪的设计和微细加工方法，其能够抓住大范围尺寸和双轴力感测能力的微型和纳米物体。 夹持运动由一个或多个电热致动器产生。 沿x和y方向的集成力传感器可以测量夹紧力以及沿着法向方向施加在微夹臂末端的力，并且分辨率低至纳摩顿。 微加工方法可实现致动器和力传感器的整体集成。

公开(公告)号：US08159107B2

公开(公告)日：2012-04-17

申请号：US11757331

申请日：2007-06-01

申请人： Harold L. Stalford

发明人： Harold L. Stalford

IPC分类号： H01L41/08

CPC分类号： H02N10/00 ,  B81B3/0024 ,  B81B2201/031 ,  B81B2201/034 ,  B81B2201/037 ,  B81B2201/051 ,  H02K7/00 ,  H02N1/002 ,  H02N11/006

摘要： A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.

摘要翻译： 微型旋转机器可以包括微型致动器和耦合到微型致动器的微型轴。 微型轴包括水平轴，并且可由微型致动器旋转。 微型工具联接到微型轴，并且可操作以响应于微型轴的运动而执行工作。

公开(公告)号：US07760065B2

公开(公告)日：2010-07-20

申请号：US11772039

申请日：2007-06-29

申请人： Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

发明人： Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

IPC分类号： H01H71/18 ,  H01H61/00

CPC分类号： H01H1/0036 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/031 ,  H01H37/00 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006 ,  H01H2061/008

摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.

摘要翻译： 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括​​具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。

公开(公告)号：US07155911B2

公开(公告)日：2007-01-02

申请号：US11107787

申请日：2005-04-18

申请人： Kia Silverbrook

发明人： Kia Silverbrook

IPC分类号： F01B29/10

CPC分类号： B41J2/1645 ,  B41J2/14427 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1648 ,  B81B3/007 ,  B81B2201/031 ,  B81B2201/036 ,  B81B2201/052 ,  Y10T29/42 ,  Y10T29/49083 ,  Y10T29/49401

摘要： A thermal bend actuator (6) is provided with a group of upper arms (23, 25, 26) and a group of lower arms (27, 28) which are non planar, so increasing the stiffness of the arms. The arms (23, 25, 26,27,28) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material

摘要翻译： 热弯曲致动器（6）设置有一组上臂（23,25,26）和一组非平面的下臂（27,28），因此增加了臂的刚度。 臂（23,25,26,27,28）可以彼此横向间隔开，并且在平面图中不会彼此过多，因此能够通过沉积单层臂形成材料来形成所有臂

公开(公告)号：US06800912B2

公开(公告)日：2004-10-05

申请号：US10147300

申请日：2002-05-17

申请人： Mehmet Ozgur

发明人： Mehmet Ozgur

IPC分类号： H01L2984

CPC分类号： H01H1/0036 ,  B81B2201/014 ,  B81B2201/031 ,  B81C1/00246 ,  B81C2203/0735 ,  H01H61/00 ,  H01H2061/006

摘要： A monolithically integrated, electromechanical microwave switch, capable of handling signals from DC to millimeter-wave frequencies, and an integrated electromechanical tunable capacitor are described. Both electromechanical devices include movable beams actuated either by thermo-mechanical or by electrostatic forces. The devices are fabricated directly on finished silicon-based integrated circuit wafers, such as CMOS, BiCMOS or bipolar wafers. The movable beams are formed by selectively removing the supporting silicon underneath the thin films available in a silicon-based integrated circuit technology, which incorporates at least one polysilicon layer and two metallization layers. A cavity and a thick, low-loss metallization are used to form an electrode above the movable beam. A thick mechanical support layer is formed on regions where the cavity is located, or substrate is bulk-micro-machined, i.e., etched.

摘要翻译： 描述了能够处理从DC到毫米波频率的信号的单片集成的机电微波开关，以及集成的机电可调电容器。 两个机电装置都包括通过热机械或静电力而致动的可移动梁。 这些器件直接在成品硅基集成电路晶片上制造，例如CMOS，BiCMOS或双极晶片。 可移动光束通过选择性地去除在基于硅的集成电路技术中可获得的薄膜下面的支撑硅而形成，该技术包括至少一个多晶硅层和两个金属化层。 使用空腔和厚的低损耗金属化在可动梁的上方形成电极。 在空腔所在的区域上形成厚的机械支撑层，或者衬底被体微加工，即蚀刻。

公开(公告)号：US20040097066A1

公开(公告)日：2004-05-20

申请号：US10663983

申请日：2003-09-17

申请人： Corporation for National Research Initiatives

发明人： Mehmet Ozgur

IPC分类号： H01L021/4763

CPC分类号： H01H1/0036 ,  B81B2201/014 ,  B81B2201/031 ,  B81C1/00246 ,  B81C2203/0735 ,  H01H61/00 ,  H01H2061/006

摘要： A monolithically integrated, electromechanical microwave switch, capable of handling signals from DC to millimeter-wave frequencies, and an integrated electromechanical tunable capacitor are described. Both electromechanical devices include movable beams actuated either by thermo-mechanical or by electrostatic forces. The devices are fabricated directly on finished silicon-based integrated circuit wafers, such as CMOS, BiCMOS or bipolar wafers. The movable beams are formed by selectively removing the supporting silicon underneath the thin films available in a silicon-based integrated circuit technology, which incorporates at least one polysilicon layer and two metallization layers. A cavity and a thick, low-loss metallization are used to form an electrode above the movable beam. A thick mechanical support layer is formed on regions where the cavity is located, or substrate is bulk-micro-machined, i.e., etched.

摘要翻译： 描述了能够处理从DC到毫米波频率的信号的单片集成的机电微波开关，以及集成的机电可调电容器。 两个机电装置都包括通过热机械或静电力而致动的可移动梁。 这些器件直接在成品硅基集成电路晶片上制造，例如CMOS，BiCMOS或双极晶片。 可移动光束通过选择性地去除在基于硅的集成电路技术中可获得的薄膜下面的支撑硅而形成，该技术包括至少一个多晶硅层和两个金属化层。 使用空腔和厚的低损耗金属化在可动梁的上方形成电极。 在空腔所在的区域上形成厚的机械支撑层，或者衬底被体微加工，即蚀刻。

公开(公告)号：US06691513B1

公开(公告)日：2004-02-17

申请号：US10222124

申请日：2002-08-16

申请人： Edward S. Kolesar

发明人： Edward S. Kolesar

IPC分类号： F01B2910

CPC分类号： B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  H01H1/0036 ,  H01H2061/006 ,  H01H2061/008

摘要： A system and method for providing an improved micro-electro-mechanical (MEMS) electrothermal actuator is disclosed. In prior art electrothermal actuators an electric current passes through a narrow arm and returns through a wide arm. The larger current density in the narrow arm heats the narrow arm so that it expands more than the wide arm. The differential expansion of the hot narrow arm and the cold wide arm deflects the end of the cold wide arm. The present invention provides an additional hot arm to provide a return path for the electric current so that the cold arm does not conduct electric current. The present invention optimizes power consumption, tip deflection and generated force. A bidirectional thermal beam actuator is also disclosed.

摘要翻译： 公开了一种用于提供改进的微电机械（MEMS）电热致动器的系统和方法。 在现有技术的电热致动器中，电流通过窄臂并通过宽臂返回。 窄臂中较大的电流密度加热了窄臂，使其比宽臂扩张。 热的窄臂和冷的宽臂的差动膨胀使冷宽臂的端部偏转。 本发明提供了一种额外的热臂，以提供电流的返回路径，使得冷臂不传导电流。 本发明优化了功耗，尖端偏转和产生的力。 还公开了双向热束致动器。

公开(公告)号：US06675578B1

公开(公告)日：2004-01-13

申请号：US09575436

申请日：2000-05-22

申请人： Michael J. Sinclair

发明人： Michael J. Sinclair

IPC分类号： F01B2910

CPC分类号： F03G7/06 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2203/051 ,  H01H1/0036 ,  H01H61/00 ,  H01H2061/006

摘要： An in-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material, for example. The actuator includes first and second anchors secured to the substrate and a floating center beam positioned between the first and second anchors and movable relative to the substrate. Symmetric first and second sets of elongated thermal half-beams are secured between opposite sides of the floating center beam and the respective first and second anchors. The half-beams are formed of semiconductor material, such as polysilicon. A current source directs electrical current through the thermal half beams via the anchors to impart thermal expansion of the thermal half-beams and hence linear motion of the floating center beam generally parallel to the substrate. In one implementation, the half-beams are configured at a bias angle to give the floating beam an affinity for in-plane motion. An actuator of the present invention with such bias angles can give the actuator an overall chevron configuration.

摘要翻译： 例如，在半导体材料的平面基板上形成有平面内的热扣梁微电机械致动器。 致动器包括固定到基板的第一和第二锚固件以及位于第一和第二锚固件之间并可相对于基板移动的浮动中心梁。 对称的第一和第二组细长的热半光束被固定在浮动中心光束的相对侧和相应的第一和第二锚定器之间。 半波束由诸如多晶硅的半导体材料形成。 电流源通过锚定器引导电流通过热半束，以赋予热半光束的热膨胀，并因此使浮动中心光束与基底平行的线性运动。 在一个实施方案中，半波束被配置为偏置角，以使浮动波束对于平面内运动具有亲和力。 具有这种偏置角度的本发明的致动器可以使致动器具有整体人字形配置。

公开(公告)号：US20030200748A1

公开(公告)日：2003-10-30

申请号：US10136703

申请日：2002-04-30

申请人： ADC Telecommunications, Inc.

发明人： Susan C. Bromley ,  Bradley J. Nelson ,  Karl Vollmers ,  Arunkumar Subramanian ,  Eniko Enikov ,  Kamal Deep Mothilal

IPC分类号： H02N010/00

CPC分类号： B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  H01H1/0036 ,  H01H61/04 ,  H01H2001/0068 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

摘要： An actuator having a hot-arm and a cold-arm wherein the hot-arm and cold-arm are vertically offset from one another. The hot-arm is heated to cause the actuator to move both vertically and horizontally. When used as a relay, an electrostatic force latches the actuator when the electrodes are brought in close proximity to one another.

摘要翻译： 具有热臂和冷臂的致动器，其中热臂和冷臂彼此垂直偏移。 热臂被加热，使致动器垂直和水平移动。 当用作继电器时，当电极彼此靠近时，静电力将致动器锁定。

公开(公告)号：US20020195674A1

公开(公告)日：2002-12-26

申请号：US10217714

申请日：2002-08-13

申请人： 3M Innovative Properties Company

发明人： Billy L. Weaver ,  Douglas P. Goetz ,  Kathy L. Hagen ,  Mike E. Hamerly ,  Robert G. Smith ,  Silva K. Theiss

IPC分类号： H01L029/82

CPC分类号： G02B6/358 ,  B81B3/0024 ,  B81B3/0037 ,  B81B2201/031 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/053 ,  B82Y15/00 ,  G02B6/352 ,  G02B6/3576 ,  H01G5/18 ,  H01H1/0036 ,  H01H61/04 ,  H01H2061/006 ,  H01H2061/008

摘要： A micrometer sized, single-stage, vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. A member mechanically and electrically couples the free ends of the hot and cold arms such that the member moves away from the substrate when current is applied to at least the hot arm. The hot arm can optionally include a grounding tab to minimize thermal expansion of the cold arm.

摘要翻译： 微米尺寸的单级垂直热致动器，其能够将微米尺寸的光学器件重复并快速地移动离开衬底的表面。 垂直热致动器构造在基板的表面上。 至少一个热臂具有锚固在表面上的第一端和位于表面上方的自由端。 冷臂具有锚固在表面上的第一端和自由端。 冷臂相对于表面位于热臂上方。 机构和电气耦合热臂和冷臂的自由端，使得当电流施加到至少热臂时，构件远离基板移动。 热臂可以可选地包括接地片，以最小化冷臂的热膨胀。