公开(公告)号：US20090109444A1

公开(公告)日：2009-04-30

申请号：US11928625

申请日：2007-10-30

申请人： Der-Shen Wan

发明人： Der-Shen Wan

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01B11/0675

摘要： Methods are provided for estimating a surface profile of a sample in an interferometer having a broad bandwidth light source. The interferometer detects interference pattern intensity data over a series of frames of a relative scan between the sample and a reference surface. Particular methods comprise, for each location (x,y) of interest on the sample: determining an envelope of the detected interference pattern intensity data corresponding the location (x,y) of interest based on amplitudes of the detected interference pattern intensity data; determining a rough estimate zrough of the surface profile of the sample at the location (x,y) of interest based on the envelope; estimating a phase offset θ of the detected intensity data using a curve fitting optimization process to fit the detected intensity data to a broad bandwidth interference model; and refining the rough estimate zrough of the surface profile using the phase offset θ to obtain a fine estimate zfine of the surface profile of the sample at the location (x,y) of interest, the fine estimate zfine having improved resolution over the rough estimate zrough. Similar methods are used for characterizing films applied to substrates.

摘要翻译： 提供了用于估计具有宽带宽光源的干涉仪中的样品的表面轮廓的方法。 干涉仪通过样品和参考表面之间的相对扫描的一系列帧来检测干涉图案强度数据。 对于样本上的感兴趣的每个位置（x，y），特定方法包括：基于检测到的干涉图案强度数据的幅度，确定对应于感兴趣位置（x，y）的检测到的干涉图案强度数据的包络; 基于所述包络确定所述样本在所述位置（x，y）处的所述样本的表面轮廓的粗略估计; 使用曲线拟合优化处理来估计检测到的强度数据的相位偏移θ，以将检测到的强度数据拟合到宽带干扰模型; 并使用相位偏移θ来改善表面轮廓的粗略估计值，以获得样本在感兴趣的位置（x，y）处的表面轮廓的精细估计zfine，精确估计zfine具有比粗略估计值更高的分辨率 zrough。 类似的方法用于表征施加到基底上的膜。

公开(公告)号：US07495772B2

公开(公告)日：2009-02-24

申请号：US11413119

申请日：2006-04-28

申请人： Yan Zhang ,  Kristie L. Cooper ,  Anbo Wang

发明人： Yan Zhang ,  Kristie L. Cooper ,  Anbo Wang

IPC分类号： G01B11/02 ,  G01B9/02 ,  G01B11/28

CPC分类号： G01B11/0675 ,  G01B2290/25 ,  G01N21/39 ,  G01N21/45 ,  G01N21/7746 ,  G01N2021/7773 ,  G01N2021/7779

摘要： A fiber optic sensor includes at least two Fabry-Perot (FP cavities) defined by at least three partially reflecting surfaces which individually and together are capable of generating different interference spectra which are affected by temperature. One of the FP cavities is formed at an end of the sensor and includes a surface which is capable of supporting a thin film, the optical thickness of which is to be measured. The other FP cavity between the lead-in fiber and the first FP cavity thus does not include the film and can thus independently provide highly accurate temperature information for calibrating the optical length of the second FP cavity and compensation for temperature effects on measurement of the thin film supported thereon, preferably by subtraction of a calibrated temperature-dependent change in optical length of the second FP cavity from the measurement made.

摘要翻译： 光纤传感器包括由至少三个部分反射表面限定的至少两个法布里 - 珀罗（FP空腔），该至少三个部分反射表面单独地和一起能够产生受温度影响的不同干涉光谱。 FP腔中的一个形成在传感器的端部，并且包括能够支撑其光学厚度被测量的薄膜的表面。 因此，引入光纤和第一FP腔之间的另一个FP腔不包括膜，因此可以独立地提供高精度的温度信息，用于校准第二FP腔的光学长度，并补偿温度对薄膜测量的影响 优选通过从所进行的测量中减去第二FP空腔的光学长度的校准温度依赖性变化来支撑其上的薄膜。

公开(公告)号：US20090035450A1

公开(公告)日：2009-02-05

申请号：US11908195

申请日：2006-03-09

申请人： Yuichi Tomaru

发明人： Yuichi Tomaru

IPC分类号： C23C14/54 ,  B05C11/00

CPC分类号： C25D21/12 ,  C25D11/005 ,  C25D11/02 ,  G01B11/0675 ,  G01N21/21 ,  G01N21/55 ,  G01N21/8422

摘要： A base material processing apparatus comprises a device for irradiating light from a light transmissive film side to a base material during film formation on a surface of the base material or film processing of the film formed on the surface of the base material. The apparatus also comprises film physical characteristic measuring device for receiving reflected light coming from the base material during the film formation or the film processing, detecting interference light formed by first reflected light and second reflected light contained in the reflected light, the first reflected light being reflected from a surface of the film, the second reflected light being reflected from an interface between the film and the base material, and measuring a physical characteristic of the film with a peak valley technique.

摘要翻译： 基材处理装置包括在基材表面形成膜时将透光膜侧的光照射到基材的装置或在基材表面形成的膜的膜加工的装置。 该装置还包括胶片物理特性测量装置，用于在成膜或胶片处理期间接收来自基材的反射光，检测由第一反射光形成的干涉光和包含在反射光中的第二反射光，第一反射光为 从膜的表面反射，第二反射光从膜和基材之间的界面反射，并用峰谷技术测量膜的物理特性。

公开(公告)号：US20080316499A1

公开(公告)日：2008-12-25

申请号：US11820664

申请日：2007-06-20

申请人： Donald R. Korb ,  Benjamin T. Gravely

发明人： Donald R. Korb ,  Benjamin T. Gravely

IPC分类号： G01B11/06

CPC分类号： G01B11/0675 ,  A61B3/101

摘要： The invention comprises an apparatus for measuring the relative thickness of the lipid layer component of the precorneal tear film on the surface of an eye after distribution of the lipid layer subsequent to blinking is disclosed. An illuminator directs light to the lipid layer of a patient's eye. The illuminator is a broad spectrum light source covering the visible region and is a lambertion light emitter such that the light source is specularly reflected from the lipid layer and undergoes constructive and destructive interference in the lipid layer. A collector collects and focuses the specularly reflected light such that the interference patterns on the tear film lipid layer are observable. The collector also produces an output signal representative of the specularly reflected light which is suitable for further analysis, such as projection on to a high resolution video monitor or analysis by or storage in a computer. In order to facilitate ease of measurement, the patient's head may be positioned on an observation platform when the illuminator directs light to the lipid layer of the patient's eye.

摘要翻译： 本发明包括一种用于测量在眨眼之后脂质层分布之后眼前表面上的预角膜撕裂膜的脂质层组分的相对厚度的装置。 照明器将光引导到患者眼睛的脂质层。 照明器是覆盖可见光区域的广谱光源，是一个薄片光发射器，使得光源从脂质层镜面反射并在脂质层中发生建设性和破坏性干扰。 收集器收集并聚焦镜面反射光，使得可以观察到泪膜脂质层上的干涉图案。 收集器还产生表示镜面反射光的输出信号，其适用于进一步分析，例如投影到高分辨率视频监视器上，或由计算机分析或存储在计算机中。 为了便于测量，当照明器将光引导到患者眼睛的脂质层时，患者的头部可以位于观察平台上。

公开(公告)号：US07468799B2

公开(公告)日：2008-12-23

申请号：US12020351

申请日：2008-01-25

申请人： Peter J. de Groot ,  Xavier Colonna de Lega

发明人： Peter J. de Groot ,  Xavier Colonna de Lega

IPC分类号： G01B9/02 ,  G01B11/28

CPC分类号： G01B11/0675 ,  G01B9/02057 ,  G01B9/0207 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/8422 ,  G02F1/13392 ,  G02F2001/133354

摘要： A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.

摘要翻译： 一种方法，包括：为具有多个接口的样本的至少一个空间位置提供低相干扫描干涉测量数据，其中使用具有照明几何形状和照明频谱的低相干扫描干涉仪来收集数据，并且其中数据包括 低相干扫描干涉测量信号，具有对应于多个界面的多个边缘对比区域; 以及基于条纹对比的对应区域和关于照明几何形状的信息之间的距离来确定至少一对界面之间的距离。

公开(公告)号：US07466429B2

公开(公告)日：2008-12-16

申请号：US11768550

申请日：2007-06-26

申请人： Peter J. de Groot ,  Robert Stoner ,  Xavier Colonna de Lega

发明人： Peter J. de Groot ,  Robert Stoner ,  Xavier Colonna de Lega

IPC分类号： G01B11/02

CPC分类号： G01B11/0675 ,  G01B9/0201 ,  G01B9/02057 ,  G01B9/02072 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/211 ,  G01N21/8422 ,  G01N21/9501

摘要： A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.

摘要翻译： 一种方法，包括将来自测试对象的第一表面位置的扫描干涉测量信号的可导出信息与对应于测试对象的多个模型的信息进行比较，其中通过测试对象的一系列特征对多个模型进行参数化。 被比较的可推导信息可以涉及测试对象的第一表面位置的扫描干涉测量信号的形状。

公开(公告)号：US07456975B2

公开(公告)日：2008-11-25

申请号：US11942166

申请日：2007-11-19

申请人： Peter J. De Groot

发明人： Peter J. De Groot

IPC分类号： G01B11/02

CPC分类号： G03F7/70491 ,  G01B9/02019 ,  G01B9/02022 ,  G01B9/02084 ,  G01B9/02087 ,  G01B9/0209 ,  G01B11/0675 ,  G01B2290/30 ,  G01B2290/70 ,  G03F7/70608 ,  G03F7/70641 ,  G03F7/70775 ,  G03F9/7003 ,  G03F9/7049 ,  G03F9/7088

摘要： A method for determining a spatial property of an object includes obtaining a scanning low coherence interference signal from a measurement object that includes two or more interfaces. The scanning low coherence interference signal includes two or more overlapping low coherence interference signals, each of which results from a respective interface. Based on the low coherence interference signal, a spatial property of at least one of the interfaces is determined. In some cases, the determination is based on a subset of the low coherence interference signal rather than on the entirety of the signal. Alternatively, or in addition, the determination can be based on a template, which may be indicative of an instrument response of the interferometer used to obtain the low coherence interference signal.

摘要翻译： 用于确定对象的空间属性的方法包括从包括两个或多个接口的测量对象获得扫描低相干干扰信号。 扫描低相干干涉信号包括两个或多个重叠的低相干干涉信号，每个干涉信号由相应的接口产生。 基于低相干干扰信号，确定至少一个接口的空间属性。 在某些情况下，确定是基于低相干干扰信号的子集而不是整个信号。 或者或另外，该确定可以基于模板，其可以指示用于获得低相干干扰信号的干涉仪的仪器响应。

公开(公告)号：US07428056B2

公开(公告)日：2008-09-23

申请号：US11373862

申请日：2006-03-10

申请人： Klaus Freischlad ,  Shouhong Tang

发明人： Klaus Freischlad ,  Shouhong Tang

IPC分类号： G01B11/02

CPC分类号： G01B11/0675 ,  G01B9/02057 ,  G01B9/02072 ,  G01B9/02084 ,  G01B9/0209

摘要： A method and apparatus for analyzing a surface of a test object employs apparatus with a scanning interferometry system which generates a windowed interferometric signal from the surface of a test object to characterize the surface of the test object.

摘要翻译： 用于分析测试对象的表面的方法和装置采用具有扫描干涉测量系统的装置，其从测试对象的表面产生窗口干涉信号，以表征测试对象的表面。

公开(公告)号：US20070195331A1

公开(公告)日：2007-08-23

申请号：US11548817

申请日：2006-10-12

申请人： Ian Bain ,  Ketil Karstad ,  Stephen Wilson ,  David Hamilton

发明人： Ian Bain ,  Ketil Karstad ,  Stephen Wilson ,  David Hamilton

IPC分类号： G01B11/02 ,  G01B21/08 ,  G01B11/28 ,  G01D21/00

CPC分类号： G01B11/0675

摘要： A coating thickness gauge for measuring the thickness of a coating on a surface of a can is described. The gauge comprises a probe head and a probe head locating mechanism. By employing the probe head locating mechanism the probe head can be easily orientated relative to the surface of a can. The ability to select and fix the measurement orientation of the probe head provides the coating thickness gauge with enhanced flexibility such that it can be employed to take measurements from all surface sections of the can, both interior and exterior. This ability is not dependent on the experience, knowledge or skill of a particular operator. As a result the gauge provides for a fast means of measuring the thickness of a coating which can be used within an in line feedback system, on a commercial scale.

摘要翻译： 描述了用于测量罐表面上的涂层厚度的涂层厚度计。 该计量器包括探针头和探针头定位机构。 通过采用探针头定位机构，探针头可以容易地相对于罐表面定向。 选择和固定探针头的测量方向的能力为涂层厚度计提供了增强的灵活性，使得它可以用于从内部和外部的罐的所有表面部分进行测量。 这种能力不依赖于特定操作者的经验，知识或技能。 因此，该量规提供了一种测量可在工业规模的在线反馈系统中使用的涂层厚度的快速方法。

公开(公告)号：US20070188768A1

公开(公告)日：2007-08-16

申请号：US11653700

申请日：2007-01-16

申请人： Daniel Mansfield

发明人： Daniel Mansfield

IPC分类号： G01B11/02 ,  G01B11/28

CPC分类号： G01B11/0675

摘要： In respective measurement operations on a first sample surface area having a layer structure (81) and a characterised second sample surface area (82), light reflected by the region of the sample surface and the reference surface interfere and a sensing device (10) senses light intensity representing interference fringes at intervals during the relative movement along a measurement scan path to provide first intensity data in the form of a first series of intensity values resulting from a measurement operation on the first sample surface area and second intensity data in the form of a second series of intensity values resulting from a measurement operation on the second sample surface area. A layer structure determiner (100) determines a frequency transform ratio corresponding to a ratio between the first and second intensity data and fits a layer structure model having variable model parameters related to the layer thicknesses and refractive indices of the layers of a layer structure to the determined ratio by adjusting the model parameters, thereby obtaining for the model parameters values representing the layer thicknesses and refractive indices of the layers of the sample layer structure.

摘要翻译： 在具有层结构（81）和表征的第二样品表面积（82）的第一样品表面区域的各个测量操作中，由样品表面的区域和参考表面反射的光干涉并且感测装置（10）感测 光强度表示沿着测量扫描路径的相对移动期间的间隔的干涉条纹，以提供由第一样品表面区域上的测量操作产生的第一系列强度值的形式的第一强度数据和第一强度数据形式的第二强度数据 由第二样品表面区域的测量操作产生的第二系列强度值。 层结构确定器（100）确定对应于第一和第二强度数据之间的比率的频率变换比，并且将具有与层结构的层的层厚度和折射率相关的可变模型参数的层结构模型拟合到 通过调整模型参数确定比例，从而获得表示样品层结构层的层厚度和折射率的模型参数值。