Impurity detection device and method
    41.
    发明申请
    Impurity detection device and method 失效
    杂质检测装置及方法

    公开(公告)号:US20030173233A1

    公开(公告)日:2003-09-18

    申请号:US10355271

    申请日:2003-01-31

    IPC分类号: G01N027/26

    摘要: There is provided a sample preparation device and method for preparing a sample of liquid for detection of impurities. First (40) and second (38) electrodes are provided, located for immersion in a liquid under test. A semipermeable membrane (42) is positioned to protect the first electrode (40) from a body of liquid under test (32). The semipermeable membrane allows the liquid under test to pass therethrough to reach the first electrode, while preventing solids carried in the liquid from reaching the first electrode, the first electrode being positioned to affect the liquid under test in the vicinity of a sensor (36). Particular embodiments feature a hydrophilic membrane to protect the electrodes from suspended solids in the sample, a thin electrode assembly to achieve a faster response and the addition of a heater for temperature control to achieve consistent detection conditions and improved anti-fouling properties.

    摘要翻译: 提供了用于制备用于检测杂质的液体样品的样品制备装置和方法。 提供第一(40)和第二(38)电极,用于浸没在被测液体中。 定位半透膜(42)以保护第一电极(40)免受待测液体(32)的影响。 半透膜允许待测液体通过其到达第一电极,同时防止液体中携带的固体到达第一电极,第一电极定位成在传感器(36)附近影响被测液体, 。 具体实施方案的特征在于亲水膜以保护电极免受样品中的悬浮固体,薄电极组件以实现更快的响应,并添加用于温度控制的加热器以实现一致的检测条件和改善的防污性能。

    Method for determining the reducing agent concentration (NH3) in the exhaust-gas flow of an internal combustion engine
    42.
    发明授权
    Method for determining the reducing agent concentration (NH3) in the exhaust-gas flow of an internal combustion engine 有权
    确定内燃机废气流中还原剂浓度(NH 3)的方法

    公开(公告)号:US06571601B2

    公开(公告)日:2003-06-03

    申请号:US10230077

    申请日:2002-08-29

    IPC分类号: G01M1500

    CPC分类号: G01N33/0054 Y02A50/246

    摘要: A method for determining the reducing agent concentration (NH3) in the exhaust-gas flow of an internal combustion engine, using a zeolitic NH3 gas sensor that supplies a base measuring value, which is initially corrected by an offset value and a correction value that depends on the H2O concentration of the exhaust gas to form an intermediate value. The intermediate value is subsequently corrected by an additional value that depends on the NOx and NH3 concentration of the exhaust gas. In particular at or above the limits for the operating range, the accuracy of the method increases for one of the following conditions: gas compositions with NOx concentrations >500 ppm, extremely low NH3 concentrations 100 ppm.

    摘要翻译: 一种使用提供基本测量值的沸石NH 3气体传感器来确定内燃机的废气流中的还原剂浓度(NH 3)的方法,该沸石NH 3气体传感器最初由偏移值校正,校正值取决于 对废气的H 2 O浓度形成中间值。 随后通过取决于废气的NOx和NH 3浓度的附加值校正中间值。 特别是等于或高于操作范围的极限值时,该方法的准确性会因以下条件之一而增加:NOx浓度> 500 ppm,极低NH3浓度<20 ppm或高NH3浓度> 100 ppm的气体组成。

    Method for measuring water concentration in ammonia
    43.
    发明申请
    Method for measuring water concentration in ammonia 有权
    测量氨水浓度的方法

    公开(公告)号:US20020061594A1

    公开(公告)日:2002-05-23

    申请号:US09732712

    申请日:2000-12-11

    IPC分类号: G01N033/00

    摘要: Method and apparatus for measuring a water concentration in ammonia, comprising using ammonia having a water concentration of 10 ppm or less as a reference gas, introducing the ammonia at a constant flow rate into a multi-reflection long optical path gas cell, and measuring infrared absorption intensity of water at at least one measurement wave number in the range of from 3,500 to 4,000 cmnull1, from 2,600 to 3,100 cmnull1, or from 1,900 to 2,400 cmnull1 at which infrared absorptions of ammonia and water do not overlap. According to the present invention, analysis of water in a low concentration range of 10 ppm or less in ammonia gas and liquefied ammonia can be performed in a simple and convenient manner.

    摘要翻译: 用于测量氨中水浓度的方法和装置,包括使用水浓度为10ppm或更低的氨作为参考气体,以恒定的流量将氨引入到多反射长路径气室中,并测量红外 在3,500至4000厘米-1的范围内的至少一个测量波数,2,600至3,100厘米-1或1,900至2,400厘米-1的水的吸收强度,其中氨和水的红外吸收不重叠 。 根据本发明,可以简单方便地对氨气和液氨中的10ppm以下的低浓度范围内的水进行分析。

    Device useful for sensing ammonia and nitrogen oxides(s) gases at room
temperature
    45.
    发明授权
    Device useful for sensing ammonia and nitrogen oxides(s) gases at room temperature 失效
    用于在室温下感测氨和氮氧化物气体的装置

    公开(公告)号:US5866075A

    公开(公告)日:1999-02-02

    申请号:US998654

    申请日:1997-12-29

    IPC分类号: G01N27/00 G01N27/12 G01N33/00

    摘要: A device for sensing ammonia (NH.sub.3) and nitrogen oxide (NO.sub.x) gases comprising: a sensor for detecting said ammonia and said nitrogen oxide gases, said sensor including a substrate and a layer consisting of cuprate material for detection of said ammonia and said nitrogen oxide gases, wherein said layer of cuprate material is selected from the group consisting of Y:Ba:Cu:O (YBCO) and Bi:Sr:Ca:Cu:O (BSCCO); a sensor holder for supporting said sensor; a perforated cap positioned over said sensor, said perforated cap having openings for passage of said ammonia and said nitrogen oxide gases to said sensor; a detection circuit communicating with said sensor for measuring output from said sensor; and a display or recording device connected to said detection circuit for displaying or recording a concentration of said ammonia and said nitrogen oxide gases based on the output from said sensor.

    摘要翻译: 一种用于感测氨(NH 3)和氮氧化物(NOx))气体的装置,包括:用于检测所述氨和所述氮氧化物气体的传感器,所述传感器包括基底和由铜酸盐材料组成的层,用于检测所述氨和所述氮氧化物 气体,其中所述铜酸盐层材料选自Y:Ba:Cu:O(YBCO)和Bi:Sr:Ca:Cu:O(BSCCO); 用于支撑所述传感器的传感器支架; 位于所述传感器上方的穿孔盖,所述多孔盖具有用于使所述氨和所述氮氧化物气体通过所述传感器的开口; 与所述传感器通信的检测电路,用于测量所述传感器的输出; 以及连接到所述检测电路的显示或记录装置,用于基于所述传感器的输出显示或记录所述氨和所述氮氧化物气体的浓度。

    Device for the measuring of gas, vapor or aerosol fractions of a
measured gas
    47.
    发明授权
    Device for the measuring of gas, vapor or aerosol fractions of a measured gas 失效
    测量气体,气体或气溶胶分数的装置

    公开(公告)号:US4992738A

    公开(公告)日:1991-02-12

    申请号:US341579

    申请日:1989-04-21

    摘要: For the measurement of gas, vapor, or aerosol fractions of a measured gas, the fraction to be determined is absorbed in a reaction solution, and a change of resistance from a reaction between the fraction and the reaction solution is determined as the measured variable by an ohmmeter, using electrodes in the reaction solution. The measured gas entering a test container through a sealing unit tight to the reaction solution and passing the medium to be determined, is improved with regard to all-purpose use and convenient measurement. This is done pursuant to the invention by placing the reaction solution in a disposable test container that can be inserted or connected interchangeably to the measuring device which has electrodes. The test container is sealed, at least at one end, with a sealing unit that is permeable to the medium to be determined and impermeable to the reaction solution.

    摘要翻译: 对于测量气体的气体,蒸气或气溶胶组分,待测定的分数被吸收在反应溶液中,并且将馏分与反应溶液之间的反应的电阻变化确定为测量的变量, 欧姆表,在反应溶液中使用电极。 通过密封单元严格进入测试容器的测量气体与反应溶液紧密接触并通过要测定的介质,在多用途和方便的测量方面得到改进。 根据本发明,通过将反应溶液放置在可以与具有电极的测量装置互换地插入或连接的一次性测试容器中来完成。 至少在一端密封测试容器,该密封单元对待确定的介质是可渗透的,并且对于反应溶液是不可渗透的。

    Electrochemical measuring cell for amperometrically determining ammonia
and derivatives thereof
    48.
    发明授权
    Electrochemical measuring cell for amperometrically determining ammonia and derivatives thereof 失效
    用于电化学测定氨及其衍生物的电化学测量电池

    公开(公告)号:US4961834A

    公开(公告)日:1990-10-09

    申请号:US448269

    申请日:1989-12-11

    CPC分类号: G01N27/4045 G01N33/0054

    摘要: The invention is directed to an electrochemical measuring cell for determining ammonia and its derivatives in a gaseous or liquid measuring sample. The measuring cell has at least one anode and at least one cathode which are disposed in an electrolyte chamber filled with a soluble electrolyte. The electrolyte chamber is closed off in the direction facing toward the measuring sample by a permeable membrane. The measuring cell provides a more selective ammonia sensor having the following advantages: a short response time, a linear response and exhibits the lowest possible tendency toward drift. The electrolyte of the measuring cell is so configured that the reaction products of the measuring reaction do not affect subsequent measurements. For this purpose the measuring cell, which operates in an amperometric measuring mode, contains a soluble non-oxidizable reagent in the electrolyte which reacts completely with ammonia to form an oxidizable product which is convertible by its oxidation into non-oxidizable soluble secondary products which are chemically and electrochemically inert.

    摘要翻译: 本发明涉及一种用于在气体或液体测量样品中测定氨及其衍生物的电化学测量池。 测量池具有至少一个阳极和至少一个阴极,它们设置在填充有可溶性电解质的电解质室中。 电解质室通过渗透膜在朝向测量样品的方向上封闭。 测量池提供了更具选择性的氨传感器,其具有以下优点:响应时间短,线性响应,并且具有尽可能低的漂移倾向。 测量池的电解质配置使得测量反应的反应产物不影响随后的测量。 为此目的,以电流计测量模式运行的测量池在电解液中含有可与氨反应的可溶性不可氧化试剂,以形成可氧化产物,该产物可通过其氧化转化为不可氧化的可溶性次级产物, 化学和电化学惰性。

    Exhaust gas monitor for photoresist adhesion control

    公开(公告)号:US12044983B2

    公开(公告)日:2024-07-23

    申请号:US18142715

    申请日:2023-05-03

    IPC分类号: G03F7/00 G01N33/00

    摘要: An exhaust stream monitoring system for a photolithography track of an IC fabrication process comprises a reaction chamber including a housing, an inflow port and an outflow port, the housing containing a thermal plate for heating a semiconductor process wafer for a predetermined amount of time. An influent pipe coupled to the inflow port supplies a photoresist adhesion promoter in a gaseous form to the reaction chamber. An effluent pipe coupled to the outflow port is operative to remove byproducts from the reaction chamber as an exhaust stream. At least one gas sensor manifold assembly is coupled to the effluent pipe for monitoring the exhaust stream from the reaction chamber to detect presence of one or more byproducts of a reaction between the photoresist adhesion promoter and the semiconductor process wafer.