公开(公告)号：US09490098B1

公开(公告)日：2016-11-08

申请号：US14992870

申请日：2016-01-11

Applicant: Applied Physics Technologies, Inc.

Inventor： William A. Mackie ,  Gerald G. Magera

IPC: H01J1/146 ,  H01J1/148 ,  H01J19/10 ,  H01J1/14

CPC classification number: H01J1/148 ,  H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J37/06 ,  H01J2201/196 ,  H01J2201/2889 ,  H01J2201/30484 ,  H01J2201/317 ,  H01J2237/06316

Abstract: An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.

Abstract translation: 电子源由具有高耐火性质的混合金属碳化物材料制成。 从这些材料产生场强增强的热离子发射，即热场或延伸的肖特基发射需要使用某种低功函数的晶体学方向，例如（100），（210）和（310） 。 这些材料由于其耐火性质而不自然而然。 所披露的由过渡金属碳化物材料制成的电子源在安装在需要高亮度，远光束电流源的先进成像应用的扫描电子显微镜（SEM）中是特别有用的。

公开(公告)号：US06853119B2

公开(公告)日：2005-02-08

申请号：US09921039

申请日：2001-08-02

Applicant: Charles A. Huntington ,  Stuart K. Denham

Inventor： Charles A. Huntington ,  Stuart K. Denham

IPC: H01J61/04 ,  H01J1/16 ,  H01J5/50 ,  H01J9/02 ,  H01J19/10 ,  H01J61/073 ,  H01S4/00

CPC classification number: H01J9/02 ,  H01J61/0732 ,  Y10T29/49002

Abstract: A double-layer electrode coil for a high intensity discharge (HID) lamp and a method of making the electrode coil are provided. A more stable layer of coils is made by front winding, instead of back winding, the layers of wire. The second layer of wire is entirely within a helical groove on the exterior surface of the first layer of wire. This arrangement is particularly stable and permits more rapid insertion of the electrode shank after removal of the mandrel.

Abstract translation: 提供了用于高强度放电（HID）灯的双层电极线圈和制造电极线圈的方法。 更稳定的线圈层是通过前绕组而不是后绕组制成的。 第二层线材完全在第一层线材的外表面上的螺旋槽内。 这种布置特别稳定，并且允许在去除心轴之后更快速地插入电极柄。

公开(公告)号：US6005335A

公开(公告)日：1999-12-21

申请号：US990624

申请日：1997-12-15

Applicant: Michael D Potter

Inventor： Michael D Potter

IPC: H01J29/94 ,  H01J1/02 ,  H01J1/16 ,  H01J1/62 ,  H01J19/10

CPC classification number: H01J29/94 ,  H01J2201/30423 ,  H01J2329/00

Abstract: A self-gettering electron field emitter has a first portion formed of a low-work-function material for emitting electrons, and it has an integral second portion that acts both as a low-resistance electrical conductor and as a gettering surface. The self-gettering emitter is formed by disposing a thin film of the low-work-function material parallel to a substrate and by disposing a thin film of the low-resistance gettering material parallel to the substrate and in contact with the thin film of the low-work-function material. The self-gettering emitter is particularly suitable for use in lateral field emission devices. The preferred emitter structure has a tapered edge, with a salient portion of the low-work-function material extending a small distance beyond an edge of the gettering and low resistance material. A fabrication process specially adapted for in situ formation of the self-gettering electron field emitters while fabricating microelectronic field emission devices is also disclosed.

Abstract translation: 自吸电子场发射器具有由用于发射电子的低功函数材料形成的第一部分，并且其具有作为低电阻电导体和吸气表面的整体第二部分。 自吸收发射体通过将低功函数材料的薄膜平行于衬底设置并且将低电阻吸气材料的薄膜平行于衬底设置并与薄膜接触而形成 低功能材料。 自吸式发射器特别适用于横向场发射装置。 优选的发射极结构具有锥形边缘，低功函数材料的显着部分在吸气和低电阻材料的边缘之外延伸一小段距离。 还公开了专门用于在制造微电子场发射器件的同时形成自吸电子场发射体的制造工艺。

公开(公告)号：US5965898A

公开(公告)日：1999-10-12

申请号：US937412

申请日：1997-09-25

Applicant: Gary W. Jones ,  Steven M. Zimmerman

Inventor： Gary W. Jones ,  Steven M. Zimmerman

IPC: H01J3/02 ,  H01J9/02 ,  H01L29/41 ,  H01J1/16 ,  H01J19/10

CPC classification number: H01J9/025 ,  H01J3/022 ,  H01J2201/30407

Abstract: A high aspect ratio gated emitter structure and a method of making the structure are disclosed. Emitters may be provided in a densely packed array on a support. Two distinct layers of insulator material may surround the emitters. The lower layer of insulator material may be a non-conformally applied spray-on or spin-on insulator. The non-conformal insulator material may pool at the base regions of the emitters so that the tip regions of the emitters extend out of the lower layer of insulator material. The upper layer of insulator material is applied to the lower layer using a conformal process so that the tip regions of the emitters are covered by the upper layer of insulator material. Gate material is applied to the upper layer of insulator material. Holes are provided in the gate material over the tip regions and wells are provided in the upper layer of insulator material surrounding the tip regions. An etch resistant layer may optionally be provided between the upper layer of insulator material and the gate material.

公开(公告)号：US5668434A

公开(公告)日：1997-09-16

申请号：US568380

申请日：1995-12-06

Applicant: Chang-seob Kim ,  Seok-bong Son ,  Bong-uk Jeong ,  Sang-kyun Kim ,  Sang-uk Shin

Inventor： Chang-seob Kim ,  Seok-bong Son ,  Bong-uk Jeong ,  Sang-kyun Kim ,  Sang-uk Shin

IPC: H01J1/15 ,  H01J1/16 ,  H01J29/04 ,  H01J1/14 ,  H01J19/06 ,  H01J19/10

CPC classification number: H01J1/16

Abstract: A directly heated cathode structure includes a porous pellet impregnated with a cathode material, filaments connected to the porous pellet, a support supporting the filament, and an insulation block supporting the support, wherein the filaments are supported on the porous pellet by at least one auxiliary member. The supporting structure is very strong and the quality and productivity can be greatly improved by improvement of the filament welding process using the auxiliary members.

Abstract translation: 直接加热的阴极结构包括浸渍有阴极材料的多孔颗粒，连接到多孔颗粒的细丝，支撑长丝的支撑体和支撑支撑体的绝缘块，其中所述长丝通过至少一个辅助材料支撑在多孔颗粒上 会员。 支撑结构非常坚固，通过使用辅助构件改进长丝焊接工艺可以大大提高质量和生产率。

公开(公告)号：US5517075A

公开(公告)日：1996-05-14

申请号：US544678

申请日：1995-10-18

Applicant: Kenneth G. Vickers

Inventor： Kenneth G. Vickers

IPC: H01J1/304 ,  H01J9/02 ,  H01J1/16 ,  H01J19/10

CPC classification number: H01J1/3042 ,  H01J9/025

Abstract: A size-arrayed emitter structure is disclosed for use in a field emission display device. The emitter structure is designed such that each emitter array (illustratively, an array comprising microtips 40 in a 5.times.5 matrix) has an emitter hole 52 size (critical dimension) distribution that is centered on the optimum hole critical dimension and extends past the point at which the emitter tip 40 will operate. If the manufacturing process varies and produces an actual critical dimension larger than the designed value, emitters with the designed critical dimensions smaller than optimal will shift toward optimal, and emitters with critical dimensions smaller than the minimum operating value will become operational, while emitters with designed critical dimensions larger than optimal will cease to function. Similarly, if the actual critical dimension is smaller than the designed value, emitters with the designed critical dimensions larger than optimal will shift toward optimal, and emitters with critical dimensions larger than the maximum operating value will become operational, while emitters with designed critical dimensions smaller than optimal will cease to function. This will result in a distribution of active emitters in each array that are centered on the optimal value and that extend from the minimum functional emitter critical dimension to the maximum functional emitter critical dimension. Where the number of emitter arrays per display pixel is relatively large, the critical dimension of all of the emitter holes within each array may be designed to be equal, and the totality of arrays within each pixel may be designed such that their emitter hole critical dimensions are centered on the optimum hole critical dimension and extend past the point at which the emitter tips will operate.

Abstract translation: 公开了用于场发射显示装置的尺寸排列的发射极结构。 发射极结构被设计成使得每个发射极阵列（示例性地，包括5×5矩阵中的微尖端40的阵列）具有以最佳孔临界尺寸为中心的发射极孔52的尺寸（临界尺寸）分布，并且延伸超过 发射极尖端40将工作。 如果制造过程发生变化并产生大于设计值的实际临界尺寸，则设计临界尺寸小于最佳值的发射器将朝向最佳状态转移，并且具有小于最小工作值的关键尺寸的发射器将变为可操作，而具有设计的发射器 大于最优的关键尺寸将不再起作用。 类似地，如果实际临界尺寸小于设计值，则具有大于最优值的设计临界尺寸的发射器将朝向最佳状态移动，并且具有大于最大工作值的关键尺寸的发射器将变得可操作，而具有设计临界尺寸的发射器较小 而不是最优将停止运作。 这将导致在每个阵列中以最佳值为中心并从最小功能发射极临界尺寸延伸到最大功能发射极临界尺寸的有源发射器的分布。 在每个显示像素的发射器阵列的数量相对较大的情况下，每个阵列内的所有发射器孔的临界尺寸可被设计为相等，并且每个像素内的阵列的总数可被设计成使得它们的发射极临界尺寸 以最佳孔临界尺寸为中心，并延伸超过发射器尖端将工作的点。

公开(公告)号：US4482838A

公开(公告)日：1984-11-13

申请号：US327467

申请日：1981-12-04

Applicant: Masaji Ishii ,  Hirotoshi Hagiwara ,  Hideo Hiraoka

Inventor： Masaji Ishii ,  Hirotoshi Hagiwara ,  Hideo Hiraoka

IPC: H01J37/06 ,  H01J1/14 ,  H01J1/148 ,  H01J1/16 ,  H01J19/10

CPC classification number: H01J1/16 ,  H01J1/148

Abstract: A thermionic emission cathode of a single crystal made of the calcium hexaboride type crystaline structure comprises a top surrounded by natural face inherent to the axial direction of the single crystal.

Abstract translation: 由六硼酸钙型晶体结构构成的单晶的热离子发射阴极包括由单晶轴向固有的天然面包围的顶部。

公开(公告)号：US4467240A

公开(公告)日：1984-08-21

申请号：US344186

申请日：1982-01-28

Applicant: Masaaki Futamoto ,  Isamu Yuito ,  Ushio Kawabe

Inventor： Masaaki Futamoto ,  Isamu Yuito ,  Ushio Kawabe

IPC: H01J1/02 ,  H01J27/00 ,  H01J27/02 ,  H01J27/26 ,  H01J37/08 ,  H01J1/16 ,  H01J19/10

CPC classification number: H01J27/022 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/0805 ,  H01J2237/0807

Abstract: An ion beam source characterized in that a needle-like tip is comprised of a carbide, a nitride, or a diboride of at least one element selected from the group consisting of Ti, Zr, Hf, V, Nb and Ta, a hexaboride of at least one element of rare earth metal elements of atomic numbers 57-70, or carbon. Stable ion beam emission of high brightness and long life can be obtained by using the needle-like tip of the said material.

Abstract translation: 一种离子束源，其特征在于针状尖端由选自Ti，Zr，Hf，V，Nb和Ta中的至少一种元素的碳化物，氮化物或二硼化物构成，六硼化物 至少一种原子数为57-70的稀土金属元素或碳。 通过使用所述材料的针状尖端可以获得高亮度和长寿命的稳定的离子束发射。

公开(公告)号：US4346325A

公开(公告)日：1982-08-24

申请号：US134677

申请日：1980-03-27

Applicant: Mamoru Nakasuji ,  Hirotsugu Wada

Inventor： Mamoru Nakasuji ,  Hirotsugu Wada

IPC: H01J1/16 ,  H01J37/06 ,  H01J19/10

CPC classification number: H01J1/16 ,  H01J37/06

Abstract: An electron gun for a shaped beam type electron beam delineating system is provided with a cathode which is prepared from a single crystal of lanthanum hexaboride (LaB.sub.6) the convex end portion of which has a tip radius ranging between 260 and 1,000 microns. The electron gun of the invention has a long effective life for producing a stable electron beam which can irradiate a limiting aperture with a uniform current density and insures the sufficiently high brightness of the electron beam image projected on a target.

Abstract translation: 用于成型梁型电子束描绘系统的电子枪具有阴极，该阴极由六边形镧六硼化镧（LaB6）的单晶制成，其凸出端部的半径范围为260-1,000微米。 本发明的电子枪具有长时间的有效寿命，用于产生稳定的电子束，该稳定的电子束可以以均匀的电流密度照射限制孔径并确保投影在靶上的电子束图像的足够高的亮度。

公开(公告)号：US4012659A

公开(公告)日：1977-03-15

申请号：US645486

申请日：1975-12-31

Applicant: Edmund M. Passmore ,  George L. Duggan ,  Warren A. Anderson ,  William M. Labadini

Inventor： Edmund M. Passmore ,  George L. Duggan ,  Warren A. Anderson ,  William M. Labadini

IPC: H01K1/14 ,  H01J1/16 ,  H01J19/10

CPC classification number: H01K1/14

Abstract: The tungsten wire filament of an incandescent lamp is flashed to a recrystallized structure by applying pulses of electrical energy thereto.

Abstract translation: 通过向其施加电能脉冲将白炽灯的钨丝灯丝闪烁成再结晶结构。