公开(公告)号：US20110301903A1

公开(公告)日：2011-12-08

申请号：US12992824

申请日：2009-04-30

Applicant: Arelie Humbert ,  Gilbert Curatola ,  Matthias Merz ,  Remco Henricus Wilhelmus Pijenburg ,  Romano Hoofman ,  Youri Ponomarev

Inventor： Arelie Humbert ,  Gilbert Curatola ,  Matthias Merz ,  Remco Henricus Wilhelmus Pijenburg ,  Romano Hoofman ,  Youri Ponomarev

IPC: G01D18/00

CPC classification number: G01D18/008 ,  G01K1/024 ,  G01K3/04 ,  G01K15/00

Abstract: A sensor, electrically connected to transponder, is calibrated in an environment of operational use of the transponder. The calibrating uses as a reference a value of a parameter representative of the environment.

Abstract translation: 电连接到应答器的传感器在应答器的操作使用环境中被校准。 校准使用代表环境的参数的值作为参考。

公开(公告)号：US20110207239A1

公开(公告)日：2011-08-25

申请号：US13126057

申请日：2009-10-26

Applicant: Roel Daamen ,  Matthias Merz

Inventor： Roel Daamen ,  Matthias Merz

IPC: H01L21/283

CPC classification number: H01L21/76849 ,  H01L21/32134 ,  H01L21/7684 ,  H01L21/76883

Abstract: A biocompatible electrode is manufactured by depositing filling metal 36 and etching back the filling metal to the surface of the surrounding insulator 30. Then, a further etch forms a recess 38 at the top of the via 32. An electrode metal 40 is then deposited and etched back to fill the recess 38 and form biocompatible electrode 42. In this way, a planar biocompatible electrode is achieved. The step of etching to form the recess may be carried out in the same CMP tool as is used to etch back the filling metal 36. A hydrogen peroxide etch may be used.

Abstract translation: 通过沉积填充金属36并将填充金属蚀刻回到周围绝缘体30的表面来制造生物相容性电极。然后，另外的蚀刻在通孔32的顶部形成凹部38.然后沉积电极金属40， 回蚀以填充凹部38并形成生物相容性电极42.以这种方式，实现平面生物相容性电极。 蚀刻形成凹部的步骤可以在与用于回填填充金属36相同的CMP工具中进行。可以使用过氧化氢蚀刻。

公开(公告)号：US20110185810A1

公开(公告)日：2011-08-04

申请号：US13063325

申请日：2009-09-10

Applicant: Aurelie Humbert ,  Matthias Merz

Inventor： Aurelie Humbert ,  Matthias Merz

IPC: G01N27/22

CPC classification number: G01N27/223

Abstract: A sensor senses a magnitude of a physical parameter of the sensor's environment. The sensor has first and second electrodes, and a material layer between them. The material has an electrical property, e.g., capacitance or resistance, whose value depends on the magnitude of the physical parameter. The first electrode is formed in a first layer, and the second electrode is formed in a second layer, different from the first layer. The first layer has a trench and an elevation next to the trench. The trench has a bottom wall and a side wall. The material is positioned on the bottom wall and on the side wall and on top of the elevation. The trench accommodates at least a part of the second electrode. The second electrode leaves exposed the material formed on top of the elevation.

Abstract translation: 传感器感测传感器环境的物理参数的大小。 传感器具有第一和第二电极以及它们之间的材料层。 该材料具有电性能，例如电容或电阻，其值取决于物理参数的大小。 第一电极形成在第一层中，并且第二电极形成在与第一层不同的第二层中。 第一层在沟槽旁边具有沟槽和高度。 沟槽具有底壁和侧壁。 材料位于底壁和侧壁上以及高度的顶部。 沟槽容纳至少一部分第二电极。 第二个电极离开了形成在高程顶部的材料。

公开(公告)号：US20110156177A1

公开(公告)日：2011-06-30

申请号：US13060949

申请日：2009-07-21

Applicant: Matthias Merz

Inventor： Matthias Merz

IPC: H01L29/66 ,  G01N27/28

CPC classification number: G01N27/4148 ,  G01N27/4145

Abstract: The invention relates to an electronic device for measuring and/or controlling a property of an analyte (100). The electronic device comprises: i) an electrode (Snsr) forming an interface with the analyte (100) in which the electrode (Snsr) is immersed in operational use, the interface having an interface temperature (T), and ii) a resistive heater (Htr) being thermally and capacitively coupled to the electrode (Snsr), the resistive heater (Htr) being configured for setting the interface temperature (T) by controlling a current through the resistive heater (Htr). The resistive heater (Htr) is provided with signal integrity protection for reducing the capacitive charging of the electrode (Snsr) by the resistive heater (Htr) if the current through the resistive heater (Htr) is modulated. The invention further relates to an electrochemical sensor for determining a charged particle concentration in the analyte (100) using the thermo-potentiometric principle, the electrochemical sensor comprising such electronic device. The invention also relates to an RFID tag and a semiconductor device comprising such electrochemical sensor. The effect of the feature of the invention is that the capacitive charging effect between the resistive heater and the electrode is reduced by the signal integrity protection.

Abstract translation: 本发明涉及一种用于测量和/或控制分析物（100）的性质的电子设备。 电子器件包括：i）与操作使用中浸渍电极（Snsr）的分析物（100）形成界面的电极（Snsr），界面具有界面温度（T），和ii）电阻加热器 （Htr）被热和电容耦合到电极（Snsr），电阻加热器（Htr）被配置为通过控制通过电阻加热器（Htr）的电流来设定界面温度（T）。 如果通过电阻加热器（Htr）的电流被调制，电阻加热器（Htr）具有信号完整性保护，用于通过电阻加热器（Htr）减小电极（Snsr）的电容充电。 本发明还涉及一种用于使用热电位原理确定分析物（100）中的带电粒子浓度的电化学传感器，该电化学传感器包括这种电子装置。 本发明还涉及RFID标签和包括这种电化学传感器的半导体器件。 本发明的特征的效果是通过信号完整性保护来降低电阻加热器和电极之间的电容充电效应。

公开(公告)号：US20110146400A1

公开(公告)日：2011-06-23

申请号：US12969884

申请日：2010-12-16

Applicant: Aurelie HUMBERT ,  Matthias MERZ ,  Youri Victorovitch PONOMAREV ,  Roel DAAMEN ,  Marcus Johannes Henricus van DAL

Inventor： Aurelie HUMBERT ,  Matthias MERZ ,  Youri Victorovitch PONOMAREV ,  Roel DAAMEN ,  Marcus Johannes Henricus van DAL

IPC: G01N27/22

CPC classification number: G01N27/223 ,  G01R27/2605

Abstract: A capacitive sensor for detecting the presence of a substance includes a plurality of upstanding conductive pillars arranged within a first layer of the sensor, a first electrode connected to a first group of the pillars, a second electrode connected to a second, different group of the pillars, and a dielectric material arranged adjacent the pillars, for altering the capacitance of the sensor in response to the presence of said substance.

Abstract translation: 用于检测物质存在的电容传感器包括布置在传感器的第一层内的多个直立的导电柱，连接到第一组柱的第一电极，连接到第二组不同组的第二电极 支柱和邻近柱子布置的介电材料，用于响应于所述物质的存在而改变传感器的电容。

公开(公告)号：US20110012211A1

公开(公告)日：2011-01-20

申请号：US12835768

申请日：2010-07-14

Applicant: Matthias Merz ,  Youri Victorovitch Ponomarev ,  Marcus Johannes Henricus van Dal

Inventor： Matthias Merz ,  Youri Victorovitch Ponomarev ,  Marcus Johannes Henricus van Dal

IPC: H01L29/84 ,  H01L21/02

CPC classification number: H01L23/564 ,  B81B7/0006 ,  B81B2201/0235 ,  B81B2203/0315 ,  B81B2207/015 ,  B81C1/00246 ,  B81C99/005 ,  B81C2201/013 ,  B81C2203/0136 ,  B81C2203/0714 ,  G01P15/06 ,  G01P15/0802 ,  G01P2015/0862 ,  G01P2015/0877 ,  H01L21/768 ,  H01L23/5226 ,  H01L23/5256 ,  H01L23/528

Abstract: Disclosed is a semiconductor device comprising a stack of patterned metal layers (12) separated by dielectric layers (14), said stack comprising a first conductive support structure (20) and a second conductive support structure (21) and a cavity (42) in which an inertial mass element (22) comprising at least one metal portion is conductively coupled to the first support structure and the second support structure by respective conductive connection portions (24), at least one of said conductive connection portions being designed to break upon the inertial mass element being exposed to an acceleration force exceeding a threshold defined by the dimensions of the conductive connection portions. A method of manufacturing such a semiconductor device is also disclosed.

Abstract translation: 公开了一种半导体器件，其包括由电介质层（14）分离的图案化金属层（12）的堆叠，所述堆叠包括第一导电支撑结构（20）和第二导电支撑结构（21）和空腔（42） 其中包括至少一个金属部分的惯性质量元件（22）通过相应的导电连接部分（24）导电耦合到第一支撑结构和第二支撑结构，所述导电连接部分中的至少一个设计成在 惯性质量元件暴露于超过由导电连接部分的尺寸限定的阈值的加速力。 还公开了制造这种半导体器件的方法。

公开(公告)号：US20100066348A1

公开(公告)日：2010-03-18

申请号：US12595090

申请日：2008-04-05

Applicant: Matthias Merz ,  Youri V. Ponomarev ,  Gilberto Curatola

Inventor： Matthias Merz ,  Youri V. Ponomarev ,  Gilberto Curatola

IPC: H01L29/66 ,  H01L21/04 ,  G01N27/00

CPC classification number: G01N33/48721 ,  C12Q1/6869 ,  G01N27/414 ,  C12Q2565/631

Abstract: A detector device comprises a substrate (50), a source region (S) and a drain region (D), and a channel region (65) between the source and drain regions. A nanopore (54) passes through the channel region, and connects fluid chambers (56,58) on opposite sides of the substrate. A voltage bias is provided between the fluid chambers, the source and drain regions and a charge flow between the source and drain regions is sensed. The device uses a nanopore for the confinement of a sample under test (for example nucleotides) close to a sensor. The size of the sensor can be made similar to the spacing of adjacent nucleotides in a DNA strand. In this way, the disadvantages of PCR based techniques for DNA sequencing are avoided, and single nucleotide resolution can be attained.

Abstract translation: 检测器装置包括衬底（50），源极区（S）和漏极区（D）以及在源极和漏极区之间的沟道区（65）。 纳米孔（54）穿过沟道区域，并且连接在衬底的相对侧上的流体室（56,58）。 在流体室，源极和漏极区之间提供电压偏置，并且感测源区和漏区之间的电荷流。 该装置使用纳米孔来限制待测样品（例如核苷酸）靠近传感器。 可以使传感器的尺寸与DNA链中相邻核苷酸的间隔相似。 以这种方式，避免了基于PCR的DNA测序技术的缺点，可以实现单核苷酸分辨率。