Contactless humidity/chemical vapor sensor device and associated method of fabrication
    57.
    发明授权
    Contactless humidity/chemical vapor sensor device and associated method of fabrication 失效
    非接触式湿度/化学气相传感器装置及相关制造方法

    公开(公告)号:US07302829B2

    公开(公告)日:2007-12-04

    申请号:US10726038

    申请日:2003-12-01

    申请人: Anis Zribi

    发明人: Anis Zribi

    IPC分类号: G01N29/00

    CPC分类号: G01N29/036 G01N2291/0256

    摘要: The invention provides a contactless sensor device operable for sensing water vapor or a predetermined chemical vapor including a thin film, wherein the thin film includes a nanostructured sensing layer and a soft magnetic layer disposed directly adjacent to the nanostructured sensing layer. The thin film has a first mass, a first density, and a first magnetostrictive resonance frequency prior to the nanostructured sensing layer adsorbing a predetermined amount of a predetermined vapor and a second mass, a second density, and a second magnetostrictive resonance frequency subsequent to the nanostructured sensing layer adsorbing the predetermined amount of the predetermined vapor. The sensor device also includes a driving coil disposed indirectly adjacent to and at a predetermined distance from the thin film, the driving coil operable for generating an alternating-current magnetic field used to query a shift in the magnetostrictive resonance frequency of the thin film. The sensor device further includes a measuring coil disposed indirectly adjacent to and at a predetermined distance from the thin film, the measuring coil operable for measuring and quantifying the shift in the magnetostrictive resonance frequency of the thin film.

    摘要翻译: 本发明提供了一种非接触式传感器装置,可操作用于感测水蒸汽或包含薄膜的预定化学气相,其中薄膜包括直接邻近纳米结构感测层设置的纳米结构感测层和软磁层。 在纳米结构感测层吸附预定量的预定蒸气之前具有第一质量,第一密度和第一磁致伸缩共振频率,第二质量,第二密度和第二磁致伸缩共振频率在 纳米结构感测层吸附预定量的预定蒸气。 传感器装置还包括间隔地与薄膜间隔相邻且距离薄膜预定距离的驱动线圈,驱动线圈可操作用于产生用于查询薄膜的磁致伸缩共振频率偏移的交流磁场。 所述传感器装置还包括与所述薄膜间接相邻并且距离所述薄膜预定距离设置的所述测量线圈,所述测量线圈可操作用于测量和量化所述薄膜的磁致伸缩共振频率的偏移。