Apparatus and methods for a fixed impedance transformation network for use in connection with a plasma chamber

    公开(公告)号:US20060017386A1

    公开(公告)日:2006-01-26

    申请号:US11179036

    申请日:2005-07-11

    IPC分类号: H01J7/24

    CPC分类号: H01J37/32082 H01J37/32183

    摘要: In certain embodiments, an apparatus for providing a fixed impedance transformation network for driving a plasma chamber includes a pre-match network adapted to couple between an Active RF match network and a plasma chamber load associated with the plasma chamber. The pre-match network includes (1) a first capacitive element; (2) an inductive element connected in parallel with the first capacitive element to form a parallel circuit that presents a stepped-up impedance to an output of the Active RF match network such that a voltage required to drive the plasma chamber load is reduced; and (3) a second capacitive element coupled to the parallel circuit and adapted to couple to the plasma chamber load. The second capacitive element reduces or cancels at least in part a reactance corresponding to an inductance associated with the plasma chamber load. Numerous other aspects are provided.

    Heated substrate support for chemical vapor deposition
    52.
    发明申请
    Heated substrate support for chemical vapor deposition 审中-公开
    用于化学气相沉积的加热衬底支撑

    公开(公告)号:US20060011139A1

    公开(公告)日:2006-01-19

    申请号:US11143992

    申请日:2005-06-02

    IPC分类号: C23C16/00

    CPC分类号: C23C16/4586

    摘要: A method and apparatus for making a heated substrate support assembly used in a processing chamber is provided. The processing chamber includes a substrate support assembly, having a first plate and a second plate with grooves disposed therein for receiving one or more heating elements, and a power source for heating the substrate support assembly. A first surface of the first plate and a second surface of the second plate include one or more matching structures disposed thereon, such that both plates can be compressed together by isostatic compression and form into a plate-like structure for supporting a substrate during substrate processing. In another embodiment, the first and second plates are compressed by applying pressure all around. In still another embodiment, compressing the first and second plates is performed at elevated temperature.

    摘要翻译: 提供了一种用于制造在处理室中使用的加热的衬底支撑组件的方法和装置。 处理室包括基板支撑组件,其具有第一板和第二板,其中设置有用于接收一个或多个加热元件的槽,以及用于加热基板支撑组件的电源。 第一板的第一表面和第二板的第二表面包括设置在其上的一个或多个匹配结构,使得两个板可以通过等静压压缩在一起,并形成用于在衬底处理期间支撑衬底的板状结构 。 在另一个实施例中,通过施加全部压力来压缩第一和第二板。 在另一个实施例中,压缩第一和第二板在升高的温度下进行。

    Apparatus and method of shaping profiles of large-area PECVD electrodes
    53.
    发明申请
    Apparatus and method of shaping profiles of large-area PECVD electrodes 审中-公开
    大面积PECVD电极成形轮廓的装置和方法

    公开(公告)号:US20060005771A1

    公开(公告)日:2006-01-12

    申请号:US11143506

    申请日:2005-06-02

    IPC分类号: C23C16/00 C23F1/00

    摘要: An apparatus and method for shaping profiles of a large-area PECVD electrode is provided. A plasma-enhanced CVD chamber for processing a large-area substrate is first provided. The chamber includes a lower electrode that supports a large area substrate. The lower electrode is shaped to selectively conform the supported substrate in a selected orientation under operating conditions. The orientation may be either planar or nonplanar. The substrate complies with the shape of the electrode so the substrate is substantially parallel to an upper electrode in the chamber, and/or to a gas diffusion plate in the chamber. The lower electrode comprises a substrate support fabricated from a material of insufficient strength to support itself at operating temperatures and pressure in the chamber. The shape of the substrate support is adjusted by modifying the dimensions and/or planarity of a supporting base structure, and/or by appropriately varying the thickness of the substrate support.

    摘要翻译: 提供了一种用于形成大面积PECVD电极的轮廓的装置和方法。 首先提供用于处理大面积基板的等离子体增强CVD室。 该室包括支撑大面积基板的下电极。 下电极被成形为在操作条件下以选定的方向选择性地使受支撑的衬底符合。 取向可以是平面或非平面的。 基板符合电极的形状,因此基板基本上平行于腔室中的上部电极,和/或腔室中的气体扩散板。 下电极包括由强度不足的材料制成的衬底支撑件,以在腔室中的操作温度和压力下自身支撑。 通过改变支撑基底结构的尺寸和/或平面度和/或通过适当地改变基底支撑件的厚度来调节基底支撑件的形状。

    Tissue puncture closure device with automatic tamping
    54.
    发明申请
    Tissue puncture closure device with automatic tamping 有权
    具有自动捣固的组织穿刺闭合装置

    公开(公告)号:US20050085851A1

    公开(公告)日:2005-04-21

    申请号:US10685912

    申请日:2003-10-15

    IPC分类号: A61B17/00 A61B17/06 A61B17/08

    摘要: A method and apparatus for sealing a puncture or incision formed percutaneously in tissue separating two internal portions of the body of a living being with an anchor, a sealing plug and a filament connecting the anchor and sealing plug. The method and apparatus provide for automatic tamping and/or cinching of the sealing plug when the apparatus is withdrawn from the puncture site. The automatic tamping and/or cinching is facilitated by transducing a motive force generated by the withdrawal of the apparatus into a tamping and/or cinching force.

    摘要翻译: 一种用于密封穿刺形成的穿刺或切口的方法和装置,所述组织通过锚固体,密封塞和连接锚固件和密封塞的细丝分离生物体的两个内部部分。 该方法和装置提供当设备从穿刺部位抽出时自动捣固和/或收紧密封塞。 通过将由装置抽出产生的动力转换成捣固和/或收紧力来促进自动捣固和/或收紧。

    Tire support ring reinforcement
    55.
    发明申请
    Tire support ring reinforcement 审中-公开
    轮胎支撑环加固

    公开(公告)号:US20050072504A1

    公开(公告)日:2005-04-07

    申请号:US10403689

    申请日:2003-03-31

    IPC分类号: B60C17/04 B60C17/06

    摘要: A support ring is intended for mounting on a wheel rim inside a tire, in order to support the tire in the event of a loss of inflation pressure. The support ring has a base intended to fit around the wheel rim, a cap, and an annular body joining the base and the cap together. Within the base of the ring, to control the expansion characteristics of the support ring, is a metal support. The metal support has a mesh configuration.

    摘要翻译: 支撑环用于安装在轮胎内的轮辋上,以便在失去充气压力的情况下支撑轮胎。 支撑环具有旨在围绕轮缘,帽以及将基部和盖连接在一起的环形体的基部。 在环的底部,为了控制支撑环的膨胀特性,是金属支撑。 金属支架具有网状结构。

    Antibodies to human CK&bgr;-10/MCP-4
    56.
    发明授权
    Antibodies to human CK&bgr;-10/MCP-4 失效
    人类CKbeta-10 / MCP-4的抗体

    公开(公告)号:US06673344B1

    公开(公告)日:2004-01-06

    申请号:US09717209

    申请日:2000-11-22

    IPC分类号: A61K39395

    摘要: Human chemokine polypeptides and DNA (RNA) encoding such chemokine polypeptides and a procedure for producing such polypeptides by recombinant techniques is disclosed. Also disclosed are methods for utilizing such chemokine polypeptides for the treatment of leukemia, tumors, chronic infections, autoimmune disease, fibrotic disorders, wound healing and psoriasis. Antagonists against such chemokine polypeptides and their use as a therapeutic to treat rheumatoid arthritis, autoimmune and chronic inflammatory and infective diseases, allergic reactions, prostaglandin-independent fever and bone marrow failure are also disclosed.

    摘要翻译: 公开了人趋化因子多肽和编码这种趋化因子多肽的DNA(RNA)和通过重组技术产生此类多肽的方法。 还公开了利用这种趋化因子多肽治疗白血病,肿瘤,慢性感染,自身免疫疾病,纤维化病症,伤口愈合和牛皮癣的方法。 还公开了抗这种趋化因子多肽的拮抗剂及其作为治疗类风湿性关节炎,自身免疫性和慢性炎性和感染性疾病,过敏反应,前列腺素依赖性发烧和骨髓衰竭的治疗剂的用途。

    Platen for retaining polishing material
    57.
    发明授权
    Platen for retaining polishing material 有权
    压板用于保留抛光材料

    公开(公告)号:US06592439B1

    公开(公告)日:2003-07-15

    申请号:US09709769

    申请日:2000-11-10

    IPC分类号: B24B2900

    摘要: Generally, a method and apparatus for retaining polishing material is provided. In one embodiment, the apparatus includes a platen having a top surface, a plurality of channels and one or more vacuum ports. The top surface is adapted to support the polishing material. The plurality of channels are formed in a polishing area of the top surface. The vacuum ports are disposed in the platen and at least one port is in communication with at least one of the channels. Upon application of a vacuum to the ports, the channels remove fluids under the polishing material while securing the polishing material to the top surface.

    摘要翻译: 通常,提供了用于保持抛光材料的方法和装置。 在一个实施例中,该装置包括具有顶表面,多个通道和一个或多个真空端口的压板。 顶表面适于支撑抛光材料。 多个通道形成在顶表面的抛光区域中。 真空端口设置在压板中,并且至少一个端口与至少一个通道连通。 当向端口施加真空时,通道在将抛光材料固定到顶表面的同时移除抛光材料下面的流体。

    Method and apparatus for reducing emissions in kiln exhaust
    58.
    发明授权
    Method and apparatus for reducing emissions in kiln exhaust 失效
    减少窑尾排放的方法和装置

    公开(公告)号:US06368103B1

    公开(公告)日:2002-04-09

    申请号:US09681289

    申请日:2001-03-14

    IPC分类号: F27B732

    摘要: A method for reducing emissions of a kiln including a feed end, the method includes operating the kiln and spraying a slurry inside the kiln at least five feet from the feed end. Additionally, the kiln includes a substantially tubular body including a bore therethrough. The body has a clinker end, a heat portion, and a feed portion. The kiln further includes a plurality of chains mounted within the bore at the feed portion, a heat source in flow communication with the heat portion, and a spray nozzle mounted in the feed portion away from the feed end.

    摘要翻译: 一种用于减少包括进料端的窑的排放的方法,所述方法包括操作窑并将窑内的浆料从进料端至少五英尺处喷洒。 此外,窑炉包括一个基本上管状的主体,其中包括一个贯穿其中的孔。 主体具有熟料端,加热部分和进料部分。 窑还包括安装在进料部分的孔内的多个链,与加热部分流动连通的热源和安装在进料部分远离进料端的喷嘴。

    Human chemokines, CK&bgr;4 and CK&bgr;10/MCP-4
    59.
    发明授权
    Human chemokines, CK&bgr;4 and CK&bgr;10/MCP-4 失效
    人类趋化因子,CKbeta4和CKbeta10 / MCP-4

    公开(公告)号:US06174995B1

    公开(公告)日:2001-01-16

    申请号:US08613822

    申请日:1996-02-23

    IPC分类号: C07K1452

    摘要: Human chemokine polypeptides and DNA/(RNA) encoding such chemokine polypeptides and a procedure for producing such polypeptides by recombinant techniques is disclosed. Also disclosed are methods for utilizing such chemokine polypeptides for the treatment of leukemia, tumors, chronic infections, autoimmune disease, fibrotic disorders, wound healing and psoriasis. Antagonists against such chemokine polypeptides and their use as a therapeutic to treat rheumatoid arthritis, autoimmune and chronic inflammatory and infective diseases, allergic reactions, prostaglandin-independent fever and bone marrow failure are also disclosed.

    摘要翻译: 公开了人类趋化因子多肽和编码这种趋化因子多肽的DNA /(RNA)和通过重组技术产生此类多肽的方法。 还公开了利用这种趋化因子多肽治疗白血病,肿瘤,慢性感染,自身免疫疾病,纤维化病症,伤口愈合和牛皮癣的方法。 还公开了抗这种趋化因子多肽的拮抗剂及其作为治疗类风湿性关节炎,自身免疫性和慢性炎性和感染性疾病,过敏反应,前列腺素依赖性发烧和骨髓衰竭的治疗剂的用途。