公开(公告)号：US08004293B2

公开(公告)日：2011-08-23

申请号：US11561463

申请日：2006-11-20

申请人： John M. White ,  Carl Sorensen

发明人： John M. White ,  Carl Sorensen

IPC分类号： G01R27/08 ,  G01R31/08

CPC分类号： H01L21/67069 ,  C23C16/4585 ,  C23C16/52 ,  H01J37/32935

摘要： A method and apparatus for monitoring the integrity of a ground member coupling a substrate support to a chamber body in a plasma processing system is provided. In one embodiment, a processing chamber is provided that includes a ground path member coupled between a substrate support and a chamber body. A sensor is positioned to sense a metric indicative of current passing through the ground member. In another embodiment, a method monitoring the integrity of a ground member coupling a substrate support to a chamber body in a plasma processing chamber includes monitoring a metric indicative of current passing through the ground member during processing, and setting a flag in response to the metric exceeding a predefined threshold.

摘要翻译： 提供了一种用于监测在等离子体处理系统中将衬底支撑件耦合到室主体的接地构件的完整性的方法和装置。 在一个实施例中，提供了处理室，其包括联接在基板支撑件和室主体之间的接地路径构件。 定位传感器以感测指示通过接地构件的电流的度量。 在另一个实施例中，监测在等离子体处理室中将衬底支撑件耦合到室主体的接地构件的完整性的方法包括在处理期间监视指示通过接地构件的电流的度量，以及响应于度量而设置标志 超过预定阈值。

公开(公告)号：US20060289608A1

公开(公告)日：2006-12-28

申请号：US11452097

申请日：2006-06-12

申请人： Russell Steel ,  Scott Packer ,  Carl Sorensen ,  Tracy Nelson ,  Richard Flak

发明人： Russell Steel ,  Scott Packer ,  Carl Sorensen ,  Tracy Nelson ,  Richard Flak

IPC分类号： A47J36/02

CPC分类号： B23K20/1255 ,  B23K20/22 ,  B23K2103/02

摘要： A method of selecting a geometry for a friction stirring tool, said tool having a melting point that is higher than the workpiece material, wherein the tool is placed in motion against the workpiece to generate heat in the workpiece such that workpiece material is transported in surface features of the tool, and wherein surface features manage workpiece material flow around the tool, and wherein the tool can be used in friction stir processing, friction stir mixing, friction stir welding, and friction stir spot welding of high melting temperature materials or high softening temperature materials.

摘要翻译： 一种选择摩擦搅拌工具的几何形状的方法，所述工具具有高于工件材料的熔点，其中工具被放置成运动抵靠工件以在工件中产生热量，使得工件材料在表面上传送 工具的特征，其中表面特征管理工具周围的工件材料流动，并且其中该工具可用于摩擦搅拌处理，摩擦搅拌混合，摩擦搅拌焊接和高熔点材料的摩擦搅拌点焊或高软化 温度材料。

公开(公告)号：US08062717B2

公开(公告)日：2011-11-22

申请号：US11425679

申请日：2006-06-21

申请人： Wendell Blonigan ,  Ernst Keller ,  Carl Sorensen

发明人： Wendell Blonigan ,  Ernst Keller ,  Carl Sorensen

IPC分类号： H05H1/24

CPC分类号： H01J37/32082 ,  H01J37/32577

摘要： An apparatus for providing a return current path for RF current between a chamber wall and a substrate support is provided comprising a low impedance flexible curtain having a first end and a second end, the first end adapted to be electrically connected to the chamber wall and the second end adapted to be connected to the substrate support, wherein the curtain further comprises at least one fold in the curtain material, located an axial distance between the first end and the second end, and at least one perforation cut into the curtain proximate the second end.

摘要翻译： 提供一种用于在室壁和衬底支撑件之间提供用于RF电流的返回电流路径的装置，其包括具有第一端和第二端的低阻抗柔性帘幕，所述第一端适于电连接到室壁和 第二端适于连接到基板支撑件，其中帘幕还包括帘幕材料中的至少一个折叠部，位于第一端部和第二端部之间的轴向距离处，并且至少一个穿孔切入靠近第二端部的帘幕 结束。

公开(公告)号：US20080116876A1

公开(公告)日：2008-05-22

申请号：US11561463

申请日：2006-11-20

申请人： John M. White ,  Carl Sorensen

发明人： John M. White ,  Carl Sorensen

IPC分类号： G01R19/00 ,  G01R31/00

CPC分类号： H01L21/67069 ,  C23C16/4585 ,  C23C16/52 ,  H01J37/32935

摘要： A method and apparatus for monitoring the integrity of a ground member coupling a substrate support to a chamber body in a plasma processing system is provided. In one embodiment, a processing chamber is provided that includes a ground path member coupled between a substrate support and a chamber body. A sensor is positioned to sense a metric indicative of current passing through the ground member. In another embodiment, a method monitoring the integrity of a ground member coupling a substrate support to a chamber body in a plasma processing chamber includes monitoring a metric indicative of current passing through the ground member during processing, and setting a flag in response to the metric exceeding a predefined threshold.

摘要翻译： 提供了一种用于监测在等离子体处理系统中将衬底支撑件耦合到室主体的接地构件的完整性的方法和装置。 在一个实施例中，提供了处理室，其包括联接在基板支撑件和室主体之间的接地路径构件。 定位传感器以感测指示通过接地构件的电流的度量。 在另一个实施例中，监测在等离子体处理室中将衬底支撑件耦合到室主体的接地构件的完整性的方法包括在处理期间监视指示通过接地构件的电流的度量，以及响应于度量而设置标志 超过预定阈值。

公开(公告)号：US20070102492A1

公开(公告)日：2007-05-10

申请号：US11637606

申请日：2006-12-12

申请人： Tracy Nelson ,  Carl Sorensen ,  Scott Packer ,  Paul Felter

发明人： Tracy Nelson ,  Carl Sorensen ,  Scott Packer ,  Paul Felter

IPC分类号： B23K20/12

CPC分类号： B23K20/122 ,  B23K20/1255 ,  B23K20/129 ,  B23K20/227 ,  B23K2101/006 ,  B23K2103/04 ,  B23K2103/05 ,  B23K2103/10 ,  B23K2103/16

摘要： A probe for friction stir welding MMCs, ferrous alloys, non-ferrous alloys, and superalloys, as well as non-ferrous alloys, the probe including a shank, a shoulder, and a pin disposed through the shoulder and into the shank, wherein the pin and the shoulder at least include a coating comprised of a superabrasive material, the Din and shoulder being designed to reduce stress risers, disposing a collar around a portion of the shoulder and the shank to thereby prevent movement of the shoulder relative to the shank, and incorporating thermal management by providing a thermal flow barrier between the shoulder and the shank, and between the collar and the tool.

摘要翻译： 用于摩擦搅拌焊接MMC，铁合金，有色合金和超级合金以及有色金属合金的探针，探针包括通过肩部和肩部设置的柄，肩部和销，其中， 销和肩部至少包括由超级磨料材料组成的涂层，所述骰子和肩部被设计成减小应力立管，将肩环设置在肩部和柄部的一部分周围，从而防止肩部相对于柄移动， 并通过在肩部和柄部之间以及在套环和工具之间提供热流动阻挡来并入热管理。

公开(公告)号：US20060027327A1

公开(公告)日：2006-02-09

申请号：US11179035

申请日：2005-07-11

申请人： Carl Sorensen ,  John White ,  Suhail Anwar

发明人： Carl Sorensen ,  John White ,  Suhail Anwar

IPC分类号： C23F1/00

CPC分类号： H01J37/32082 ,  H01J37/32183

摘要： In certain aspects, a plasma chamber is provided that has (1) a chamber size of at least about 1.8 by 2.0 meters; and (2) an effective inductance having an inductive reactance of not more than about 12-15 ohms. The plasma chamber may be used, for example, to process substrates used for flat panel displays. Numerous other aspects are provided.

摘要翻译： 在某些方面，提供了一种等离子体室，其具有（1）至少约1.8×2.0米的室尺寸; 和（2）具有不大于约12-15欧姆的感抗的有效电感。 等离子体室可以用于例如处理用于平板显示器的基板。 提供了许多其他方面。

公开(公告)号：US20050265818A1

公开(公告)日：2005-12-01

申请号：US11140777

申请日：2005-05-31

申请人： Wendell Blonigan ,  Carl Sorensen ,  John White ,  Robin Tiner

发明人： Wendell Blonigan ,  Carl Sorensen ,  John White ,  Robin Tiner

IPC分类号： H01L21/683 ,  B65G1/00 ,  B66C1/00 ,  B66C3/00 ,  H01L21/00 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01L21/67259 ,  H01L21/68742 ,  H01L21/68778

摘要： Substrate support methods and apparatus include vertically aligned lift pins that have bearing surfaces that engage friction plates and/or magnetic fields to maintain the vertical orientation of the lift pins during substrate lifting. In some embodiments, a magnetic field and/or weighting may alternatively or additionally be used to control the vertical orientation of the lift pins, limit the angle of the lift pins, and/or prevent the lift pins from unintentionally binding in a susceptor as the susceptor is raised and prevent the resulting uneven support of the substrate.

摘要翻译： 衬底支撑方法和装置包括垂直对齐的提升销，其具有接合摩擦板和/或磁场的承载表面，以在衬垫提升期间保持提升销的垂直取向。 在一些实施例中，可以替代地或另外地使用磁场和/或加权来控制提升销的垂直定向，限制提升销的角度和/或防止提升销在基座中无意地结合，因为 感受器被升高并且防止由此产生的基板不均匀的支撑。

公开(公告)号：US20050006439A1

公开(公告)日：2005-01-13

申请号：US10843208

申请日：2004-05-11

申请人： Scott Packer ,  Tracy Nelson ,  Carl Sorensen

发明人： Scott Packer ,  Tracy Nelson ,  Carl Sorensen

IPC分类号： B23K20060101 ,  B23K20/12

CPC分类号： B23K20/126

摘要： A friction stir welding anvil and method of producing a friction stir welding anvil that precludes diffusion or mechanical bonding of the anvil to the work pieces are provided. The alternatives for producing such an anvil comprise coating the anvil with diffusion barriers such as oxides, nitrides, intermetallics, and/or refractory metals; manufacturing an anvil either completely or partially from the same; or placing a coating of such materials in the form of a thin sheet or a powder between the anvil and the work pieces. The anvil disclosed herein exhibits high strength and hardness even at elevated temperatures, such as those greater than 800° C., so as to prevent the anvil from mechanically or diffusion bonding to the work pieces and so as to minimize, or eliminate altogether, anvil deformation.

摘要翻译： 提供了一种摩擦搅拌焊接砧座以及制造摩擦搅拌焊砧的方法，该砧座排除了砧座对工件的扩散或机械结合。 用于生产这种砧座的替代方案包括用诸如氧化物，氮化物，金属间化合物和/或难熔金属的扩散阻挡层涂覆砧座; 完全或部分地制造砧座; 或者在砧座和工件之间放置薄片或粉末形式的这种材料的涂层。 本文公开的砧座即使在高于800℃的高温下也显示出高的强度和硬度，以防止砧座机械地或扩散地粘结到工件上并且使砧座最小化或完全消除 形变。

公开(公告)号：US06485084B2

公开(公告)日：2002-11-26

申请号：US09915022

申请日：2001-07-25

申请人： Richard Carl Sorensen ,  Kenneth Michael Weiler

发明人： Richard Carl Sorensen ,  Kenneth Michael Weiler

IPC分类号： B62D2506

CPC分类号： B62D33/0617 ,  B60R21/131

摘要： A four post ROPS is provided with left and right front vertical posts and left and right rear vertical posts. The rear vertical posts have a bottom portion that extends upwardly, forwardly and outwardly from the floor of the operator's station. Each left and right front vertical post has an arrowhead shaped cross section. The arrow shaped cross section has a main lobe, a secondary lobe and a connecting portion located between the two lobes. The arrowhead shaped cross section defines a windshield channel for receiving the side edge of the windshield, and a side door channel for receiving the side edge of the side door. The arrowhead shape has an elongated axis that is in line with the line of sight of the operator when driving the backhoe loader.

摘要翻译： 四杆ROPS提供左右前立柱和左右后立柱。 后立柱具有从操作员站的地板向上，向前和向外延伸的底部。 每个左右前垂直柱都有一个箭头形横截面。 箭形横截面具有主瓣，副叶和位于两个叶之间的连接部分。 箭头形横截面限定了用于接收挡风玻璃的侧边缘的挡风玻璃通道和用于接收侧门侧边缘的侧门通道。 箭头形状具有与驾驶反铲装载机时的操作者的视线一致的细长轴线。

公开(公告)号：US20100311249A1

公开(公告)日：2010-12-09

申请号：US12794756

申请日：2010-06-06

申请人： JOHN M. WHITE ,  Carl Sorensen ,  Robin Tiner ,  Beom Soo Park ,  Soo Young Choi

发明人： JOHN M. WHITE ,  Carl Sorensen ,  Robin Tiner ,  Beom Soo Park ,  Soo Young Choi

IPC分类号： H01L21/46 ,  C23C16/455 ,  C23C16/00 ,  C23C16/513 ,  C23C16/30 ,  C23C14/00 ,  H05H1/24 ,  C23C16/56

CPC分类号： C23C16/45565 ,  C23C16/45591 ,  H01J37/32091 ,  H01J37/32357 ,  H01J37/3244 ,  H01J37/32449

摘要： Embodiments of the disclosure generally provide a method and apparatus for processing a substrate in a vacuum process chamber. In one embodiment a vacuum process chamber is provided that includes a chamber body and lid disposed on the chamber body. A blocker plate is coupled to the lid and bounds a staging plenum therewith. A gas distribution plate is coupled to the lid. The gas distribution plate separates a main plenum defined between the gas distribution plate and the blocker plate from a process volume defined within the chamber body. The gas distribution plate and the blocker plate define a spacing gradient therebetween which influences mixing of gases within the main plenum.

摘要翻译： 本公开的实施例通常提供用于在真空处理室中处理衬底的方法和装置。 在一个实施例中，提供真空处理室，其包括设置在室主体上的室主体和盖。 阻挡板联接到盖子并且与其分隔起来。 气体分配板联接到盖子上。 气体分配板将限定在气体分配板和阻挡板之间的主增压室与室主体内限定的过程体积分开。 气体分配板和阻挡板限定了它们之间的间隔梯度，其影响主增压室内气体的混合。