摘要:
There is provided a fluid control apparatus which can improve assembling operation efficiency. A screw insertion hole 29 extending in a front and rear direction have a stepped portion 29a which receives a head portion 18a of a male screw member 18, and the stepped portion 29a is positioned at a position closer to an inserted tip end side of a male screw member 28 in the front and rear direction than a position, in the front and rear direction, of male screw members 34 from above. By fastening the male screw member 18 in the front and rear direction at first and then fastening the male screw member 34 from above, it is possible to prevent the male screw member 18 in the front and rear direction and the male screw member 34 from above from interfering with each other.
摘要:
A direct touch type metal diaphragm valve, wherein durability of the valve, that is to say, the ensured number of continuous open/close operations of the valve, is substantially increased under conditions that an appropriate flow rate coefficient Cv is maintained, and changes of the afore-mentioned Cv value over time are mitigated by means of restricting the deformation of the valve seat over time. The afore-mentioned metal diaphragm is formed in a round, reverse-dish shape by laminating a plural number of thin stainless steel plates and a thin Nickel.Cobalt alloy plate, and its center part is bulged upward, and the maximum valve stroke of the valve is regulated to be 55% to 70% of the distance of the maximum bulge height Δh of the afore-mentioned metal diaphragm.
摘要:
A fluid control device that can be miniaturized without reducing a bolt diameter and a path diameter is provided.A fluid controller 31 having an inlet port 31a and an outlet port 31b aligned in a line direction and a line-to-line connection port 31c positioned in the middle of the above ports in the line direction is supported by a pair of joint members 7, a stepped part 7a is formed at each upper surface of opposed parts of the joint members 7, and line-to-line connection path forming members 9 and 10 having line-to-line paths 13 and 18 each communicating with the line-to-line connection port 31c of the fluid controller 31, respectively and constituting line-to-line connecting means 8 are supported by the stepped parts 7a of the joint members 7.
摘要:
A pressure type flow rate control reference which allows performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy.The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.
摘要:
A pipe joint comprises a first joint member of synthetic resin having an annular recessed portion in an end face thereof, and a second joint member of synthetic resin having an annular ridge on an end face thereof. The ridge is fitted in the opening of the recessed portion, with a synthetic resin gasket fitted in the recessed portion. When the pipe joint is properly tightened up, the outer surface of the ridge of the second joint member is pressed against the inner surface of the recessed portion of the first joint member with the gasket interposed therebetween in intimate contact with the surfaces approximately over the entire areas thereof.
摘要:
The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance. With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S4, which is hermetically fitted to the lower vacuum jacket S5 and with its lower face made open.
摘要:
Each of ridges 7 on respective opposite side surfaces of a gasket 4 has a trapezoidal cross sectional shape defined by an outer tapered face 7a providing an outer peripheral surface, an inner tapered face 7b providing an inner peripheral surface and a flat face 7c providing a top end surface. The hardness of the gasket 4, the angle between the tapered faces 7a, 7b of the ridge 7, the height of the ridge 7 and the area of the flat top end face 7c of the ridge are so determined that the value of thrust for tightening up the coupling is between a predetermined minimum value and a predetermined maximum value.
摘要:
Line interconnecting means 50 comprises lower channel blocks 51 each having a line interconnecting channel 54 and arranged in an upper stage of lines B1, B2, B3 to be interconnected, at the same position with respect to the direction of the lines, and a plurality of upper channel blocks 57 each arranged on an upper side of the lower channel blocks 51 of adjacent lines interconnected and each having a transverse channel 58a extending orthogonal to the lines and downward channel 58b extending from the transverse channel 58a and communicating with the respective line interconnecting channels 54 of the lower channel blocks 51. Each of the lower channel blocks 51 is removably fastened to a coupling member in a lower stage with screws from above, and the upper channel blocks 57 are removably fastened to the lower channel blocks 51 with screws from above.
摘要:
A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.
摘要:
Two coupling members are provided in respective butting end faces thereof with annular recessed portions surrounding respective fluid channels thereof and having annular projections each formed in a bottom face of the recessed portion. A gasket comprises a sealing portion having an outside diameter smaller than the diameter of the recessed portions and is positioned between the projections of the coupling members, and a guide has an outside diameter permitting the guide to be fitted into the recessed portions and positioned externally of the sealing portion. The butting end faces of the coupling members are movable into contact with each other when the coupling is tightened up properly. The sealing portion has an annular groove formed in an outer periphery thereof, and the sealing portion and the guide are connected together by a snap ring fitted in the annular groove.