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公开(公告)号:US20180005880A1
公开(公告)日:2018-01-04
申请号:US15198516
申请日:2016-06-30
Applicant: International Business Machines Corporation
Inventor: Benjamin D. Briggs , Lawrence A. Clevenger , Cornelius Brown Peethala , Michael Rizzolo , Chih-Chao Yang
IPC: H01L21/768 , H01L23/522 , H01L23/532
CPC classification number: H01L21/76862 , H01L21/76802 , H01L21/76843 , H01L21/76865 , H01L21/76877 , H01L23/5226 , H01L23/53238
Abstract: A method of forming a semiconductor structure includes forming at least one trench in a dielectric layer, forming a barrier layer on a bottom of said at least one trench, sidewalls of said at least one trench and a top surface of the dielectric layer, the barrier layer having a non-uniform thickness, and selectively thinning at least a first portion of the barrier layer using one or more cycles comprising forming an oxidized layer in the first portion of the barrier layer using a neutral beam oxidation and removing the oxidized layer using an etching process.
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公开(公告)号:US20170368992A1
公开(公告)日:2017-12-28
申请号:US15681528
申请日:2017-08-21
Applicant: International Business Machines Corporation
Inventor: Benjamin D. Briggs , Lawrence A. Clevenger , Leigh Anne H. Clevenger , Jonathan H. Connell, II , Nalini K. Ratha , Michael Rizzolo
CPC classification number: B60C9/00 , B60Q9/00 , B60W30/08 , B60W40/09 , B60W2540/22
Abstract: Techniques are provided for alerting drivers of hazardous driving conditions using the sensing capabilities of wearable mobile technology. In one aspect, a method for alerting drivers of hazardous driving conditions includes the steps of: collecting real-time data from a driver of a vehicle, wherein the data is collected via a mobile device worn by the driver; determining whether the real-time data indicates that a hazardous driving condition exists; providing feedback to the driver if the real-time data indicates that a hazardous driving condition exists, and continuing to collect data from the driver in real-time if the real-time data indicates that a hazardous driving condition does not exist. The real-time data may also be collected and used to learn characteristics of the driver. These characteristics can be compared with the data being collected to help determine, in real-time, whether the driving behavior is normal and whether a hazardous driving condition exists.
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公开(公告)号:US09837485B2
公开(公告)日:2017-12-05
申请号:US15091043
申请日:2016-04-05
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor: Benjamin D. Briggs , Lawrence A. Clevenger , Bartlet H. Deprospo , Huai Huang , Christopher J. Penny , Michael Rizzolo
IPC: H01L49/02 , H01L23/522
CPC classification number: H01L28/40 , H01L23/5223
Abstract: Capacitors and methods of forming the same include forming a gap in a dielectric layer underneath one or more conducting lines, such that the one or more conducting lines are suspended over the gap. A capacitor stack is deposited in the gap and on the conducting lines. Respective contacts are deposited on the conducting lines and on the capacitor stack.
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公开(公告)号:US20170344722A1
公开(公告)日:2017-11-30
申请号:US15167120
申请日:2016-05-27
Applicant: International Business Machines Corporation
Inventor: Maryam Ashoori , Benjamin David Briggs , Lawrence A. Clevenger , Leigh Anne Hodges Clevenger , Jonathan Hudson Connell, II , Michael Rizzolo
CPC classification number: G06F19/3456 , G06F16/245 , G06F16/2455 , G16H10/60
Abstract: A cognitive health management method, system, and non-transitory computer readable medium, include analyzing user input data of a first user by comparing the user input data of the first user to medical data in the database, and providing both of: a recommendation to the first user based on the comparison of the user input data of the first user to the medical data of the database, and a result feedback including a conclusion of the analyzing to a result feedback section of the database.
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55.
公开(公告)号:US20170317025A1
公开(公告)日:2017-11-02
申请号:US15650344
申请日:2017-07-14
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor: Benjamin D. Briggs , Lawrence A. Clevenger , Christopher J. Penny , Michael Rizzolo
IPC: H01L23/528 , H01L21/768 , H01L21/764 , H01L21/02 , H01L21/3213 , H01L21/311
CPC classification number: H01L23/5283 , H01L21/02266 , H01L21/02271 , H01L21/31111 , H01L21/31116 , H01L21/32133 , H01L21/764 , H01L21/76804 , H01L21/76808 , H01L21/76811 , H01L21/76814 , H01L21/76816 , H01L21/7682 , H01L21/76831 , H01L21/76834 , H01L21/7685 , H01L21/76877 , H01L21/76879 , H01L21/76885 , H01L21/76897 , H01L23/522 , H01L23/5226 , H01L23/528 , H01L23/53209 , H01L23/53214 , H01L23/53223 , H01L23/53228 , H01L23/53238 , H01L23/53252 , H01L23/53266 , H01L23/53271 , H01L23/5329 , H01L23/53295
Abstract: A method of forming an interconnect to an electrical device is provided. The structure produced by the method may include a plurality of metal lines in a region of a substrate positioned in an array of metal lines all having parrallel lengths; and a plurality of air gaps between the metal lines in a same level as the metal lines, wherein an air gap is present between each set of adjacent metal lines. A plurality of interconnects may be present in electrical communication with said plurality of metal lines, wherein an exclusion zone for said plurality of interconnects is not present in said array of metal lines.
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公开(公告)号:US20170301621A1
公开(公告)日:2017-10-19
申请号:US15337130
申请日:2016-10-28
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor: Benjamin D. Briggs , Lawrence A. Clevenger , Christopher J. Penny , Michael Rizzolo
IPC: H01L23/522 , H01L21/768 , H01L23/532
CPC classification number: H01L23/5226 , H01L21/76816 , H01L21/76819 , H01L21/7682 , H01L21/76829 , H01L21/76832 , H01L21/76834 , H01L21/76879 , H01L21/76897 , H01L23/5222 , H01L23/5329 , H01L23/53295
Abstract: A method for via alignment includes forming first airgaps between interconnect structures and depositing a pinch off layer to close off openings to the first airgaps. A protection layer is formed in divots in the pinch off layer. The protection layer and the pinch off layer are planarized to form a surface where the protection layer remains in the divots. An interlevel dielectric layer (ILD) is deposited on the surface. The ILD and the pinch off layer are etched using the protection layer as an etch stop to align a via and expose the interconnect structure through the via.
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公开(公告)号:US20170286633A1
公开(公告)日:2017-10-05
申请号:US15085938
申请日:2016-03-30
Applicant: International Business Machines Corporation
Inventor: Maryam Ashoori , Benjamin D. Briggs , Lawrence A. Clevenger , Leigh Anne H. Clevenger , Jonathan H. Connell, II , Nalini K. Ratha , Michael Rizzolo
IPC: G06F19/00
CPC classification number: G06F19/3456 , G16H40/63
Abstract: Embodiments include method, systems and computer program products for proximity feedback for medication identification. Aspects include accessing, via a user device, a profile data for the user; reading, via the user device, identification data from an identification tag on an object; obtaining information associated with the identification data, wherein the information is associated with contents of the object; and providing a feedback to the user via the user device, the feedback is based upon the information and an interaction between the user of the user device and the object.
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58.
公开(公告)号:US20170278796A1
公开(公告)日:2017-09-28
申请号:US15076878
申请日:2016-03-22
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor: Benjamin D. Briggs , Lawrence A. Clevenger , Christopher J. Penny , Michael Rizzolo
IPC: H01L23/528 , H01L21/02 , H01L21/3213 , H01L21/768 , H01L21/311
CPC classification number: H01L23/5283 , H01L21/02266 , H01L21/02271 , H01L21/31111 , H01L21/31116 , H01L21/32133 , H01L21/764 , H01L21/76804 , H01L21/76808 , H01L21/76811 , H01L21/76814 , H01L21/76816 , H01L21/7682 , H01L21/76831 , H01L21/76834 , H01L21/7685 , H01L21/76877 , H01L21/76879 , H01L21/76885 , H01L23/522 , H01L23/5226 , H01L23/528 , H01L23/53209 , H01L23/53214 , H01L23/53223 , H01L23/53228 , H01L23/53238 , H01L23/53252 , H01L23/53266 , H01L23/53271 , H01L23/5329 , H01L23/53295
Abstract: A method of forming an interconnect to an electrical device is provided. The structure produced by the method may include a plurality of metal lines in a region of a substrate positioned in an array of metal lines all having parrallel lengths; and a plurality of air gaps between the metal lines in a same level as the metal lines, wherein an air gap is present between each set of adjacent metal lines. A plurality of interconnects may be present in electrical communication with said plurality of metal lines, wherein an exclusion zone for said plurality of interconnects is not present in said array of metal lines.
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公开(公告)号:US09758095B2
公开(公告)日:2017-09-12
申请号:US15005675
申请日:2016-01-25
Applicant: International Business Machines Corporation
Inventor: Benjamin D. Briggs , Lawrence A. Clevenger , Leigh Anne H. Clevenger , Jonathan H. Connell, II , Nalini K. Ratha , Michael Rizzolo
CPC classification number: B60C9/00 , B60Q9/00 , B60W30/08 , B60W40/09 , B60W2540/22
Abstract: Techniques are provided for alerting drivers of hazardous driving conditions using the sensing capabilities of wearable mobile technology. In one aspect, a method for alerting drivers of hazardous driving conditions includes the steps of: collecting real-time data from a driver of a vehicle, wherein the data is collected via a mobile device worn by the driver; determining whether the real-time data indicates that a hazardous driving condition exists; providing feedback to the driver if the real-time data indicates that a hazardous driving condition exists, and continuing to collect data from the driver in real-time if the real-time data indicates that a hazardous driving condition does not exist. The real-time data may also be collected and used to learn characteristics of the driver. These characteristics can be compared with the data being collected to help determine, in real-time, whether the driving behavior is normal and whether a hazardous driving condition exists.
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公开(公告)号:US20170236717A1
公开(公告)日:2017-08-17
申请号:US15583638
申请日:2017-05-01
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor: Benjamin D. Briggs , Lawrence A. Clevenger , Michael Rizzolo , Jay W. Strane
IPC: H01L21/3065 , H01L21/762 , H01L21/768 , H01L21/8234 , H01L29/66 , H01L21/306
CPC classification number: H01L21/76232 , H01L21/30604 , H01L21/30625 , H01L21/3065 , H01L21/31051 , H01L21/31055 , H01L21/31056 , H01L21/31111 , H01L21/31116 , H01L21/76229 , H01L21/76897 , H01L21/823431 , H01L21/823481 , H01L27/0886 , H01L29/0653 , H01L29/66795
Abstract: A method for providing a uniform recess depth between different fin gap sizes includes depositing a dielectric material between fins on a substrate. Etch lag is tuned for etching the dielectric material between narrow gaps faster than the dielectric material between wider gaps such that the dielectric material in the narrow gaps reaches a target depth. An etch block is formed in die narrow gaps. The wider gaps are etched to the target depth. The etch block is removed.
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