TEMPORARY ADHESIVES INCLUDING A FILLER MATERIAL AND RELATED METHODS
    53.
    发明申请
    TEMPORARY ADHESIVES INCLUDING A FILLER MATERIAL AND RELATED METHODS 有权
    临时粘合剂包括填充材料和相关方法

    公开(公告)号:US20140147989A1

    公开(公告)日:2014-05-29

    申请号:US13689144

    申请日:2012-11-29

    Inventor: Shijian Luo Xiao Li

    Abstract: Temporary adhesives include a thermoplastic polymer comprising from about 30% by weight to about 80% by weight of the temporary adhesive, a solvent comprising from about 20% by weight to about 70% by weight of the temporary adhesive, and a filler material comprising from about 0.2% to about 5% by weight of the temporary adhesive. Methods of processing a semiconductor device wafer include bonding the semiconductor device wafer to a surface of a carrier substrate using a temporary adhesive including a filler material comprising from about 0.2% to about 5% by weight of the temporary adhesive, thinning the semiconductor device wafer, and, while the temporary adhesive remains on the surface of the carrier substrate proximate a peripheral edge thereof, subjecting the thinned semiconductor device wafer to one or more back side processing operations. Methods of forming a thinned semiconductor wafer include using such a temporary adhesive.

    Abstract translation: 临时粘合剂包括热塑性聚合物,其包含约30重量%至约80重量%的临时粘合剂,包含约20重量%至约70重量%的临时粘合剂的溶剂,以及填料, 约0.2%至约5%的临时粘合剂。 处理半导体器件晶片的方法包括使用包括约0.2重量%至约5重量%的临时粘合剂的填充材料的临时粘合剂将半导体器件晶片接合到载体衬底的表面,使半导体器件晶片变薄, 并且当临时粘合剂在其周边附近残留在载体基板的表面上时,对减薄的半导体器件晶片进行一个或多个背面处理操作。 形成薄化半导体晶片的方法包括使用这种临时粘合剂。

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