HIGH PERFORMANCE HIGH-VOLTAGE ISOLATORS
    51.
    发明公开

    公开(公告)号:US20240120270A1

    公开(公告)日:2024-04-11

    申请号:US18527618

    申请日:2023-12-04

    CPC classification number: H01L23/5223 H01L23/5227 H01L23/585

    Abstract: An integrated circuit includes a semiconductor substrate and a plurality of dielectric layers over the semiconductor substrate, including a top dielectric layer. A metal plate or metal coil is located over the top dielectric layer; a metal ring is located over the top dielectric layer and substantially surrounds the metal plate or metal coil. A protective overcoat overlies the metal ring and overlies the metal plate or metal coil. A trench opening is formed through the protective overcoat, with the trench opening exposing the top dielectric layer between the metal plate/coil and the metal ring, the trench opening substantially surrounding the metal plate or metal coil.

    GALVANIC HIGH VOLTAGE ISOLATION CAPABILITY ENHANCEMENT ON REINFORCED ISOLATION TECHNOLOGIES

    公开(公告)号:US20230047044A1

    公开(公告)日:2023-02-16

    申请号:US17403723

    申请日:2021-08-16

    Abstract: A microelectronic device includes a semiconductor substrate and a high voltage isolation capacitor over the substrate. The capacitor includes a bottom capacitor plate over the substrate. Dielectric layers are formed above the bottom capacitor plate, including a top dielectric layer. A high dielectric layer on the top dielectric layer includes at least a first sublayer having a first dielectric constant that is higher than a dielectric constant of the top dielectric layer. A top capacitor plate is formed on the high dielectric layer over the bottom capacitor plate. An electric field abatement structure surrounds the top capacitor plate. The electric field abatement structure includes a shelf of the high dielectric layer extending outward from a lower corner of the bottom capacitor plate at least 14 microns, and an isolation break in the high dielectric layer past the shelf, in which the first sublayer is removed from the isolation break.

    High voltage isolated microelectronic device

    公开(公告)号:US11574995B2

    公开(公告)日:2023-02-07

    申请号:US17138059

    申请日:2020-12-30

    Abstract: A method forms a first voltage node of a high voltage component of a microelectronic device. The method also forms a plurality of dielectric layers. The method also forms a second voltage node of the high voltage component of the microelectronic device in a fourth position such that the plurality of dielectric layers is between the first voltage node and the second voltage node. During the forming a second voltage node step, a portion of a third layer in the plurality of dielectric layers, in a region outwardly positioned relative to the second voltage node, is removed to expose the second layer, in the plurality of dielectric layers, in the region.

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