METHOD AND APPARATUS FOR RESOLUTION AND SENSITIVITY ENHANCED ATOMIC FORCE MICROSCOPE BASED INFRARED SPECTROSCOPY

    公开(公告)号:US20180120344A1

    公开(公告)日:2018-05-03

    申请号:US15348848

    申请日:2016-11-10

    IPC分类号: G01Q30/02 G01Q60/34 G01N21/35

    摘要: Methods and apparatus for obtaining extremely high sensitivity chemical composition maps with spatial resolution down to a few nanometers. In some embodiments these chemical composition maps are created using a combination of three techniques: (1) Illuminating the sample with IR radiation than is tuned to an absorption band in the sample; and (2) Optimizing a mechanical coupling efficiency that is tuned to a specific target material; (3) Optimizing a resonant detection that is tuned to a specific target material. With the combination of these steps it is possible to obtain (1) Chemical composition maps based on unique IR absorption; (2) spatial resolution that is enhanced by extremely short-range tip-sample interactions; and (3) resonant amplification tuned to a specific target material. In other embodiments it is possible to take advantage of any two of these steps and still achieve a substantial improvement in spatial resolution and/or sensitivity.