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公开(公告)号：US11899159B2
公开(公告)日：2024-02-13
申请号：US16838490
申请日：2020-04-02
发明人： Jani Reijonen , Kevin McFarland
IPC分类号： G01V5/08 , G01V5/12 , H01J29/48 , H05H5/06 , H01J35/06 , H01J35/04 , H01J35/14 , H05G1/08 , H01J35/32 , H01J35/18 , H01J35/16 , H01J35/08
CPC分类号： G01V5/08 , G01V5/125 , H01J29/481 , H01J35/045 , H01J35/064 , H01J35/14 , H01J35/16 , H01J35/186 , H01J35/32 , H05G1/085 , H05H5/06 , H01J35/116
摘要： A beam injector may include a cathode emitter to emit electrons and an electrode to bias at least a portion of the electrons to remain on the cathode emitter and focus the emitted electrons into an electron beam. The beam injector may also include a resistor coupled between the cathode emitter and the electrode and configured to allow self-regulation of a voltage potential on the electrode based at least in part on a current of the electron beam.
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公开(公告)号：US20230249002A1
公开(公告)日：2023-08-10
申请号：US17984954
申请日：2022-11-10
CPC分类号： A61N5/1077 , A61N5/1048 , H05H5/03 , H05H5/063 , A61N2005/109 , A61N2005/1095
摘要： Embodiments of systems, devices, and methods relate to a beam system. An example beam system includes a charged particle source configured to generate a beam of charged particles, a pre-accelerator system configured to accelerate the beam, and an accelerator configured to accelerate the beam from the pre-accelerator system. The pre-accelerator system can cause the beam to converge as it is propagated from the source to an input aperture of the accelerator. The pre-accelerator system can further reduce or eliminate source disturbance or damage caused by backflow traveling from the accelerator toward the source.
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公开(公告)号：US11524179B2
公开(公告)日：2022-12-13
申请号：US17006080
申请日：2020-08-28
摘要： Embodiments of systems, devices, and methods relating to a beam system. An example beam system includes a charged particle source configured to generate a beam of charged particles, a pre-accelerator system configured to accelerate the beam, and an accelerator configured to accelerate the beam from the pre-accelerator system. The pre-accelerator system can cause the beam to converge as it is propagated from the source to an input aperture of the accelerator. The pre-accelerator system can further reduce or eliminate source disturbance or damage caused by backflow traveling from the accelerator toward the source.
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公开(公告)号：US20220084774A1
公开(公告)日：2022-03-17
申请号：US17356171
申请日：2021-06-23
摘要： Embodiments of systems, devices, and methods relate to an ion beam source system. An ion source is configured to provide a negative ion beam to a tandem accelerator system downstream of the ion source, and a modulator system connected to an extraction electrode of the ion source is configured to bias the extraction electrode for a duration sufficient to maintain acceleration voltage stability of the tandem accelerator system.
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公开(公告)号：US20210138273A1
公开(公告)日：2021-05-13
申请号：US17006080
申请日：2020-08-28
摘要： Embodiments of systems, devices, and methods relating to a beam system. An example beam system includes a charged particle source configured to generate a beam of charged particles, a pre-accelerator system configured to accelerate the beam, and an accelerator configured to accelerate the beam from the pre-accelerator system. The pre-accelerator system can cause the beam to converge as it is propagated from the source to an input aperture of the accelerator. The pre-accelerator system can further reduce or eliminate source disturbance or damage caused by backflow traveling from the accelerator toward the source.
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公开(公告)号：US20200321182A1
公开(公告)日：2020-10-08
申请号：US16838490
申请日：2020-04-02
发明人： Jani Reijonen , Kevin McFarland
摘要： A beam injector may include a cathode emitter to emit electrons and an electrode to bias at least a portion of the electrons to remain on the cathode emitter and focus the emitted electrons into an electron beam. The beam injector may also include a resistor coupled between the cathode emitter and the electrode and configured to allow self-regulation of a voltage potential on the electrode based at least in part on a current of the electron beam.
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公开(公告)号：US10453668B2
公开(公告)日：2019-10-22
申请号：US15907786
申请日：2018-02-28
发明人： Robert Continetti , Morgan Miller , Brian Adamson
摘要： A spectrometer device for analysis of aerosol particles, dusts, and other microparticles and/or nanoparticles includes an electrospray ionization source supplying a particle stream to an aerodynamic lens that focuses and collimates a beam of particles. An electrostatic trap accepts the beam of particles and traps a single trapped particle at a time in the electrostatic trap to oscillate with a measurable amplitude and frequency. A sensor senses the amplitude and frequency, and a processor determines a calculated mass to charge ratio from the amplitude and frequency of oscillation of the trapped particle in real time. A method creates a focused stream of micro or nanoparticles, traps a single particle at a time in an electrostatic trap. The amplitude and frequency of the oscillation of the trapped particle is sensed. The mass to charge ratio is determined from the amplitude and frequency of oscillation. Particles can be accelerated into a target.
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公开(公告)号：US09847740B2
公开(公告)日：2017-12-19
申请号：US14432052
申请日：2012-09-28
申请人： Peter Simon Aptaker , Paul Beasley , Oliver Heid
发明人： Peter Simon Aptaker , Paul Beasley , Oliver Heid
摘要： A high-voltage electrostatic generator has an assembly of concentric electrically conductive half-shells separated by an equatorial gap, essentially with cylindrical symmetry about an axis. Adjacent to the equatorial gap, edge regions of at least a selected subset of the half-shells are shaped.
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公开(公告)号：US09281165B1
公开(公告)日：2016-03-08
申请号：US14469050
申请日：2014-08-26
IPC分类号： H01J49/00 , H01J37/30 , H01J37/317 , H01J37/05 , H05H5/06
CPC分类号： H01J37/3007 , H01J37/08 , H01J37/3171 , H01J2237/0473 , H01J2237/0815 , H05H5/063
摘要： A tandem accelerator and ion implanter with improved performance is disclosed. The tandem accelerator includes a plurality of input electrodes, a plurality of output electrodes and a high voltage terminal disposed therebetween. The high voltage terminal includes a stripper tube. Neutral molecules are injected into the stripper tube, which remove electrons from the incoming negative ion beam. The resulting positive ions are accelerated toward the plurality of output electrodes. To reduce the amount of undesired positive ions that exit the stripper tube, bias electrodes is disposed at the entrance and exit of the stripper tube. The bias electrodes are biased a second voltage, greater than the first voltage applied to the terminal. The bias electrodes repel slow moving positive ions, preventing them from exiting the stripper tube and contaminating the workpiece.
摘要翻译： 公开了一种具有改进性能的串联加速器和离子注入机。 串联加速器包括多个输入电极，多个输出电极和设置在它们之间的高电压端子。 高压端子包括剥离管。 将中性分子注入汽提塔，从入射的负离子束中除去电子。 所产生的正离子朝向多个输出电极加速。 为了减少离开汽提塔的不需要的正离子的量，偏压电极设置在汽提塔管的入口和出口处。 偏置电极偏置第二电压，大于施加到端子的第一电压。 偏置电极排斥缓慢移动的正离子，防止它们离开剥离管并污染工件。
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公开(公告)号：US09253869B2
公开(公告)日：2016-02-02
申请号：US14402380
申请日：2012-06-04
申请人： Oliver Heid , Timothy Hughes
发明人： Oliver Heid , Timothy Hughes
IPC分类号： H05H5/06 , H05H5/04 , H05H5/00 , H05H15/00 , H01J37/244
CPC分类号： H05H5/066 , H01J37/244 , H05H6/00
摘要： A device for collecting electrically charged particles comprising a first shell and a second shell disposed concentrically around the first shell is provided. Each of the shells is divided respectively into a first half-shell and a second half-shell. A first switch is disposed between the first half-shell of the first shell and the second half-shell of the first shell. A second switch is disposed between the second half-shell of the first shell and the first half-shell of the second shell. The first half-shell of the second shell has a through opening.
摘要翻译： 提供了一种用于收集带电粒子的装置，包括围绕第一壳体同心设置的第一壳体和第二壳体。 每个壳分别分成第一半壳和第二半壳。 第一开关设置在第一壳体的第一半壳体与第一壳体的第二半壳体之间。 第二开关设置在第一壳体的第二半壳体和第二壳体的第一半壳体之间。 第二壳的第一半壳具有通孔。
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