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61.发明申请DATA PROCESSING DEVICE FOR GAS CHROMATOGRAPH, DATA PROCESSING METHOD, AND RECORDING MEDIUM THAT STORES DATA PROCESSING PROGRAM 审中-公开用于气体色谱的数据处理装置，数据处理方法和存储数据处理程序的记录介质公开(公告)号：US20140309946A1
公开(公告)日：2014-10-16
申请号：US14247561
申请日：2014-04-08
发明人： Nanako KONO , Tomohiro SASAKI
IPC分类号： G01N30/86
CPC分类号： G01N30/8675 , G01N30/8658 , G01N30/8668 , G01N30/8693 , G01N2030/3084
摘要： A data processing device for gas chromatograph includes an actually measured retention time storage part, a predicted retention time storage part, and an actual temperature condition estimation part configured to estimate an actual temperature condition in the column on the basis of an actually measured retention time and a predicted retention time.
摘要翻译： 用于气相色谱的数据处理装置包括实际测量的保留时间存储部分，预测保留时间存储部分和实际温度条件估计部分，其被配置为基于实际测量的保留时间来估计列中的实际温度条件，以及 预计保留时间。
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公开(公告)号：US20140167366A1
公开(公告)日：2014-06-19
申请号：US14133268
申请日：2013-12-18
CPC分类号： C23F1/02 , F16J15/0818 , F16J15/0887
摘要： The present invention is mainly intended to provide a sealing member which can be easily manufactured and which is capable of sealing with high accuracy and a method of manufacturing the sealing member, wherein the sealing member is a metallic sealing member that is arranged so as to be interposed between a first surface and a second surface which are facing each other. The sealing member is provided with a first protrusion protruded toward the first surface and a pair of second protrusions protruded toward the second surface, wherein the first protrusion is arranged between the paired second protrusions and distal end portions of the first protrusion and second protrusions are mutually parallel flat surfaces.
摘要翻译： 本发明主要是为了提供一种可以容易地制造并且能够高精度地密封的密封构件和密封构件的制造方法，其中密封构件是金属密封构件，其被布置为 插入在彼此面对的第一表面和第二表面之间。 密封构件设置有朝向第一表面突出的第一突起和朝向第二表面突出的一对第二突起，其中第一突起布置在第一突起的一对第二突起和远端部之间，第二突起相互 平行平面。
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63.发明授权Mass flow controller verifying system, verifying method and verifying program 有权质量流量控制器验证系统，验证方法和验证程序公开(公告)号：US08646307B2
公开(公告)日：2014-02-11
申请号：US13779527
申请日：2013-02-27
发明人： Tadahiro Yasuda , Yuji Yamaguchi
CPC分类号： G01F25/0007 , G01F1/36 , G01F1/50 , G01F25/00 , G01F25/0038 , G01F25/0053 , G05B23/00 , G05B23/02 , G05D7/0635 , H01L21/67017 , Y10T137/7759
摘要： In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately.
摘要翻译： 在质量流量控制器验证系统中，提供了与流入气体管线平行布置并连接到后汇合流动气体管线中的验证气体管线，参考体积计算部分，其适于计算针对特定管道确定的参考体积 气体管道系统的验证参数计算部，其基于由待验证的质量流量控制器控制流量的压力测量单元测量的测量压力的时间序列数据，计算验证参数;以及 比较部分，其适于比较基于参考体积的参考参数集和验证参数，由此可以以低成本将验证系统引入到用于半导体制造过程等的现有气体管道系统中，并且能够验证 质量流量控制器快速准确。
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公开(公告)号：US20130186499A1
公开(公告)日：2013-07-25
申请号：US13748506
申请日：2013-01-23
发明人： Hidetaka Yada , Takehisa Hataita , Soutaro Kishida
IPC分类号： F16L55/027
CPC分类号： F16L55/027 , G01F1/34
摘要： In order to provide a fluid resistance device that is easily manufactured, compact, accurate, and uniform in performance, the fluid resistance device comprises two members that have facing surfaces that face each other and a downstream end of the upstream side flow channel and an upstream end of the downstream side flow channel open at positions displaced from each other on the facing surfaces, and a ring body that is arranged to surround the downstream end opening and the upstream end opening and that forms the fluid resistance channel between the downstream end opening and the upstream end opening by being sandwiched by the facing surfaces, and is so configured that the ring body is made of a material harder than that of each member, and the ring body breaks into the facing surfaces by fastening two members so as to make the facing surfaces approach each other.
摘要翻译： 为了提供容易制造，紧凑，精确和性能均匀的流体阻力装置，流体阻力装置包括两个构件，其具有彼此相对的相对表面和上游侧流动通道的下游端以及上游侧 下游侧流路的端部在面对面上彼此偏移的位置开口，环状体设置成包围下游端开口和上游端开口，并在下游端开口与下游端开口之间形成流体阻力通道 所述上游端开口被所述相对表面夹持，并且被构造成使得所述环形主体由比每个构件更硬的材料制成，并且所述环体通过紧固两个构件而分裂成相对表面，以使 面对面。
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公开(公告)号：US20240324464A1
公开(公告)日：2024-09-26
申请号：US18597775
申请日：2024-03-06
发明人： Akihiro TAGUCHI , Chihiro HAMADA
CPC分类号： H10N30/802 , G01N29/222
摘要： The present invention enables a piezo element to be replaced or maintained at an appropriate timing, and is a piezo element diagnosis device for making a diagnosis of a piezo element incorporated in a piece of equipment, and includes a driving information acquisition unit that acquires driving information of the piezo element, and a life calculation unit that calculates a consumed life or a remaining life of the piezo element based on the driving information.
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66.发明公开公开(公告)号：US20240201157A1
公开(公告)日：2024-06-20
申请号：US18288097
申请日：2022-02-14
发明人： Motonobu TAKAHASHI
CPC分类号： G01N33/0067 , G01N1/02 , G01N33/18 , G01N2001/028 , G01N2033/0068
摘要： A gas analysis device for analyzing a compound gas and H2O gas produced in a main reaction in which an aqueous solution including a compound and water is vaporized, includes a first concentration calculating unit that calculates a concentration of the compound gas, a second concentration calculating unit that calculates a concentration of the H2O gas, an analysis unit that compares a first actual concentration which is the concentration of the compound gas calculated by the first concentration calculating unit with a first ideal concentration which is the concentration of the compound gas in case that the main reaction proceeds ideally, and that compares a second actual concentration which is the concentration of the H2O gas calculated by the second concentration calculating unit with a second ideal concentration which is the concentration of the H2O gas in case that the main reaction proceeds ideally and an output unit.
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公开(公告)号：US20240060573A1
公开(公告)日：2024-02-22
申请号：US18366925
申请日：2023-08-08
发明人： Kazuya SHAKUDO , Yuki HIDA , Shigeyuki HAYASHI
CPC分类号： F16K31/0655 , F16K1/36 , F16K27/029 , F16K31/0675 , F16K37/0066
摘要： The present invention enables fluid control with a smaller current or voltage by reducing a magnetic resistance of a magnetic path including the valve body. The present invention includes: a flow path block formed with an internal flow path; an orifice fixed to the flow path block and having a valve seat surface; a valve body having a seating surface seated on the valve seat surface, and made of a magnetic material; and an actuator portion that drives the valve body by a magnetic force. The actuator portion includes: an iron core provided to face a surface of the valve body opposite to the seating surface; a solenoid coil wound around the iron core; and a casing accommodating the iron core and the solenoid coil, and made of a magnetic material. The casing extends to a position surrounding a periphery of the valve body.
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公开(公告)号：US11899475B2
公开(公告)日：2024-02-13
申请号：US17447320
申请日：2021-09-10
发明人： Kazuya Imai
IPC分类号： G05D7/06 , F16K31/02 , F16K41/10 , F16K1/36 , F16K31/12 , F16K1/00 , F16K1/52 , F16K27/02 , F16K1/42 , F16K25/00
CPC分类号： G05D7/0635 , F16K31/02 , F16K1/00 , F16K1/36 , F16K1/42 , F16K1/52 , F16K25/005 , F16K27/02 , F16K31/12 , F16K41/10 , G05D7/06
摘要： In order to achieve an enlargement of a seating surface, and to additionally achieve an improvement in productivity while forming this seating surface using a resin layer, without having to sacrifice any of the drive range of the valve body, there is provided a fluid control valve that is formed such that drive force from an actuator is transmitted to a valve body via a plunger, and that controls a flow of a fluid by causing a seating surface of the valve body to move towards or away from a valve seat surface of a valve seat, wherein the valve body is a separate body from the plunger, and the seating surface is formed by a resin layer.
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公开(公告)号：US20240030013A1
公开(公告)日：2024-01-25
申请号：US18222029
申请日：2023-07-14
发明人： Miyako HADA , Motonobu TAKAHASHI , Masakazu MINAMI , Yuhei SAKAGUCHI , Toru SHIMIZU , Tetsuo FUJII
CPC分类号： H01J37/32981 , H01J37/32926 , H01L21/67069 , H01L21/67253 , H01J2237/2445 , H01J2237/3341
摘要： The present invention is aimed to perform precise monitoring of the processed amount by which a workpiece is processed, and includes a measurement unit that measures a concentration or a partial pressure of a reaction product generated while the workpiece is being processed, and an operation unit that calculates the processed amount of the workpiece using an output value of the measurement unit. The measurement unit includes: a laser light source that irradiates target gas containing the reaction product with a laser beam; a photodetector that detects a laser beam having passed through the target gas; and a signal processing unit that calculates the concentration or the partial pressure of the reaction product based on a detection signal of the photodetector. The operation unit includes a time integration unit; a relationship data storage unit; and a processed amount calculation unit.
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公开(公告)号：US20230417660A1
公开(公告)日：2023-12-28
申请号：US18039316
申请日：2021-11-22
IPC分类号： G01N21/3504 , G01N21/03 , G01N21/39
CPC分类号： G01N21/3504 , G01N21/0332 , G01N21/39 , G01N2201/127
摘要： The present invention is a gas analysis device that measures a concentration or partial pressure of a halide contained in a material gas used in semiconductor manufacturing process or a by-product gas generated in semiconductor manufacturing process with good accuracy, the device being for analyzing a concentration or partial pressure of a halide contained in a material gas used in a semiconductor manufacturing process or a by-product gas generated in a semiconductor manufacturing process, the device including a gas cell into which the material gas or the by-product gas is introduced, a laser light source that irradiates the gas cell with laser light whose wavelength is modulated, a light detector that detects the laser light transmitted through the gas cell, and a signal processing unit that calculates the concentration or partial pressure of the halide by using a light absorption signal obtained from an output signal of the light detector.
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