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76 条记录 (耗时 0.028 秒)

    Stabilizing substrate carriers during overhead transport
    61.
    发明授权
    Stabilizing substrate carriers during overhead transport 有权
    架空运输过程中稳定底物载体

    公开(公告)号：US07798309B2

    公开(公告)日：2010-09-21

    申请号：US10988168

    申请日：2004-11-12

    申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    IPC分类号： B65G43/08

    CPC分类号： B24B37/345 ,  H01L21/68707

    摘要： In a first aspect, a first apparatus is provided for inter-station overhead transport of a substrate carrier. The first apparatus includes (1) an overhead transport mechanism; (2) a substrate carrier support suspended from the overhead transport mechanism and adapted to receive and support a substrate carrier; and (3) a stabilization apparatus adapted to limit rocking of the substrate carrier and substrate carrier support relative to the overhead transport mechanism. Numerous other aspects are provided.

    摘要翻译： 在第一方面，提供了一种用于衬底载体的站间架空输送的第一装置。 第一装置包括（1）架空运输机构; （2）悬架在架空运输机构上并适于接收和支撑衬底载体的衬底载体支撑件; 以及（3）稳定装置，其适于限制衬底载体和衬底载体支撑件相对于架空输送机构的摆动。 提供了许多其他方面。

    Extended mainframe designs for semiconductor device manufacturing equipment
    62.
    发明授权
    Extended mainframe designs for semiconductor device manufacturing equipment 有权
    用于半导体器件制造设备的扩展主机设计

    公开(公告)号：US07720655B2

    公开(公告)日：2010-05-18

    申请号：US11613559

    申请日：2006-12-20

    申请人： Michael R. Rice

    发明人： Michael R. Rice

    IPC分类号： G06F17/50 ,  H01L21/00

    CPC分类号： H01L21/67184 ,  H01L21/67196 ,  H01L21/67201

    摘要： In a first aspect, a first mainframe is provided for use during semiconductor device manufacturing. The first mainframe includes (1) a sidewall that defines a central transfer region adapted to house a robot; (2) a plurality of facets formed on the sidewall, each adapted to couple to a process chamber; and (3) an extended facet formed on the sidewall that allows the mainframe to be coupled to at least four full-sized process chambers while providing service access to the mainframe. Numerous other aspects are provided.

    摘要翻译： 在第一方面，提供第一主机用于在半导体器件制造期间使用。 第一主机包括（1）限定适于容纳机器人的中央传送区域的侧壁; （2）形成在侧壁上的多个小平面，每个小面适于联接到处理室; 和（3）形成在侧壁上的延伸小面，其允许主机耦合到至少四个全尺寸处理室，同时提供对主机的服务访问。 提供了许多其他方面。

    Break-away positioning conveyor mount for accommodating conveyor belt bends
    65.
    发明授权
    Break-away positioning conveyor mount for accommodating conveyor belt bends 失效
    分离定位输送机支架，用于容纳输送带弯头

    公开(公告)号：US07455172B2

    公开(公告)日：2008-11-25

    申请号：US11495052

    申请日：2006-07-28

    申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    IPC分类号： B65G17/20

    CPC分类号： H01L21/68707 ,  H01L21/6773 ,  H01L21/67733

    摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

    摘要翻译： 公开了一种用于连续运动的高速位置传送器系统的分离安装系统。 支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力 皮带和支撑架。 安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。 安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。

    Monitoring of smart pin transition timing
    69.
    发明授权
    Monitoring of smart pin transition timing 有权
    监控智能针脚转换时序

    公开(公告)号：US07230702B2

    公开(公告)日：2007-06-12

    申请号：US10987950

    申请日：2004-11-12

    申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Kirk Van Katwyk ,  Amitabh Puri

    发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Kirk Van Katwyk ,  Amitabh Puri

    IPC分类号： G01B11/00 ,  H01L21/677 ,  B65B21/02

    CPC分类号： H01L21/67775 ,  H01L21/67769

    摘要： A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling events are detected between corresponding interface elements of the movable portion and the substrate carrier, respective signals are generated in response thereto, and an alignment offset between the substrate carrier and the substrate carrier transport system is determined based on the signals. A movable portion matches an elevation, position, and/or a speed/velocity of a substrate carrier moving along the transport path. Sensors for detecting kinematic coupling and generating signals in response thereto are provided on the movable portion. An end effector includes a support with interface elements and sensors for detecting kinematic coupling and generating respective signals. A substrate carrier handler includes a movable portion, interface elements, sensors, and a controller for receiving signals and determining an alignment offset.

    摘要翻译： 衬底载体处理器的可移动部分延伸到传送路径中，衬底载体传输系统沿着传送路径传送衬底载体，在可移动部分的对应界面元件和衬底载体之间检测到相应的运动耦合事件， 基于这些信号来确定衬底载体和衬底载体传输系统之间的对准偏移。 可移动部分匹配沿着传送路径移动的衬底载体的高度，位置和/或速度/速度。 用于检测运动耦合和响应于此产生信号的传感器设置在可动部分上。 端部执行器包括具有接口元件的支撑件和用于检测运动耦合并产生相应信号的传感器。 基板载体处理器包括可移动部分，接口元件，传感器和用于接收信号并确定对准偏移的控制器。