公开(公告)号：US07712206B2

公开(公告)日：2010-05-11

申请号：US11439297

申请日：2006-05-22

申请人： Ming Jiang ,  Aron Pentek ,  Yi Zheng

发明人： Ming Jiang ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  H01R31/00

CPC分类号： G11B5/3143 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49021 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield. After forming a magnetic write pole such as by masking and ion milling a magnetic write pole layer, a thin layer of alumina is deposited. This is followed by the deposition of a thin layer of Rh. Then, a thick layer of alumina is deposited, having a thickness that is preferably at least equal to the height of the write pole layer. A chemical mechanical polish is then performed until a portion of the Rh layer over the top (trailing edge) of the write pole is exposed. A material removal process such as ion milling is then performed to remove the exposed Rh layer exposing the thin alumina layer there beneath. Since the Rh trailing gap layer is electrically conductive it can also serve as a seed layer for electroplating the magnetic trailing shield.

摘要翻译： 一种用于构造用于垂直磁记录的磁写头的方法，该写头具有带后挡板的写极。 在通过掩蔽和离子铣削磁性写入磁极层形成磁性写入磁极之后，沉积薄层的氧化铝。 随后沉积一层薄薄​​的Rh。 然后，沉积厚的氧化铝层，其厚度优选至少等于写入极层的高度。 然后执行化学机械抛光，直到暴露在写柱的顶部（后缘）上的Rh层的一部分。 然后进行诸如离子研磨的材料去除工艺以除去暴露在其下面的薄氧化铝层的暴露的Rh层。 由于Rh拖尾间隙层是导电的，所以它也可以用作用于电镀磁性后屏蔽的种子层。

公开(公告)号：US20090152234A1

公开(公告)日：2009-06-18

申请号：US11956277

申请日：2007-12-13

申请人： Hung-Chin Guthrie ,  Ming Jiang ,  Edward Hin Pong Lee ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Hung-Chin Guthrie ,  Ming Jiang ,  Edward Hin Pong Lee ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315

摘要： A method for manufacturing a magnetic write head having a write pole with a flared step feature that defines a secondary flare point. The method involves depositing a magnetic write pole material on a substrate and then depositing a magnetic material over the write pole material followed by a non-magnetic material. A first mask is formed having a front edge to define the location of the secondary flare point, and one or more material removal processes are used to remove portions of the magnetic layer and non-magnetic layer that are not protected by this first mask. The first mask is replaced by a second mask that is configured to define a write pole, and an ion milling is performed to define the write pole. Shadowing from the magnetic layer and non-magnetic layer form a flared secondary flare point.

摘要翻译： 一种用于制造具有定义二次闪光点的具有扩口步骤特征的写极的磁写头的方法。 该方法包括将磁性写入极材料沉积在衬底上，然后将磁性材料沉积在写入极材料上，随后是非磁性材料。 形成第一掩模，其具有前边缘以限定次级火炬点的位置，并且使用一个或多个材料去除过程来去除未被该第一掩模保护的磁性层和非磁性层的部分。 第一个掩模由配置为定义写入极的第二个掩模代替，并且执行离子铣削来定义写入极点。 从磁性层和非磁性层的阴影形成扩张的次级耀斑点。

公开(公告)号：US20090139080A1

公开(公告)日：2009-06-04

申请号：US12343713

申请日：2008-12-24

申请人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49032 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head that avoids the challenges associated with the formation of fence structures during write pole definition. A magnetic write pole material is deposited. A mask structure is deposited over the magnetic write pole material. The mask structure includes a first hard mask, a marker layer, a physically robust, inorganic RIEable image transfer layer, a second hard mask structure over the image transfer layer and a photoresist layer over the second hard mask. A reactive ion etching process can be used to transfer the image of the photoresist mask and second hard mask layer onto the image transfer layer. An ion milling is performed to define the write pole. A layer of non-magnetic material such as alumina is deposited. An ion milling is performed until the marker layer has been reached, and another reactive ion etching is performed to remove the remaining hard mask.

摘要翻译： 一种用于制造写磁头的磁头的方法，其避免了写磁极定义期间与栅栏结构的形成有关的挑战。 沉积磁性写入极材料。 掩模结构沉积在磁性写入极材料上。 掩模结构包括第一硬掩模，标记层，物理上坚固的无机RIEable图像转印层，图像转印层上方的第二硬掩模结构和在第二硬掩模上的光致抗蚀剂层。 可以使用反应离子蚀刻工艺将光致抗蚀剂掩模和第二硬掩模层的图像转印到图像转印层上。 执行离子铣削以限定写入极。 沉积一层非磁性材料如氧化铝。 进行离子研磨直到达到标记层，并执行另一反应离子蚀刻以除去剩余的硬掩模。

公开(公告)号：US20080144215A1

公开(公告)日：2008-06-19

申请号：US11611824

申请日：2006-12-15

申请人： Wen-Chien David Hsiao ,  Ming Jiang ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Ming Jiang ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/147 ,  G11B5/23

CPC分类号： G11B5/3169 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/3173 ,  G11B5/6005 ,  Y10T29/49021 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for constructing a magnetic write head using an electrical lapping guide to carefully control critical dimensions dining a lapping operation used to define an air bearing surface. The lapping guide is photolithographically patterned in a common photolithographic step with another write head structure so that special relation between the lapping guide and critical dimensions of the write head structure can be carefully maintained. For example, the electrical lapping guide can be patterned in a common photolithographic step as the write pole so that the location of the flare point can he carefully controlled with respect to the location of the lapping guide. A stitched flare structure can also be built together with the electrical lapping guide, then a self-aligned shield can be further built over this stitched flare structure so that both flare point and shield throat can be controlled tightly together by this electrical lapping guide during lapping process. Similarly, the lapping guide can be formed in a common photolithographic step with a trailing shield, so that a critical dimension such as throat height of the trailing shield can be carefully controlled with respect to the electrical lapping guide.

摘要翻译： 一种使用电研磨导向器构造磁性写入头的方法，以仔细控制关键尺寸，以用于界定空气轴承表面的研磨操作。 研磨导向器在具有另一写头结构的普通光刻步骤中光刻图案化，使得研磨引导件与写入头结构的关键尺寸之间的特殊关系可以被小心地保持。 例如，电研磨引导件可以以普通的光刻步骤图案化为写入极，使得可以相对于研磨导轨的位置仔细地控制闪光点的位置。 缝合的火炬结构也可以与电研磨导轨一起构建，然后可以在该缝合的火炬结构上进一步构建自对准的屏蔽，使得在研磨过程中这种电研磨引导件可以将喇叭口和屏蔽喉两者紧密地一起控制 处理。 类似地，研磨引导件可以在具有后挡板的普通光刻步骤中形成，使得可以相对于电研磨导轨小心地控制关键尺寸，例如后挡板的喉部高度。

公开(公告)号：US20070211384A1

公开(公告)日：2007-09-13

申请号：US11744054

申请日：2007-05-03

申请人： Wen-Chien Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/147

CPC分类号： G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： A perpendicular magnetic write head having a conformal wrap around trailing shield. The write head includes a write pole that can be configured with a trapezoidal shape as viewed from the Air Bearing Surface (ABS) and which includes a wrap around trailing magnetic shield. The magnetic shield has a trailing portion that is separated from the leading edge of the writ pole by a non-magnetic trailing gap, and has side shield portions that are separated from first and second side portions of the write pole by first and second non-magnetic side gaps. The magnetic shield can be configured with notches at either side of the trailing portion of magnetic shield. These notches can extend in the trailing direction by a distance that is preferably ¼ to 1 times the trailing gap thickness. The width of the straight, trailing portion of the shield is preferable ½ to 1 times of the main pole width.

摘要翻译： 垂直磁性写头，其具有围绕后屏蔽的保形包裹。 写入头包括写入极，其可以被配置为从空气轴承表面（ABS）观察到的梯形形状，并且包括围绕尾部磁屏蔽的包裹。 磁屏蔽具有通过非磁性拖尾间隙与写极的前缘分离的后部，并且具有通过第一和第二非隔离部分与写入极的第一和第二侧部分离的侧面屏蔽部分， 磁侧隙。 磁屏蔽可以在磁屏蔽的尾部的任一侧配置有凹口。 这些凹口可以在拖尾方向上延伸一段距离，优选为后缘间隙厚度的1/4至1倍。 屏蔽的直的后部的宽度优选为主极宽度的1/2至1倍。

公开(公告)号：US20070115584A1

公开(公告)日：2007-05-24

申请号：US11286077

申请日：2005-11-23

申请人： Hamid Balamane ,  Yimin Hsu ,  Aron Pentek ,  Yi Zheng

发明人： Hamid Balamane ,  Yimin Hsu ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/147

CPC分类号： G11B5/3163 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49021

摘要： A perpendicular write head having a wrap around trailing shield for reducing stray field writing and adjacent track interference. A method for constructing such a write head allows for excellent control of side shield gap thickness and trailing shield gap thickness, and allows the ratio of side gap to trailing gap thicknesses to be maintained at about two to one as desired. The method includes depositing forming a write pole by constructing a mask which may include a bi-layer hard mask, and then ion milling to form the write pole. Once the write pole has been formed, a layer of alumina or some other non-magnetic material can be conformally deposited. A reactive ion mill (RIM) can be performed to open up the top of the write pole (remove the horizontally disposed portions of the alumina layer). Then, a second layer of alumina or some other non-magnetic material can be deposited, and the write pole can be plated. The thickness of the side shield gaps is defined by the sum of the final thicknesses of the first and second alumina layers, while the thickness of the first magnetic layer defines the thickness of the trailing shield gap.

摘要翻译： 垂直写头，其具有围绕后屏蔽的卷绕，用于减少杂散场写入和相邻轨道干涉。 用于构造这样的写头的方法允许对侧屏蔽间隙厚度和后屏蔽间隙厚度的优良控制，并且允许侧间隙与后间隙厚度的比率根据需要保持在大约二对一。 该方法包括通过构成可包括双层硬掩模的掩模沉积形成写入极，然后进行离子铣削以形成写入极。 一旦形成了写极，就可以共形沉积一层氧化铝或其它非磁性材料。 可以执行反应离子磨（RIM）以打开写柱的顶部（去除氧化铝层的水平放置的部分）。 然后，可以沉积第二层氧化铝或一些其它非磁性材料，并且可以对写入极进行电镀。 侧屏蔽间隙的厚度由第一和第二氧化铝层的最终厚度之和限定，而第一磁性层的厚度限定了后屏蔽间隙的厚度。

公开(公告)号：US20050193550A1

公开(公告)日：2005-09-08

申请号：US10792330

申请日：2004-03-02

申请人： Hung-Chin Guthrie ,  Ming Jiang ,  Jerry Lo ,  Aron Pentek ,  Yi Zheng

发明人： Hung-Chin Guthrie ,  Ming Jiang ,  Jerry Lo ,  Aron Pentek ,  Yi Zheng

IPC分类号： B24B1/00 ,  C09K3/14 ,  H01L21/00

CPC分类号： B24B1/00 ,  G11B5/00 ,  G11B5/3116 ,  G11B5/3163 ,  H01L21/00 ,  Y10T29/49032 ,  Y10T29/49044 ,  Y10T29/49048

摘要： A method for forming a high aspect ratio magnetic structure in a magnetic write head using a combination of chemical mechanical polishing and reactive ion etching.

摘要翻译： 使用化学机械抛光和反应离子蚀刻的组合在磁写头中形成高纵横比磁结构的方法。

公开(公告)号：US08619391B2

公开(公告)日：2013-12-31

申请号：US12914543

申请日：2010-10-28

申请人： Yimin Hsu ,  Aron Pentek ,  Thomas Roucoux ,  Jing Zhang ,  Honglin Zhu

发明人： Yimin Hsu ,  Aron Pentek ,  Thomas Roucoux ,  Jing Zhang ,  Honglin Zhu

IPC分类号： G11B5/31

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： Magnetic write heads and corresponding fabrication methods for bi-layer wrap around shields resulting in dissimilar shield layer widths are disclosed. A gap structure is formed around a main write pole for a magnetic write head. A wrap around shield for the main write pole is fabricated to include a first magnetic layer proximate to the main write pole and a second magnetic layer on the first magnetic layer. A width of the first magnetic layer is less than the width of the second magnetic layer, and back edges of the first and second magnetic layers are coplanar. Further, a throat height of the wrap around shield is maintained between the first and the second magnetic layers because their back edges are coplanar.

摘要翻译： 公开了用于双层缠绕屏蔽的磁性写头和相应的制造方法，导致不同的屏蔽层宽度。 在用于磁写头的主写磁极周围形成间隙结构。 制造用于主写极的环绕屏蔽件，以包括靠近主写磁极的第一磁性层和第一磁性层上的第二磁性层。 第一磁性层的宽度小于第二磁性层的宽度，第一和第二磁性层的后边缘是共面的。 此外，由于它们的后边缘是共面的，缠绕屏蔽的喉部高度保持在第一和第二磁性层之间。

公开(公告)号：US20120106002A1

公开(公告)日：2012-05-03

申请号：US12914543

申请日：2010-10-28

申请人： Yimin Hsu ,  Aron Pentek ,  Thomas Roucoux ,  Jing Zhang ,  Honglin Zhu

发明人： Yimin Hsu ,  Aron Pentek ,  Thomas Roucoux ,  Jing Zhang ,  Honglin Zhu

IPC分类号： G11B5/127 ,  B05D5/12

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： Magnetic write heads and corresponding fabrication methods for bi-layer wrap around shields resulting in dissimilar shield layer widths are disclosed. A gap structure is formed around a main write pole for a magnetic write head. A wrap around shield for the main write pole is fabricated to include a first magnetic layer proximate to the main write pole and a second magnetic layer on the first magnetic layer. A width of the first magnetic layer is less than the width of the second magnetic layer, and back edges of the first and second magnetic layers are coplanar. Further, a throat height of the wrap around shield is maintained between the first and the second magnetic layers because their back edges are coplanar.

摘要翻译： 公开了用于双层缠绕屏蔽的磁性写头和相应的制造方法，导致不同的屏蔽层宽度。 在用于磁写头的主写磁极周围形成间隙结构。 制造用于主写极的环绕屏蔽件，以包括靠近主写磁极的第一磁性层和第一磁性层上的第二磁性层。 第一磁性层的宽度小于第二磁性层的宽度，第一和第二磁性层的后边缘是共面的。 此外，由于它们的后边缘是共面的，缠绕屏蔽的喉部高度保持在第一和第二磁性层之间。

公开(公告)号：US20120094009A1

公开(公告)日：2012-04-19

申请号：US12904636

申请日：2010-10-14

申请人： Donald Allen ,  Jennifer Ai-Ming Leung ,  Aron Pentek ,  Thomas Roucoux

发明人： Donald Allen ,  Jennifer Ai-Ming Leung ,  Aron Pentek ,  Thomas Roucoux

IPC分类号： C23C16/52 ,  B05D5/00

CPC分类号： G11B5/3166 ,  G11B5/3169 ,  G11B5/6082 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： Methods of fabricating magnetic write heads and electrical lapping guides (ELG's) using a split gap deposition process is described. A removal process is performed on a magnetic material to define a main write pole and to define a corresponding ELG for the main write pole. A first non-magnetic gap layer is deposited. A mask and liftoff process is performed to deposit an electrically conductive material on the first gap layer disposed along a front edge of the ELG. A second non-magnetic gap layer is then deposited and a shield is fabricated for the write pole.

摘要翻译： 描述了使用分割间隙沉积工艺制造磁性写入头和电气研磨导向器（ELG）的方法。 在磁性材料上执行移除过程以限定主写极并且为主写极定义相应的ELG。 沉积第一非磁隙层。 执行掩模和剥离处理以将导电材料沉积在沿着ELG的前边缘设置的第一间隙层上。 然后沉积第二非磁性间隙层，并为写入极制造屏蔽。