摘要:
There is provided an electrically conductive path device which can prevent radiation noise. An electrically conductive path device includes three bus bars electrically connecting a motor unit to an inverter unit, capacitance portions creating stray capacitance and an insulator. In terms of the electrically conductive path device, switching operation of a semiconductor switch located inside an inverter of the inverter unit creates change in voltage which is transmitted to the bus bar corresponding to a path from the inverter to the motor. At that time, the change in voltage is not transmitted further to the motor but is transmitted to the bus bar corresponding to a path from the motor to the inverter via the capacitance portion formed between the facing portions, i.e. via the stray capacitance.
摘要:
A method for manufacturing a polishing pad made from a polyurethane resin foam having very uniform, fine cells therein and a polishing pad obtained by that method provides a polishing pad having better polishing characteristics (especially, in planarization) while providing improved dressability while maintaining the planarization characteristics and polishing speed of a conventional polishing pad. The polyurethane resin foam is a cured product obtained by reacting an isocyanate-terminated prepolymer with an aromatic polyamine chain extender having a melting point of 70° C. or lower, for example.
摘要:
An object of the present invention is to provide a polishing pad that is prevented from causing an end-point detection error due to a reduction in light transmittance from the early stage to the final stage of the process, and to provide a method of producing a semiconductor device with the polishing pad. The present invention is directed to a polishing pad, comprising a polishing layer comprising a polishing region and a light-transmitting region, wherein a polishing side surface of the light-transmitting region is subjected to a surface roughness treatment, and the light-transmitting region has a light transmittance of 40% to 60% at a wavelength of 600 nm before use.
摘要:
The object of the invention is to provide a polishing pad capable of maintaining high-precision end-point optical detection over a long period from the start of use to the end of use even if polishing is performed with an alkaline or acid slurry, as well as a method of manufacturing a semiconductor device with this polishing pad. The polishing pad of the invention is used in chemical mechanical polishing and has a polishing region and a light-transmitting region, wherein the light-transmitting region satisfies that the difference ΔT (ΔT=T0−T1) (%) between T0 and T1 is within 10(%) over the whole range of measurement wavelengths of from 400 to 700 nm, wherein T1 is the light transmittance (%) of the light-transmitting region measured at the measurement wavelength λ after dipping for 24 hours in a KOH aqueous solution at pH 11 or an H2O2 aqueous solution at pH 4 and T0 is the light-transmittance (%) measured at the measurement wavelength λ before the dipping.
摘要翻译:本发明的目的是提供一种抛光垫,即使在用碱性或酸性浆料进行研磨的同时,也能够在从使用开始到使用结束的长时间内保持高精度的端点光学检测 作为使用该研磨垫的半导体装置的制造方法。 本发明的抛光垫用于化学机械抛光,并具有抛光区域和透光区域,其中透光区域满足以下区别:Dgr; T(&Dgr; T = T0-T1)(%) T0和T1在400〜700nm的测量波长的整个范围内在10(%)以内,其中T1是在浸渍24小时后在测量波长λ测量的透光区域的透光率(%) pH为11的KOH水溶液或pH4的H 2 O 2水溶液,T0为在浸渍前测定的波长λ下测定的透光率(%)。
摘要:
An object of the present invention is to provide a polishing pad excellent in polishing rate and superior in longevity without generating center slow. Another object of the present invention is to provide a method of manufacturing a semiconductor device with the polishing pad. Disclosed is a polishing pad having a polishing layer consisting of a polyurethane foam having fine cells, wherein a high-molecular-weight polyol component that is a starting component of the polyurethane foam contains a hydrophobic high-molecular-weight polyol A having a number-average molecular weight of 550 to 800 and a hydrophobic high-molecular-weight polyol B having a number-average molecular weight of 950 to 1300 in an A/B ratio of from 10/90 to 50/50 by weight.
摘要:
An object of the invention is to provide a polishing pad which hardly generates a scratch on a surface of a polishing object, and is excellent in planarization property. In addition, an object of the invention is to provide a polishing pad which has a high polishing rate and is excellent in planarization property. In addition, an object of the invention is to provide a polishing pad in which a groove is scarcely clogged with abrasive grains or polishing swarf during polishing and, even when continuously used for a long period of time, a polishing rate is scarcely reduced.
摘要:
Communicating apparatus to be provided between an intermediate line and transmission lines to establish data communications, the intermediate line and the transmission lines having in combination data pass therethrough, the transmission lines including first line and second line 1 and 2, is designed to select the transmission line from among the first and second lines 1 and 2 based on detecting the data passing through each of the first and second lines 1 and 2 so as to transmit data without collision.
摘要:
A communications system and method, an information processing apparatus and method, an information management apparatus and method, a recording medium and a program make it possible to efficiently and comfortably make use of contents, which are stored in one server, from a plurality of devices connected via a network. In a case in which the playing of content is stopped, bookmark information including a time stamp representing the stopped position of the content is stored in association with predetermined identification information. The bookmark information is available for various apparatuses transmitting the identification information. When playing the content from a position designated by the information from a predetermined apparatus, the time stamp included in the bookmark information is referred to and the playing of the content from the stopped position is started. The present invention can be applied to various apparatuses such as a personal computer, audio equipment, a PDA, a mobile phone and the like.
摘要:
A recording medium cartridge includes a memory circuit for storing information concerning signals recorded on the recording medium within the cartridge. The information is stored in the memory circuit in the form of a hierarchic data structure which includes a plurality of data packets having a predetermined form and length. Each data packet includes a code indicative of a level in the data structure to which the data packet belongs. At least some of the data packets include data indicative of starting and ending positions on the recording medium of recorded signals which the data packet represents. The hierarchic (or “tree”) data structure facilitates rapid retrieval and reproduction of the signals recorded on the recording medium, particularly when the recording medium is a magnetic tape. The tree structure also facilitates storage of information in connection with recording of additional signals on the recording medium.
摘要:
A novel shape memory alloy of Fe—Mn—Si system containing at least Fe, Mn, and Si wherein the alloy contains niobium carbide in the structure and is improved in that a sufficiently satisfactory shape memory effect is provided without carrying out a special treatment termed training.