公开(公告)号：US20060189103A1

公开(公告)日：2006-08-24

申请号：US11139465

申请日：2005-05-31

申请人： Nobuaki Matsuoka ,  Tsunenaga Nakashima ,  Shinichi Hayashi ,  Akira Oozono

发明人： Nobuaki Matsuoka ,  Tsunenaga Nakashima ,  Shinichi Hayashi ,  Akira Oozono

IPC分类号： H01L21/20

CPC分类号： H01L21/67178 ,  H01L21/6715 ,  H01L21/67253

摘要： In the present invention, a plurality of exhaust paths connected to a plurality of cup bodies surrounding substrate holding portions respectively are joined together for common use, and the openings of exhaust rate adjustment sections provided on the exhaust paths are adjusted with reference to data in which combinations of the numbers of rotations of the substrate holding portions are associated with combinations of set exhaust rates of the exhaust paths when solution treatment is performed by rotating the substrate by the substrate holding portion. According to the present invention, the cup body can be exhausted at an intended exhaust rate at all times independently of the state where the substrate in which cup body is subjected to which process.

公开(公告)号：US08888387B2

公开(公告)日：2014-11-18

申请号：US13177976

申请日：2011-07-07

申请人： Nobuaki Matsuoka ,  Akira Miyata ,  Shinichi Hayashi ,  Suguru Enokida

发明人： Nobuaki Matsuoka ,  Akira Miyata ,  Shinichi Hayashi ,  Suguru Enokida

IPC分类号： G03D5/00 ,  H01L21/67 ,  H01L21/677

CPC分类号： H01L21/6715 ,  H01L21/67178 ,  H01L21/67288 ,  H01L21/67745

摘要： In one embodiment, a coating and developing apparatus includes a processing block including a vertical stack of early-stage processing unit blocks; a vertical stack of later-stage processing unit blocks disposed laterally adjacent to respective ones of the early-stage processing unit blocks; a vertical stack of developing unit blocks stacked on the early-stage processing unit blocks; a vertical stack of auxiliary processing unit blocks disposed laterally adjacent to respective ones of the developing unit blocks; first transfer units, each of which are disposed between the laterally adjacent early-stage processing unit and later-stage processing unit; second transfer units, each of which is disposed between the laterally adjacent developing unit block and auxiliary processing unit block; and a auxiliary transfer mechanism for transferring a substrate between the first transfer units and between the second transfer units.

摘要翻译： 在一个实施例中，涂层和显影装置包括处理块，其包括早期处理单元块的垂直堆叠; 垂直堆叠的后级处理单元块，其横向邻近于相应的早期处理单元块设置; 堆叠在早期处理单元块上的显影单元块的垂直堆叠; 辅助处理单元块的垂直堆叠，其横向邻近于相应的显影单元块设置; 第一传送单元，每个传送单元布置在横向相邻的早期处理单元和后期处理单元之间; 第二转印单元，其各自设置在横向相邻的显影单元块和辅助处理单元块之间; 以及用于在第一转印单元之间和第二转印单元之间转印衬底的辅助转印机构。

公开(公告)号：US08506186B2

公开(公告)日：2013-08-13

申请号：US13225985

申请日：2011-09-06

申请人： Shinichi Hayashi ,  Yuichi Douki ,  Akira Miyata ,  Yuuichi Yamamoto ,  Kousuke Yoshihara ,  Nobuaki Matsuoka ,  Suguru Enokida

发明人： Shinichi Hayashi ,  Yuichi Douki ,  Akira Miyata ,  Yuuichi Yamamoto ,  Kousuke Yoshihara ,  Nobuaki Matsuoka ,  Suguru Enokida

IPC分类号： G03D5/00

CPC分类号： G03F7/3021 ,  G03F7/162 ,  H01L21/67178 ,  H01L21/67742 ,  H01L21/67745

摘要： A process block including a group of liquid-process related unit blocks, a first heating-process related block arranged on a carrier block side of the group of unit blocks, and a second heating-process related block arranged on an interface block side of the group of unit blocks. The group of liquid-process unit blocks includes doubled unit blocks for preprocessing for forming an antireflection film and a resist film, doubled unit blocks for post-processing for forming an upper layer film and performing a cleaning operation before exposure, and a unit block for developing. The first heating-process related block heats a substrate coated with a resist liquid and a substrate that has been developed. The second heating-process related block heats a substrate that has been exposed but is not yet developed, a substrate on which an antireflection film has been formed and a substrate on which an upper layer film has been formed.

摘要翻译： 一种处理块，包括一组液体处理相关单元块，布置在该组单位块的载体块侧的第一加热处理相关块，以及布置在该单元块的界面块侧的第二加热处理相关块 单位块组。 液体处理单元块组包括用于形成防反射膜和抗蚀剂膜的预处理的双重单元块，用于形成上层膜的后处理和进行曝光之前的清洁操作的双倍单位块，以及用于 发展。 第一加热工艺相关块加热涂覆有抗蚀剂液体和已经显影的基底的基底。 第二加热处理相关块加热已经暴露但尚未显影的基板，已经形成有抗反射膜的基板和已经形成有上层膜的基板。

公开(公告)号：US20120009528A1

公开(公告)日：2012-01-12

申请号：US13177976

申请日：2011-07-07

申请人： Nobuaki MATSUOKA ,  Akira Miyata ,  Shinichi Hayashi ,  Suguru Enokida

发明人： Nobuaki MATSUOKA ,  Akira Miyata ,  Shinichi Hayashi ,  Suguru Enokida

IPC分类号： G03F7/20 ,  G03B27/52

CPC分类号： H01L21/6715 ,  H01L21/67178 ,  H01L21/67288 ,  H01L21/67745

摘要： In one embodiment, a coating and developing apparatus includes a processing block including a vertical stack of early-stage processing unit blocks; a vertical stack of later-stage processing unit blocks disposed laterally adjacent to respective ones of the early-stage processing unit blocks; a vertical stack of developing unit blocks stacked on the early-stage processing unit blocks; a vertical stack of auxiliary processing unit blocks disposed laterally adjacent to respective ones of the developing unit blocks; first transfer units, each of which are disposed between the laterally adjacent early-stage processing unit and later-stage processing unit; second transfer units, each of which is disposed between the laterally adjacent developing unit block and auxiliary processing unit block; and a auxiliary transfer mechanism for transferring a substrate between the first transfer units and between the second transfer units.

摘要翻译： 在一个实施例中，涂层和显影装置包括处理块，其包括早期处理单元块的垂直堆叠; 垂直堆叠的后级处理单元块，其横向相邻于所述早期处理单元块中的相应处理单元块; 堆叠在早期处理单元块上的显影单元块的垂直堆叠; 辅助处理单元块的垂直堆叠，其横向邻近于相应的显影单元块设置; 第一传送单元，每个传送单元布置在横向相邻的早期处理单元和后期处理单元之间; 第二转印单元，其各自设置在横向相邻的显影单元块和辅助处理单元块之间; 以及用于在第一转印单元之间和第二转印单元之间转印衬底的辅助转印机构。

公开(公告)号：US20120008936A1

公开(公告)日：2012-01-12

申请号：US13178037

申请日：2011-07-07

申请人： Nobuaki Matsuoka ,  Akira Miyata ,  Shinichi Hayashi ,  Suguru Enokida

发明人： Nobuaki Matsuoka ,  Akira Miyata ,  Shinichi Hayashi ,  Suguru Enokida

IPC分类号： G03D5/00

CPC分类号： G03F7/708 ,  H01L21/6715

摘要： A coating and developing apparatus includes a processing block having at least one coating film-forming unit block stack and a vertically stacked developing unit block stack. Each unit block stack includes vertically stacked unit blocks, and each unit block includes processing modules containing liquid processing modules and heating modules. Each unit block includes a transport mechanism moveable along a transport passage from a carrier block side to an interface block side, to transport a substrate between the processing modules belonging to the unit block. Transfer units are provided on the carrier block sides of the coating film-forming unit blocks and the developing unit blocks respectively, for transferring a substrate to and from the transport mechanism of the associated coating film-forming or developing unit blocks. A first transfer mechanism transfers a substrate removed from a carrier to one of the transfer units associated with the coating film-forming unit blocks.

摘要翻译： 涂覆和显影装置包括具有至少一个涂膜形成单元块堆叠和垂直堆叠的显影单元块堆叠的处理块。 每个单元块堆叠包括垂直堆叠的单元块，并且每个单元块包括包含液体处理模块和加热模块的处理模块。 每个单元块包括可沿着运输通道从承载块侧移动到接口块侧的运输机构，以在属于单元块的处理模块之间输送基板。 分别在涂膜形成单元块和显影单元块的承载块侧设置传送单元，用于将基板传送到相关的涂膜形成或显影单元块的传送机构。 第一传送机构将从载体移除的基板传送到与涂膜形成单元块相关联的转印单元之一。

公开(公告)号：US09547443B2

公开(公告)日：2017-01-17

申请号：US13460634

申请日：2012-04-30

申请人： Shinichi Hayashi

发明人： Shinichi Hayashi

IPC分类号： G06F12/02 ,  G06F3/06

CPC分类号： G06F3/0611 ,  G06F3/0649 ,  G06F3/0685

摘要： A storage system includes plural types of storage devices that define a plurality of virtual volumes and a plurality of logical volumes. A storage controller is configured to manage the plurality of virtual volumes and the plurality of logical volumes, the plurality of virtual volumes defining first storage areas and the plurality of logical volumes defining second storage areas. A second storage area of the plurality of logical volumes is allocated to a first storage area of the plurality of virtual volumes. The storage controller is configured to determine whether data of a first storage area of a swap file is to be stored in the first tier storage device or the second tier storage device based on access information from an application server that manages a swap file information of the swap file.

摘要翻译： 存储系统包括定义多个虚拟卷和多个逻辑卷的多种类型的存储设备。 存储控制器被配置为管理多个虚拟卷和多个逻辑卷，多个虚拟卷定义第一存储区域和限定第二存储区域的多个逻辑卷。 多个逻辑卷的第二存储区域被分配给多个虚拟卷的第一存储区域。 存储控制器被配置为基于来自管理交换文件的交换文件信息的应用服务器的访问信息来确定交换文件的第一存储区域的数据是否要存储在第一层存储设备或第二层存储设备中 交换文件。

公开(公告)号：US09281096B2

公开(公告)日：2016-03-08

申请号：US13806506

申请日：2011-06-21

申请人： Shinichi Hayashi ,  Hiroshi Hamachi

发明人： Shinichi Hayashi ,  Hiroshi Hamachi

IPC分类号： C09J9/02 ,  H01B1/20 ,  C08L23/08 ,  C08L71/00 ,  C09D167/00 ,  C09J129/14 ,  H01B1/22 ,  H01R4/04 ,  C09J123/08 ,  C08K5/14 ,  C08L63/10 ,  C08L67/07 ,  C08L75/16 ,  C08L79/08

CPC分类号： H01B1/20 ,  C08G2650/56 ,  C08K5/14 ,  C08L23/0853 ,  C08L31/04 ,  C08L63/00 ,  C08L63/10 ,  C08L67/00 ,  C08L67/07 ,  C08L71/00 ,  C08L75/16 ,  C08L79/08 ,  C08L2205/03 ,  C09D167/00 ,  C09J9/02 ,  C09J123/0853 ,  C09J129/14 ,  H01B1/22 ,  H01R4/04 ,  C08L2666/02

摘要： A process margin is improved and high connection reliability is obtained. Disclosed is an anisotropic conductive material including an adhesive composite and conductive particles dispersed in the adhesive composite, the adhesive composite containing a film forming resin, an ethylene vinyl acetate copolymer, a radical polymerizable resin, and a radical polymerization initiator, wherein the ethylene vinyl acetate copolymer to be used has a melt flow rate of not less than 400 g/10 min.

摘要翻译： 改善了加工余量，获得了较高的连接可靠性。 公开了一种各向异性导电材料，其包括分散在粘合剂复合材料中的粘合剂复合材料和导电颗粒，含有成膜树脂的粘合剂复合物，乙烯乙酸乙烯酯共聚物，可自由基聚合树脂和自由基聚合引发剂，其中乙烯醋酸乙烯酯 共聚物的熔体流动速率不小于400g / 10min。

公开(公告)号：US08683120B2

公开(公告)日：2014-03-25

申请号：US13072862

申请日：2011-03-28

申请人： Shinichi Hayashi

发明人： Shinichi Hayashi

IPC分类号： G06F12/00

CPC分类号： G06F3/0613 ,  G06F3/061 ,  G06F3/0631 ,  G06F3/064 ,  G06F3/0665 ,  G06F3/0683 ,  G06F3/0685 ,  G06F3/0689

摘要： A storage system comprises a plurality of hard disk drives and a storage controller providing a plurality of virtual volumes to a server and including a processor and a memory. The storage controller allocates pages of the plurality of virtual volumes to the plurality of hard disk drives in response to write requests. The storage controller controls to allocate outer sections of the plurality of hard disks to first addresses of the virtual volume and allocates inner sections of the plurality of hard disk drives to second addresses of the virtual volume, wherein the first addresses are lower than the second addresses.

摘要翻译： 存储系统包括多个硬盘驱动器和向服务器提供多个虚拟卷并且包括处理器和存储器的存储控制器。 存储控制器响应于写请求而将多个虚拟卷的页面分配给多个硬盘驱动器。 所述存储控制器控制将所述多个硬盘的外部部分分配给所述虚拟卷的第一地址，并将所述多个硬盘驱动器的内部部分分配给所述虚拟卷的第二地址，其中所述第一地址低于所述第二地址 。

公开(公告)号：US20130332652A1

公开(公告)日：2013-12-12

申请号：US13581426

申请日：2012-06-11

申请人： Shinichi Hayashi

发明人： Shinichi Hayashi

IPC分类号： G06F12/08

CPC分类号： G06F12/0866 ,  G06F2212/264 ,  G06F2212/401

摘要： The present invention provides a computer system comprising a server and a storage system having a compression function, wherein the server includes a control unit and a cache, and the storage system has a storage area provided by a plurality of storage devices. When a designated data of a received read request is stored in the cache, the control unit of the server returns the stored data as a response to the read request, and when the designated data is not stored in the cache, the control unit acquires the designated data compressed via the compression function and stored in the storage area in the compressed state from the storage system, decompresses the acquired compression data, and returns the same as a response to the read request.

摘要翻译： 本发明提供了一种包括服务器和具有压缩功能的存储系统的计算机系统，其中服务器包括控制单元和高速缓存，并且存储系统具有由多个存储设备提供的存储区域。 当接收到的读取请求的指定数据被存储在高速缓存中时，服务器的控制单元作为对读取请求的响应返回存储的数据，并且当指定数据未被存储在高速缓存中时，控制单元获取 通过压缩功能压缩的指定数据，并从存储系统存储在压缩状态的存储区域中，解压缩获取的压缩数据，并将其作为对读取请求的响应返回。

公开(公告)号：US08321629B2

公开(公告)日：2012-11-27

申请号：US12527450

申请日：2009-04-21

申请人： Shinichi Hayashi ,  Yuichi Taguchi

发明人： Shinichi Hayashi ,  Yuichi Taguchi

IPC分类号： G06F12/08 ,  G06F1/32

CPC分类号： G06F3/0647 ,  G06F3/0625 ,  G06F3/0689 ,  Y02D10/154

摘要： The present invention calculates the power consumption of the storage system for each device which supplies power with a storage system, and controls the storage system to keep the power consumption not to exceed the upper limit. In order to achieve this, the power consumption of the chassis configuring the destination storage system is calculated with reference to the number of logical volumes configuring the pool which includes virtual logical volumes, and the logical volumes included in the source storage system are migrated to the virtual logical volumes included in the destination storage system, keeping the power consumption specified in advance per device supplying power to the chassis configuring the destination storage system not to exceed the upper limit value. (Refer to FIG. 27.)

摘要翻译： 本发明计算用于为存储系统供电的每个设备的存储系统的功耗，并且控制存储系统以使功耗不超过上限。 为了实现这一点，参考配置包括虚拟逻辑卷的池的逻辑卷的数量来计算配置目的地存储系统的机箱的功耗，并且将源存储系统中包括的逻辑卷迁移到 包含在目的地存储系统中的虚拟逻辑卷，保持为配置目的地存储系统的机箱供电的每个设备提前指定的功耗不超过上限值。 （参照图27）