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61.发明授权公开(公告)号：US07720655B2
公开(公告)日：2010-05-18
申请号：US11613559
申请日：2006-12-20
申请人： Michael R. Rice
发明人： Michael R. Rice
CPC分类号： H01L21/67184 , H01L21/67196 , H01L21/67201
摘要： In a first aspect, a first mainframe is provided for use during semiconductor device manufacturing. The first mainframe includes (1) a sidewall that defines a central transfer region adapted to house a robot; (2) a plurality of facets formed on the sidewall, each adapted to couple to a process chamber; and (3) an extended facet formed on the sidewall that allows the mainframe to be coupled to at least four full-sized process chambers while providing service access to the mainframe. Numerous other aspects are provided.
摘要翻译： 在第一方面，提供第一主机用于在半导体器件制造期间使用。 第一主机包括（1）限定适于容纳机器人的中央传送区域的侧壁; （2）形成在侧壁上的多个小平面，每个小面适于联接到处理室; 和（3）形成在侧壁上的延伸小面，其允许主机耦合到至少四个全尺寸处理室，同时提供对主机的服务访问。 提供了许多其他方面。
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公开(公告)号：US07578647B2
公开(公告)日：2009-08-25
申请号：US11051504
申请日：2005-02-04
IPC分类号： B65G65/34
CPC分类号： H01L21/67772 , H01L21/67353 , H01L21/67363 , H01L21/67373 , H01L21/67379 , Y10S414/137
摘要： In a first aspect, an apparatus is provided for opening a substrate carrier door of a substrate carrier. The apparatus includes a supporting member adapted to (1) support the substrate carrier door at a load port; (2) allow removal of the door from the substrate carrier; and (3) pivot the removed door below a bottom surface of the substrate carrier. Numerous other aspects are provided.
摘要翻译： 在第一方面，提供一种用于打开衬底载体的衬底载体门的装置。 该装置包括适于（1）在负载端口处支撑基板载体门的支撑构件; （2）允许从基板载体移除门; 和（3）将移除的门枢转在衬底载体的底表面下方。 提供了许多其他方面。
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公开(公告)号：US20090108544A1
公开(公告)日：2009-04-30
申请号：US12256458
申请日：2008-10-22
CPC分类号： F16K3/06 , F16K3/0227 , F16K51/02 , H01L21/67126 , H01L21/67772
摘要： Apparatus, methods and systems are provided for sealing a door of a slit valve. The invention includes a seal, adapted to extend along a perimeter of a slit valve door; and a hard stop, disposed between the seal and an outer edge of the slit valve door, and adapted to extend along at least a portion of the length of the seal, wherein the hard stop and the seal fill at least a portion of a gap between the slit valve door and a substrate sealing surface. Numerous other aspects are provided.
摘要翻译： 提供了用于密封狭缝阀的门的装置，方法和系统。 本发明包括适于沿着狭缝阀门的周边延伸的密封件; 以及设置在所述密封件和所述狭缝阀门的外边缘之间并且适于沿着所述密封件的所述长度的至少一部分延伸的硬止动件，其中所述硬止动件和所述密封件填充至少一部分间隙 在狭缝阀门和基板密封面之间。 提供了许多其他方面。
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公开(公告)号：US20090024241A1
公开(公告)日：2009-01-22
申请号：US12176381
申请日：2008-07-20
CPC分类号： G05B19/41875 , G05B2219/37224 , G05B2219/45061 , H01L21/67742 , H01L21/67766 , Y02P90/22 , Y10S414/135
摘要： Electronic device manufacturing systems and methods are provided. In some aspects, a system having a dual-mode robot is provided which is disposed within a system component (e.g., a factory interface or transfer chamber) and adapted to operate in a first mode and a second mode. In the first mode, the robot may transfer a substrate between components of the system (e.g., between a carrier and a process chamber or chamber to chamber) and in the second mode, the robot may execute a process motion profile (e.g., metrology).
摘要翻译： 提供电子设备制造系统和方法。 在一些方面，提供一种具有双模式机器人的系统，其被布置在系统部件（例如，工厂接口或传送室）内并且适于在第一模式和第二模式中操作。 在第一模式中，机器人可以在系统的部件之间（例如，在载体和处理室或室到室之间）传送基板，并且在第二模式中，机器人可以执行过程运动曲线（例如，计量） 。
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65.发明授权公开(公告)号：US07455172B2
公开(公告)日：2008-11-25
申请号：US11495052
申请日：2006-07-28
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G17/20
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.
摘要翻译： 公开了一种用于连续运动的高速位置传送器系统的分离安装系统。 支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力 皮带和支撑架。 安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。 安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。
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公开(公告)号：US20080187419A1
公开(公告)日：2008-08-07
申请号：US12099780
申请日：2008-04-08
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： H01L21/67
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.
摘要翻译： 在第一方面，提供了一种将基板载体加载器校准到移动输送机的第一种方法。 第一种方法包括以下步骤：（1）提供适于将基板载体加载到移动输送机上的基底载体加载器; （2）将基板载体装载器对准移动的输送机; 和（3）将衬底载体装载器校准到移动的输送机。 提供了许多其他方面。
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公开(公告)号：US07293642B2
公开(公告)日：2007-11-13
申请号：US11476994
申请日：2006-06-27
申请人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/67706 , B65G17/20 , B65G37/02 , B65G2201/0297 , H01L21/67727 , H01L21/6773 , H01L21/67769 , H01L21/67778 , Y10S414/135
摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.
摘要翻译： 根据第一方面，提供了一种适于在半导体器件制造设备内传送衬底载体的第一传送系统。 第一输送机系统包括沿半导体器件制造设备的至少一部分形成闭合回路的带状物。 该带适于（1）在水平面上具有柔性并且在垂直平面中是刚性的; 和（2）在所述半导体器件制造设备的至少一部分内传输多个衬底载体。 还提供了许多其他方面，以及根据这些和其它方面的系统，方法和计算机程序产品。
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公开(公告)号：US20070144439A1
公开(公告)日：2007-06-28
申请号：US11530297
申请日：2006-09-08
申请人： Eric A. Englhardt , Michael R. Rice , Jeffrey C. Hudgens , Steve Hongkham , Jay D. Pinson , Mohsen Salek , Charles Carlson , William T. Weaver , Helen R. Armer
发明人： Eric A. Englhardt , Michael R. Rice , Jeffrey C. Hudgens , Steve Hongkham , Jay D. Pinson , Mohsen Salek , Charles Carlson , William T. Weaver , Helen R. Armer
IPC分类号： B65H1/00 , C23F1/00 , H01L21/306 , C23C16/00
CPC分类号： G03F7/70991 , H01L21/67173 , H01L21/67178 , H01L21/67225 , H01L21/67742 , H01L21/67745
摘要： The present invention generally provides an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that is easily configurable, has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, and then certain portions of the photosensitive material are removed in a developing process completed in the cluster tool.
摘要翻译： 本发明总体上提供了一种用于使用容易配置的多室处理系统（例如，集群工具）处理衬底的装置和方法，具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片 处理历史（或晶圆历史），减少占地面积。 在一个实施例中，簇工具适于执行其中衬底被感光材料涂覆的轨道光刻工艺，然后转移到步进/扫描器，其将感光材料暴露于某种形式的辐射以形成图案 感光材料，然后在簇组工具中完成的显影过程中去除感光材料的某些部分。
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公开(公告)号：US07230702B2
公开(公告)日：2007-06-12
申请号：US10987950
申请日：2004-11-12
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amitabh Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amitabh Puri
IPC分类号： G01B11/00 , H01L21/677 , B65B21/02
CPC分类号： H01L21/67775 , H01L21/67769
摘要： A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling events are detected between corresponding interface elements of the movable portion and the substrate carrier, respective signals are generated in response thereto, and an alignment offset between the substrate carrier and the substrate carrier transport system is determined based on the signals. A movable portion matches an elevation, position, and/or a speed/velocity of a substrate carrier moving along the transport path. Sensors for detecting kinematic coupling and generating signals in response thereto are provided on the movable portion. An end effector includes a support with interface elements and sensors for detecting kinematic coupling and generating respective signals. A substrate carrier handler includes a movable portion, interface elements, sensors, and a controller for receiving signals and determining an alignment offset.
摘要翻译： 衬底载体处理器的可移动部分延伸到传送路径中，衬底载体传输系统沿着传送路径传送衬底载体，在可移动部分的对应界面元件和衬底载体之间检测到相应的运动耦合事件， 基于这些信号来确定衬底载体和衬底载体传输系统之间的对准偏移。 可移动部分匹配沿着传送路径移动的衬底载体的高度，位置和/或速度/速度。 用于检测运动耦合和响应于此产生信号的传感器设置在可动部分上。 端部执行器包括具有接口元件的支撑件和用于检测运动耦合并产生相应信号的传感器。 基板载体处理器包括可移动部分，接口元件，传感器和用于接收信号并确定对准偏移的控制器。
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公开(公告)号：US07077264B2
公开(公告)日：2006-07-18
申请号：US10764982
申请日：2004-01-26
申请人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/67706 , B65G17/20 , B65G37/02 , B65G2201/0297 , H01L21/67727 , H01L21/6773 , H01L21/67769 , H01L21/67778 , Y10S414/135
摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.
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