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公开(公告)号：US08991785B2
公开(公告)日：2015-03-31
申请号：US12256458
申请日：2008-10-22
IPC分类号： F16K3/06 , H01L21/67 , H01L21/677
CPC分类号： F16K3/06 , F16K3/0227 , F16K51/02 , H01L21/67126 , H01L21/67772
摘要： Apparatus, methods and systems are provided for sealing the door of a slit valve. In one embodiment, the apparatus includes a seal, adapted to extend along a perimeter of a slit valve door; and a hard stop, disposed between the seal and an outer edge of the slit valve door, and adapted to extend along the length of the seal, wherein the hard stop and elastomer seal fill at least a portion of a gap between the slit valve door and an insert leading to a process chamber.
摘要翻译： 提供了用于密封狭缝阀的门的装置，方法和系统。 在一个实施例中，该装置包括适于沿着狭缝阀门的周边延伸的密封件; 以及设置在所述密封件和所述狭缝阀门的外边缘之间并且适于沿所述密封件的长度延伸的硬止动件，其中所述硬止动件和弹性体密封件填充所述狭缝阀门之间的间隙的至少一部分 以及通向处理室的插入件。
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公开(公告)号：US20090108544A1
公开(公告)日：2009-04-30
申请号：US12256458
申请日：2008-10-22
CPC分类号： F16K3/06 , F16K3/0227 , F16K51/02 , H01L21/67126 , H01L21/67772
摘要： Apparatus, methods and systems are provided for sealing a door of a slit valve. The invention includes a seal, adapted to extend along a perimeter of a slit valve door; and a hard stop, disposed between the seal and an outer edge of the slit valve door, and adapted to extend along at least a portion of the length of the seal, wherein the hard stop and the seal fill at least a portion of a gap between the slit valve door and a substrate sealing surface. Numerous other aspects are provided.
摘要翻译： 提供了用于密封狭缝阀的门的装置，方法和系统。 本发明包括适于沿着狭缝阀门的周边延伸的密封件; 以及设置在所述密封件和所述狭缝阀门的外边缘之间并且适于沿着所述密封件的所述长度的至少一部分延伸的硬止动件，其中所述硬止动件和所述密封件填充至少一部分间隙 在狭缝阀门和基板密封面之间。 提供了许多其他方面。
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公开(公告)号：US20180374684A1
公开(公告)日：2018-12-27
申请号：US16015074
申请日：2018-06-21
申请人： Kenneth S. Collins , Kartik Ramaswamy , Shahid Rauf , Kallol Bera , James D. Carducci , Michael R. Rice , Yue Guo
发明人： Kenneth S. Collins , Kartik Ramaswamy , Shahid Rauf , Kallol Bera , James D. Carducci , Michael R. Rice , Yue Guo
IPC分类号： H01J37/32 , H01L21/02 , C23C16/455
摘要： A plasma reactor includes a chamber body having an interior space that provides a plasma chamber, a gas distributor, a pump coupled to the plasma chamber, a workpiece support to hold a workpiece, an intra-chamber electrode assembly comprising a plurality of filaments extending laterally through the plasma chamber, each filament including a conductor surrounded by a cylindrical insulating shell, the plurality of filaments including a first multiplicity of filaments and a second multiplicity of filaments arranged in an alternating pattern with the first multiplicity of filaments, a first bus coupled to the first multiplicity of filaments and a second bus coupled to the second multiplicity of filaments, an RF power source to apply RF signal the intra-chamber electrode assembly, and at least one RF switch configured to controllably electrically couple and decouple the first bus from one of i) ground, ii) the RF power source, or iii) the second bus.
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公开(公告)号：US20180308667A1
公开(公告)日：2018-10-25
申请号：US15960342
申请日：2018-04-23
申请人： Kenneth S. Collins , Kartik Ramaswamy , Yue Guo , Shahid Rauf , Kallol Bera , James D. Carducci , Michael R. Rice
发明人： Kenneth S. Collins , Kartik Ramaswamy , Yue Guo , Shahid Rauf , Kallol Bera , James D. Carducci , Michael R. Rice
IPC分类号： H01J37/32 , C23C16/455
CPC分类号： H01J37/32568 , C23C16/45536 , C23C16/45544 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32541 , H01J37/32715 , H01J2237/1825 , H01J2237/327 , H01J2237/3323 , H01J2237/3344 , H01L21/67069
摘要： A plasma reactor includes a chamber body having an interior space that provides a plasma chamber, a gas distributor to deliver a processing gas to the plasma chamber, a pump coupled to the plasma chamber to evacuate the chamber, a workpiece support to hold a workpiece, and an intra-chamber electrode assembly that includes a plurality of filaments extending laterally through the plasma chamber between a ceiling of the plasma chamber and the workpiece support. Each filament including a conductor surrounded by a cylindrical insulating shell. The plurality of filaments includes a first multiplicity of filaments and a second multiplicity of filaments arranged in an alternating pattern with the first multiplicity of filaments. An RF power source is configured to apply a first RF input signal to the first multiplicity of filaments.
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5.发明授权Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event 有权晶圆加载站，响应于非计划事件，自动从运动的输送机回缩公开(公告)号：US07684895B2
公开(公告)日：2010-03-23
申请号：US10987452
申请日：2004-11-12
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： G06F19/00
CPC分类号： H01L21/67769 , H01L21/67775 , H01L21/67778 , Y10S414/135 , Y10S414/136
摘要： In a first aspect, a wafer loading station adapted to exchange wafer carriers with a wafer carrier transport system comprises a biasing element adapted to urge the end effector of the wafer loading station away from a moveable conveyor of the wafer carrier transport system upon the occurrence of a unscheduled event such as a power failure or an emergency shutdown. In a second aspect, an uninterruptible power supply commands a controller to cause the wafer carrier handler to retract the end effector from the wafer carrier transport system upon the occurrence of the unscheduled event, and provides the power necessary for the same. Numerous other aspects are provided.
摘要翻译： 在第一方面，一种适于与晶片载体传输系统交换晶片载体的晶片装载站包括偏置元件，该偏置元件适于在晶片载体传输系统发生时将晶片载体站的末端执行器远离晶片载体传输系统的可移动传送器 一个非计划的事件，如停电或紧急停机。 在第二方面，不间断电源命令控制器使晶片载体处理器在发生非预定事件时从晶片载体传输系统缩回端部执行器，并提供其所需的功率。 提供了许多其他方面。
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公开(公告)号：US20090308030A1
公开(公告)日：2009-12-17
申请号：US12545145
申请日：2009-08-21
CPC分类号： H01L21/6773 , H01L21/67733 , H01L21/67769
摘要： In a first aspect, a method of opening a substrate carrier is provided. The method includes moving the substrate carrier such that a door of the substrate carrier contacts a supporting member; employing the supporting member to support the door; moving a housing of the substrate carrier away from the supporting member; and pivoting the supporting member and door below a bottom surface of the substrate carrier. Numerous other aspects are provided.
摘要翻译： 在第一方面，提供一种打开衬底载体的方法。 该方法包括移动衬底载体，使得衬底载体的门接触支撑构件; 使用支撑构件来支撑门; 使所述基板载体的壳体远离所述支撑构件移动; 以及使所述支撑构件和门在所述衬底载体的底表面下方枢转。 提供了许多其他方面。
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公开(公告)号：US07611318B2
公开(公告)日：2009-11-03
申请号：US10764820
申请日：2004-01-26
申请人： Michael R. Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/6773 , H01L21/67733 , H01L21/67769 , H01L21/67778
摘要： In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.
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8.发明授权公开(公告)号：US07597183B2
公开(公告)日：2009-10-06
申请号：US11932224
申请日：2007-10-31
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G15/64
CPC分类号： H01L21/68 , H01L21/67775 , Y10S414/14 , Y10S414/141
摘要： A kinematic pin and a substrate carrier adapted to deter dislodgment of the substrate carrier from the kinematic pin are provided. A shear member on the kinematic pin interacts with a shear feature of the substrate carrier to deter lateral movement of the substrate carrier relative to the kinematic pin. A substrate carrier handler that employs the kinematic pin is also provided.
摘要翻译： 提供了一种用于阻止衬底载体从运动销上移动的运动销和衬底载体。 运动销上的剪切构件与衬底载体的剪切特征相互作用，以阻止衬底载体相对于运动销的横向移动。 还提供了采用运动销的衬底载体处理器。
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9.发明申请公开(公告)号：US20090205930A1
公开(公告)日：2009-08-20
申请号：US12430032
申请日：2009-04-24
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliot , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliot , Jeffrey C. Hudgens
IPC分类号： B65G47/38
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.
摘要翻译： 公开了一种用于连续运动的高速位置传送器系统的分离安装系统。 支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力 皮带和支撑架。 安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。 安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。
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公开(公告)号：US07433756B2
公开(公告)日：2008-10-07
申请号：US10987956
申请日：2004-11-12
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： G06F7/00
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.
摘要翻译： 在第一方面，提供了一种将基板载体加载器校准到移动输送机的第一种方法。 第一种方法包括以下步骤：（1）提供适于将基板载体加载到移动输送机上的基底载体加载器; （2）将基板载体装载器对准移动的输送机; 和（3）将衬底载体装载器校准到移动的输送机。 提供了许多其他方面。
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