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90 条记录 (耗时 0.031 秒)

    Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor
    61.
    发明授权
    Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor 有权
    监控和/或控制半导体制造装置的方法及其系统

    公开(公告)号：US06616759B2

    公开(公告)日：2003-09-09

    申请号：US09946732

    申请日：2001-09-06

    申请人： Junichi Tanaka ,  Hiroyuki Kitsunai ,  Akira Kagoshima ,  Daisuke Shiraishi ,  Hideyuki Yamamato ,  Shoji Ikuhara ,  Toshio Masuda

    发明人： Junichi Tanaka ,  Hiroyuki Kitsunai ,  Akira Kagoshima ,  Daisuke Shiraishi ,  Hideyuki Yamamato ,  Shoji Ikuhara ,  Toshio Masuda

    IPC分类号： B05C1302

    CPC分类号： H01L22/20 ,  G05B13/048 ,  G05B19/41865 ,  G05B23/024 ,  G05B2219/31357 ,  G05B2219/32058 ,  H01L21/67276 ,  H01L2924/0002 ,  Y02P90/12 ,  Y02P90/14 ,  Y02P90/18 ,  Y02P90/20 ,  H01L2924/00

    摘要： A method and system are provided for controlling and/or monitoring a semiconductor processing apparatus while predicting its processing results. The system includes a sensor for monitoring a processing state of the processing apparatus, a sensed data storage unit for preserving sensed data sent from the sensor, an input device for inputting measured values for processing results of semiconductor devices processed by the processing apparatus, a processing result measured value storage unit for preserving the inputted processing result measured values, a model equation generation unit for generating a model equation from preserved sensed data and processing result measured values, a model equation storage unit for preserving the generated model equation, a model equation based prediction unit for predicting processing results from the preserved model equation and the sensed data, and a process recipe control unit for controlling processing conditions of the processing apparatus from predicted processing results.

    摘要翻译： 提供一种用于在预测其处理结果的同时控制和/或监视半导体处理装置的方法和系统。 该系统包括用于监视处理装置的处理状态的传感器，用于保存从传感器发送的感测数据的感测数据存储单元，用于输入用于处理由处理装置处理的半导体装置的处理结果的测量值的输入装置， 结果测量值存储单元，用于保存输入的处理结果测量值;模型方程生成单元，用于从保存的感测数据和处理结果测量值生成模型方程;模型方程式存储单元，用于保存生成的模型方程;基于模型方程 预测单元，用于从保存的模型方程和感测数据预测处理结果;以及处理配方控制单元，用于根据预测的处理结果控制处理装置的处理条件。

    Plasma processing apparatus and plasma processing method
    62.
    发明授权
    Plasma processing apparatus and plasma processing method 失效
    等离子体处理装置和等离子体处理方法

    公开(公告)号：US06171438B2

    公开(公告)日：2001-01-09

    申请号：US09227332

    申请日：1999-01-08

    申请人： Toshio Masuda ,  Kazue Takahashi ,  Mitsuru Suehiro ,  Tetsunori Kaji ,  Saburo Kanai

    发明人： Toshio Masuda ,  Kazue Takahashi ,  Mitsuru Suehiro ,  Tetsunori Kaji ,  Saburo Kanai

    IPC分类号： C23C1600

    CPC分类号： H01J37/32504 ,  H01J37/32522 ,  H01J2237/022 ,  H01L21/3065 ,  H01L21/67069 ,  H01L21/67109 ,  H01L21/6831

    摘要： A plasma etching apparatus including a vacuum processing chamber, a plasma generation device, a processing gas supply for supplying processing gas to the processing chamber, an electrode for holding a sample to be processed in the vacuum processing chamber, and an evacuation system for reducing the pressure of the vacuum processing chamber. The processing gas includes at least one kind of gas having a composition for forming a polymerized film by plasma discharge, wherein the processing gas is made plasmatic by plasma discharge in the processing chamber. At least one surface of an inner wall surface of the processing chamber in contact with plasma in the processing chamber and a surface of an internal component part is controlled to a predetermined temperature which is lower than the temperature of the sample to be processed and a strong polymerized film is formed on the inner wall surface of the processing chamber.

    摘要翻译： 一种等离子体蚀刻装置，包括真空处理室，等离子体产生装置，用于向处理室供应处理气体的处理气体供应源，用于保持真空处理室中待处理样品的电极和用于减少处理气体的排气系统 真空处理室的压力。 处理气体包括至少一种具有通过等离子体放电形成聚合膜的组成的气体，其中处理气体通过在处理室中的等离子体放电而制成。 与处理室中的等离子体接触的处理室的内壁表面的至少一个表面和内部部件的表面被控制到比待处理样品的温度低的预定温度，并且强 聚合膜形成在处理室的内壁表面上。

    Purifying method and purification system for lakes and marshes
    63.
    发明授权
    Purifying method and purification system for lakes and marshes 失效
    湖泊和沼泽净化方法及净化系统

    公开(公告)号：US5893978A

    公开(公告)日：1999-04-13

    申请号：US794902

    申请日：1997-02-04

    申请人： Hiroaki Yoda ,  Shiro Nakadaira ,  Toshio Masuda ,  Takashi Mizumori ,  Koichi Tsuzuki

    发明人： Hiroaki Yoda ,  Shiro Nakadaira ,  Toshio Masuda ,  Takashi Mizumori ,  Koichi Tsuzuki

    IPC分类号： E02B3/00 ,  C02F3/08 ,  C02F7/00 ,  E02B15/10 ,  E02B15/04

    CPC分类号： C02F7/00 ,  Y02W10/15 ,  Y02W10/33 ,  Y02W10/37

    摘要： A purification system is provided for purifying the water of eutrophic lakes and marshes by partitioning the target lake/marsh to form a specified water treating area therein. For this purpose, a partitioning structure is provided for enclosing and partitioning the whole or part of an area around the mouth of each river flowing into the target eutrophic lake/marsh in the direction of depth to form a water treating water area; and a purifier for taking in water from the water treating area operates to separate and remove pollutants from the water, and then discharges treated water outside the water treating area.

    摘要翻译： 提供净化系统，用于通过划分目标湖/沼泽来在其中形成指定的水处理区域来净化富营养化湖泊和沼泽的水。 为此，提供一种分隔结构，用于围绕并划分沿着深度方向流入目标富营养化湖/沼泽的每条河流的口部的整个或部分区域，以形成水处理水区域; 用于从水处理区吸入水的净化器用于分离和去除水中的污染物，然后将处理水排出水处理区域外。

    Method for loading liquids into containers made of resins
    64.
    发明授权
    Method for loading liquids into containers made of resins 失效
    将液体装入由树脂制成的容器中的方法

    公开(公告)号：US5533324A

    公开(公告)日：1996-07-09

    申请号：US126656

    申请日：1993-09-27

    申请人： Masahiko Furukawa ,  Toshio Masuda ,  Toru Kenmotsu

    发明人： Masahiko Furukawa ,  Toshio Masuda ,  Toru Kenmotsu

    IPC分类号： B65B3/18 ,  B65B3/04 ,  B65B7/00 ,  B65B7/02 ,  B65B1/04 ,  B65B35/56

    CPC分类号： B65B3/04

    摘要： A method for loading a liquid into a container made of a resin comprises the steps of holding a portion of a bag, which is made of a resin film and which is provided with an opening, the portion surrounding the opening, and thereby suspending the bag in a case housing, which is to accommodate the bag therein. A predetermined amount of a liquid is poured through the opening into the bag, which is being suspended in the case housing, and thereafter the opening is closed. After the liquid has been poured into the bag, but before the opening is closed, the case housing is moved up, and the bag is thereby pushed up a predetermined distance, an appropriate amount of air being thus introduced into the bag having been loaded with the liquid. Worsening of the orientation or form of the bag and scratching or flawing of the bag are thus prevented from occurring due to vibrations given to the bag during its transportation, or the like.

    摘要翻译： 将液体装载到由树脂制成的容器中的方法包括以下步骤：保持由树脂膜制成并且设置有开口的袋的一部分，围绕开口的部分，从而悬挂袋 在其中容纳袋子的壳体壳体中。 将预定量的液体通过开口倒入被悬挂在壳体中的袋中，然后关闭开口。 在液体已经倒入袋子之后，但是在开口关闭之前，壳体的壳体向上移动，并且袋子被推上预定的距离，因此将适量的空气引入到已经装入袋子的袋子中 液体。 因此，防止袋子的取向或形式的恶化以及袋子的划伤或瑕疵由于在运输过程中给予袋的振动等而被发生。

    Method for manufacturing foam aluminum product and product
    65.
    发明授权
    Method for manufacturing foam aluminum product and product 失效
    泡沫铝产品和产品的制造方法

    公开(公告)号：US5482533A

    公开(公告)日：1996-01-09

    申请号：US202366

    申请日：1994-02-25

    申请人： Toshio Masuda ,  Shigemi Kanbayashi

    发明人： Toshio Masuda ,  Shigemi Kanbayashi

    IPC分类号： B22D27/00

    CPC分类号： B22D27/00 ,  Y10T29/49798 ,  Y10T29/49988 ,  Y10T29/49989 ,  Y10T428/12479

    摘要： A method is disclosed for forming a foamed aluminum article. A foaming vessel is used including a peripheral wall and a plurality of vertical rod members to form mounting holes at given positions in the vicinity of the inside surface of the peripheral wall. The melt of aluminum or its alloy is stirred with a viscosity increaser and a foaming material. The solidified aluminum block is then sliced to a given thickness to obtain a product of foamed aluminum having mounting holes in given positions in the vicinity of the outer edge thereof. A hard portion around the holes is used as the surface site for mounting the product. The products are used for sound and heat insulation.

    摘要翻译： 公开了一种用于形成泡沫铝制品的方法。 使用发泡容器，其包括周壁和多个垂直杆构件，以在周壁的内表面附近的给定位置处形成安装孔。 铝或其合金的熔体与增粘剂和发泡材料一起搅拌。 然后将固化的铝块切片至给定的厚度，以获得具有在其外边缘附近的给定位置的安装孔的发泡铝的产品。 孔周围的硬质部分用作安装产品的表面部位。 产品用于隔音和隔音。