Acoustic wave device with frequency control film
    63.
    发明授权
    Acoustic wave device with frequency control film 有权
    具有频率控制膜的声波装置

    公开(公告)号:US08344590B2

    公开(公告)日:2013-01-01

    申请号:US13431642

    申请日:2012-03-27

    IPC分类号: H01L41/04 H03H9/205

    摘要: An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. The sub resonator has a mass addition film on the upper electrode in a resonance area in which the upper electrode and the lower electrode face each other. At least one of the main resonator and the sub resonator is provided with a frequency control film on an upper side of the resonance area, and the frequency control film has a weight per unit area smaller than a weight of the mass addition film per unit area.

    摘要翻译: 声波装置包括主谐振器和子谐振器,每个具有基板,设置在基板上的下电极,设置在下电极上的压电膜和设置在压电膜上侧的上电极。 副谐振器在上电极和上电极彼此面对的共振区域中的上电极上具有质量加成膜。 主谐振器和副谐振器中的至少一个在谐振区域的上侧设置有频率控制膜,频率控制膜的每单位面积的重量比单位面积的质量加成膜的重量小 。

    Filter device
    64.
    发明授权
    Filter device 失效
    过滤装置

    公开(公告)号:US06949990B2

    公开(公告)日:2005-09-27

    申请号:US10665209

    申请日:2003-09-22

    摘要: A filter device includes a filter element that has piezoelectric thin-film resonators arranged in series arms and parallel arms, and a package that houses the filter element in a face-down state. In this filter device, the filter element and the package are electrically connected to each other through bumps. The package includes first pad parts on which the bumps are placed, and transmission paths that electrically connect the first pad parts to the outside. The filter element includes second pad parts that are electrically connected to the first pad parts through the bumps, and wiring parts that electrically connect the second pads to the piezoelectric thin-film resonators and electrically connect the piezoelectric thin-film resonators to one another. In this structure, inductances formed with the transmission paths are connected in series to the piezoelectric thin-film resonators.

    摘要翻译: 滤波器装置包括具有布置成串联臂和平行臂的压电薄膜谐振器的滤波器元件和以面朝下的状态容纳滤波元件的封装。 在该过滤器装置中,过滤元件和封装通过凸块彼此电连接。 该包装包括其上放置有凸块的第一垫片部分和将第一垫片部分电连接到外部的传输路径。 滤波器元件包括通过凸块电连接到第一焊盘部分的第二焊盘部分,以及将第二焊盘电连接到压电薄膜谐振器并将压电薄膜谐振器彼此电连接的布线部分。 在该结构中,形成有传输路径的电感与压电薄膜谐振器串联连接。