SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD
    63.
    发明申请
    SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD 有权
    半导体制造设备和半导体制造方法

    公开(公告)号:US20110217795A1

    公开(公告)日:2011-09-08

    申请号:US13035182

    申请日:2011-02-25

    IPC分类号: H01L21/66 B23P19/00

    摘要: According to one embodiment, a first substrate and a second substrate are pressed from an opposite surface of a joint surface of the second substrate such that a joint surface of the first substrate and the joint surface of the second substrate are in contact with each other. The second substrate is restrained by a member to provide a gap between the joint surfaces. It is determined, based on a temporal change of a joint interface calculated based on an image imaged from the opposite surface side of the joint surface, whether joining is normally performed.

    摘要翻译: 根据一个实施例,第一基板和第二基板从第二基板的接合表面的相对表面被按压,使得第一基板的接合表面和第二基板的接合表面彼此接触。 第二基板被构件约束以在接合表面之间提供间隙。 基于基于从接合面的相对面侧成像的图像计算的接合界面的时间变化,确定是否正常进行接合。

    Optical semiconductor module and its manufacturing method
    64.
    发明授权
    Optical semiconductor module and its manufacturing method 有权
    光半导体模块及其制造方法

    公开(公告)号:US07255493B2

    公开(公告)日:2007-08-14

    申请号:US11442276

    申请日:2006-05-30

    IPC分类号: G02B6/36

    CPC分类号: G02B6/4249 G02B6/423

    摘要: An optical semiconductor module comprises an optical transmission channel including a waveguide transmitting a light beam, a holding member whose holding member holds the channel with the end of the channel being exposed from the surface, electric wiring formed on the surface, an optical semiconductor element, mounted above the surface, including an active area to emit or receive a light beam and an electrode pad electrically connected to the electric wiring, the active area optically coupled to the waveguide at the end of the channel, and an electrical insulation film between the optical semiconductor element and the holding member, including openings each corresponding to an electrical connection between the electrode pad and the electric wiring, and an optically coupling portion between the active area and the waveguide, the electrical insulation film being in contact with a portion of the end of the channel.

    摘要翻译: 光学半导体模块包括:光传输通道,其包括透射光束的波导;保持部件,其保持部件保持沟道的端部从表面露出,形成在表面上的电布线,光学半导体元件, 安装在所述表面上方,包括发射或接收光束的有源区域和电连接到所述电线路的电极焊盘,所述有源区域在所述通道的端部处光耦合到所述波导,以及在所述光学器件之间的电绝缘膜 半导体元件和保持构件,包括各自对应于电极焊盘和电布线之间的电连接的开口以及有源区域和波导之间的光学耦合部分,电绝缘膜与端部的一部分接触 的频道。

    Optical semiconductor module and its manufacturing method

    公开(公告)号:US20060215969A1

    公开(公告)日:2006-09-28

    申请号:US11442276

    申请日:2006-05-30

    IPC分类号: G02B6/36

    CPC分类号: G02B6/4249 G02B6/423

    摘要: An optical semiconductor module comprises an optical transmission channel including a waveguide transmitting a light beam, a holding member whose holding member holds the channel with the end of the channel being exposed from the surface, electric wiring formed on the surface, an optical semiconductor element, mounted above the surface, including an active area to emit or receive a light beam and an electrode pad electrically connected to the electric wiring, the active area optically coupled to the waveguide at the end of the channel, and an electrical insulation film between the optical semiconductor element and the holding member, including openings each corresponding to an electrical connection between the electrode pad and the electric wiring, and an optically coupling portion between the active area and the waveguide, the electrical insulation film being in contact with a portion of the end of the channel.

    Electrode connections for a piezoelectric sensor
    68.
    发明授权
    Electrode connections for a piezoelectric sensor 失效
    压电传感器的电极连接

    公开(公告)号:US4511819A

    公开(公告)日:1985-04-16

    申请号:US534915

    申请日:1983-09-22

    摘要: A piezoelectric sensor for measuring an external force is disclosed which is accommodated in a cassette through a sealing member and provided with a pair of electrodes which are respectively bonded to opposite sides of a piezoelectric element. A masking strip made of a highly insulative material covers the whole area of and end face of the piezoelectric element, which is exposed to the outside of the sensor, and a desired width of an end face of each of the electrodes adjacent to the end face of the piezoelectric element. This maintains a high resistance between the electrodes having the piezoelectric element therebetween and thereby promotes accurate measurement without being effected by changes in the resistance of the sealing member due to temperature variation. The sensor is effectively applicable to a vortex flow meter.

    摘要翻译: 公开了一种用于测量外力的压电传感器,其通过密封构件容纳在盒中,并且设置有分别结合到压电元件的相对侧的一对电极。 由绝缘性高的绝缘材料构成的掩模条覆盖了暴露于传感器外部的压电元件的整个区域和端面以及与端面相邻的每个电极的端面的期望宽度 的压电元件。 这在其间具有压电元件的电极之间保持高电阻,从而促进精确的测量,而不受由温度变化引起的密封构件的电阻变化的影响。 该传感器可有效应用于涡街流量计。