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公开(公告)号：US07408429B2
公开(公告)日：2008-08-05
申请号：US11453064
申请日：2006-06-15
IPC分类号： H03H9/00
CPC分类号： H03H9/564 , H03H9/0207
摘要： A coupled FBAR filter 100 includes first and second input/output vibration portions 110 and 111 respectively including first and second lower electrodes 104 and 106, first and second upper electrodes 105 and 107, and a piezoelectric thin film 103 interposed therebetween; and a cavity 102 for commonly guaranteeing vibrations of the first and second input/output vibration portions 110 and 111 so as to couple the vibrations. The first and second input/output vibration portions 110 and 111 are located adjacently in contact with each other with a step therebetween, such that the first and second lower electrodes 104 and 106 are not electrically connected to each other and such that the first and second upper electrodes 105 and 107 are not electrically connected to each other. Insulators 108 and 109 are provided in the vicinity of the step.
摘要翻译： 耦合的FBAR滤波器100包括分别包括第一和第二下部电极104和106的第一和第二输入/输出振动部分110和111，第一和第二上部电极105和107以及介于其间的压电薄膜103; 以及用于共同地保证第一和第二输入/输出振动部分110和111的振动以便耦合振动的空腔102。 第一和第二输入/输出振动部分110和111彼此相邻地彼此接触地定位，使得第一和第二下部电极104和106彼此不电连接，并且使得第一和第二输入/输出振动部分110和111 上电极105和107彼此不电连接。 绝缘体108和109设置在台阶附近。
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62.发明申请Piezoelectric filter, antenna duplexer, and communications apparatus employing piezoelectric resonator 失效压电滤波器，天线双工器以及采用压电谐振器的通信装置公开(公告)号：US20070296523A1
公开(公告)日：2007-12-27
申请号：US11812013
申请日：2007-06-14
CPC分类号： H03H9/588 , H03H3/04 , H03H9/587 , H03H2003/023 , H03H2003/0414
摘要： A piezoelectric filter comprises a substrate and a plurality of piezoelectric resonators provided on the same substrate. Each piezoelectric resonator comprises a cavity formed in the substrate, a lower electrode formed on the substrate, covering the cavity, a piezoelectric material layer formed on the lower electrode, and an upper electrode formed on the piezoelectric material layer. At least one of the piezoelectric resonators has a cavity formed of a plurality of cells.
摘要翻译： 压电滤波器包括基板和设置在同一基板上的多个压电谐振器。 每个压电谐振器包括形成在基板中的空腔，形成在基板上的覆盖空腔的下电极，形成在下电极上的压电材料层和形成在压电材料层上的上电极。 至少一个压电谐振器具有由多个单元形成的空腔。
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公开(公告)号：US07301420B2
公开(公告)日：2007-11-27
申请号：US10543837
申请日：2004-11-19
CPC分类号： H03H9/605 , H03H9/6483
摘要： A piezoelectric resonator filter for allowing a high-frequency signal in a desired frequency band to pass therethrough. The piezoelectric resonator filter presents a low insertion loss while securing satisfactory characteristics in a stop band. The piezoelectric resonator includes two or more reactance elements in serial connection between input and output terminals, at least three or more piezoelectric resonators in parallel connection between the input and output terminals, and an inductor having a grounded end. The reactive elements and resonators of the piezoelectric resonator are arranged in a ladder connection. Among the three or more piezoelectric resonators, only those piezoelectric resonators which do not adjoin each other are connected in common to the inductor.
摘要翻译： 一种用于允许期望频带中的高频信号通过的压电谐振器滤波器。 压电谐振器滤波器具有低插入损耗，同时在阻带中确保令人满意的特性。 压电谐振器包括在输入和输出端子之间串联连接的两个或更多个电抗元件，在输入和输出端子之间并联连接的至少三个或更多个压电谐振器和具有接地端的电感器。 压电谐振器的电抗元件和谐振器被布置在梯形连接中。 在三个或更多个压电谐振器中，只有那些彼此不相邻的压电谐振器共同地连接到电感器。
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公开(公告)号：US07246421B2
公开(公告)日：2007-07-24
申请号：US11220815
申请日：2005-09-07
CPC分类号： H03H9/0542 , H01L21/568 , H01L21/6835 , H01L24/97 , H01L2224/16 , H01L2224/16245 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01021 , H01L2924/01024 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01039 , H01L2924/01046 , H01L2924/01047 , H01L2924/01057 , H01L2924/01058 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/15153 , H01L2924/1517 , H01L2924/16195 , H01L2924/16235 , H01L2924/181 , H01L2924/30105 , H01L2924/30107 , H01L2924/3025 , H01L2924/351 , H03H3/08 , H03H9/059 , H03H9/1085 , H03H9/1092 , Y10T29/42 , Y10T29/49005 , Y10T29/49144 , Y10T29/49146 , Y10T29/49158 , Y10T29/49171 , H01L2224/81 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
摘要： A surface acoustic wave device which occupies a small mounting area and has a low profile, yet having an improved reliability, and can be made available at low cost. The surface acoustic wave device comprises a piezoelectric substrate, a function region formed of comb-like electrodes for exciting surface acoustic wave provided on a main surface of the piezoelectric substrate, a space formation member covering the function region, a plurality of bump electrodes provided on a main surface of the piezoelectric substrate and a terminal electrode provided opposed to the main surface of piezoelectric substrate. The bump electrode and the terminal electrode are having a direct electrical connection, and a space between piezoelectric substrate and terminal electrode is filled with resin. When the above-configured acoustic wave device is applied for a frequency filter, a resonator, in a portable telephone unit, a keyless entry or the like communication apparatus, the overall size of such apparatus can be reduced and a higher reliability is implemented.
摘要翻译： 表面声波装置占据小的安装面积并且具有低轮廓，但具有改进的可靠性，并且可以以低成本获得。 表面声波装置包括压电基板，由用于激发设置在压电基板的主表面上的表面声波的梳状电极形成的功能区域，覆盖该功能区域的空间形成部件，设置在该功能区域上的多个凸块电极 压电基板的主表面和与压电基板的主表面相对设置的端子电极。 突起电极和端子电极具有直接的电连接，并且压电基板和端子电极之间的空间填充有树脂。 当将上述构造的声波装置应用于频率滤波器，便携式电话单元中的谐振器，无钥匙进入等通信装置时，可以减少这种装置的总体尺寸并实现更高的可靠性。
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65.发明授权Piezoelectric device, antenna duplexer, and method of manufacturing piezoelectric resonators used therefor 有权压电器件，天线双工器以及用于此的压电谐振器的制造方法公开(公告)号：US07242130B2
公开(公告)日：2007-07-10
申请号：US10979276
申请日：2004-11-03
CPC分类号： H03H9/605 , H03H3/02 , H03H9/02118 , H03H9/587
摘要： A piezoelectric device of the present invention includes first and second piezoelectric resonators. The first piezoelectric resonator has a structure in which a cavity, a lower electrode, a piezoelectric layer, and an upper electrode are formed on a substrate. The second piezoelectric resonator has a structure in which a cavity, a lower electrode, a piezoelectric layer, and an upper electrode are formed on the substrate. A feature of the above-structure piezoelectric device is that the piezoelectric layers, have the same film thickness, and the depth of the cavity of the first piezoelectric resonator is different from the depth of the cavity of the second piezoelectric resonator.
摘要翻译： 本发明的压电装置包括第一和第二压电谐振器。 第一压电谐振器具有在基板上形成空腔，下电极，压电层和上电极的结构。 第二压电谐振器具有在基板上形成空腔，下电极，压电层和上电极的结构。 上述结构的压电装置的特征在于，压电层具有相同的膜厚度，并且第一压电谐振器的空腔的深度与第二压电谐振器的腔的深度不同。
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公开(公告)号：US20060284702A1
公开(公告)日：2006-12-21
申请号：US11453064
申请日：2006-06-15
CPC分类号： H03H9/564 , H03H9/0207
摘要： A coupled FBAR filter 100 includes first and second input/output vibration portions110 and 111 respectively including first and second lower electrodes 104 and 106, first and second upper electrodes 105 and 107, and a piezoelectric thin film 103 interposed therebetween; and a cavity 102 for commonly guaranteeing vibrations of the first and second input/output vibration portions 110 and 111 so as to couple the vibrations. The first and second input/output vibration portions 110 and 111 are located adjacently in contact with each other with a step therebetween, such that the first and second lower electrodes 104 and 106 are not electrically connected to each other and such that the first and second upper electrodes 105 and 107 are not electrically connected to each other. Insulators 108 and 109 are provided in the vicinity of the step.
摘要翻译： 耦合的FBAR滤波器100包括分别包括第一和第二下部电极104和106的第一和第二输入/输出振动部分110和111，第一和第二上部电极105和107以及介于其间的压电薄膜103; 以及用于共同地保证第一和第二输入/输出振动部分110和111的振动以便耦合振动的空腔102。 第一和第二输入/输出振动部分110和111彼此相邻地彼此接触地定位，使得第一和第二下部电极104和106彼此不电连接，并且使得第一和第二输入/输出振动部分110和111 上电极105和107彼此不电连接。 绝缘体108和109设置在台阶附近。
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公开(公告)号：US06996882B2
公开(公告)日：2006-02-14
申请号：US10167775
申请日：2002-06-10
申请人： Keiji Onishi , Hiroki Sato , Yoshihiro Tomita
发明人： Keiji Onishi , Hiroki Sato , Yoshihiro Tomita
IPC分类号： H04R17/00
CPC分类号： H03H9/02984 , H03H9/0222 , H03H9/02566 , H03H9/02574 , H03H9/02629 , H03H9/02669 , H03H9/02834 , H03H9/1071 , H03H9/1085 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49128 , Y10T29/49135
摘要： A surface acoustic wave element includes a laminated substrate where a first substrate made of a piezoelectric material is laminated over a second substrate made of a material different from that of the first substrate, and at least one pair of comb-shaped electrodes formed on one main plane of the first substrate. A step or a notch is formed on the periphery of the laminated substrate on the side of the first substrate.
摘要翻译： 表面声波元件包括层压基板，其中由由压电材料制成的第一基板层叠在由与第一基板不同的材料制成的第二基板上，以及形成在一个主体上的至少一对梳状电极 第一衬底的平面。 在层叠基板的第一基板侧的周围形成台阶或切口。
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68.发明申请公开(公告)号：US20060028298A1
公开(公告)日：2006-02-09
申请号：US11195820
申请日：2005-08-03
IPC分类号： H03H9/70
CPC分类号： H03H9/706 , H03H9/0038 , H03H9/0042 , H03H9/0576 , H03H9/14588 , H03H9/72 , H03H9/725
摘要： Either one of a transmission terminal connected to a transmission filter and a receiving terminal connected to a receiving filter is a balanced type terminal, and the other is an unbalanced type terminal. The transmission filter and the receiving filter includes surface acoustic wave resonators or film bulk acoustic resonators. The balanced type terminal is connected to a longitudinal mode coupled surface acoustic wave filter.
摘要翻译： 连接到发送滤波器的发送终端和连接到接收滤波器的接收终端中的任一个是平衡型终端，而另一个是不平衡型终端。 传输滤波器和接收滤波器包括表面声波谐振器或薄膜体声共振器。 平衡型端子连接到纵模耦合表面声波滤波器。
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69.发明申请公开(公告)号：US20050255824A1
公开(公告)日：2005-11-17
申请号：US11166810
申请日：2005-06-24
CPC分类号： H03H9/0038 , H01L2224/05571 , H01L2224/05573 , H01L2224/16225 , H01L2924/15174 , H01L2924/15192 , H01L2924/16195 , H03H9/0042 , H03H9/02874 , H03H9/02952 , H03H9/0542 , H03H9/059 , H03H9/1071
摘要： A surface acoustic wave filter element has a piezoelectric substrate; and a plurality of inter-digital transducer (IDT) electrodes formed on the piezoelectric substrate, wherein at least one of the plurality of IDT electrodes is connected to a balanced type terminal and other IDT electrodes are connected to balanced type terminals or unbalanced type terminals, and first wiring electrode means which is connected or to be connected to the at least one IDT electrode and second wiring electrode means which is connected or to be connected to the other IDT electrodes are disposed on planes different from each other.
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70.发明申请Piezoelectric device, antenna duplexer, and method of manufacturing piezoelectric resonators used therefor 有权压电器件，天线双工器以及用于此的压电谐振器的制造方法公开(公告)号：US20050099092A1
公开(公告)日：2005-05-12
申请号：US10979276
申请日：2004-11-03
CPC分类号： H03H9/605 , H03H3/02 , H03H9/02118 , H03H9/587
摘要： A piezoelectric device 100 includes first and second piezoeletric resonators 110, 120. The first piezoeletric resonator 110 has a structure in which a cavity 111, a lower electrode 112, a piezoeletric layer 113, and an upper electrode 114 are formed on a substrate 101. The second piezoeletric resonator 120 has a structure in which a cavity 121, a lower electrode 122, a piezoeletric layer 123, and an upper electrode 124 are formed on the substrate 110. A feature of the above-structure piezoelectric device 100 is that the piezoeletric layers 113, 123 have the same film thickness and the depth t1 of the cavity 111 of the first piezoeletric resonator 110 is different from the depth t2 of the cavity 121 of the second piezoeletric resonator 120.
摘要翻译： 压电装置100包括第一和第二压电谐振器110,120。 第一压电谐振器110具有其中在基板101上形成空腔111，下电极112，压电层113和上电极114的结构。 第二压电谐振器120具有其中在基板110上形成空腔121，下电极122，压电层123和上电极124的结构。 上述结构的压电装置100的特征在于，压电层113,123具有相同的膜厚度，并且第一压电谐振器110的空腔111的深度t 1与腔体121的深度t 2不同 第二压电谐振器120。
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