Methods for making multi-chip packaging using an interposer
    6.
    发明授权
    Methods for making multi-chip packaging using an interposer 有权
    使用插入片进行多芯片封装的方法

    公开(公告)号:US08387240B2

    公开(公告)日:2013-03-05

    申请号:US12955816

    申请日:2010-11-29

    IPC分类号: H01K3/10

    摘要: In one embodiment, a method includes forming a plurality of vias partially through a body, the vias including sidewalls defined by the body. An electrically insulating layer is formed on the sidewalls and on an upper surface of the body. An electrically conductive layer is formed on the insulating layer in the vias and on the upper surface, the electrically conductive layer defining first metal pads on the upper surface and second metal pads in contact with the first metal pads, the second metal pads having a denser pitch than the first metal pads. A dielectric layer is formed between adjacent first metal pads and between adjacent second metal pads. The body is thinned through a lower surface and the electrically insulating layer in the vias is exposed. After the thinning, a portion of the electrically insulating layer in the, vias is removed. The body is coupled to a substrate.

    摘要翻译: 在一个实施例中,一种方法包括通过主体部分地形成多个通孔,通孔包括由身体限定的侧壁。 电绝缘层形成在主体的侧壁和上表面上。 在通孔和上表面上的绝缘层上形成导电层,导电层限定上表面上的第一金属焊盘和与第一金属焊盘接触的第二金属焊盘,第二金属焊盘具有较密的 间距比第一金属垫。 在相邻的第一金属焊盘之间和相邻的第二金属焊盘之间形成介电层。 身体通过下表面变薄,并且通孔中的电绝缘层被暴露。 在变薄之后,去除通孔中的电绝缘层的一部分。 主体耦合到基板。