公开(公告)号：US20070180909A1

公开(公告)日：2007-08-09

申请号：US11655576

申请日：2007-01-19

Applicant: Takeshi Uchiyama ,  Mitsuo Yarita ,  Akira Egawa

Inventor： Takeshi Uchiyama ,  Mitsuo Yarita ,  Akira Egawa

IPC: G01P9/04 ,  G01P1/04

CPC classification number: G01P15/125 ,  G01C19/56 ,  G01P15/18 ,  G01P2015/0842

Abstract: An angular velocity sensor amplifies a plurality of detection signals using one amplifying circuit and properly separates these detection signals after amplification. The angular velocity sensor detects displacements of a mass in the respective axial directions using an x-axis detection circuit, a y-axis detection circuit and a z-axis detection circuit respectively. A carrier wave which has a phase thereof shifted from a phase of a carrier wave of the z-axis detection circuit by 90° is applied to the x-axis detection circuit and the y-axis detection circuit, wherein the application of the carrier wave to the x-axis detection circuit and the y-axis detection circuit is performed by switching based on a clock signals. Outputs of the respective axis detection circuits are collectively inputted to a current/voltage conversion circuit. An output signal of the current/voltage conversion circuit is inputted to three synchronous detection circuits, and an x-axis detection signal component, a y-axis detection signal component and a z-axis detection signal component are separated in the respective synchronous detection circuits. In the synchronous detection circuits, by applying phase division processing to the combined signal, the z-axis detection signal component is separated from cross axis detection signal components and, further, by applying time division processing to the signal components based on switching timing of the carrier wave, the x-axis detection signal component and the y-axis detection signal component are separated from each other.

Abstract translation: 角速度传感器使用一个放大电路放大多个检测信号，并在放大后适当地分离这些检测信号。 角速度传感器分别使用x轴检测电路，y轴检测电路和z轴检测电路来检测各轴向的质量位移。 将具有从z轴检测电路的载波相位偏移90°的相位的载波施加到x轴检测电路和y轴检测电路，其中载波的应用 并且通过基于时钟信号的切换来执行y轴检测电路。 各轴检测电路的输出被共同地输入到电流/电压转换电路。 电流/电压转换电路的输出信号被输入到三个同步检测电路，并且在各个同步检测电路中分离x轴检测信号分量，y轴检测信号分量和z轴检测信号分量 。 在同步检测电路中，通过对组合信号进行相位分割处理，将z轴检测信号分量与交叉轴检测信号分量分离，并且通过对基于信号分量的切换定时对信号分量进行时分处理 载波，x轴检测信号分量和y轴检测信号分量彼此分离。

公开(公告)号：US20070044557A1

公开(公告)日：2007-03-01

申请号：US11213982

申请日：2005-08-30

Applicant: Kengo Takemasa ,  Fumihiko Ooka

Inventor： Kengo Takemasa ,  Fumihiko Ooka

IPC: G01P15/12

CPC classification number: G01P1/023 ,  G01P1/006 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/0842 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

Abstract: According to the present invention, a package for an acceleration sensor, includes an acceleration sensor which is proved with a first terminal; a package base; an adhesive layer provided on the package base; and a spacer provided between the adhesive layer and the acceleration sensor. The spacer comprises a second terminal, which is electrically coupled to the first terminal of the acceleration sensor.

Abstract translation: 根据本发明，一种用于加速度传感器的包装件，包括用第一端子证明的加速度传感器; 包装基地 设置在所述封装基座上的粘合层; 以及设置在粘合剂层和加速度传感器之间的间隔件。 间隔件包括电耦合到加速度传感器的第一端子的第二端子。

公开(公告)号：US07019231B2

公开(公告)日：2006-03-28

申请号：US11091456

申请日：2005-03-29

Applicant: Hiroshi Ishikawa ,  Yoshitaka Nakamura ,  Hiroshi Tokunaga ,  Kenji Nagata

Inventor： Hiroshi Ishikawa ,  Yoshitaka Nakamura ,  Hiroshi Tokunaga ,  Kenji Nagata

IPC: H01H35/14

CPC classification number: G01P15/123 ,  B81B3/0051 ,  B81B2201/0235 ,  G01C19/56 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0842

Abstract: An inertial sensor includes a sensing portion having a weight supported by beams, the weight being a movable portion, and a weight stopper that limits a movable range of the weight, the weight stopper being arranged in a vicinity of the weight with a given clearance and being a part of a substrate for the inertial sensor processed with MEMS techniques.

Abstract translation: 惯性传感器包括具有由梁支撑的重物的感测部分，该重物是可移动部分，以及限制重物的可移动范围的重量限制器，该重物限制器布置在具有给定间隙的重物附近， 作为用MEMS技术处理的惯性传感器的基板的一部分。

公开(公告)号：US20050268717A1

公开(公告)日：2005-12-08

申请号：US11063551

申请日：2005-02-24

Applicant: Nobuo Ozawa

Inventor： Nobuo Ozawa

IPC: G01P15/08 ,  G01P15/12 ,  G01P15/18 ,  H01L29/84

CPC classification number: G01P15/123 ,  B81B3/0051 ,  B81B2201/025 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0842

Abstract: An acceleration sensor includes a base portion shaped into the form of a frame, a weight portion located inside the base portion and disposed away from the base portion, a flexible beam portion disposed over an upper portion of the base portion and an upper portion of the weight portion and a stopper portion disposed above the base portion and disposed over the weight portion away from the weight portion, wherein the stopper portion restricts an amount of displacement of the weight portion in the direction of the stopper portion.

Abstract translation: 加速度传感器包括成形为框架形状的基部，位于基部内部并且远离基部设置的配重部分，设置在基部的上部上方的柔性梁部分和 所述止动部设置在所述基部的上方并且配置在所述配重部分上方远离所述配重部分，其中，所述止动部限制所述配重部在所述止动部的方向上的位移量。

公开(公告)号：US20050160814A1

公开(公告)日：2005-07-28

申请号：US11042721

申请日：2005-01-24

Applicant: Vladimir Vaganov ,  Nickolai Belov

Inventor： Vladimir Vaganov ,  Nickolai Belov

IPC: G01P15/08 ,  G01P15/12 ,  G01P15/18

CPC classification number: G01P15/18 ,  G01P15/123 ,  G01P2015/084 ,  G01P2015/0842

Abstract: A system and method for inputting motion measurement data into a computationally based device are provided. In a first version three-axis accelerometer determines components of an inertial force vector with respect to an orthogonal coordinate system. The accelerometer includes a sensor die made of a semiconductor substrate having a frame element, a proof mass element, and an elastic element mechanically coupling the frame and the proof mass. The accelerometer also has three or more stress-sensitive IC components integrated into the elastic element adjacent to the frame element for electrical connectivity without metal conductor traversal of the elastic element.

Abstract translation: 提供了一种将运动测量数据输入到基于计算的设备中的系统和方法。 在第一版本中，三轴加速度计确定相对于正交坐标系的惯性力矢量的分量。 加速度计包括由半导体衬底制成的传感器芯片，该半导体衬底具有框架元件，校验质量元件和机械地联接框架和校验块的弹性元件。 加速度计还具有集成到与框架元件相邻的弹性元件中的三个或更多个应力敏感的IC部件，用于电连接而不需要金属导体穿过弹性元件。

公开(公告)号：US20050016271A1

公开(公告)日：2005-01-27

申请号：US10488490

申请日：2002-09-02

Applicant: Hiroyuki Hashimoto ,  Takahiko Ooasa ,  Naoki Ikeuchi ,  Muneo Harada

Inventor： Hiroyuki Hashimoto ,  Takahiko Ooasa ,  Naoki Ikeuchi ,  Muneo Harada

IPC: B81B3/00 ,  B81B7/00 ,  G01C19/56 ,  G01C19/5719 ,  G01P15/08 ,  G01P15/12 ,  G01P15/18 ,  H01L49/00

CPC classification number: G01P15/18 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/0181 ,  B81B2203/053 ,  B81B2203/058 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0842

Abstract: A microstructure includes a mass; a base member in which the mass is movably contained. The mass includes a surface, which is exposed out of the base member, and a stopper wire, which is arranged above the surface of the mass so as to inhibit over move of the mass.

公开(公告)号：US20040231422A1

公开(公告)日：2004-11-25

申请号：US10879317

申请日：2004-06-29

Applicant: WACOH CORPORATION

Inventor： Kazuhiro Okada

IPC: G01P015/12

CPC classification number: G01P15/125 ,  B81B3/0062 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2203/056 ,  B81B2203/058 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/084 ,  G01P2015/0842 ,  G01P2015/0871

Abstract: The present invention easily achieves an accurate control structure for limiting displacement of a weight. An SOI substrate with a trilaminar structure including a silicon layer, a silicon oxide layer, and a silicon layer is prepared, and slits are opened by applying induced coupling plasma etching which can selectively remove only silicon from the upper side. Then, the same etching is applied from the lower side to form grooves, whereby the lower silicon layer is separated into a weight and a pedestal. Next, the structure is immersed in an etchant which can selectively remove only silicon oxide, whereby the vicinities of exposed portions of the silicon oxide layer are removed to form joint layers. A glass substrate is joined to the bottom surface of the pedestal. Piezo resistor elements are formed on the upper surface of the silicon layer to detect bending. The degree of freedom of upward displacements of the weight is accurately set based on the thickness of the joint layer.

Abstract translation: 本发明容易实现用于限制重量位移的精确控制结构。 制备具有硅层，氧化硅层和硅层的三层结构的SOI衬底，通过施加感应耦合等离子体蚀刻来打开缝隙，该等离子体蚀刻可以从上侧仅选择性地除去硅。 然后，从下侧施加相同的蚀刻以形成槽，由此将下硅层分离成重物和基座。 接下来，将该结构浸渍在可以仅选择性地除去氧化硅的蚀刻剂中，从而去除氧化硅层的暴露部分附近以形成接合层。 玻璃基板与基座的底面接合。 压电电阻元件形成在硅层的上表面上以检测弯曲。 基于接合层的厚度精确地设定重量向上位移的自由度。

公开(公告)号：US20030209075A1

公开(公告)日：2003-11-13

申请号：US10419610

申请日：2003-04-21

Applicant: WACOH CORPORATION

Inventor： Kazuhiro Okada

IPC: G01P015/00

CPC classification number: G01P15/125 ,  B81B3/0062 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2203/056 ,  B81B2203/058 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/084 ,  G01P2015/0842 ,  G01P2015/0871

Abstract: The present invention easily achieves an accurate control structure for limiting displacement of a weight. An SOI substrate with a trilaminar structure including a silicon layer, a silicon oxide layer, and a silicon layer is prepared, and slits are opened by applying induced coupling plasma etching which can selectively remove only silicon from the upper side. Then, the same etching is applied from the lower side to form grooves, whereby the lower silicon layer is separated into a weight and a pedestal. Next, the structure is immersed in an etchant which can selectively remove only silicon oxide, whereby the vicinities of exposed portions of the silicon oxide layer are removed to form joint layers. A glass substrate is joined to the bottom surface of the pedestal. Piezo resistor elements are formed on the upper surface of the silicon layer to detect bending. The degree of freedom of upward displacements of the weight is accurately set based on the thickness of the joint layer.

Abstract translation: 本发明容易实现用于限制重量位移的精确控制结构。 制备具有硅层，氧化硅层和硅层的三层结构的SOI衬底，通过施加感应耦合等离子体蚀刻来开启狭缝，该等离子体蚀刻可以从上侧仅选择性地除去硅。 然后，从下侧施加相同的蚀刻以形成槽，由此将下硅层分离成重物和基座。 接下来，将该结构浸渍在可以仅选择性地除去氧化硅的蚀刻剂中，从而去除氧化硅层的暴露部分附近以形成接合层。 玻璃基板与基座的底面接合。 压电电阻元件形成在硅层的上表面上以检测弯曲。 基于接合层的厚度精确地设定重量向上位移的自由度。

公开(公告)号：US20030057447A1

公开(公告)日：2003-03-27

申请号：US10243650

申请日：2002-09-16

Applicant: HITACHI METALS, LTD.

Inventor： Masakatsu Saitoh ,  Shigenori Tanaka ,  Yoshio Ikeda

IPC: H01L031/0328

CPC classification number: G01P15/18 ,  B81B3/0078 ,  B81B2201/0235 ,  B81B2203/0109 ,  B81B2203/053 ,  B81B2203/058 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/084 ,  G01P2015/0842

Abstract: A microminiature and thin semiconductor acceleration sensor with high sensitivity is provided. The acceleration sensor has a mass portion formed in a center part of a silicon semiconductor substrate, a frame formed at a perimeter portion of the substrate, thin elastic support arms, which are provided at upper part of the mass portion and the frame and connect the mass portion and the frame, and a plurality of pairs of piezoresistors disposed on top surface sides of the elastic support arms. In the mass portion, a plurality of recessed portions which are recessed toward a center thereof from a perimeter thereof are formed, each of the elastic support arms is attached to the top surface of the mass portion at the bottom of each of the recessed portions, and sides of the elastic support arms are spaced from sides of the recessed portions. Since the volume of the mass portion and the length of the elastic support arms can be independently made large, sensitivity can be made higher.

Abstract translation: 提供了一种具有高灵敏度的微型和薄型半导体加速度传感器。 加速度传感器具有形成在硅半导体基板的中心部分的质量部分，形成在基板的周边部分的框架，薄的弹性支撑臂，其设置在质量部分和框架的上部，并将 质量部分和框架，以及设置在弹性支撑臂的顶表面侧上的多对压电电感器。 在质量部分中，形成有从其周边向其中心凹陷的多个凹部，每个凹部的底部都安装有弹性支撑臂，该质量部分的顶面， 并且弹性支撑臂的侧面与凹部的侧面间隔开。 由于质量部分的体积和弹性支撑臂的长度可以独立地变大，因此可以提高灵敏度。

公开(公告)号：US6164134A

公开(公告)日：2000-12-26

申请号：US239632

申请日：1999-01-29

Applicant: Donald R. Cargille

Inventor： Donald R. Cargille

IPC: G01C19/5719 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01C19/00

CPC classification number: G01C19/5719 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/084 ,  G01P2015/0842

Abstract: A balanced vibratory micro-gyroscope having an electrode pattern having four inner drive electrodes and four outer sense electrodes for providing balanced push-pull control of a cloverleaf micro-gyroscope. A control circuit utilizes equal and opposite input signals to the drive electrodes and processes output signals from the sense electrodes to precisely control the drive electrodes. Capacitance is added between opposing drive and sense electrodes pattern in order to null capacitive coupling effects between adjacent drive and sense electrodes. The control circuit linearizes the force on the micro-gyroscope thereby improving performance. Advantage is taken of Coulomb's Law to eliminate an electronic multiplier in the vibration amplitude control loop. A simplified full-wave rectifier further enhances the control circuit and operation of the micro-gyroscope. A closed negative feedback loop in the control circuit provides a corrective signal to the rate driving electrodes through rate sensing signals in order to prevent unwanted harmonic movement in the micro-gyroscope.

Abstract translation: 具有电极图案的平衡振动微型陀螺仪，具有四个内部驱动电极和四个外部感测电极，用于提供三叶草微型陀螺仪的平衡推挽控制。 控制电路利用与驱动电极相等且相反的输入信号，并且处理来自感测电极的输出信号以精确地控制驱动电极。 在相对的驱动和感测电极图案之间增加电容，以消除相邻的驱动电极和感测电极之间的电容耦合效应。 控制电路使微陀螺仪上的力线性化，从而提高性能。 利用库仑定律来消除振幅控制回路中的电子倍增器。 简化的全波整流器进一步增强了微陀螺仪的控制电路和操作。 控制电路中的闭合负反馈回路通过速率感测信号向速率驱动电极提供校正信号，以便防止微陀螺仪中的不必要的谐波运动。