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    Conforming seats for clamps used in mounting an optical element, and optical systems comprising same
    62.
    发明授权
    Conforming seats for clamps used in mounting an optical element, and optical systems comprising same 有权
    适合用于安装光学元件的夹具的座椅，以及包括其的光学系统

    公开(公告)号：US08416386B2

    公开(公告)日：2013-04-09

    申请号：US12047244

    申请日：2008-03-12

    申请人： Christopher S. Margeson ,  Douglas C. Watson

    发明人： Christopher S. Margeson ,  Douglas C. Watson

    IPC分类号： G03B27/42 ,  G03B27/52 ,  G03B27/54 ,  G02B7/02

    CPC分类号： G02B7/026 ,  G02B7/182 ,  G03F7/70825 ,  G03F7/7095

    摘要： Clamps are disclosed for holding an optical element relative to a support. An exemplary clamp includes first and second arms and a member connecting the arms such that a portion of a mounting feature of the optical element is between the first and second arms. The first arm applies a clamping force toward a respective portion of the mounting feature, and the second arm includes a seat. The seat has at least upper and intermediate portions. The upper portion engages the respective location on the mounting feature. The intermediate portion is situated between the upper portion and the second arm and has a lateral thickness less than the lateral thickness of the upper portion. The intermediate portion exhibits elastic and plastic deformability sufficient for any moment applied by the clamp to the mounting feature to be limited to less than a designated peak moment, while maintaining substantially full engagement of the upper portion with the respective location.

    摘要翻译： 公开了用于相对于支撑件保持光学元件的夹具。 示例性夹具包括第一臂和第二臂以及连接臂的构件，使得光学元件的安装特征的一部分在第一和第二臂之间。 第一臂向安装构件的相应部分施加夹紧力，并且第二臂包括座。 座椅至少具有上部和中间部分。 上部接合安装特征上的相应位置。 中间部分位于上部和第二臂之间，其横向厚度小于上部的横向厚度。 中间部分表现出弹性和塑性可变形性，足以使夹具对安装特征施加的任何时刻被限制在小于指定的峰值时刻，同时保持上部与相应位置的基本上完全接合。

    LEAF SPRING, STAGE SYSTEM, AND LITHOGRAPHIC APPARATUS
    63.
    发明申请
    LEAF SPRING, STAGE SYSTEM, AND LITHOGRAPHIC APPARATUS 失效
    叶子弹簧，舞台系统和平面设备

    公开(公告)号：US20120105817A1

    公开(公告)日：2012-05-03

    申请号：US13281229

    申请日：2011-10-25

    申请人： Christiaan Alexander HOOGENDAM ,  Martinus Agnes Willem Cuijpers ,  Bart Friso Riedstra ,  Ronald Cornelis Gerardus Gijzen ,  Maikel Cornelis Andreas Bruin

    发明人： Christiaan Alexander HOOGENDAM ,  Martinus Agnes Willem Cuijpers ,  Bart Friso Riedstra ,  Ronald Cornelis Gerardus Gijzen ,  Maikel Cornelis Andreas Bruin

    IPC分类号： G03B27/54 ,  F16F1/18 ,  F16F1/26

    CPC分类号： F16F1/10 ,  F16F1/027 ,  G03F7/70716 ,  G03F7/70758 ,  G03F7/70833 ,  G03F7/7095

    摘要： A leaf spring to be mounted between two objects, the leaf spring configured to have a high stiffness in two orthogonal directions, and a relative low stiffness in other degrees of freedom, wherein the leaf spring has a substantially panel-shaped body, the leaf spring including a first mounting location at or near the center of the panel-shaped body to mount the leaf spring to a first of the two objects, wherein the leaf spring includes one or more second mounting locations at or near the circumference of the panel-shaped body to mount the leaf spring to the second of the two objects, and elongate grooves and/or slits in the panel shaped body between the first mounting location and the second mounting location, the grooves and/or slits running in at least two non-orthogonal directions in the plane of the two orthogonal directions.

    摘要翻译： 一种用于安装在两个物体之间的板簧，所述板簧构造成在两个正交方向上具有高刚度，而在其他自由度处具有相对较低的刚度，其中所述板簧具有大致板状的主体，所述板簧 包括在所述板状体的中心处或附近的第一安装位置，以将所述板簧安装到所述两个物体中的第一个，其中所述板簧包括位于所述板状体的圆周处或附近的一个或多个第二安装位置 主体将板簧安装到两个物体中的第二个物体上，以及在第一安装位置和第二安装位置之间的板状体中的细长槽和/或狭缝， 在两个正交方向的平面内的正交方向。

    Exposure apparatus, exposure method, and method for producing device
    69.
    发明授权
    Exposure apparatus, exposure method, and method for producing device 有权
    曝光装置，曝光方法和制造装置的方法

    公开(公告)号：US07907253B2

    公开(公告)日：2011-03-15

    申请号：US11826465

    申请日：2007-07-16

    申请人： Hiroyuki Nagasaka ,  Soichi Owa ,  Yasugumi Nishii

    发明人： Hiroyuki Nagasaka ,  Soichi Owa ,  Yasugumi Nishii

    IPC分类号： G03B27/54 ,  G03B27/52

    CPC分类号： G03F7/70733 ,  G03F7/70341 ,  G03F7/708 ,  G03F7/7095

    摘要： An exposure apparatus exposes a substrate by projecting an image of a predetermined pattern through a liquid onto the substrate. The exposure apparatus includes a projection optical system which projects the image of the pattern onto the substrate, a liquid supply mechanism which supplies the liquid onto the substrate to form a liquid immersion area on a part of the substrate including a projection area of the projection optical system, and a liquid recovery mechanism which recovers the liquid on the substrate simultaneously at a plurality of positions. The liquid recovery mechanism recovers the liquid with a recovery force which differs depending on the position for recovering the liquid.

    摘要翻译： 曝光装置通过将预定图案的图像通过液体投影到基板上来曝光基板。 曝光装置包括将图案的图像投影到基板上的投影光学系统，将液体供给到基板上以在基板的一部分上形成液浸区域的液体供给机构，该液浸区域包括投影光学部 系统，以及在多个位置同时回收基板上的液体的液体回收机构。 液体回收机构用回收力来回收液体，该恢复力根据用于回收液体的位置而不同。